12 Nti Sapphire Wafer rau High-Volume Semiconductor Manufacturing

Kev Piav Qhia Luv:

Lub 12 nti sapphire wafer yog tsim los ua kom tau raws li qhov kev thov loj hlob rau thaj chaw loj, kev tsim khoom siab semiconductor thiab optoelectronic. Raws li cov qauv khoom siv txuas ntxiv mus thiab cov kab ntau lawm txav mus rau cov qauv wafer loj dua, sapphire substrates nrog cov kab uas hla loj heev muab cov txiaj ntsig zoo hauv kev tsim khoom, kev ua kom zoo dua qub, thiab kev tswj tus nqi.

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Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Kev Taw Qhia Txog 12 nti sapphire wafer

Ua los ntawm cov khoom siv Al₂O₃ uas muaj cov khoom siv siab, peb cov sapphire wafers 12 nti sib xyaw ua ke lub zog zoo heev, kev ruaj khov thermal, thiab qhov zoo ntawm qhov chaw. Los ntawm kev loj hlob ntawm cov siv lead ua kom zoo thiab kev ua cov wafer raug, cov substrates no muab kev ua tau zoo rau LED, GaN, thiab cov ntawv thov semiconductor tshwj xeeb.

Cov yam ntxwv ntawm cov khoom siv

Sapphire (ib-siv lead ua txhuas oxide, Al₂O₃) yog paub zoo txog nws cov khoom siv lub cev thiab tshuaj zoo heev. 12 nti sapphire wafers tau txais txhua qhov zoo ntawm cov khoom siv sapphire thaum muab thaj chaw loj dua siv tau.

Cov yam ntxwv tseem ceeb ntawm cov khoom siv suav nrog:

Kev ua haujlwm siab heev thiab hnav tsis kam
Kev ruaj khov thermal zoo heev thiab lub ntsiab lus melting siab
Kev tiv thaiv tshuaj lom neeg zoo rau cov kua qaub thiab alkalis
Kev pom tseeb siab los ntawm UV mus rau IR wavelengths
Cov khoom siv hluav taws xob zoo heev

Cov yam ntxwv no ua rau 12 nti sapphire wafers tsim nyog rau cov chaw ua haujlwm hnyav thiab cov txheej txheem tsim khoom semiconductor kub siab.

Cov Txheej Txheem Tsim Khoom

Kev tsim cov 12 nti sapphire wafers xav tau kev loj hlob ntawm cov siv lead ua thiab cov thev naus laus zis ua tiav heev. Cov txheej txheem tsim khoom ib txwm muaj xws li:

Kev Loj Hlob Crystal Ib Leeg
Cov siv lead ua sapphire uas muaj cov khoom huv si siab raug cog los ntawm kev siv cov txheej txheem siab heev xws li KY lossis lwm yam thev naus laus zis loj hlob ntawm cov siv lead ua, kom ntseeg tau tias cov kev taw qhia siv lead ua sib xws thiab kev ntxhov siab sab hauv qis.
Crystal Shaping thiab Slicing
Cov pob zeb sapphire ingot raug puab thiab txiav ua 12 nti wafers siv cov khoom siv txiav siab kom txo qis kev puas tsuaj hauv av.
Kev txhuam thiab kev txhuam
Cov txheej txheem ntau kauj ruam thiab cov txheej txheem tshuaj lom neeg kho tshuab (CMP) raug siv los ua kom tiav qhov roughness ntawm qhov chaw, flatness, thiab thickness uniformity.
Kev Ntxuav thiab Kev Tshuaj Xyuas
Txhua lub sapphire wafer 12 nti raug ntxuav kom huv si thiab tshuaj xyuas nruj me ntsis, suav nrog qhov zoo ntawm qhov chaw, TTV, hneev, warp, thiab kev tshuaj xyuas qhov tsis zoo.

Cov ntawv thov

12 nti sapphire wafers yog siv dav hauv cov thev naus laus zis siab heev thiab tshiab, suav nrog:

Cov khoom siv LED muaj zog thiab ci ntsa iab
Cov khoom siv fais fab raws li GaN thiab cov khoom siv RF
Cov khoom siv semiconductor thiab cov khoom siv rwb thaiv tsev
Cov qhov rai kho qhov muag thiab cov khoom siv kho qhov muag loj
Cov khoom ntim semiconductor siab heev thiab cov neeg nqa khoom tshwj xeeb

Lub txoj kab uas hla loj ua rau muaj kev xa khoom ntau dua thiab txhim kho kev siv nyiaj hauv kev tsim khoom loj.

Cov txiaj ntsig ntawm 12 nti Sapphire Wafers

Thaj chaw siv tau loj dua rau cov khoom siv tso zis ntau dua ib lub wafer
Kev txhim kho cov txheej txheem sib xws thiab kev sib xws
Txo tus nqi rau ib lub cuab yeej hauv kev tsim khoom ntau
Lub zog kho tshuab zoo heev rau kev tuav loj
Cov lus qhia tshwj xeeb rau ntau daim ntawv thov

Cov Kev Xaiv Kho Kom Haum

Peb muab kev hloov kho kom haum rau 12 nti sapphire wafers, suav nrog:

Kev taw qhia ntawm cov siv lead ua (C-dav hlau, A-dav hlau, R-dav hlau, thiab lwm yam)
Kev kam rau siab ntawm qhov tuab thiab txoj kab uas hla
Kev txhuam ib sab lossis ob sab
Edge profile thiab chamfer tsim
Qhov roughness thiab flatness yuav tsum tau ua

Cov Qauv	Cov Lus Qhia Tshwj Xeeb	Cov Lus Cim
Wafer Txoj Kab uas hla	12 nti (300 hli)	Tus qauv loj-txoj kab uas hla wafer
Khoom siv	Ib leeg-sapphire siv lead ua (Al₂O₃)	Qib siab purity, hluav taws xob/kho qhov muag
Kev Taw Qhia Crystal	C-dav hlau (0001), A-dav hlau (11-20), R-dav hlau (1-102)	Kev taw qhia xaiv tau
Qhov tuab	430–500 μm	Kev cai tuab muaj thaum thov
Kev kam rau siab tuab	±10 μm	Kev kam rau siab rau cov khoom siv siab heev
Tag Nrho Thickness Variation (TTV)	≤10 μm	Ua kom muaj kev ua tiav zoo sib xws thoob plaws wafer
Hneev	≤50 μm	Ntsuas thoob plaws tag nrho lub wafer
Ua kom nkhaus	≤50 μm	Ntsuas thoob plaws tag nrho lub wafer
Qhov Chaw Tiav	Ib sab ci ntsa iab (SSP) / Ob sab ci ntsa iab (DSP)	Qhov chaw zoo nkauj kho qhov muag
Qhov Roughness ntawm qhov chaw (Ra)	≤0.5 nm (polished)	Atomic-level smoothness rau epitaxial kev loj hlob
Ntug Profile	Chamfer / Rounded ntug	Yuav kom tsis txhob muaj chipping thaum lub sijhawm tuav
Kev Taw Qhia Tseeb	±0.5°	Xyuas kom meej tias cov txheej epitaxial loj hlob zoo
Qhov Ceev Ntawm Qhov Tsis Zoo	<10 cm⁻²	Ntsuas los ntawm kev tshuaj xyuas qhov muag
Kev tiaj tiaj	≤2 μm / 100 hli	Ua kom pom tseeb tias cov lithography thiab epitaxial loj hlob zoo ib yam
Kev huv si	Chav Kawm 100 - Chav Kawm 1000	Chav huv si sib xws
Kev Kis Tau Los Ntawm Optical	>85% (UV–IR)	Nyob ntawm qhov wavelength thiab thickness

12 Nti Sapphire Wafer Cov Lus Nug Feem Ntau

Q1: Lub thickness txheem ntawm 12 nti sapphire wafer yog dab tsi?
A: Tus qauv tuab yog txij li 430 μm txog 500 μm. Kev cai tuab kuj tseem tuaj yeem tsim tau raws li cov neeg siv khoom xav tau.

Q2: Cov kev taw qhia siv lead ua dab tsi muaj rau 12 nti sapphire wafers?
A: Peb muab C-plane (0001), A-plane (11-20), thiab R-plane (1-102) kev taw qhia. Lwm cov kev taw qhia tuaj yeem hloov kho raws li qhov xav tau ntawm cov khoom siv tshwj xeeb.

Q3: Qhov sib txawv ntawm qhov tuab tag nrho (TTV) ntawm lub wafer yog dab tsi?
A: Peb cov 12 nti sapphire wafers feem ntau muaj TTV ≤10 μm, ua kom muaj kev sib npaug thoob plaws tag nrho cov wafer nto rau kev tsim khoom siv zoo.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.