6 hauv Silicon Carbide 4H-SiC Semi-Insulating Ingot, Qib Dummy
Cov Khoom
1. Cov Khoom Siv Lub Cev thiab Cov Qauv
●Hom Khoom Siv: Silicon Carbide (SiC)
●Polytype: 4H-SiC, cov qauv siv lead ua hexagonal
●Txoj kab uas hla: 6 nti (150 hli)
●Tuab: Kho tau (5-15 hli feem ntau rau qib dummy)
● Kev Taw Qhia Siv Crystal:
oTus thawj: [0001] (C-dav hlau)
oCov kev xaiv thib ob: Tawm ntawm 4° rau kev loj hlob epitaxial zoo tshaj plaws
●Kev Taw Qhia Tiaj Tus Thawj Coj: (10-10) ± 5°
●Kev Taw Qhia Tiaj Tiaj Thib Ob: 90° tig rov qab los ntawm lub tiaj tiaj thawj ± 5°
2. Cov Khoom Siv Hluav Taws Xob
●Kev tiv taus:
oSemi-insulating (>106^66 Ω·cm), zoo tagnrho rau kev txo qis cov kab mob parasitic capacitance.
●Hom Tshuaj Doping:
oTsis txhob txwm doped, ua rau muaj kev tiv thaiv hluav taws xob siab thiab ruaj khov nyob rau hauv ntau yam kev ua haujlwm.
3. Cov Khoom Siv Thermal
●Kev Ua Kub: 3.5-4.9 W/cm·K, ua kom cov cua sov tawm tau zoo hauv cov tshuab muaj zog heev.
● Tus Nqi Sib Nqus Kub: 4.2 × 10−64.2 \times 10^{-6}4.2 × 10−6/K, ua kom muaj kev ruaj khov thaum lub sijhawm ua haujlwm kub siab.
4. Cov Khoom Siv Kho Qhov Muag
●Bandgap: bandgap dav ntawm 3.26 eV, tso cai rau kev ua haujlwm nyob rau hauv cov hluav taws xob siab thiab kub.
●Kev Pom Tseeb: Pom tseeb heev rau UV thiab cov wavelengths pom, muaj txiaj ntsig zoo rau kev sim optoelectronic.
5. Cov Khoom Siv Kho Tshuab
●Qhov nyuaj: Mohs scale 9, thib ob tsuas yog pob zeb diamond, ua kom ruaj khov thaum lub sijhawm ua haujlwm.
●Qhov Ceev Ntawm Qhov Tsis Zoo:
Tswj kom tsis txhob muaj qhov tsis zoo ntawm cov macro, xyuas kom zoo txaus rau cov ntawv thov dummy-grade.
●Kev tiaj tiaj: Kev sib npaug nrog kev hloov pauv
| Cov Qauv | Cov ntsiab lus | Chav tsev |
| Qib | Qib Dummy | |
| Txoj kab uas hla | 150.0 ± 0.5 | mm |
| Kev Taw Qhia Wafer | Nyob rau ntawm-axis: <0001> ± 0.5° | qib kawm |
| Kev Tiv Thaiv Hluav Taws Xob | > 1E5 | Ω·cm |
| Kev Taw Qhia Tiaj Tus Thawj Coj | {10-10} ± 5.0° | qib kawm |
| Qhov Ntev Tiaj Tus Thawj | Qhov Notch | |
| Cov Kab Ntsig (Kev Tshuaj Xyuas Lub Teeb Ci Siab) | < 3 hli hauv radial | mm |
| Cov Phaj Hex (Kev Tshuaj Xyuas Lub Teeb Ci Siab) | Thaj chaw sib sau ua ke ≤ 5% | % |
| Cov Cheeb Tsam Polytype (Kev Tshuaj Xyuas Lub Teeb Ci Siab) | Thaj chaw sib sau ua ke ≤ 10% | % |
| Qhov Ceev ntawm Micropipe | < 50 | cm−2^-2−2 |
| Kev Txiav Ntug | 3 tso cai, txhua ≤ 3 hli | mm |
| Lus Cim | Kev txiav cov wafer tuab < 1 hli, > 70% (tsis suav nrog ob qhov kawg) ua tau raws li cov kev cai saum toj no |
Cov ntawv thov
1. Kev tsim qauv thiab kev tshawb fawb
Cov khoom siv dummy-qib 6-nti 4H-SiC yog cov khoom siv zoo tagnrho rau kev tsim qauv thiab kev tshawb fawb, tso cai rau cov chaw tsim khoom thiab cov chaw soj nstuam kom:
●Kuaj cov txheej txheem hauv Chemical Vapor Deposition (CVD) lossis Physical Vapor Deposition (PVD).
● Tsim thiab txhim kho cov txheej txheem etching, polishing, thiab wafer slicing.
● Tshawb nrhiav cov qauv tsim khoom siv tshiab ua ntej hloov mus rau cov khoom siv qib tsim khoom.
2. Kev Ntsuas thiab Kev Ntsuas Cov Khoom Siv
Cov khoom semi-insulating ua rau cov ingot no muaj nqis heev rau:
● Soj ntsuam thiab kho cov khoom siv hluav taws xob ntawm cov khoom siv hluav taws xob siab thiab cov khoom siv zaus siab.
●Ua qauv qhia txog tej yam kev ua haujlwm rau MOSFETs, IGBTs, lossis diodes hauv tej chaw sim.
●Ua ib yam khoom siv hloov pauv uas pheej yig rau cov khoom siv uas muaj cov khoom huv si thaum lub sijhawm pib tsim khoom.
3. Cov Khoom Siv Hluav Taws Xob
Qhov ua tau zoo ntawm cov thermal conductivity thiab cov yam ntxwv dav dav ntawm 4H-SiC ua rau kev ua haujlwm zoo hauv cov khoom siv hluav taws xob, suav nrog:
● Cov khoom siv hluav taws xob siab.
●Cov inverters tsheb fais fab (EV).
●Cov tshuab hluav taws xob rov ua dua tshiab, xws li cov inverters hnub ci thiab cov turbines cua.
4. Cov Kev Siv Xov Tooj Cua Zaus (RF)
4H-SiC qhov kev poob qis dielectric thiab kev txav mus los ntawm electron siab ua rau nws tsim nyog rau:
●RF amplifiers thiab transistors hauv kev sib txuas lus.
● Cov tshuab radar zaus siab rau kev siv rau hauv aerospace thiab kev tiv thaiv.
● Cov khoom siv wireless network rau cov thev naus laus zis 5G tshiab.
5. Cov Khoom Siv Tiv Thaiv Kev Tawm Tsam
Vim nws txoj kev tiv taus cov teeb meem uas tshwm sim los ntawm hluav taws xob, semi-insulating 4H-SiC yog qhov zoo tagnrho rau:
●Cov khoom siv tshawb nrhiav qhov chaw, suav nrog cov khoom siv hluav taws xob satellite thiab cov tshuab fais fab.
●Cov khoom siv hluav taws xob uas tau kho kom ruaj khov rau kev saib xyuas thiab tswj hwm nuclear.
● Cov ntawv thov kev tiv thaiv uas xav tau kev ruaj khov hauv cov chaw ib puag ncig hnyav.
6. Cov khoom siv hluav taws xob Optoelectronics
Qhov pom tseeb ntawm qhov muag thiab qhov dav bandgap ntawm 4H-SiC ua rau nws siv tau rau hauv:
● Cov duab thaij UV thiab cov LEDs muaj zog heev.
●Kuaj cov txheej txheem kho qhov muag thiab kev kho qhov chaw.
●Prototyping optical Cheebtsam rau cov sensors siab heev.
Cov Zoo ntawm Cov Khoom Siv Qib Dummy
Kev Siv Nyiaj Zoo:
Qib dummy yog lwm txoj hauv kev pheej yig dua li cov ntaub ntawv tshawb fawb lossis cov ntaub ntawv tsim khoom, ua rau nws zoo tagnrho rau kev sim niaj hnub thiab kev txhim kho cov txheej txheem.
Kev hloov kho tau:
Qhov ntev thiab cov qauv siv lead ua ke tuaj yeem ua kom sib xws nrog ntau yam kev siv.
Kev nthuav dav:
Lub txoj kab uas hla 6-nti sib haum nrog cov qauv kev lag luam, tso cai rau kev nce qib mus rau cov txheej txheem tsim khoom.
Kev Ruaj Kho:
Lub zog kho tshuab siab thiab thermal stability ua rau cov ingot ruaj khov thiab txhim khu kev qha nyob rau hauv ntau yam kev sim.
Kev siv tau ntau yam:
Haum rau ntau yam lag luam, los ntawm cov tshuab hluav taws xob mus rau kev sib txuas lus thiab optoelectronics.
Xaus lus
Lub 6-nti Silicon Carbide (4H-SiC) semi-insulating ingot, qib dummy, muab lub platform txhim khu kev qha thiab ntau yam rau kev tshawb fawb, prototyping, thiab kev sim hauv cov thev naus laus zis tshiab. Nws cov khoom siv thermal, hluav taws xob, thiab mechanical zoo heev, ua ke nrog kev pheej yig thiab kev hloov kho tau, ua rau nws yog cov khoom siv tseem ceeb rau ob qho tib si kev kawm thiab kev lag luam. Txij li cov khoom siv hluav taws xob fais fab mus rau RF systems thiab cov khoom siv hluav taws xob-hardened, lub ingot no txhawb nqa kev tsim kho tshiab ntawm txhua theem ntawm kev txhim kho.
Yog xav paub ntxiv txog cov lus qhia lossis xav thov tus nqi, thov hu rau peb ncaj qha. Peb pab neeg txawj ntse npaj txhij los pab nrog cov kev daws teeb meem uas tsim tshwj xeeb rau koj kom tau raws li koj xav tau.
Daim duab qhia ntxaws ntxaws
