Gallium Nitride (GaN) Epitaxial Loj Hlob Ntawm Sapphire Wafers 4 nti 6 nti rau MEMS
Cov khoom ntawm GaN ntawm Sapphire Wafers
●Kev Ua Haujlwm Zoo:Cov khoom siv GaN muab tsib zaug zog ntau dua li cov khoom siv silicon, txhim kho kev ua tau zoo hauv ntau yam kev siv hluav taws xob, suav nrog RF amplification thiab optoelectronics.
●Qhov sib txawv ntawm Bandwidth:Qhov bandgap dav ntawm GaN ua rau muaj kev ua haujlwm siab ntawm qhov kub siab, ua rau nws zoo tagnrho rau kev siv hluav taws xob siab thiab zaus siab.
● Kev ruaj khov:GaN lub peev xwm los tswj cov xwm txheej hnyav (kub siab thiab hluav taws xob) ua kom muaj kev ua haujlwm ntev hauv cov chaw ib puag ncig hnyav.
●Me Me:GaN tso cai rau kev tsim cov khoom siv compact thiab sib dua piv rau cov ntaub ntawv semiconductor ib txwm muaj, ua rau cov khoom siv hluav taws xob me dua thiab muaj zog dua.
Abstract
Gallium Nitride (GaN) tab tom tshwm sim ua lub semiconductor xaiv rau cov ntawv thov siab heev uas xav tau lub zog siab thiab ua haujlwm tau zoo, xws li RF front-end modules, cov kab ke sib txuas lus ceev ceev, thiab teeb pom kev zoo LED. GaN epitaxial wafers, thaum cog rau ntawm sapphire substrates, muab kev sib xyaw ua ke ntawm kev ua haujlwm thermal siab, lub zog tawg siab, thiab kev teb zaus dav, uas yog qhov tseem ceeb rau kev ua tau zoo tshaj plaws hauv cov khoom siv sib txuas lus wireless, radars, thiab jammers. Cov wafers no muaj nyob rau hauv ob qho tib si 4-nti thiab 6-nti txoj kab uas hla, nrog ntau yam GaN thicknesses kom tau raws li cov kev cai sib txawv. GaN cov khoom tshwj xeeb ua rau nws yog tus neeg sib tw tseem ceeb rau yav tom ntej ntawm cov khoom siv hluav taws xob.
Cov Khoom Siv
| Khoom Feature | Cov Lus Qhia Tshwj Xeeb |
| Wafer Txoj Kab uas hla | 50 hli, 100 hli, 50.8 hli |
| Cov khoom siv hauv qab | Sapphire |
| GaN Txheej Thickness | 0.5 μm - 10 μm |
| Hom GaN/Doping | N-hom (P-hom muaj thaum thov) |
| Kev Taw Qhia Txog GaN Crystal | <0001> |
| Hom Polishing | Ib Sab Polished (SSP), Ob Sab Polished (DSP) |
| Al2O3 tuab | 430 μm - 650 μm |
| TTV (Tag Nrho Thickness Variation) | ≤ 10 μm |
| Hneev | ≤ 10 μm |
| Ua kom nkhaus | ≤ 10 μm |
| Thaj Chaw Nto | Qhov Chaw Siv Tau > 90% |
Cov Lus Nug thiab Lus Teb
Q1: Cov txiaj ntsig tseem ceeb ntawm kev siv GaN dua li cov khoom siv semiconductor uas siv silicon yog dab tsi?
A1GaN muaj ntau qhov zoo dua li silicon, suav nrog qhov bandgap dav dua, uas tso cai rau nws los tswj cov hluav taws xob tawg siab dua thiab ua haujlwm tau zoo ntawm qhov kub siab dua. Qhov no ua rau GaN zoo tagnrho rau cov ntawv thov muaj zog, zaus siab xws li RF modules, lub zog amplifiers, thiab LEDs. GaN lub peev xwm los tswj cov zog ntau dua kuj ua rau cov khoom siv me dua thiab ua haujlwm tau zoo dua piv rau lwm txoj hauv kev raws li silicon.
Q2: Puas siv tau GaN ntawm Sapphire wafers hauv MEMS (Micro-Electro-Mechanical Systems) daim ntawv thov?
A2: Yog lawm, GaN ntawm Sapphire wafers yog qhov tsim nyog rau MEMS daim ntawv thov, tshwj xeeb tshaj yog qhov twg xav tau lub zog siab, qhov kub thiab txias ruaj khov, thiab suab nrov qis. Cov khoom siv lub zog thiab kev ua haujlwm zoo hauv cov chaw muaj zaus siab ua rau nws zoo tagnrho rau MEMS cov khoom siv siv hauv kev sib txuas lus wireless, kev soj ntsuam, thiab cov kab ke radar.
Q3: Cov kev siv tau ntawm GaN hauv kev sib txuas lus wireless yog dab tsi?
A3GaN siv dav hauv RF pem hauv ntej modules rau kev sib txuas lus wireless, suav nrog 5G infrastructure, radar systems, thiab jammers. Nws lub zog ceev thiab thermal conductivity ua rau nws zoo meej rau cov khoom siv high-power, high-frequency, ua rau muaj kev ua tau zoo dua thiab cov yam ntxwv me dua piv rau cov kev daws teeb meem silicon.
Q4: Lub sijhawm ua khoom thiab qhov tsawg kawg nkaus kom muaj nuj nqis rau GaN ntawm Sapphire wafers yog dab tsi?
A4Lub sijhawm ua khoom thiab qhov tsawg kawg nkaus ntawm kev txiav txim sib txawv nyob ntawm qhov loj me ntawm wafer, GaN tuab, thiab cov kev xav tau tshwj xeeb ntawm cov neeg siv khoom. Thov hu rau peb ncaj qha rau cov nqi ntxaws ntxaws thiab muaj raws li koj cov lus qhia.
Q5: Kuv puas tuaj yeem tau txais GaN txheej tuab lossis doping theem?
A5Yog, peb muab kev hloov kho ntawm GaN tuab thiab cov qib doping kom tau raws li cov kev xav tau ntawm daim ntawv thov tshwj xeeb. Thov qhia rau peb paub koj cov lus qhia xav tau, thiab peb yuav muab kev daws teeb meem tshwj xeeb.
Daim duab qhia ntxaws ntxaws
