AlN-on-NPSS Wafer: Txheej Txheem Nitride Aluminium Ua Haujlwm Zoo Tshaj Plaws ntawm Cov Khoom Siv Sapphire Uas Tsis Tau Ua Kom Tiav Rau Kev Siv Kub, Muaj Zog, thiab RF
Cov yam ntxwv
Txheej AlN Ua Haujlwm Zoo: Aluminium Nitride (AlN) paub txog nws cov khoom siv hluav taws xobkev ua tau zoo ntawm cov cua sov(~200 W/m·K),qhov dav bandgap, thiabhluav taws xob tawg siab, ua rau nws yog ib qho khoom siv zoo tagnrho raumuaj zog heev, zaus siab, thiabkub heevcov ntawv thov.
Cov Khoom Siv Sapphire Uas Tsis Yog Polished (NPSS): Cov pob zeb sapphire uas tsis tau txhuam kom du muab ib qhopheej yig, muaj zog heevlub hauv paus, ua kom lub hauv paus ruaj khov rau kev loj hlob epitaxial yam tsis muaj qhov nyuaj ntawm kev txhuam nto. NPSS cov khoom siv kho tshuab zoo heev ua rau nws ruaj khov rau cov chaw nyuaj.
Kev Ruaj Ntseg Thermal Siab: Lub AlN-on-NPSS wafer tuaj yeem tiv taus qhov kub thiab txias hloov pauv ntau heev, ua rau nws tsim nyog siv rau hauvhluav taws xob, cov txheej txheem tsheb, Cov LEDs, thiabdaim ntawv thov kho qhov muaguas xav tau kev ua haujlwm ruaj khov hauv qhov kub siab.
Kev rwb thaiv hluav taws xobAlN muaj cov khoom siv hluav taws xob zoo heev, ua rau nws zoo meej rau cov ntawv thov uaskev rho tawm hluav taws xobyog qhov tseem ceeb, suav nrogCov khoom siv RFthiabcov khoom siv hluav taws xob microwave.
Kev Tshem Tawm Kub Zoo Tshaj Plaws: Nrog rau qhov ua tau zoo ntawm cov cua sov, txheej AlN ua kom muaj kev yaj cua sov zoo, uas yog qhov tseem ceeb rau kev tswj hwm kev ua haujlwm thiab lub neej ntev ntawm cov khoom siv ua haujlwm hauv qab lub zog siab thiab zaus.
Cov Kev Ntsuas Kev Txawj
| Cov Qauv | Cov Lus Qhia Tshwj Xeeb |
| Wafer Txoj Kab uas hla | 2-nti, 4-nti (qhov loj me tuaj yeem hloov kho) |
| Hom substrate | Cov Khoom Siv Sapphire Uas Tsis Yog Polished (NPSS) |
| AlN Txheej Thickness | 2µm txog 10µm (kho tau) |
| Qhov tuab ntawm cov khoom | 430µm ± 25µm (rau 2-nti), 500µm ± 25µm (rau 4-nti) |
| Kev Ua Kub | 200 W/m·K |
| Kev Tiv Thaiv Hluav Taws Xob | Kev rwb thaiv tsev siab, tsim nyog rau kev siv RF |
| Qhov Roughness ntawm qhov chaw | Ra ≤ 0.5µm (rau AlN txheej) |
| Cov Khoom Siv Huv Si | Siab purity AlN (99.9%) |
| Xim | Dawb/Tawm-Dawb (Txheej AlN nrog lub substrate NPSS xim dawb) |
| Wafer Warp | < 30µm (ib txwm) |
| Hom tshuaj doping | Tsis muaj doped (tuaj yeem hloov kho) |
Cov ntawv thov
LubAlN-rau-NPSS waferyog tsim los rau ntau yam kev siv ua haujlwm siab thoob plaws ntau yam lag luam:
Cov Khoom Siv Hluav Taws Xob Muaj Zog Siab: AlN txheej muaj kev ua tau zoo thermal thiab cov khoom rwb thaiv tsev ua rau nws yog cov khoom siv zoo tagnrho raucov transistor fais fab, cov rectifiers, thiabcov hwj chim ICssiv rau hauvtsheb, kev lag luam, thiablub zog rov ua dua tshiabcov txheej txheem.
Cov Cheebtsam Xov Tooj Cua Zaus (RF)Cov khoom siv hluav taws xob zoo heev ntawm AlN, ua ke nrog nws qhov kev poob qis, ua rau muaj kev tsim covCov transistor RF, HEMTs (Cov Transistors Muaj Zog Hluav Taws Xob), thiab lwm yamcov khoom siv microwaveuas ua haujlwm tau zoo ntawm cov zaus siab thiab cov qib fais fab.
Cov Khoom Siv Kho Qhov Muag: AlN-on-NPSS wafers siv rau hauvcov laser diodes, Cov LEDs, thiabphotodetectors, qhov twgkev ua tau zoo ntawm cov cua sovthiabkev ruaj khov kho tshuabyog qhov tseem ceeb rau kev tswj hwm kev ua tau zoo thoob plaws lub neej ntev.
Cov Sensors Kub Siab: Lub wafer lub peev xwm los tiv taus cua sov heev ua rau nws haum raucov ntsuas kubthiabkev saib xyuas ib puag ncighauv cov lag luam zoo likev tsav dav hlau, tsheb, thiabroj thiab roj av.
Kev Ntim Khoom Siv Semiconductor: Siv rau hauv cov cua sov kis tauthiabcov txheej txheem tswj kev kubhauv cov txheej txheem ntim khoom, xyuas kom meej tias muaj kev ntseeg siab thiab ua haujlwm tau zoo ntawm cov semiconductors.
Cov Lus Nug thiab Lus Teb
Q: Qhov zoo tshaj plaws ntawm AlN-on-NPSS wafers dua li cov ntaub ntawv ib txwm muaj xws li silicon yog dab tsi?
A: Qhov zoo tshaj plaws yog AlN'skev ua tau zoo ntawm cov cua sov, uas tso cai rau nws kom ua haujlwm tau zoo dissipate cua sov, ua rau nws zoo tagnrho raumuaj zog heevthiabcov ntawv thov zaus siabqhov twg kev tswj cua sov yog qhov tseem ceeb. Tsis tas li ntawd, AlN muaj ib qhoqhov dav bandgapthiab zoo heevkev rwb thaiv hluav taws xobua rau nws zoo dua rau kev siv hauvRFthiabcov khoom siv microwavepiv rau cov silicon ib txwm muaj.
Q: Puas tuaj yeem hloov kho AlN txheej ntawm NPSS wafers?
A: Yog, txheej AlN tuaj yeem hloov kho raws li qhov tuab (xws li 2µm txog 10µm lossis ntau dua) kom tau raws li qhov xav tau tshwj xeeb ntawm koj daim ntawv thov. Peb kuj muab kev hloov kho raws li hom doping (N-hom lossis P-hom) thiab cov txheej ntxiv rau cov haujlwm tshwj xeeb.
Q: Daim ntawv thov rau wafer no hauv kev lag luam tsheb yog dab tsi?
A: Hauv kev lag luam tsheb, AlN-on-NPSS wafers feem ntau siv rau hauvhluav taws xob, Cov tshuab teeb pom kev zoo LED, thiabcov ntsuas kubLawv muab kev tswj cua sov zoo tshaj plaws thiab kev rwb thaiv hluav taws xob, uas yog qhov tseem ceeb rau cov kab ke ua haujlwm zoo uas ua haujlwm nyob rau hauv ntau yam kub.
Daim duab qhia ntxaws ntxaws
