12 nti SiC Substrate N Hom Loj Loj Kev Ua Haujlwm Siab RF Daim Ntawv Thov

Kev Piav Qhia Luv:

Lub 12-nti SiC substrate sawv cev rau kev nce qib tshiab hauv cov khoom siv semiconductor, muab cov txiaj ntsig hloov pauv rau cov khoom siv hluav taws xob thiab cov ntawv thov zaus siab. Raws li kev lag luam loj tshaj plaws hauv kev lag luam muaj silicon carbide wafer hom, 12-nti SiC substrate ua rau muaj kev lag luam tsis tau muaj dua thaum tswj cov khoom siv zoo ntawm cov yam ntxwv dav bandgap thiab cov khoom siv thermal tshwj xeeb. Piv rau cov 6-nti lossis me dua SiC wafers, lub platform 12-nti muab ntau dua 300% thaj chaw siv tau ntau dua ib wafer, ua rau cov khoom tuag ntau ntxiv thiab txo cov nqi tsim khoom rau cov khoom siv fais fab. Qhov kev hloov pauv loj no ua rau pom qhov kev hloov pauv keeb kwm ntawm silicon wafers, qhov twg txhua qhov kev nce ntawm txoj kab uas hla coj kev txo nqi tseem ceeb thiab kev txhim kho kev ua tau zoo. Lub 12-nti SiC substrate qhov kev ua tau zoo thermal conductivity (yuav luag 3 × ntawm silicon) thiab lub zog tawg siab ua rau nws muaj txiaj ntsig tshwj xeeb rau cov kab ke tsheb fais fab 800V tiam tom ntej, qhov twg nws ua rau cov modules fais fab me dua thiab ua haujlwm tau zoo dua. Hauv 5G infrastructure, cov khoom siv qhov ceev ntawm electron saturation siab tso cai rau RF cov khoom siv ua haujlwm ntawm cov zaus siab dua nrog kev poob qis dua. Qhov sib xws ntawm cov khoom siv tsim khoom siv silicon hloov kho kuj ua rau cov tuam txhab uas twb muaj lawm siv tau yooj yim dua, txawm hais tias yuav tsum tau ua haujlwm tshwj xeeb vim SiC muaj zog heev (9.5 Mohs). Thaum cov khoom tsim tawm ntau ntxiv, 12-nti SiC substrate yuav tsum dhau los ua tus qauv kev lag luam rau cov ntawv thov siv hluav taws xob siab, tsav kev tsim kho tshiab thoob plaws hauv tsheb, lub zog rov ua dua tshiab, thiab cov tshuab hloov pauv hluav taws xob hauv kev lag luam.

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Cov kev tsis sib xws

12 nti Silicon Carbide (SiC) Cov Khoom Siv Substrate
Qib		ZeroMPD Kev Tsim Khoom Qib (Qib Z)	Kev Tsim Khoom Txheem Qib (Qib P)		Qib Dummy (Qib D)
Txoj kab uas hla		3 0 0 hli ~ 1305 hli
Qhov tuab	4H-N	750μm ± 15 μm	750μm ± 25 μm
	4H-SI	750μm ± 15 μm	750μm ± 25 μm
Kev Taw Qhia Wafer		Tawm ntawm txoj kab: 4.0° mus rau <1120 >±0.5° rau 4H-N, Ntawm txoj kab: <0001>±0.5° rau 4H-SI
Qhov Ceev ntawm Micropipe	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Kev tiv taus	4H-N	0.015~0.024 Ω·cm			0.015~0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Kev Taw Qhia Tiaj Tus Thawj Coj		{10-10} ±5.0°
Qhov Ntev Tiaj Tus Thawj	4H-N	Tsis muaj
	4H-SI	Qhov Notch
Kev Tshem Tawm Ntug		3 hli
LTV/TTV/Hneev nti /Warp		≤5μm / ≤15μm / ≤35μm / ≤55μm			≤ 5μm / ≤15μm / ≤35 □ μm / ≤55 □ μm
Kev ntxhib		Polish Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Cov Ntxaij Ntug Los Ntawm Lub Teeb Ci Siab Hex Phaj Los Ntawm Lub Teeb Ci Siab Cov Cheeb Tsam Polytype Los Ntawm Lub Teeb Ci Siab Cov pa roj carbon uas pom tau Cov khawb ntawm cov nplaim silicon los ntawm lub teeb ci ntsa iab		Tsis muaj dab tsi Thaj chaw sib sau ua ke ≤0.05% Tsis muaj dab tsi Thaj chaw sib sau ua ke ≤0.05% Tsis muaj dab tsi			Qhov ntev tag nrho ≤ 20 hli, ib qho ntev ≤ 2 hli Thaj chaw sib sau ua ke ≤0.1% Thaj chaw sib sau ua ke ≤ 3% Thaj chaw sib sau ua ke ≤3% Qhov ntev tag nrho ≤1 × txoj kab uas hla wafer
Ntug Chips Los Ntawm Lub Teeb Ci Siab		Tsis pub ≥0.2 hli dav thiab tob			7 tso cai, ≤1 hli txhua
(TSD) Kev sib txhuam ntawm cov ntsia hlau		≤500 cm-2		Tsis muaj
(BPD) Kev puas tsuaj ntawm lub hauv paus		≤1000 cm-2		Tsis muaj
Kev Ua Rau Silicon Nto Los Ntawm Lub Teeb Ci Siab		Tsis muaj dab tsi
Ntim Khoom		Multi-wafer Cassette Los Yog Ib Lub Thawv Wafer
Cov Lus Cim:
1 Cov kev txwv tsis zoo siv rau tag nrho cov wafer nto tshwj tsis yog thaj chaw tsis suav nrog ntug. 2 Cov khawb yuav tsum tau kuaj xyuas rau ntawm Si lub ntsej muag xwb. 3 Cov ntaub ntawv dislocation tsuas yog los ntawm KOH etched wafers.

Cov Nta Tseem Ceeb

1. Qhov Zoo Ntawm Qhov Loj: Lub 12-nti SiC substrate (12-nti silicon carbide substrate) muaj thaj chaw loj dua ib lub wafer, ua rau muaj ntau lub chips tsim tau ib lub wafer, yog li txo cov nqi tsim khoom thiab ua rau cov txiaj ntsig ntau dua.
2. Cov Khoom Siv Ua Haujlwm Zoo: Silicon carbide qhov kev tiv taus kub siab thiab lub zog tawg ua rau lub substrate 12-nti zoo tagnrho rau cov ntawv thov high-voltage thiab high-frequency, xws li EV inverters thiab cov txheej txheem them ceev.
3. Kev Sib Haum Xeeb ntawm Kev Ua Haujlwm: Txawm hais tias SiC muaj qhov nyuaj thiab kev sib tw ua haujlwm siab, lub 12-nti SiC substrate ua tiav qhov tsis zoo ntawm qhov chaw los ntawm kev txiav thiab txhuam kom zoo, txhim kho cov khoom siv.
4. Kev Tswj Xyuas Kub Zoo Tshaj Plaws: Nrog rau kev ua tau zoo dua li cov ntaub ntawv ua los ntawm silicon, lub substrate 12-nti zoo daws teeb meem kev tawg cua sov hauv cov khoom siv hluav taws xob siab, ua rau lub neej ntawm cov khoom siv ntev dua.

Cov Ntawv Thov Tseem Ceeb

1. Cov Tsheb Hluav Taws Xob: Lub 12-nti SiC substrate (12-nti silicon carbide substrate) yog ib qho tseem ceeb ntawm cov tshuab tsav hluav taws xob tiam tom ntej, ua rau cov inverters ua haujlwm tau zoo uas txhim kho qhov deb thiab txo lub sijhawm them.

2. 5G Chaw Nres Tsheb: Cov khoom siv SiC loj loj txhawb nqa cov khoom siv RF zaus siab, ua tau raws li qhov xav tau ntawm 5G chaw nres tsheb rau lub zog siab thiab poob qis.

3. Cov Khoom Siv Fais Fab Rau Kev Lag Luam: Hauv cov inverters hnub ci thiab cov smart grids, lub substrate 12-nti tuaj yeem tiv taus cov voltages siab dua thaum txo qis kev poob zog.

4. Cov Khoom Siv Hluav Taws Xob Rau Cov Neeg Siv Khoom: Cov chaw them hluav taws xob ceev ceev yav tom ntej thiab cov chaw muab hluav taws xob hauv chaw khaws ntaub ntawv yuav siv cov khoom siv SiC 12-nti kom ua tiav qhov loj me me thiab ua haujlwm tau zoo dua.

Cov Kev Pabcuam ntawm XKH

Peb tshwj xeeb hauv kev pabcuam ua cov khoom siv rau 12-nti SiC substrates (12-nti silicon carbide substrates), suav nrog:
1. Kev Txiav thiab Kev Txhuam: Kev ua cov khoom siv uas tsis muaj kev puas tsuaj ntau, thiab tiaj tiaj raws li cov neeg siv khoom xav tau, ua kom cov khoom siv ua haujlwm ruaj khov.
2. Kev Txhawb Nqa Kev Loj Hlob Epitaxial: Cov kev pabcuam zoo epitaxial wafer los ua kom cov khoom tsim tau sai dua.
3. Kev Tsim Qauv Me Me: Txhawb kev lees paub R&D rau cov tsev tshawb fawb thiab cov tuam txhab lag luam, ua kom luv lub voj voog kev loj hlob.
4. Kev Sab Laj Txog Kev Siv Tshuab: Kev daws teeb meem txij thaum pib mus txog thaum kawg, txij li kev xaiv cov khoom siv mus txog rau kev ua kom zoo dua qub, pab cov neeg siv khoom kov yeej cov teeb meem kev ua haujlwm SiC.
Txawm yog rau kev tsim khoom ntau lossis kev hloov kho tshwj xeeb, peb cov kev pabcuam SiC substrate 12-nti sib haum nrog koj cov kev xav tau ntawm qhov project, txhawb nqa kev nce qib hauv kev siv tshuab.