4 nti SiC Wafers 6H Semi-Insulating SiC Substrates prime, kev tshawb fawb, thiab qib dummy

Kev Piav Qhia Luv:

Cov khoom siv silicon carbide semi-insulated yog tsim los ntawm kev txiav, sib tsoo, polishing, ntxuav thiab lwm yam thev naus laus zis tom qab kev loj hlob ntawm cov siv lead ua silicon carbide semi-insulated. Ib txheej lossis ntau txheej siv lead ua ke yog loj hlob ntawm cov khoom siv uas ua tau raws li qhov yuav tsum tau ua zoo li epitaxy, thiab tom qab ntawd lub microwave RF ntaus ntawv yog ua los ntawm kev sib txuas cov qauv tsim thiab ntim khoom. Muaj raws li 2 nti 3 nti 4 nti 6 nti 8 nti kev lag luam, kev tshawb fawb thiab kev xeem qib semi-insulated silicon carbide ib leeg siv lead ua ke.

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Cov Khoom Siv Qhia Txog Khoom

Qib			Qib Tsim Khoom Xoom MPD (Qib Z)			Qib Tsim Khoom Txheem (Qib P)		Qib Dummy (Qib D)
Txoj kab uas hla			99.5 hli ~ 100.0 hli
	4H-SI		500 μm ± 20 μm			500 μm ± 25 μm
Kev Taw Qhia Wafer			Tawm ntawm txoj kab: 4.0° mus rau <1120> ±0.5° rau 4H-N, Ntawm txoj kab: <0001> ±0.5° rau 4H-SI
	4H-SI		≤1cm^-2			≤5 cm^-2		≤15 cm^-2
	4H-SI		≥1E9 Ω·cm					≥1E5 Ω·cm
Kev Taw Qhia Tiaj Tus Thawj Coj		{10-10} ±5.0°
Qhov Ntev Tiaj Tus Thawj		32.5 hli ± 2.0 hli
Qhov Ntev Thib Ob		18.0 hli ± 2.0 hli
Kev Taw Qhia Qib Thib Ob		Lub ntsej muag silicon tig rau saum: 90° CW. los ntawm Prime tiaj tus ±5.0°
Kev Tshem Tawm Ntug		3 hli
LTV/TTV/Hneev nti /Warp		≤ 3 μm / ≤ 5 μm / ≤ 15 μm / ≤ 30 μm						≤ 10 μm / ≤ 15 μm / ≤ 25 μm / ≤ 40 μm
Kev ntxhib			C lub ntsej muag				Polish		Ra≤1 nm
			Si lub ntsej muag	CMP	Ra≤0.2 nm					Ra≤0.5 nm
Cov Ntxaij Ntug Los Ntawm Lub Teeb Ci Siab		Tsis muaj dab tsi						Qhov ntev tag nrho ≤ 10 hli, ib leeg ntev ≤ 2 hli
Hex Phaj Los Ntawm Lub Teeb Ci Siab		Thaj chaw sib sau ua ke ≤0.05%						Thaj chaw sib sau ua ke ≤0.1%
Cov Cheeb Tsam Polytype Los Ntawm Lub Teeb Ci Siab		Tsis muaj dab tsi						Thaj chaw sib sau ua ke ≤ 3%
Cov pa roj carbon uas pom tau		Thaj chaw sib sau ua ke ≤0.05%						Thaj chaw sib sau ua ke ≤3%
Cov khawb ntawm cov nplaim silicon los ntawm lub teeb ci ntsa iab		Tsis muaj dab tsi						Tag nrho ntev ≤1 * wafer txoj kab uas hla
Ntug Chips Siab Los Ntawm Lub Teeb Ci		Tsis pub ≥0.2 hli dav thiab tob						5 tso cai, ≤1 hli txhua
Kev Ua Rau Silicon Nto Paug Los Ntawm Kev Siv Siab		Tsis muaj dab tsi
Ntim Khoom		Multi-wafer Cassette Los Yog Ib Lub Thawv Wafer