4H/6H-P 6 nti SiC wafer Qib xoom MPD Qib Tsim Khoom Qib Dummy
4H/6H-P Hom SiC Composite Substrates Cov lus qhia dav dav
6 nti txoj kab uas hla Silicon Carbide (SiC) Substrate Cov Lus Qhia Tshwj Xeeb
| Qib | Tsis Muaj MPD Ntau LawmQib (Z Qib) | Kev Tsim Khoom TxheemQib (P Qib) | Qib Dummy (D Qib) | ||
| Txoj kab uas hla | 145.5 hli ~ 150.0 hli | ||||
| Qhov tuab | 350 μm ± 25 μm | ||||
| Kev Taw Qhia Wafer | -Offaxis: 2.0°-4.0° mus rau [1120] ± 0.5° rau 4H/6H-P, Ntawm axis:〈111〉± 0.5° rau 3C-N | ||||
| Qhov Ceev ntawm Micropipe | 0 cm-2 | ||||
| Kev tiv taus | p-hom 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| n-hom 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| Kev Taw Qhia Tiaj Tus Thawj Coj | 4H/6H-P | -{1010} ± 5.0° | |||
| 3C-N | -{110} ± 5.0° | ||||
| Qhov Ntev Tiaj Tus Thawj | 32.5 hli ± 2.0 hli | ||||
| Qhov Ntev Thib Ob | 18.0 hli ± 2.0 hli | ||||
| Kev Taw Qhia Qib Thib Ob | Silicon tig rau saum: 90° CW. los ntawm Prime tiaj tus ± 5.0° | ||||
| Kev Tshem Tawm Ntug | 3 hli | 6 hli | |||
| LTV/TTV/Hneev nti /Warp | ≤ 2.5 μm / ≤5 μm / ≤ 15 μm / ≤ 30 μm | ≤ 10 μm / ≤ 15 μm / ≤ 25 μm / ≤ 40 μm | |||
| Kev ntxhib | Polish Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| Cov Ntxaij Ntug Los Ntawm Lub Teeb Ci Siab | Tsis muaj dab tsi | Qhov ntev tag nrho ≤ 10 hli, ib qho ntev ≤ 2 hli | |||
| Hex Phaj Los Ntawm Lub Teeb Ci Siab | Thaj chaw sib sau ua ke ≤0.05% | Thaj chaw sib sau ua ke ≤0.1% | |||
| Cov Cheeb Tsam Polytype Los Ntawm Lub Teeb Ci Siab | Tsis muaj dab tsi | Thaj chaw sib sau ua ke ≤ 3% | |||
| Cov pa roj carbon uas pom tau | Thaj chaw sib sau ua ke ≤0.05% | Thaj chaw sib sau ua ke ≤3% | |||
| Cov khawb ntawm cov nplaim silicon los ntawm lub teeb ci ntsa iab | Tsis muaj dab tsi | Qhov ntev tag nrho ≤1 × txoj kab uas hla wafer | |||
| Ntug Chips Siab Los Ntawm Lub Teeb Ci | Tsis pub ≥0.2 hli dav thiab tob | 5 tso cai, ≤1 hli txhua | |||
| Kev Ua Rau Silicon Nto Paug Los Ntawm Kev Siv Siab | Tsis muaj dab tsi | ||||
| Ntim Khoom | Multi-wafer Cassette los yog Single Wafer Thawv | ||||
Cov Lus Cim:
※ Cov kev txwv tsis zoo siv rau tag nrho cov nplaim wafer tshwj tsis yog thaj chaw tsis suav nrog ntug. # Cov khawb yuav tsum tau kuaj xyuas ntawm Si ntsej muag o
Cov 4H/6H-P hom 6-nti SiC wafer nrog qib xoom MPD thiab kev tsim khoom lossis qib dummy yog siv dav hauv cov ntawv thov hluav taws xob siab heev. Nws cov thermal conductivity zoo heev, lub zog tawg siab, thiab kev tiv taus rau qhov chaw ib puag ncig hnyav ua rau nws zoo tagnrho rau cov khoom siv hluav taws xob, xws li cov hloov hluav taws xob siab thiab cov inverters. Qib xoom MPD ua kom muaj qhov tsis zoo tsawg kawg nkaus, tseem ceeb rau cov khoom siv siab ntseeg siab. Cov wafers qib tsim khoom siv hauv kev tsim khoom loj ntawm cov khoom siv hluav taws xob thiab cov ntawv thov RF, qhov twg kev ua tau zoo thiab kev ua haujlwm raug yog qhov tseem ceeb. Cov wafers qib dummy, ntawm qhov tod tes, yog siv rau kev ntsuas cov txheej txheem, kev sim khoom siv, thiab prototyping, ua rau muaj kev tswj hwm zoo tas li hauv cov chaw tsim khoom semiconductor.
Cov txiaj ntsig ntawm N-hom SiC composite substrates suav nrog
- Kev Ua Haujlwm Thermal Siab: Lub 4H/6H-P SiC wafer ua haujlwm tau zoo tshem tawm cov cua sov, ua rau nws tsim nyog rau kev siv hluav taws xob kub thiab muaj zog heev.
- Lub zog tawg siab: Nws lub peev xwm los tswj cov hluav taws xob siab yam tsis muaj kev puas tsuaj ua rau nws zoo tagnrho rau cov khoom siv hluav taws xob thiab cov ntawv thov hloov pauv hluav taws xob siab.
- Qib xoom MPD (Micro Pipe Defect): Qhov tsis zoo uas tsawg tshaj plaws ua rau muaj kev ntseeg siab thiab kev ua tau zoo dua, qhov tseem ceeb rau cov khoom siv hluav taws xob uas xav tau ntau.
- Qib Tsim Khoom rau Kev Tsim Khoom Loj: Haum rau kev tsim khoom loj ntawm cov khoom siv semiconductor ua haujlwm siab nrog cov qauv zoo nruj.
- Qib Dummy rau Kev Ntsuas thiab Kev Ntsuas: Ua kom cov txheej txheem zoo dua, kev sim khoom siv, thiab kev tsim qauv yam tsis tas siv cov wafers kim heev.
Zuag qhia tag nrho, 4H/6H-P 6-nti SiC wafers nrog qib xoom MPD, qib tsim khoom, thiab qib dummy muab cov txiaj ntsig zoo rau kev tsim cov khoom siv hluav taws xob ua tau zoo. Cov wafers no muaj txiaj ntsig zoo rau cov ntawv thov uas xav tau kev ua haujlwm kub siab, lub zog ceev ceev, thiab kev hloov pauv hluav taws xob zoo. Qib xoom MPD ua kom muaj qhov tsis zoo tsawg kawg nkaus rau kev ua haujlwm ntawm cov khoom siv txhim khu kev qha thiab ruaj khov, thaum cov wafers qib tsim khoom txhawb nqa kev tsim khoom loj nrog kev tswj hwm zoo nruj. Cov wafers qib dummy muab kev daws teeb meem pheej yig rau kev ua kom zoo dua qub thiab kev ntsuas cov khoom siv, ua rau lawv tsis tseem ceeb rau kev tsim khoom semiconductor siab.
Daim duab qhia ntxaws ntxaws
