Gallium Nitride ntawm Silicon wafer 4 nti 6 nti Tailored Si Substrate Orientation, Resistivity, thiab N-hom/P-hom Kev Xaiv

Gallium Nitride ntawm Silicon wafer 4 nti 6 nti Tailored Si Substrate Orientation, Resistivity, thiab N-hom / P-hom Options Featured Image

Kev Piav Qhia Luv:

Peb Cov Khoom Siv Gallium Nitride Uas Tau Kho Kom Haum Rau Silicon (GaN-on-Si) Wafers yog tsim los ua kom tau raws li qhov xav tau ntawm cov ntawv thov hluav taws xob uas muaj zaus siab thiab muaj zog ntau. Muaj ob qho tib si 4-nti thiab 6-nti wafer qhov loj me, cov wafers no muaj cov kev xaiv kho kom haum rau Si substrate orientation, resistivity, thiab doping type (N-type/P-type) kom haum rau cov kev xav tau tshwj xeeb. GaN-on-Si technology sib xyaw cov txiaj ntsig ntawm gallium nitride (GaN) nrog cov silicon (Si) substrate pheej yig, ua kom muaj kev tswj hwm thermal zoo dua, ua haujlwm tau zoo dua, thiab hloov pauv sai dua. Nrog lawv cov bandgap dav thiab tsis tshua muaj hluav taws xob, cov wafers no zoo tagnrho rau kev hloov pauv hluav taws xob, kev siv RF, thiab cov txheej txheem hloov pauv ntaub ntawv ceev ceev.

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Cov yam ntxwv

●Qhov sib txawv ntawm Bandwidth:GaN (3.4 eV) muab kev txhim kho zoo hauv kev ua haujlwm siab, muaj zog, thiab kub siab piv rau cov silicon ib txwm muaj, ua rau nws zoo tagnrho rau cov khoom siv fais fab thiab RF amplifiers.
●Kev Taw Qhia Si Substrate Uas Koj Kho Tau:Xaiv los ntawm ntau hom Si substrate orientations xws li <111>, <100>, thiab lwm yam kom phim cov kev xav tau ntawm cov khoom siv tshwj xeeb.
●Kev Tiv Thaiv Kho Kom Haum:Xaiv ntawm ntau txoj kev xaiv resistivity rau Si, los ntawm semi-insulating mus rau high-resistivity thiab low-resistivity los ua kom cov khoom siv ua haujlwm zoo dua.
●Hom Tshuaj Doping:Muaj nyob rau hauv N-hom lossis P-hom doping kom phim cov kev xav tau ntawm cov khoom siv fais fab, RF transistors, lossis LEDs.
●High Breakdown Voltage:GaN-on-Si wafers muaj qhov hluav taws xob tawg siab (txog li 1200V), uas tso cai rau lawv los tswj cov ntawv thov hluav taws xob siab.
● Kev Hloov Ceev Sai Dua:GaN muaj kev txav mus los ntawm hluav taws xob ntau dua thiab kev poob qis dua li silicon, ua rau GaN-on-Si wafers zoo tagnrho rau cov voj voog ceev ceev.
●Kev Ua Haujlwm Kub Dua:Txawm hais tias silicon tsis tshua muaj thermal conductivity, GaN-on-Si tseem muaj kev ruaj khov thermal zoo dua, nrog rau kev tso cua sov zoo dua li cov khoom siv silicon ib txwm muaj.

Cov Lus Qhia Txog Kev Siv

Cov Qauv	Tus nqi
Qhov Loj ntawm Wafer	4-nti, 6-nti
Kev Taw Qhia Si Substrate	<111>, <100>, kev cai
Si Resistivity	Siab-resistivity, Semi-insulating, Tsawg-resistivity
Hom tshuaj doping	N-hom, P-hom
GaN Txheej Thickness	100 nm - 5000 nm (kho tau)
AlGaN Txheej Txheem	24% – 28% Al (feem ntau 10-20 nm)
Lub zog tawg	600V – 1200V
Kev txav mus los ntawm cov hluav taws xob	2000 cm²/V·s
Kev Hloov Zaus	Txog li 18 GHz
Wafer Qhov Roughness	RMS ~0.25 nm (AFM)
GaN Daim Ntawv Tsis kam	437.9 Ω·cm²
Tag Nrho Wafer Warp	< 25 µm (siab tshaj plaws)
Kev Ua Kub	1.3 – 2.1 W/cm·K

Cov ntawv thov

Cov Khoom Siv Hluav Taws XobGaN-on-Si yog qhov zoo tagnrho rau cov khoom siv hluav taws xob xws li cov amplifiers fais fab, converters, thiab inverters siv rau hauv cov tshuab hluav taws xob rov ua dua tshiab, tsheb fais fab (EVs), thiab cov khoom siv hauv kev lag luam. Nws lub zog tawg siab thiab qhov tsis kam qis ua kom muaj kev hloov pauv hluav taws xob zoo, txawm tias nyob rau hauv cov ntawv thov muaj zog siab.

Kev Sib Txuas Lus RF thiab MicrowaveCov wafer GaN-on-Si muaj peev xwm ua haujlwm ntau zaus, ua rau lawv zoo meej rau RF power amplifiers, satellite communications, radar systems, thiab 5G technologies. Nrog rau qhov ceev hloov pauv siab dua thiab muaj peev xwm ua haujlwm ntawm cov zaus siab dua (txog li18 GHz), cov khoom siv GaN muab kev ua tau zoo dua hauv cov ntawv thov no.

Tsheb Khoom Siv Hluav Taws XobGaN-on-Si siv rau hauv cov tshuab fais fab tsheb, suav nrogcov chargers hauv lub tsheb (OBCs)thiabCov hloov pauv DC-DCNws lub peev xwm ua haujlwm ntawm qhov kub siab dua thiab tiv taus cov qib hluav taws xob siab dua ua rau nws haum rau cov ntawv thov tsheb fais fab uas xav tau kev hloov pauv hluav taws xob zoo.

LED thiab OptoelectronicsGaN yog cov khoom siv xaiv rau cov LED xiav thiab dawbCov wafer GaN-on-Si yog siv los tsim cov tshuab teeb pom kev zoo LED, muab kev ua tau zoo heev hauv kev teeb pom kev zoo, cov thev naus laus zis tso saib, thiab kev sib txuas lus optical.

Cov Lus Nug thiab Lus Teb

Q1: Qhov zoo ntawm GaN dua li silicon hauv cov khoom siv hluav taws xob yog dab tsi?

A1:GaN muaj ib qhoqhov bandgap dav dua (3.4 eV)dua li silicon (1.1 eV), uas tso cai rau nws kom tiv taus cov hluav taws xob siab dua thiab kub dua. Cov cuab yeej no ua rau GaN tswj tau cov ntawv thov fais fab siab zoo dua, txo qhov poob hluav taws xob thiab ua kom lub cev ua haujlwm zoo dua. GaN kuj tseem muaj kev hloov pauv ceev dua, uas yog qhov tseem ceeb rau cov khoom siv zaus siab xws li RF amplifiers thiab cov hloov pauv fais fab.

Q2: Kuv puas tuaj yeem hloov kho Si substrate orientation rau kuv daim ntawv thov?

A2:Yog, peb muabkev teeb tsa Si substrate uas hloov kho tauxws li<111>, <100>, thiab lwm yam kev taw qhia nyob ntawm koj cov khoom siv xav tau. Kev taw qhia ntawm Si substrate ua lub luag haujlwm tseem ceeb hauv kev ua haujlwm ntawm lub cuab yeej, suav nrog cov yam ntxwv hluav taws xob, kev coj tus cwj pwm thermal, thiab kev ruaj khov ntawm lub tshuab.

Q3: Cov txiaj ntsig ntawm kev siv GaN-on-Si wafers rau cov ntawv thov zaus siab yog dab tsi?

A3:GaN-on-Si wafers muaj cov khoom zoo duahloov qhov ceev, ua kom ua haujlwm sai dua ntawm cov zaus siab dua piv rau silicon. Qhov no ua rau lawv zoo tagnrho rauRFthiablub tshuab cua sovcov ntawv thov, nrog rau cov zaus siabcov khoom siv fais fabxws liCov HEMTs(Cov Transistors Muaj Peev Xwm Siv Hluav Taws Xob Siab) thiabCov RF amplifiersGaN qhov kev txav mus los ntawm hluav taws xob siab dua kuj ua rau muaj kev poob qis dua thiab kev ua haujlwm zoo dua.

Q4: Muaj cov kev xaiv doping twg rau GaN-on-Si wafers?

A4:Peb muab ob qho tib siN-homthiabP-homcov kev xaiv doping, uas feem ntau siv rau ntau hom khoom siv semiconductor.N-hom dopingzoo tagnrho raucov transistor fais fabthiabCov RF amplifiers, thaumP-hom dopingfeem ntau siv rau cov khoom siv optoelectronic xws li LEDs.

Xaus lus

Peb Cov Khoom Siv Gallium Nitride Uas Kho Kom Haum Rau Silicon (GaN-on-Si) Wafers muab cov kev daws teeb meem zoo tshaj plaws rau cov zaus siab, lub zog siab, thiab cov ntawv thov kub siab. Nrog rau kev hloov kho Si substrate orientations, resistivity, thiab N-hom / P-hom doping, cov wafers no tau tsim los ua kom tau raws li cov kev xav tau tshwj xeeb ntawm kev lag luam xws li cov khoom siv hluav taws xob thiab cov tshuab tsheb mus rau kev sib txuas lus RF thiab cov thev naus laus zis LED. Siv cov khoom zoo dua ntawm GaN thiab qhov scalability ntawm silicon, cov wafers no muab kev ua tau zoo dua, kev ua haujlwm zoo, thiab kev tiv thaiv yav tom ntej rau cov khoom siv tiam tom ntej.