Kev Cai N Hom SiC Noob Substrate Dia153 / 155mm Rau Cov Khoom Siv Hluav Taws Xob

Kev Piav Qhia Luv:

Cov khoom siv noob Silicon Carbide (SiC) ua lub hauv paus rau cov khoom siv semiconductors tiam peb, uas muaj kev coj ua kub siab heev, lub zog hluav taws xob tawg zoo heev, thiab kev txav mus los ntawm hluav taws xob siab. Cov yam ntxwv no ua rau lawv tsis tseem ceeb rau cov khoom siv hluav taws xob, cov khoom siv RF, cov tsheb fais fab (EVs), thiab cov kev siv hluav taws xob rov ua dua tshiab. XKH tshwj xeeb hauv kev tshawb fawb thiab kev tsim cov khoom siv noob SiC zoo, siv cov txheej txheem loj hlob siv lead ua xws li Physical Vapor Transport (PVT) thiab High-Temperature Chemical Vapor Deposition (HTCVD) los xyuas kom meej tias cov khoom siv lead ua zoo tshaj plaws hauv kev lag luam.

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Cov yam ntxwv

Qhia tawm

XKH muaj cov noob SiC 4-nti, 6-nti, thiab 8-nti nrog cov khoom siv N-hom/P-hom doping uas hloov kho tau, ua tiav cov qib resistivity ntawm 0.01-0.1 Ω·cm thiab dislocation densities qis dua 500 cm⁻², ua rau lawv zoo tagnrho rau kev tsim MOSFETs, Schottky Barrier Diodes (SBDs), thiab IGBTs. Peb cov txheej txheem tsim khoom ntsug suav nrog kev loj hlob ntawm crystal, wafer slicing, polishing, thiab kev tshuaj xyuas, nrog rau lub peev xwm tsim khoom txhua hli ntau dua 5,000 wafers kom tau raws li qhov xav tau ntawm cov tsev kawm ntawv tshawb fawb, cov chaw tsim khoom semiconductor, thiab cov tuam txhab hluav taws xob rov ua dua tshiab.

Tsis tas li ntawd xwb, peb muab cov kev daws teeb meem tshwj xeeb, suav nrog:

Kev hloov kho qhov kev taw qhia ntawm cov siv lead ua (4H-SiC, 6H-SiC)

Kev siv tshuaj doping tshwj xeeb (Aluminium, Nitrogen, Boron, thiab lwm yam)

Kev txhuam kom du heev (Ra < 0.5 nm)

XKH txhawb nqa kev ua cov qauv raws li qauv, kev sab laj txog kev siv tshuab, thiab kev tsim cov qauv me me kom xa tau cov kev daws teeb meem SiC substrate zoo tshaj plaws.

Cov kev tsis sib xws

Silicon carbide noob wafer
Polytype	4H
Qhov yuam kev ntawm kev taw qhia nto	4° mus rau <11-20> ±0.5º
Kev tiv taus	kev hloov kho
Txoj kab uas hla	205 ± 0.5 hli
Qhov tuab	600 ± 50μm
Kev ntxhib	CMP, Ra≤0.2nm
Qhov Ceev ntawm Micropipe	≤1 ib daim/cm2
Cov khawb	≤5, Tag Nrho Ntev ≤2 * Txoj Kab Uas hla
Cov chips ntug / indents	Tsis muaj dab tsi
Lub cim laser pem hauv ntej	Tsis muaj dab tsi
Cov khawb	≤2, Tag Nrho Ntev ≤ Txoj Kab Uas hla
Cov chips ntug / indents	Tsis muaj dab tsi
Cov cheeb tsam ntau hom	Tsis muaj dab tsi
Rov qab laser cim	1 hli (los ntawm ntug sab saud)
Ntug	Chamfer
Ntim Khoom	Cov cassette ntau hom

Cov Khoom Siv SiC Noob - Cov Yam Ntxwv Tseem Ceeb

1. Cov Khoom Siv Zoo Tshaj Plaws

· Kev ua tau zoo ntawm cov cua sov (~490 W/m·K), ntau dua li silicon (Si) thiab gallium arsenide (GaAs), ua rau nws zoo tagnrho rau kev txias cov khoom siv hluav taws xob ntau.

· Lub zog tawg ntawm lub zog (~3 MV/cm), ua kom muaj kev ua haujlwm ruaj khov nyob rau hauv cov xwm txheej hluav taws xob siab, tseem ceeb rau EV inverters thiab cov khoom siv hluav taws xob hauv kev lag luam.

· Qhov bandgap dav (3.2 eV), txo cov dej ntws tawm ntawm qhov kub siab thiab txhim kho kev ntseeg siab ntawm cov khoom siv.

2. Kev Zoo Tshaj Plaws Crystalline

· PVT + HTCVD hybrid growth technology txo qhov tsis zoo ntawm cov micropipe, tswj cov dislocation densities hauv qab 500 cm⁻².

· Wafer bow/warp < 10 μm thiab qhov roughness ntawm qhov chaw Ra < 0.5 nm, ua kom ntseeg tau tias muaj kev sib raug zoo nrog cov txheej txheem lithography siab thiab cov txheej txheem tso cov yeeb yaj kiab nyias.

3. Kev Xaiv Tshuaj Doping Ntau Yam

· Hom N (Nitrogen-doped): Kev tiv taus qis (0.01-0.02 Ω·cm), zoo rau cov khoom siv RF zaus siab.

· P-hom (Aluminium-doped): Zoo tagnrho rau lub zog MOSFETs thiab IGBTs, txhim kho kev txav mus los ntawm cov neeg nqa khoom.

· Semi-insulating SiC (Vanadium-doped): Resistivity > 10⁵ Ω·cm, tsim rau 5G RF pem hauv ntej modules.

4. Kev Ruaj Ntseg Ib puag ncig

· Kev tiv taus kub siab (> 1600 ° C) thiab qhov nyuaj ntawm hluav taws xob, tsim nyog rau kev tsav dav hlau, cov khoom siv nuclear, thiab lwm yam chaw ib puag ncig hnyav.

Cov Khoom Siv SiC Noob - Cov Ntawv Thov Tseem Ceeb

1. Cov Khoom Siv Hluav Taws Xob

· Cov Tsheb Hluav Taws Xob (EVs): Siv rau hauv cov chargers (OBC) thiab inverters los txhim kho kev ua haujlwm zoo thiab txo cov kev xav tau kev tswj hwm thermal.

· Cov Txheej Txheem Fais Fab Kev Lag Luam: Txhim kho cov photovoltaic inverters thiab smart grids, ua tiav >99% kev hloov pauv hluav taws xob zoo.

2. Cov Khoom Siv RF

· 5G Chaw Nres Tsheb: Cov khoom siv SiC semi-insulating ua rau GaN-on-SiC RF fais fab amplifiers, txhawb nqa kev xa xov tooj cua zaus siab, muaj zog siab.

Kev Sib Txuas Lus Satellite: Cov yam ntxwv qis-poob ua rau nws haum rau cov khoom siv millimeter-wave.

3. Lub Zog Rov Ua Dua Tshiab & Kev Khaws Cia Lub Zog

· Lub Hwj Chim Hnub Ci: SiC MOSFETs ua rau DC-AC hloov pauv tau zoo dua thaum txo cov nqi ntawm lub kaw lus.

· Cov Txheej Txheem Khaws Cia Zog (ESS): Ua kom cov hloov pauv ob txoj kev zoo dua thiab ua kom lub roj teeb siv tau ntev dua.

4. Kev Tiv Thaiv thiab Kev Ua Haujlwm Huab Cua

· Cov Txheej Txheem Radar: Cov khoom siv SiC muaj zog siab siv rau hauv AESA (Active Electronically Scanned Array) radars.

· Kev Tswj Xyuas Lub Hwj Chim ntawm Lub Nkoj Dav Hlau: Cov khoom siv SiC uas tiv taus hluav taws xob yog qhov tseem ceeb rau kev ua haujlwm tob hauv qhov chaw.

5. Kev Tshawb Fawb & Cov Txuj Ci Tshiab

· Kev Xam Xaj Quantum: SiC uas muaj kev ntshiab siab ua rau muaj kev tshawb fawb txog kev sib hloov qubit.

· Cov Sensors Kub Siab: Siv rau hauv kev tshawb nrhiav roj thiab kev soj ntsuam lub tshuab hluav taws xob nuclear.

Cov Khoom Siv SiC Noob - XKH Services

1. Cov txiaj ntsig ntawm kev muab khoom

· Kev tsim khoom sib xyaw ua ke: Kev tswj hwm tag nrho los ntawm cov hmoov SiC uas muaj kev ntshiab siab mus rau cov wafers tiav, xyuas kom meej tias lub sijhawm ua khoom siv yog 4-6 lub lis piam rau cov khoom txheem.

· Kev sib tw nqi: Kev lag luam ntawm qhov loj me ua rau tus nqi qis dua 15-20% piv rau cov neeg sib tw, nrog kev txhawb nqa rau Cov Lus Cog Tseg Ntev (LTAs).

2. Kev Pabcuam Kho Kom Haum

· Kev taw qhia siv lead ua: 4H-SiC (tus qauv) lossis 6H-SiC (cov ntawv thov tshwj xeeb).

· Kev ua kom zoo dua ntawm cov tshuaj doping: Cov khoom siv N-hom/P-hom/semi-insulating uas tau kho kom haum.

· Kev txhuam kom zoo dua: Kev txhuam CMP thiab kev kho qhov chaw uas npaj txhij rau kev txhuam (Ra < 0.3 nm).

3. Kev Txhawb Nqa Txog Kev Txawj Ntse

· Kev kuaj qauv pub dawb: suav nrog cov ntawv qhia ntsuas XRD, AFM, thiab Hall effect.

· Kev pab cuam simulation ntawm cov cuab yeej: Txhawb kev loj hlob ntawm epitaxial thiab kev tsim qauv cuab yeej kom zoo dua.

4. Teb sai sai

· Kev tsim qauv tsawg tsawg: Yam tsawg kawg nkaus ntawm 10 wafers, xa tuaj tsis pub dhau 3 lub lis piam.

· Kev xa khoom thoob ntiaj teb: Kev koom tes nrog DHL thiab FedEx rau kev xa khoom ntawm qhov rooj mus rau qhov rooj.

5. Kev Pov Hwm Zoo

· Kev tshuaj xyuas tag nrho cov txheej txheem: Npog X-ray topography (XRT) thiab kev tshuaj xyuas qhov ntom ntawm qhov tsis xws luag.

· Daim ntawv pov thawj thoob ntiaj teb: Ua raws li IATF 16949 (qib tsheb) thiab AEC-Q101 cov qauv.

Xaus lus

XKH cov noob SiC substrates zoo heev hauv qhov zoo ntawm crystalline, kev ruaj khov ntawm cov khoom xa tuaj, thiab kev hloov kho tau yooj yim, pabcuam rau cov khoom siv hluav taws xob, kev sib txuas lus 5G, lub zog rov ua dua tshiab, thiab cov thev naus laus zis tiv thaiv. Peb txuas ntxiv txhim kho 8-nti SiC ntau lawm thev naus laus zis los tsav kev lag luam semiconductor tiam thib peb mus tom ntej.

Yav dhau los: SiC ceramic phaj/tais rau 4 nti 6 nti wafer tuav rau ICP

Tom ntej no: Cov Khoom Siv SiC Noob Crystal Uas Kho Kom Zoo Dia 205/203/208 4H-N Hom Rau Kev Sib Txuas Lus Optical