3 nti High purity Semi-Insulating (HPSI) SiC wafer 350um Dummy qib Prime qib
Daim Ntawv Thov
HPSI SiC wafers yog qhov tseem ceeb hauv kev ua kom cov khoom siv hluav taws xob tiam tom ntej, uas siv rau ntau yam kev siv ua haujlwm siab:
Cov Txheej Txheem Hloov Fais Fab: SiC wafers ua haujlwm ua cov khoom siv tseem ceeb rau cov khoom siv fais fab xws li fais fab MOSFETs, diodes, thiab IGBTs, uas yog qhov tseem ceeb rau kev hloov fais fab zoo hauv cov hluav taws xob. Cov khoom no pom muaj nyob rau hauv cov khoom siv fais fab ua haujlwm siab, cov tsav tsheb, thiab cov inverters kev lag luam.
Cov Tsheb Fais Fab (EVs):Qhov kev thov kom muaj tsheb fais fab ntau zuj zus ua rau yuav tsum tau siv cov khoom siv hluav taws xob zoo dua, thiab SiC wafers yog cov khoom tseem ceeb hauv kev hloov pauv no. Hauv EV powertrains, cov wafers no muab kev ua haujlwm zoo thiab kev hloov pauv sai, uas ua rau lub sijhawm them sai dua, kev khiav ntev dua, thiab kev ua haujlwm ntawm lub tsheb zoo dua.
Lub Zog Rov Ua Dua Tshiab:Hauv cov tshuab hluav taws xob rov ua dua tshiab xws li lub hnub ci thiab cua zog, SiC wafers siv rau hauv inverters thiab converters uas ua rau muaj kev ntes thiab faib hluav taws xob zoo dua. Lub thermal conductivity siab thiab lub zog tawg zoo dua ntawm SiC ua kom ntseeg tau tias cov kab ke no ua haujlwm tau zoo, txawm tias nyob hauv qhov xwm txheej ib puag ncig hnyav.
Kev Siv Tshuab Hauv Kev Lag Luam thiab Kev Siv Neeg Hlau:Cov khoom siv hluav taws xob muaj zog ua tau zoo hauv cov tshuab automation thiab robotics xav tau cov khoom siv uas muaj peev xwm hloov pauv sai, tswj cov khoom siv hluav taws xob loj, thiab ua haujlwm hauv qab kev ntxhov siab siab. Cov khoom siv semiconductor raws li SiC ua tau raws li cov kev cai no los ntawm kev muab kev ua haujlwm zoo dua thiab kev ruaj khov, txawm tias nyob hauv qhov chaw ua haujlwm hnyav.
Cov Txheej Txheem Sib Txuas Lus:Hauv kev tsim kho vaj tse hauv kev sib txuas lus, qhov twg kev ntseeg siab thiab kev hloov pauv hluav taws xob zoo yog qhov tseem ceeb, SiC wafers siv rau hauv cov khoom siv hluav taws xob thiab DC-DC converters. SiC cov khoom siv pab txo kev siv hluav taws xob thiab txhim kho kev ua haujlwm ntawm lub kaw lus hauv cov chaw khaws ntaub ntawv thiab cov tes hauj lwm sib txuas lus.
Los ntawm kev muab lub hauv paus ruaj khov rau cov ntawv thov muaj zog siab, HPSI SiC wafer ua rau muaj kev tsim cov khoom siv txuag hluav taws xob, pab cov lag luam hloov mus rau cov kev daws teeb meem ntsuab dua, ruaj khov dua.
Cov Khoom
| kev ua haujlwm | Qib Tsim Khoom | Qib Kev Tshawb Fawb | Qib Dummy |
| Txoj kab uas hla | 75.0 hli ± 0.5 hli | 75.0 hli ± 0.5 hli | 75.0 hli ± 0.5 hli |
| Qhov tuab | 350 µm ± 25 µm | 350 µm ± 25 µm | 350 µm ± 25 µm |
| Kev Taw Qhia Wafer | Nyob rau ntawm axis: <0001> ± 0.5 ° | Nyob rau ntawm axis: <0001> ± 2.0 ° | Nyob rau ntawm axis: <0001> ± 2.0 ° |
| Qhov Ceev ntawm Micropipe rau 95% ntawm Wafers (MPD) | ≤ 1 cm⁻² | ≤ 5 cm⁻² | ≤ 15 cm⁻² |
| Kev Tiv Thaiv Hluav Taws Xob | ≥ 1E7 Ω·cm | ≥ 1E6 Ω·cm | ≥ 1E5 Ω·cm |
| Cov tshuaj lom | Tsis muaj tshuaj lom | Tsis muaj tshuaj lom | Tsis muaj tshuaj lom |
| Kev Taw Qhia Tiaj Tus Thawj Coj | {11-20} ± 5.0° | {11-20} ± 5.0° | {11-20} ± 5.0° |
| Qhov Ntev Tiaj Tus Thawj | 32.5 hli ± 3.0 hli | 32.5 hli ± 3.0 hli | 32.5 hli ± 3.0 hli |
| Qhov Ntev Thib Ob | 18.0 hli ± 2.0 hli | 18.0 hli ± 2.0 hli | 18.0 hli ± 2.0 hli |
| Kev Taw Qhia Qib Thib Ob | Si tig rau saum: 90° CW ntawm lub tiaj tiaj thawj ± 5.0° | Si tig rau saum: 90° CW ntawm lub tiaj tiaj thawj ± 5.0° | Si tig rau saum: 90° CW ntawm lub tiaj tiaj thawj ± 5.0° |
| Kev Tshem Tawm Ntug | 3 hli | 3 hli | 3 hli |
| LTV/TTV/Hneev/Warp | 3 µm / 10 µm / ± 30 µm / 40 µm | 3 µm / 10 µm / ± 30 µm / 40 µm | 5 µm / 15 µm / ± 40 µm / 45 µm |
| Qhov Roughness ntawm qhov chaw | C-ntsej muag: Polished, Si-ntsej muag: CMP | C-ntsej muag: Polished, Si-ntsej muag: CMP | C-ntsej muag: Polished, Si-ntsej muag: CMP |
| Cov kab nrib pleb (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
| Cov Phaj Hex (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi | Tsis muaj dab tsi | Thaj chaw sib sau ua ke 10% |
| Cov Cheeb Tsam Polytype (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Thaj chaw sib sau ua ke 5% | Thaj chaw sib sau ua ke 5% | Thaj chaw sib sau ua ke 10% |
| Cov khawb (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | ≤ 5 khawb, qhov ntev tag nrho ≤ 150 hli | ≤ 10 khawb, qhov ntev tag nrho ≤ 200 hli | ≤ 10 khawb, qhov ntev tag nrho ≤ 200 hli |
| Kev Txiav Ntug | Tsis pub muaj ≥ 0.5 hli dav thiab tob | 2 tso cai, ≤ 1 hli dav thiab tob | 5 tso cai, ≤ 5 hli dav thiab tob |
| Kev Ua Phem Ntawm Qhov Chaw (tshuaj xyuas los ntawm lub teeb ci ntsa iab) | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
Cov Txiaj Ntsig Tseem Ceeb
Kev Ua Haujlwm Kub Zoo Tshaj Plaws: SiC qhov kev ua haujlwm kub siab ua kom muaj kev kub hnyiab zoo hauv cov khoom siv fais fab, ua rau lawv ua haujlwm ntawm cov qib fais fab thiab zaus siab dua yam tsis muaj kev kub dhau. Qhov no txhais tau tias cov kab ke me dua, ua haujlwm tau zoo dua thiab lub neej ua haujlwm ntev dua.
Lub zog hluav taws xob tawg siab: Nrog rau qhov bandgap dav dua piv rau silicon, SiC wafers txhawb nqa cov ntawv thov hluav taws xob siab, ua rau lawv zoo tagnrho rau cov khoom siv hluav taws xob uas xav tau kev tiv taus lub zog tawg siab, xws li hauv tsheb fais fab, cov kab ke fais fab grid, thiab cov kab ke zog rov ua dua tshiab.
Txo Kev Poob Fais Fab: Qhov kev tiv thaiv qis thiab kev hloov pauv ceev ntawm SiC cov khoom siv ua rau kev poob zog tsawg dua thaum lub sijhawm ua haujlwm. Qhov no tsis yog tsuas yog txhim kho kev ua haujlwm zoo xwb tab sis kuj txhim kho kev txuag hluav taws xob ntawm cov kab ke uas lawv tau xa mus.
Kev Txhim Kho Kev Ntseeg Siab Hauv Qhov Chaw Nyuaj: SiC cov khoom siv khov kho tso cai rau nws ua haujlwm hauv qhov xwm txheej hnyav, xws li qhov kub siab (txog li 600 ° C), hluav taws xob siab, thiab zaus siab. Qhov no ua rau SiC wafers tsim nyog rau kev siv hauv kev lag luam, tsheb, thiab lub zog.
Kev Siv Hluav Taws Xob Zoo: Cov khoom siv SiC muab cov zog ceev dua li cov khoom siv silicon ib txwm muaj, txo qhov loj thiab qhov hnyav ntawm cov tshuab hluav taws xob fais fab thaum txhim kho lawv cov kev ua haujlwm zoo. Qhov no ua rau kev txuag nqi thiab qhov chaw me dua rau ib puag ncig hauv cov ntawv thov xws li lub zog rov ua dua tshiab thiab tsheb fais fab.
Kev Loj Hlob Tau: Lub 3-nti txoj kab uas hla thiab kev ua haujlwm raug ntawm HPSI SiC wafer ua kom ntseeg tau tias nws muaj peev xwm loj hlob tau rau kev tsim khoom loj, ua tau raws li kev tshawb fawb thiab kev tsim khoom lag luam.
Xaus lus
Lub HPSI SiC wafer, nrog nws txoj kab uas hla 3-nti thiab 350 µm ± 25 µm tuab, yog cov khoom siv zoo tshaj plaws rau tiam tom ntej ntawm cov khoom siv hluav taws xob ua haujlwm siab. Nws qhov kev sib xyaw ua ke ntawm kev ua kom sov, lub zog tawg siab, kev poob hluav taws xob tsawg, thiab kev ntseeg siab nyob rau hauv cov xwm txheej hnyav ua rau nws yog ib qho tseem ceeb rau ntau yam kev siv hauv kev hloov pauv hluav taws xob, lub zog rov ua dua tshiab, tsheb fais fab, cov txheej txheem kev lag luam, thiab kev sib txuas lus.
Cov SiC wafer no yog qhov tsim nyog rau cov lag luam uas tab tom nrhiav kev ua haujlwm tau zoo dua, txuag hluav taws xob ntau dua, thiab txhim kho kev ntseeg siab ntawm lub kaw lus. Raws li thev naus laus zis hluav taws xob txuas ntxiv hloov zuj zus, HPSI SiC wafer muab lub hauv paus rau kev tsim cov kev daws teeb meem tshiab, txuag hluav taws xob, tsav kev hloov pauv mus rau yav tom ntej uas ruaj khov dua, tsis muaj carbon.
Daim duab qhia ntxaws ntxaws
