8 nti Silicon wafer P / N-hom (100) 1-100Ω dummy reclaim substrate
Taw qhia ntawm lub thawv wafer
Lub 8-nti silicon wafer yog ib qho khoom siv silicon substrate uas siv ntau thiab siv dav hauv cov txheej txheem tsim cov integrated circuits. Cov silicon wafers no feem ntau siv los ua ntau hom integrated circuits, suav nrog microprocessors, memory chips, sensors thiab lwm yam khoom siv hluav taws xob. 8-nti silicon wafers feem ntau siv los ua cov chips ntawm qhov loj me, nrog rau qhov zoo suav nrog thaj chaw loj dua thiab muaj peev xwm ua ntau cov chips ntawm ib lub silicon wafer, ua rau muaj kev ua haujlwm ntau ntxiv. 8-nti silicon wafer kuj muaj cov khoom siv kho tshuab thiab tshuaj lom neeg zoo, uas tsim nyog rau kev tsim cov integrated circuit loj.
Cov yam ntxwv ntawm cov khoom
8" P/N hom, Polished silicon wafer (25 pcs)
Kev Taw Qhia: 200
Kev tiv taus: 0.1 - 40 ohm • cm (Nws yuav txawv ntawm ib pawg mus rau ib pawg)
Tuab: 725 +/- 20um
Qib Siab/Saib Xyuas/Qib Xeem
COV KHOOM SIV
| Cov Qauv | Yam ntxwv |
| Hom/Dopant | P, Boron N, Phosphorous N, Antimony N, Arsenic |
| Kev Taw Qhia | <100>, <111> txiav cov kev taw qhia raws li cov lus qhia ntawm cov neeg siv khoom |
| Cov ntsiab lus ntawm cov pa oxygen | 1019ppmA Kev cai tolerances ib tus neeg siv khoom specification |
| Cov ntsiab lus carbon | < 0.6 ppmA |
COV KHOOM SIV TXUJ CI
| Cov Qauv | Thawj | Saib Xyuas/ Kev Ntsuas A | Kev Ntsuas |
| Txoj kab uas hla | 200 ± 0.2 hli | 200 ± 0.2 hli | 200 ± 0.5 hli |
| Qhov tuab | 725 ± 20µm (tus qauv) | 725 ± 25µm (tus qauv) 450 ± 25µm 625 ± 25µm 1000 ± 25µm 1300 ± 25µm 1500 ± 25 µm | 725 ± 50µm (tus qauv) |
| TTV | < 5 µm | < 10 µm | < 15 µm |
| Hneev | < 30 µm | < 30 µm | < 50 µm |
| Qhwv | < 30 µm | < 30 µm | < 50 µm |
| Kev Sib Npaug Ntug | Kab mob SEMI-STD | ||
| Kev cim | Tsuas yog SEMI-Flat thawj zaug xwb, SEMI-STD Flats Jeida Flat, Notch | ||
| Cov Qauv | Thawj | Saib Xyuas/ Kev Ntsuas A | Kev Ntsuas |
| Cov Qauv Sab Pem Hauv Ntej | |||
| Qhov xwm txheej ntawm qhov chaw | Tshuaj lom neeg kho tshuab txhuam | Tshuaj lom neeg kho tshuab txhuam | Tshuaj lom neeg kho tshuab txhuam |
| Qhov Roughness ntawm qhov chaw | < 2 A° | < 2 A° | < 2 A° |
| Kev ua qias tuaj Cov khoom me me @ >0.3 µm | = 20 | = 20 | = 30 |
| Huab cua daj cua dub, qhov av Txiv kab ntxwv tev | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
| Pom, Cim Cov kab txaij | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
| Cov Qauv Sab Nraud | |||
| Cov kab nrib pleb, cov kab txiav, cov cim pom, cov xim av | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
| Qhov xwm txheej ntawm qhov chaw | Caustic etched | ||
Daim duab qhia ntxaws ntxaws





