3 nti High Purity (Undoped) Silicon Carbide Wafers semi-Insulating Sic Substrates (HPSl)

Kev Piav Qhia Luv:

Lub 3-nti High Purity Semi-Insulating (HPSI) Silicon Carbide (SiC) wafer yog cov khoom siv zoo tshaj plaws rau kev siv hluav taws xob siab, zaus siab, thiab optoelectronic. Tsim los ntawm cov khoom siv undoped, high-purity 4H-SiC, cov wafers no qhia txog kev ua haujlwm thermal zoo heev, bandgap dav, thiab cov khoom semi-insulating zoo heev, ua rau lawv tsis tseem ceeb rau kev tsim khoom siv siab heev. Nrog rau kev ua tiav zoo thiab qhov zoo ntawm qhov chaw, HPSI SiC substrates ua lub hauv paus rau cov thev naus laus zis tiam tom ntej hauv kev siv hluav taws xob fais fab, kev sib txuas lus, thiab kev lag luam aerospace, txhawb nqa kev tsim kho tshiab thoob plaws ntau qhov chaw.

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Cov yam ntxwv

Cov Khoom

1. Cov Khoom Siv Lub Cev thiab Cov Qauv
●Hom Khoom Siv: Siab Purity (Undoped) Silicon Carbide (SiC)
●Txoj kab uas hla: 3 nti (76.2 hli)
●Tuab: 0.33-0.5 hli, kho tau raws li qhov yuav tsum tau ua ntawm daim ntawv thov.
●Cov Qauv Siv Crystal: 4H-SiC polytype nrog lub lattice hexagonal, paub txog kev txav mus los ntawm hluav taws xob siab thiab kev ruaj khov thermal.
●Kev Taw Qhia:
oTus Qauv: [0001] (C-dav hlau), tsim nyog rau ntau yam kev siv.
oYeem xaiv tau: Tawm ntawm txoj kab (4° lossis 8° qaij) rau kev txhim kho epitaxial kev loj hlob ntawm cov txheej khoom siv.
●Qhov tiaj tiaj: Tag nrho cov tuab sib txawv (TTV) ●Qhov zoo ntawm qhov chaw:
oTau txhuam kom txog oQhov ceev qis (<10/cm² micropipe density). 2. Cov Khoom Hluav Taws Xob ●Kev Tiv Thaiv: >109^99 Ω·cm, tswj los ntawm kev tshem tawm cov dopants txhob txwm.
●Lub Zog Dielectric: Kev ua haujlwm siab voltage nrog kev poob dielectric tsawg kawg nkaus, zoo tagnrho rau cov ntawv thov fais fab siab.
●Kev Ua Kub: 3.5-4.9 W/cm·K, ua kom cov cua sov tawm tau zoo hauv cov khoom siv ua haujlwm siab.

3. Cov Khoom Siv Thermal thiab Mechanical
●Bandgap Dav: 3.26 eV, txhawb kev ua haujlwm nyob rau hauv qhov muaj hluav taws xob siab, kub siab, thiab cov xwm txheej hluav taws xob siab.
●Kev Nyuaj: Mohs scale 9, ua kom muaj kev ruaj khov tiv thaiv kev hnav thaum lub sijhawm ua haujlwm.
● Tus Nqi Sib Nqus Kub: 4.2 × 10−6/K4.2 \times 10^{-6}/\text{K}4.2 × 10−6/K, ua kom muaj kev ruaj khov ntawm qhov ntsuas thaum muaj kev hloov pauv ntawm qhov kub thiab txias.

Cov Qauv	Qib Tsim Khoom	Qib Kev Tshawb Fawb	Qib Dummy	Chav tsev
Qib	Qib Tsim Khoom	Qib Kev Tshawb Fawb	Qib Dummy
Txoj kab uas hla	76.2 ± 0.5	76.2 ± 0.5	76.2 ± 0.5	mm
Qhov tuab	500 ± 25	500 ± 25	500 ± 25	µm
Kev Taw Qhia Wafer	Nyob rau ntawm-axis: <0001> ± 0.5°	Nyob rau ntawm-axis: <0001> ± 2.0 °	Nyob rau ntawm-axis: <0001> ± 2.0 °	qib kawm
Qhov Ceev ntawm Cov Kav Dej Me Me (MPD)	≤ 1	≤ 5	≤ 10	cm−2^-2−2
Kev Tiv Thaiv Hluav Taws Xob	≥ 1E10	≥ 1E5	≥ 1E5	Ω·cm
Cov tshuaj lom	Tsis muaj tshuaj lom	Tsis muaj tshuaj lom	Tsis muaj tshuaj lom
Kev Taw Qhia Tiaj Tus Thawj Coj	{1-100} ± 5.0°	{1-100} ± 5.0°	{1-100} ± 5.0°	qib kawm
Qhov Ntev Tiaj Tus Thawj	32.5 ± 3.0	32.5 ± 3.0	32.5 ± 3.0	mm
Qhov Ntev Thib Ob	18.0 ± 2.0	18.0 ± 2.0	18.0 ± 2.0	mm
Kev Taw Qhia Qib Thib Ob	90° CW ntawm lub tiaj tiaj thawj ± 5.0°	90° CW ntawm lub tiaj tiaj thawj ± 5.0°	90° CW ntawm lub tiaj tiaj thawj ± 5.0°	qib kawm
Kev Tshem Tawm Ntug	3	3	3	mm
LTV/TTV/Hneev/Warp	3 / 10 / ±30 / 40	3 / 10 / ±30 / 40	5 / 15 / ±40 / 45	µm
Qhov Roughness ntawm qhov chaw	Si-ntsej muag: CMP, C-ntsej muag: Polished	Si-ntsej muag: CMP, C-ntsej muag: Polished	Si-ntsej muag: CMP, C-ntsej muag: Polished
Cov Kab Ntsig (Lub Teeb Ci Muaj Zog)	Tsis muaj dab tsi	Tsis muaj dab tsi	Tsis muaj dab tsi
Cov Phaj Hex (Lub Teeb Ci Siab)	Tsis muaj dab tsi	Tsis muaj dab tsi	Thaj chaw sib sau ua ke 10%	%
Cov Cheeb Tsam Polytype (Lub Teeb Ci Siab)	Thaj chaw sib sau ua ke 5%	Thaj chaw sib sau ua ke 20%	Thaj chaw sib sau ua ke 30%	%
Cov Khawb (Lub Teeb Ci Siab)	≤ 5 khawb, qhov ntev tag nrho ≤ 150	≤ 10 khawb, qhov ntev tag nrho ≤ 200	≤ 10 khawb, qhov ntev tag nrho ≤ 200	mm
Kev Txiav Ntug	Tsis muaj ≥ 0.5 hli dav/qhov tob	2 tso cai ≤ 1 hli dav/qhov tob	5 tso cai ≤ 5 hli dav/qhov tob	mm
Kev Ua Phem Ntawm Qhov Chaw	Tsis muaj dab tsi	Tsis muaj dab tsi	Tsis muaj dab tsi

Cov ntawv thov

1. Cov Khoom Siv Hluav Taws Xob
Qhov dav bandgap thiab siab thermal conductivity ntawm HPSI SiC substrates ua rau lawv zoo tagnrho rau cov khoom siv fais fab ua haujlwm hauv cov xwm txheej hnyav, xws li:
●Cov Khoom Siv Hluav Taws Xob Siab: Xws li MOSFETs, IGBTs, thiab Schottky Barrier Diodes (SBDs) rau kev hloov hluav taws xob zoo.
●Cov Tshuab Hluav Taws Xob Rov Siv Tau Dua: Xws li cov inverters hnub ci thiab cov tswj cua turbine.
●Cov Tsheb Hluav Taws Xob (EVs): Siv rau hauv cov inverters, chargers, thiab powertrain systems los txhim kho kev ua haujlwm zoo thiab txo qhov loj.

2. Cov Ntawv Thov RF thiab Microwave
Qhov siab resistivity thiab qis dielectric poob ntawm HPSI wafers yog qhov tseem ceeb rau xov tooj cua-zaus (RF) thiab microwave systems, suav nrog:
●Kev Tsim Kho Kev Sib Txuas Lus: Chaw nres tsheb rau 5G tes hauj lwm thiab kev sib txuas lus satellite.
●Aerospace thiab Defense: Radar systems, phased-array antennas, thiab avionics Cheebtsam.

3. Cov khoom siv hluav taws xob Optoelectronics
Qhov pob tshab thiab qhov dav bandgap ntawm 4H-SiC ua rau nws siv tau rau hauv cov khoom siv optoelectronic, xws li:
● Cov Duab Tshawb Pom UV: Rau kev saib xyuas ib puag ncig thiab kev kuaj mob.
● Cov LEDs Muaj Zog Siab: Txhawb nqa cov tshuab teeb pom kev zoo.
●Laser Diodes: Rau kev siv hauv kev lag luam thiab kev kho mob.

4. Kev Tshawb Fawb thiab Kev Txhim Kho
Cov khoom siv HPSI SiC siv dav hauv kev kawm thiab kev lag luam R&D labs rau kev tshawb nrhiav cov khoom siv siab heev thiab kev tsim khoom siv, suav nrog:
● Kev Loj Hlob ntawm Txheej Epitaxial: Kev tshawb fawb txog kev txo qhov tsis zoo thiab kev ua kom zoo dua ntawm txheej.
●Kev Tshawb Fawb Txog Kev Txav Mus Los Ntawm Tus Neeg Nqa Khoom: Kev tshawb nrhiav txog kev thauj mus los ntawm hluav taws xob thiab qhov hauv cov ntaub ntawv huv si.
●Prototyping: Kev tsim kho thawj zaug ntawm cov khoom siv tshiab thiab cov voj voog.

Cov txiaj ntsig

Zoo Tshaj Plaws:
Kev huv siab thiab qhov tsis zoo tsawg muab lub platform txhim khu kev qha rau cov ntawv thov siab heev.

Kev Ruaj Ntseg Thermal:
Cov khoom siv cua sov zoo heev ua rau cov khoom siv ua haujlwm tau zoo hauv qab lub zog siab thiab qhov kub thiab txias.

Kev Sib Tw Dav Dav:
Muaj cov kev taw qhia thiab cov kev xaiv tuab uas tsim nyog ua kom muaj kev hloov pauv tau rau ntau yam khoom siv.

Kev ruaj khov:
Qhov nyuaj thiab kev ruaj khov ntawm cov qauv txo qis kev hnav thiab kev hloov pauv thaum lub sijhawm ua haujlwm thiab kev ua haujlwm.

Kev siv tau ntau yam:
Haum rau ntau yam lag luam, los ntawm lub zog rov ua dua tshiab mus rau aerospace thiab kev sib txuas lus.

Xaus lus

Lub 3-nti High Purity Semi-Insulating Silicon Carbide wafer sawv cev rau qhov siab tshaj plaws ntawm cov thev naus laus zis substrate rau cov khoom siv hluav taws xob siab, zaus siab, thiab optoelectronic. Nws txoj kev sib xyaw ua ke ntawm cov khoom siv thermal, hluav taws xob, thiab cov khoom siv kho tshuab zoo heev ua kom muaj kev ua haujlwm zoo hauv cov chaw nyuaj. Los ntawm cov khoom siv hluav taws xob fais fab thiab RF systems mus rau optoelectronics thiab kev tshawb fawb thiab kev txhim kho siab heev, cov HPSI substrates no muab lub hauv paus rau kev tsim kho tshiab yav tom ntej.
Yog xav paub ntxiv lossis xav txiav txim, thov hu rau peb. Peb pab neeg txawj ntse muaj los muab kev taw qhia thiab kev xaiv kho kom haum rau koj cov kev xav tau.