2 nti SiC ingot Dia50.8mmx10mmt 4H-N monocrystal

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Ib lub 2-nti SiC (silicon carbide) ingot yog hais txog ib lub cylindrical lossis block-puab ib lub siv lead ua los ntawm silicon carbide nrog lub cheeb lossis ntug ntev ntawm 2 nti. Silicon carbide ingots yog siv ua cov khoom siv pib rau kev tsim ntau yam khoom siv semiconductor, xws li cov khoom siv hluav taws xob fais fab thiab cov khoom siv optoelectronic.

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Cov yam ntxwv

SiC Crystal Growth Technology

Cov yam ntxwv ntawm SiC ua rau nws nyuaj rau kev loj hlob ib leeg siv lead ua ke. Qhov no yog vim qhov tseeb tias tsis muaj theem kua nrog stoichiometric piv ntawm Si: C = 1: 1 ntawm atmospheric siab, thiab nws tsis tuaj yeem loj hlob SiC los ntawm cov txheej txheem loj hlob ntau dua, xws li txoj kev kos duab ncaj qha thiab txoj kev poob crucible, uas yog cov ntsiab lus tseem ceeb ntawm kev lag luam semiconductor. Hauv kev xav, kev daws teeb meem nrog stoichiometric piv ntawm Si: C = 1: 1 tsuas yog tuaj yeem tau txais thaum lub siab ntau dua 10E5atm thiab qhov kub siab dua 3200 ℃. Tam sim no, cov txheej txheem tseem ceeb suav nrog PVT txoj kev, cov kua-theem txoj kev, thiab cov txheej txheem tso tshuaj lom neeg kub-theem vapor-theem.

Cov SiC wafers thiab crystals uas peb muab feem ntau yog loj hlob los ntawm kev thauj mus los ntawm lub cev (PVT), thiab cov hauv qab no yog kev qhia luv luv txog PVT:

Txoj kev thauj mus los ntawm lub cev (PVT) tau pib los ntawm cov txheej txheem sublimation roj-theem uas Lely tau tsim hauv xyoo 1955, uas cov hmoov SiC raug muab tso rau hauv lub raj graphite thiab cua sov rau qhov kub siab kom ua rau cov hmoov SiC lwj thiab sublimate, thiab tom qab ntawd lub raj graphite raug txias, thiab cov khoom seem roj-theem ntawm cov hmoov SiC raug tso thiab crystallized ua SiC crystals hauv thaj chaw ib puag ncig ntawm lub raj graphite. Txawm hais tias txoj kev no nyuaj rau tau txais cov khoom siv SiC loj thiab cov txheej txheem tso rau hauv lub raj graphite nyuaj rau tswj, nws muab cov tswv yim rau cov kws tshawb fawb tom ntej.

YM Tairov et al. hauv tebchaws Russia tau qhia txog lub tswv yim ntawm cov noob siv lead ua los ntawm lub hauv paus no, uas daws qhov teeb meem ntawm cov duab siv lead ua tsis tau thiab qhov chaw nucleation ntawm SiC siv lead ua. Cov kws tshawb fawb tom qab ntawd tau txuas ntxiv txhim kho thiab thaum kawg tsim cov txheej txheem hloov pauv lub cev (PVT) uas siv hauv kev lag luam niaj hnub no.

Raws li txoj kev loj hlob ntawm SiC siv lead ua thaum ub, PVT tam sim no yog txoj kev loj hlob tseem ceeb tshaj plaws rau SiC siv lead ua. Piv nrog rau lwm txoj kev, txoj kev no tsis tas yuav siv cov khoom siv loj hlob, cov txheej txheem loj hlob yooj yim, kev tswj hwm zoo, kev txhim kho thiab kev tshawb fawb kom zoo, thiab twb tau ua lag luam lawm.