2 nti 4 nti 6 nti Patterned Sapphire Substrate (PSS) uas cov khoom siv GaN loj hlob tuaj yeem siv rau LED teeb pom kev zoo

Kev Piav Qhia Luv:

Cov qauv sapphire substrate (PSS) yog lub npog ntsej muag rau kev etching qhuav ntawm sapphire substrate, lub npog ntsej muag yog engraved nrog ib tug qauv los ntawm tus qauv lithography txheej txheem, thiab tom qab ntawd lub sapphire yog etched los ntawm ICP etching technology, thiab lub npog ntsej muag raug tshem tawm, thiab thaum kawg GaN khoom siv yog loj hlob rau nws, yog li ntawd lub longitudinal epitaxy ntawm GaN khoom siv dhau los ua kab rov tav epitaxy. Cov txheej txheem no suav nrog ntau kauj ruam xws li photoresist txheej, kauj ruam raug, tsim cov qauv raug, ICP qhuav etching thiab ntxuav.

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Cov yam ntxwv

Cov yam ntxwv tseem ceeb

1. Cov yam ntxwv ntawm cov qauv:
Qhov chaw PSS muaj ib lub cone lossis triangular conical pattern uas nws cov duab, qhov loj thiab kev faib tawm tuaj yeem tswj tau los ntawm kev kho cov txheej txheem etching.
Cov qauv duab no pab hloov txoj kev sib kis ntawm lub teeb thiab txo qhov kev cuam tshuam tag nrho ntawm lub teeb, yog li txhim kho kev ua haujlwm ntawm kev rho tawm lub teeb.

2. Cov yam ntxwv ntawm cov khoom siv:
PSS siv cov sapphire zoo ua cov khoom siv substrate, uas muaj cov yam ntxwv ntawm kev tawv siab, kev ua kom sov siab, kev ruaj khov tshuaj lom neeg zoo thiab kev pom tseeb ntawm qhov muag.
Cov yam ntxwv no ua rau PSS tiv taus cov chaw ib puag ncig hnyav xws li kub thiab siab thaum tseem tswj tau qhov kev ua tau zoo ntawm qhov muag.

3. Kev ua tau zoo ntawm qhov muag:
Los ntawm kev hloov pauv ntau qhov kev tawg ntawm qhov sib txuas ntawm GaN thiab sapphire substrate, PSS ua rau cov photons uas raug cuam tshuam tag nrho hauv GaN txheej muaj lub sijhawm khiav tawm ntawm sapphire substrate.
Qhov feature no ua rau lub teeb LED zoo dua qub thiab ua rau lub teeb ci ntsa iab dua.

4. Cov yam ntxwv ntawm cov txheej txheem:
Cov txheej txheem tsim khoom ntawm PSS yog qhov nyuaj heev, suav nrog ntau kauj ruam xws li lithography thiab etching, thiab xav tau cov khoom siv siab thiab kev tswj cov txheej txheem.
Txawm li cas los xij, nrog rau kev nce qib ntawm thev naus laus zis thiab kev txo nqi, cov txheej txheem tsim khoom ntawm PSS maj mam ua kom zoo dua thiab txhim kho.

Qhov zoo tshaj plaws

1. Txhim kho qhov ua tau zoo ntawm lub teeb: PSS txhim kho qhov ua tau zoo ntawm lub teeb ntawm LED los ntawm kev hloov txoj kev kis lub teeb thiab txo qhov kev cuam tshuam tag nrho.

2. Ua kom lub neej LED ntev dua: PSS tuaj yeem txo qhov ceev ntawm cov khoom siv GaN epitaxial, yog li txo cov kev sib xyaw ua ke tsis-radiative thiab rov qab xau tam sim no hauv thaj chaw nquag, ua kom lub neej ntawm LED ntev dua.

3. Txhim kho qhov ci ntawm LED: Vim yog kev txhim kho ntawm kev siv lub teeb kom zoo dua qub thiab kev siv lub neej ntev dua ntawm LED, qhov ci ntawm LED ntawm PSS tau txhim kho zoo heev.

4. Txo cov nqi tsim khoom: Txawm hais tias cov txheej txheem tsim khoom ntawm PSS yog qhov nyuaj heev, nws tuaj yeem txhim kho qhov ua tau zoo ntawm lub teeb thiab lub neej ntawm LED, yog li txo cov nqi tsim khoom mus rau qee qhov thiab txhim kho kev sib tw ntawm cov khoom.

Cov chaw thov tseem ceeb

1. Teeb pom kev zoo LED: PSS ua cov khoom siv substrate rau LED chips, tuaj yeem txhim kho qhov ua tau zoo ntawm lub teeb thiab lub neej ntawm LED.
Hauv thaj chaw ntawm LED teeb pom kev zoo, PSS yog siv dav hauv ntau yam khoom siv teeb pom kev zoo, xws li teeb ntawm txoj kev, teeb rooj, teeb tsheb thiab lwm yam.

2. Cov khoom siv semiconductor: Ntxiv rau teeb pom kev zoo LED, PSS kuj tseem siv tau los tsim lwm cov khoom siv semiconductor, xws li cov khoom ntes teeb, lasers, thiab lwm yam. Cov khoom siv no muaj ntau yam kev siv hauv kev sib txuas lus, kev kho mob, tub rog thiab lwm yam teb.

3. Kev koom ua ke ntawm Optoelectronic: Cov khoom siv kho qhov muag thiab kev ruaj khov ntawm PSS ua rau nws yog ib qho ntawm cov ntaub ntawv zoo tshaj plaws hauv kev sib koom ua ke ntawm optoelectronic. Hauv kev koom ua ke ntawm optoelectronic, PSS tuaj yeem siv los ua cov waveguides kho qhov muag, cov hloov kho qhov muag thiab lwm yam khoom kom paub txog kev xa thiab ua cov teeb liab kho qhov muag.

Cov kev tsis sib xws

Khoom	Cov Khoom Siv Sapphire Muaj Qauv (2 ~ 6 nti)
Txoj kab uas hla	50.8 ± 0.1 hli	100.0 ± 0.2 hli	150.0 ± 0.3 hli
Qhov tuab	430 ± 25μm	650 ± 25μm	1000 ± 25μm
Kev Taw Qhia Nto	C-dav hlau (0001) tawm ntawm lub kaum sab xis mus rau M-axis (10-10) 0.2 ± 0.1°
	C-dav hlau (0001) tawm ntawm lub kaum sab xis mus rau A-axis (11-20) 0 ± 0.1°
Kev Taw Qhia Tiaj Tus Thawj Coj	A-Dav Hlau (11-20) ± 1.0°
Qhov Ntev Tiaj Tus Thawj	16.0 ± 1.0 hli	30.0 ± 1.0 hli	47.5 ± 2.0 hli
R-Dav Hlau	9 teev
Pem Hauv Ntej Qhov Tiav	Muaj qauv
Tom qab nto tiav	SSP: Zoo-av, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm
Laser Mark	Sab nraub qaum
TTV	≤8μm	≤10μm	≤20μm
Hneev	≤10μm	≤15μm	≤25μm
WARP	≤12μm	≤20μm	≤30μm
Kev Tshem Tawm Ntug	≤2 hli
Cov Qauv Qhia Txog	Cov Qauv Duab	Dome, Cone, Pyramid
	Qhov Siab ntawm Qauv	1.6 ~ 1.8μm
	Qauv Txoj Kab uas hla	2.75 ~ 2.85μm
	Qhov Chaw Qauv	0.1 ~ 0.3μm

XKH tsom mus rau kev tsim, tsim khoom thiab muag cov khoom siv patterned sapphire substrate (PSS), thiab cog lus tias yuav muab cov khoom PSS zoo thiab ua haujlwm tau zoo rau cov neeg siv khoom thoob plaws ntiaj teb. XKH muaj cov thev naus laus zis tsim khoom siab heev thiab pab pawg kws tshaj lij, uas tuaj yeem kho cov khoom PSS nrog cov lus qhia sib txawv thiab cov qauv sib txawv raws li cov neeg siv khoom xav tau. Tib lub sijhawm, XKH mob siab rau qhov zoo ntawm cov khoom thiab kev pabcuam, thiab cog lus tias yuav muab kev txhawb nqa thiab kev daws teeb meem rau cov neeg siv khoom. Hauv PSS, XKH tau khaws cov kev paub dhau los thiab cov txiaj ntsig zoo, thiab tos ntsoov yuav ua haujlwm ua ke nrog cov neeg koom tes thoob ntiaj teb los txhawb kev tsim kho tshiab ntawm LED teeb pom kev zoo, cov khoom siv semiconductor thiab lwm yam lag luam.