12 nti SIC substrate silicon carbide prime qib txoj kab uas hla 300 hli loj loj 4H-N Haum rau cov khoom siv hluav taws xob siab dissipation cua sov

12 nti SIC substrate silicon carbide prime qib txoj kab uas hla 300 hli loj loj 4H-N Haum rau lub zog siab ntaus ntawv cua sov dissipation Featured Duab

Kev Piav Qhia Luv:

Lub substrate silicon carbide 12-nti (SiC substrate) yog ib lub substrate loj, ua haujlwm tau zoo semiconductor khoom siv ua los ntawm ib lub siv lead ua silicon carbide. Silicon carbide (SiC) yog ib qho khoom siv semiconductor dav dav uas muaj cov khoom siv hluav taws xob, thermal thiab mechanical zoo heev, uas siv dav hauv kev tsim cov khoom siv hluav taws xob hauv lub zog siab, zaus siab thiab qhov kub siab. Lub substrate 12-nti (300mm) yog cov lus qhia siab heev ntawm silicon carbide technology, uas tuaj yeem txhim kho kev ua haujlwm ntau lawm thiab txo cov nqi.

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Cov yam ntxwv

Cov yam ntxwv ntawm cov khoom

1. Kev ua haujlwm thermal siab: qhov thermal conductivity ntawm silicon carbide yog ntau dua 3 npaug ntawm silicon, uas yog qhov tsim nyog rau kev siv hluav taws xob siab.

2. Lub zog tawg siab: Lub zog tawg yog 10 npaug ntawm silicon, tsim rau cov ntawv thov siab.

3. Qhov sib txawv ntawm qhov sib txawv: Qhov sib txawv ntawm qhov sib txawv yog 3.26eV (4H-SiC), tsim nyog rau qhov kub thiab txias thiab cov ntawv thov zaus siab.

4. Kev nyuaj siab: Mohs hardness yog 9.2, thib ob tsuas yog pob zeb diamond, zoo heev hnav tsis kam thiab lub zog kho tshuab.

5. Kev ruaj khov tshuaj lom neeg: muaj zog tiv taus corrosion, ruaj khov hauv qhov kub thiab txias thiab ib puag ncig hnyav.

6. Loj: 12 nti (300 hli) substrate, txhim kho kev ua haujlwm ntau lawm, txo cov nqi khoom.

7. Qhov ceev tsis zoo: kev siv tshuab loj hlob zoo ib leeg siv lead ua kom ntseeg tau tias qhov ceev tsis zoo thiab kev sib xws siab.

Cov khoom siv tseem ceeb ntawm daim ntawv thov

1. Cov khoom siv hluav taws xob:

Mosfets: Siv rau hauv cov tsheb fais fab, cov tsav tsheb hauv kev lag luam thiab cov hloov hluav taws xob.

Diodes: xws li Schottky diodes (SBD), siv rau kev kho kom zoo thiab hloov cov khoom siv fais fab.

2. Cov khoom siv Rf:

Rf lub zog amplifier: siv rau hauv 5G kev sib txuas lus hauv paus chaw nres tsheb thiab kev sib txuas lus satellite.

Cov khoom siv microwave: Haum rau radar thiab wireless kev sib txuas lus systems.

3. Cov tsheb siv hluav taws xob tshiab:

Cov tshuab tsav hluav taws xob: cov tswj lub cev muaj zog thiab cov inverters rau cov tsheb fais fab.

Lub thawv them nqi: Lub zog fais fab rau cov khoom siv them ceev.

4. Cov ntawv thov kev lag luam:

Lub inverter hluav taws xob siab: rau kev tswj lub cev muaj zog thiab kev tswj hwm lub zog.

Lub phiaj xwm ntse: Rau HVDC kis thiab cov hloov pauv hluav taws xob fais fab.

5. Kev Ua Haujlwm Dav Hlau:

Cov khoom siv hluav taws xob kub siab: tsim nyog rau cov chaw kub siab ntawm cov khoom siv aerospace.

6. Kev tshawb fawb teb:

Kev tshawb fawb txog semiconductor dav dav: rau kev tsim cov ntaub ntawv thiab cov khoom siv semiconductor tshiab.

Lub substrate silicon carbide 12-nti yog ib hom khoom siv semiconductor ua tau zoo nrog cov khoom zoo heev xws li kev ua kom sov siab, lub zog tawg siab thiab qhov sib txawv dav. Nws yog siv dav hauv cov khoom siv hluav taws xob, cov khoom siv hluav taws xob xov tooj cua, cov tsheb fais fab tshiab, kev tswj hwm kev lag luam thiab aerospace, thiab yog cov khoom siv tseem ceeb los txhawb kev txhim kho ntawm tiam tom ntej ntawm cov khoom siv hluav taws xob zoo thiab muaj zog.

Txawm hais tias cov khoom siv silicon carbide tam sim no muaj tsawg dua cov ntawv thov ncaj qha hauv cov khoom siv hluav taws xob xws li AR tsom iav, lawv lub peev xwm hauv kev tswj hwm lub zog zoo thiab cov khoom siv hluav taws xob me me tuaj yeem txhawb nqa cov kev daws teeb meem fais fab uas tsis hnyav, ua haujlwm tau zoo rau cov khoom siv AR / VR yav tom ntej. Tam sim no, kev txhim kho tseem ceeb ntawm silicon carbide substrate yog tsom mus rau hauv cov teb kev lag luam xws li tsheb fais fab tshiab, kev sib txuas lus hauv paus thiab kev lag luam automation, thiab txhawb kev lag luam semiconductor kom txhim kho mus rau hauv kev coj ua zoo dua thiab txhim khu kev qha.

XKH cog lus tias yuav muab cov khoom siv SIC zoo 12 "nrog kev txhawb nqa thiab kev pabcuam dav dav, suav nrog:

1. Kev tsim khoom tshwj xeeb: Raws li cov neeg siv khoom xav tau los muab cov resistivity sib txawv, crystal orientation thiab deg kho substrate.

2. Kev txhim kho cov txheej txheem: Muab kev txhawb nqa rau cov neeg siv khoom ntawm kev loj hlob epitaxial, kev tsim khoom siv thiab lwm yam txheej txheem los txhim kho kev ua haujlwm ntawm cov khoom.

3. Kev kuaj thiab daim ntawv pov thawj: Muab kev kuaj xyuas qhov tsis zoo thiab daim ntawv pov thawj zoo kom ntseeg tau tias cov khoom siv ua tau raws li cov qauv kev lag luam.

4. Kev Koom Tes Tshawb Fawb thiab Kev Txhim Kho: Ua ke tsim cov khoom siv silicon carbide tshiab nrog cov neeg siv khoom los txhawb kev tsim kho tshiab.

Daim ntawv qhia txog cov ntaub ntawv

1 2 nti Silicon Carbide (SiC) Cov Khoom Siv Substrate
Qib		ZeroMPD Kev Tsim Khoom Qib (Qib Z)	Kev Tsim Khoom Txheem Qib (Qib P)		Qib Dummy (Qib D)
Txoj kab uas hla		3 0 0 hli ~ 305 hli
Qhov tuab	4H-N	750μm ± 15 μm	750μm ± 25 μm
	4H-SI	750μm ± 15 μm	750μm ± 25 μm
Kev Taw Qhia Wafer		Tawm ntawm txoj kab: 4.0° mus rau <1120 >±0.5° rau 4H-N, Ntawm txoj kab: <0001>±0.5° rau 4H-SI
Qhov Ceev ntawm Micropipe	4H-N	≤0.4cm-2	≤4cm-2		≤25cm-2
	4H-SI	≤5cm-2	≤10cm-2		≤25cm-2
Kev tiv taus	4H-N	0.015~0.024 Ω·cm			0.015~0.028 Ω·cm
	4H-SI	≥1E10 Ω·cm			≥1E5 Ω·cm
Kev Taw Qhia Tiaj Tus Thawj Coj		{10-10} ±5.0°
Qhov Ntev Tiaj Tus Thawj	4H-N	Tsis muaj
	4H-SI	Qhov Notch
Kev Tshem Tawm Ntug		3 hli
LTV/TTV/Hneev nti /Warp		≤5μm / ≤15μm / ≤35μm / ≤55μm			≤ 5μm / ≤15μm / ≤35 □ μm / ≤55 □ μm
Kev ntxhib		Polish Ra≤1 nm
		CMP Ra≤0.2 nm			Ra≤0.5 nm
Cov Ntxaij Ntug Los Ntawm Lub Teeb Ci Siab Hex Phaj Los Ntawm Lub Teeb Ci Siab Cov Cheeb Tsam Polytype Los Ntawm Lub Teeb Ci Siab Cov pa roj carbon uas pom tau Cov khawb ntawm cov nplaim silicon los ntawm lub teeb ci ntsa iab		Tsis muaj dab tsi Thaj chaw sib sau ua ke ≤0.05% Tsis muaj dab tsi Thaj chaw sib sau ua ke ≤0.05% Tsis muaj dab tsi			Qhov ntev tag nrho ≤ 20 hli, ib qho ntev ≤ 2 hli Thaj chaw sib sau ua ke ≤0.1% Thaj chaw sib sau ua ke ≤ 3% Thaj chaw sib sau ua ke ≤3% Qhov ntev tag nrho ≤1 × txoj kab uas hla wafer
Ntug Chips Los Ntawm Lub Teeb Ci Siab		Tsis pub ≥0.2 hli dav thiab tob			7 tso cai, ≤1 hli txhua
(TSD) Kev sib txhuam ntawm cov ntsia hlau		≤500 cm-2		Tsis muaj
(BPD) Kev puas tsuaj ntawm lub hauv paus		≤1000 cm-2		Tsis muaj
Kev Ua Rau Silicon Nto Los Ntawm Lub Teeb Ci Siab		Tsis muaj dab tsi
Ntim Khoom		Multi-wafer Cassette Los Yog Ib Lub Thawv Wafer
Cov Lus Cim:
1 Cov kev txwv tsis zoo siv rau tag nrho cov wafer nto tshwj tsis yog thaj chaw tsis suav nrog ntug. 2 Cov khawb yuav tsum tau kuaj xyuas rau ntawm Si lub ntsej muag xwb. 3 Cov ntaub ntawv dislocation tsuas yog los ntawm KOH etched wafers.

XKH yuav txuas ntxiv nqis peev rau kev tshawb fawb thiab kev txhim kho kom txhawb kev tsim cov khoom siv silicon carbide 12-nti uas loj, tsis muaj qhov tsis zoo thiab ruaj khov, thaum XKH tshawb nrhiav nws cov ntawv thov hauv cov chaw tshiab xws li cov khoom siv hluav taws xob rau cov neeg siv khoom (xws li cov khoom siv fais fab rau AR/VR) thiab kev suav lej quantum. Los ntawm kev txo cov nqi thiab nce lub peev xwm, XKH yuav coj kev vam meej rau kev lag luam semiconductor.