8 nti SiC Cov qib tsim khoom wafer 4H-N SiC substrate
Cov lus qhia hauv qab no qhia txog cov lus qhia ntawm peb cov 8inch SiC wafers:
| 8 nti N-hom SiC DSP Cov Lus Qhia | |||||
| Tus lej | Khoom | Chav tsev | Kev tsim khoom | Kev Tshawb Fawb | Dummy |
| 1: cov kev cai | |||||
| 1.1 | polytype | -- | 4H | 4H | 4H |
| 1.2 | kev taw qhia ntawm qhov chaw | ° | <11-20>4 ± 0.5 | <11-20>4 ± 0.5 | <11-20>4 ± 0.5 |
| 2: Cov khoom siv hluav taws xob | |||||
| 2.1 | tshuaj pleev xim | -- | n-hom Nitrogen | n-hom Nitrogen | n-hom Nitrogen |
| 2.2 | kev tiv taus | ohm · cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Cov txheej txheem kho tshuab | |||||
| 3.1 | txoj kab uas hla | mm | 200 ± 0.2 | 200 ± 0.2 | 200 ± 0.2 |
| 3.2 | tuab | μm | 500 ± 25 | 500 ± 25 | 500 ± 25 |
| 3.3 | Kev taw qhia ntawm qhov nkhaus | ° | [1- 100] ± 5 | [1- 100] ± 5 | [1- 100] ± 5 |
| 3.4 | Qhov tob ntawm qhov nkhaus | mm | 1 ~ 1.5 | 1 ~ 1.5 | 1 ~ 1.5 |
| 3.5 | LTV | μm | ≤5 (10mm * 10mm) | ≤5 (10mm * 10mm) | ≤10 (10mm * 10mm) |
| 3.6 | TTV | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Hneev | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Ua kom nkhaus | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Qauv | |||||
| 4.1 | qhov ceev ntawm cov kav dej me me | ib/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | cov ntsiab lus hlau | atoms/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ib/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ib/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ib/cm2 | ≤7000 | ≤10000 | NA |
| 5. Zoo pem hauv ntej | |||||
| 5.1 | pem hauv ntej | -- | Si | Si | Si |
| 5.2 | qhov chaw tiav | -- | Si-ntsej muag CMP | Si-ntsej muag CMP | Si-ntsej muag CMP |
| 5.3 | tej khoom me me | ea/wafer | ≤100 (loj ≥ 0.3μm) | NA | NA |
| 5.4 | khawb | ea/wafer | ≤5, Tag Nrho Ntev ≤200mm | NA | NA |
| 5.5 | Ntug tej daim me me/qhov nkhaus/qhov tawg/tej xim/tej yam qias neeg | -- | Tsis muaj dab tsi | Tsis muaj dab tsi | NA |
| 5.6 | Cov cheeb tsam ntau hom | -- | Tsis muaj dab tsi | Thaj Chaw ≤10% | Thaj Chaw ≤30% |
| 5.7 | cim pem hauv ntej | -- | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
| 6: Rov qab zoo | |||||
| 6.1 | tiav tom qab | -- | C-lub ntsej muag MP | C-lub ntsej muag MP | C-lub ntsej muag MP |
| 6.2 | khawb | mm | NA | NA | NA |
| 6.3 | Cov qhov tsis zoo ntawm ntug tom qab cov chips/indents | -- | Tsis muaj dab tsi | Tsis muaj dab tsi | NA |
| 6.4 | Qhov ntxhib nraub qaum | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Cim rov qab | -- | Qhov Notch | Qhov Notch | Qhov Notch |
| 7: ntug | |||||
| 7.1 | ntug | -- | Chamfer | Chamfer | Chamfer |
| 8: Pob khoom | |||||
| 8.1 | ntim khoom | -- | Epi-npaj nrog lub tshuab nqus tsev ntim khoom | Epi-npaj nrog lub tshuab nqus tsev ntim khoom | Epi-npaj nrog lub tshuab nqus tsev ntim khoom |
| 8.2 | ntim khoom | -- | Ntau-wafer kev ntim khoom cassette | Ntau-wafer kev ntim khoom cassette | Ntau-wafer kev ntim khoom cassette |
Daim duab qhia ntxaws ntxaws
Cov Khoom Sib Xws
Sau koj cov lus ntawm no thiab xa tuaj rau peb