Ob chav chaw nres tsheb square tshuab monocrystalline silicon pas nrig ua 6/8/12 nti nto flatness Ra≤0.5μm
Cov yam ntxwv ntawm cov khoom siv:
(1) Ob chav chaw nres tsheb synchronous ua tiav
· Kev ua haujlwm tau zoo ob npaug: Kev ua haujlwm tib lub sijhawm ntawm ob lub pas nrig silicon (Ø6 "-12") ua rau muaj kev tsim khoom ntau ntxiv los ntawm 40% -60% piv rau cov khoom siv Simplex.
· Kev tswj hwm ywj pheej: Txhua qhov chaw nres tsheb tuaj yeem hloov kho qhov kev txiav (kev nruj, qhov ceev pub) kom haum rau cov lus qhia sib txawv ntawm cov pas nrig silicon.
(2) Kev txiav txim siab siab
· Qhov tseeb ntawm qhov ntev: qhov ntev ntawm sab square bar yog ± 0.15 hli, qhov ntau yog ≤ 0.20 hli.
· Qhov zoo ntawm qhov chaw: kev txiav ntug tawg <0.5 hli, txo qhov ntau ntawm kev sib tsoo tom qab.
(3) Kev tswj hwm ntse
· Kev txiav hloov kho tau: kev saib xyuas lub sijhawm tiag tiag ntawm cov qauv ntawm cov pas nrig silicon, kev hloov kho txoj kev txiav (xws li kev ua cov pas nrig silicon khoov).
· Kev taug qab cov ntaub ntawv: sau cov txheej txheem ua tiav ntawm txhua tus pas nrig silicon los txhawb MES system docking.
(4) Tus nqi siv tsawg
· Kev siv hlau pob zeb diamond: ≤0.06m/hli (ntev ntawm tus pas nrig silicon), txoj kab uas hla ntawm hlau ≤0.30 hli.
· Kev ncig ntawm cov dej txias: Lub tshuab lim dej ua rau lub neej ua haujlwm ntev dua thiab txo cov kua dej pov tseg.
Cov txiaj ntsig ntawm kev siv tshuab thiab kev txhim kho:
(1) Kev siv tshuab txiav kom zoo dua
- Kev txiav ntau kab: 100-200 kab pob zeb diamond siv ua ke, thiab qhov ceev txiav yog ≥40mm / feeb.
- Kev tswj qhov nruj: Lub kaw lus kho qhov voj voog kaw (± 1N) kom txo qhov kev pheej hmoo ntawm kev tawg hlau.
(2) Kev txuas ntxiv ntawm kev sib raug zoo
- Kev hloov kho cov khoom siv: Txhawb P-hom / N-hom monocrystalline silicon, sib xws nrog TOPCon, HJT thiab lwm yam roj teeb silicon ua haujlwm siab.
- Qhov loj me yooj ywm: silicon pas nrig ntev 100-950mm, square pas nrig sab nrug 166-233mm kho tau.
(3) Kev hloov kho tshuab
- Neeg hlau thauj khoom thiab tshem tawm: tsis siv neeg thauj khoom / tshem tawm ntawm cov pas nrig silicon, ntaus ≤3 feeb.
- Kev kuaj mob ntse: Kev saib xyuas ua ntej kom txo lub sijhawm tsis ua haujlwm uas tsis tau npaj tseg.
(4) Kev coj noj coj ua hauv kev lag luam
- Kev txhawb nqa Wafer: tuaj yeem ua tiav ≥100μm ultra-thin silicon nrog cov pas nrig plaub fab, qhov sib cais <0.5%.
- Kev siv hluav taws xob zoo tshaj plaws: Kev siv hluav taws xob rau ib chav ntawm cov pas nrig silicon raug txo los ntawm 30% (piv rau cov khoom siv ib txwm muaj).
Cov kev tsis:
| Lub npe ntawm parameter | Tus nqi ntsuas |
| Tus naj npawb ntawm cov bar uas tau ua tiav | 2 daim/teeb |
| Qhov ntev ntawm cov khoom ua tiav | 100 ~ 950 hli |
| Kev ua haujlwm ntawm ntug kev | 166 ~ 233 hli |
| Kev txiav ceev | ≥40 hli / feeb |
| Kev ceev ntawm cov hlau pob zeb diamond | 0 ~ 35m / s |
| Lub pob zeb diamond txoj kab uas hla | 0.30 hli los yog tsawg dua |
| Kev siv hluav taws xob | 0.06 m/hli los yog tsawg dua |
| Sib xws puag ncig pas nrig txoj kab uas hla | Tiav lawm square rod inch + 2mm, Xyuas kom meej tias polishing pass rate |
| Kev tswj kev tawg ntawm ntug kev txiav | Raw ntug ≤0.5mm, Tsis muaj chipping, zoo nto |
| Arc ntev sib npaug | Qhov projection ntau yam <1.5 hli, Tsuas yog silicon rod distortion |
| Qhov loj ntawm tshuab (ib lub tshuab) | 4800 × 3020 × 3660 hli |
| Tag nrho cov hwj chim ntsuas | 56kW |
| Qhov hnyav tuag ntawm cov khoom siv | 12t |
Cov lus qhia txog kev ua haujlwm raug:
| Khoom meej | Kev kam rau siab ntau yam |
| Kev kam rau siab ntawm cov square bar margin | ±0.15 hli |
| Cov ntug ntawm cov square bar | ≤0.20 hli |
| Lub kaum sab xis ntawm txhua sab ntawm lub pas nrig square | 90°±0.05° |
| Flatness ntawm square rod | ≤0.15 hli |
| Neeg hlau rov ua qhov tseeb ntawm qhov chaw | ±0.05 hli |
Cov kev pabcuam ntawm XKH:
XKH muab kev pabcuam puv ntoob rau cov tshuab mono-crystalline silicon dual-station, suav nrog kev kho cov khoom siv (sib xws nrog cov pas nrig silicon loj), kev ua haujlwm (kev ua kom zoo dua ntawm cov txheej txheem txiav), kev cob qhia ua haujlwm thiab kev txhawb nqa tom qab muag (kev muab cov khoom tseem ceeb, kev kuaj mob deb), xyuas kom cov neeg siv khoom tau txais txiaj ntsig siab (> 99%) thiab cov nqi tsim khoom tsawg, thiab muab kev txhim kho txuj ci (xws li kev ua kom zoo dua ntawm AI txiav). Lub sijhawm xa khoom yog 2-4 lub hlis.
Daim duab qhia ntxaws ntxaws









