High-Purity Fused Quartz Wafers rau Semiconductor, Photonics Optical Applications 2″4″6″8″12″
Daim duab qhia ntxaws ntxaws
Txheej txheem cej luam ntawm Quartz Iav
Quartz wafers yog lub hauv paus ntawm ntau yam khoom siv niaj hnub uas tsav lub ntiaj teb digital niaj hnub no. Txij li kev taw qhia hauv koj lub xov tooj ntse mus rau lub hauv paus ntawm 5G chaw nres tsheb, quartz maj mam xa cov kev ruaj khov, kev huv si, thiab kev raug siab uas xav tau hauv cov khoom siv hluav taws xob thiab photonics ua tau zoo. Txawm hais tias txhawb nqa cov circuitry hloov pauv tau, ua kom MEMS sensors, lossis tsim lub hauv paus rau kev suav quantum, quartz cov yam ntxwv tshwj xeeb ua rau nws tsis tseem ceeb thoob plaws hauv kev lag luam.
"Fused Silica" lossis "Fused Quartz" uas yog theem amorphous ntawm quartz (SiO2). Thaum piv rau borosilicate iav, fused silica tsis muaj cov khoom ntxiv; yog li nws muaj nyob rau hauv nws daim ntawv ntshiab, SiO2. Fused silica muaj kev sib kis ntau dua hauv infrared thiab ultraviolet spectrum thaum piv rau iav ib txwm. Fused silica yog tsim los ntawm kev yaj thiab rov khov dua ultrapure SiO2. Synthetic fused silica ntawm qhov tod tes yog ua los ntawm silicon-nplua nuj tshuaj precursors xws li SiCl4 uas tau gasified thiab tom qab ntawd oxidized hauv H2 + O2 huab cua. Cov hmoov SiO2 tsim nyob rau hauv cov ntaub ntawv no yog fused rau silica ntawm ib lub substrate. Cov fused silica blocks raug txiav rau hauv wafers tom qab ntawd cov wafers thaum kawg polished.
Cov Nta Tseem Ceeb thiab Cov Txiaj Ntsig ntawm Quartz Iav Wafer
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Kev Ntshiab Siab Tshaj Plaws (≥99.99% SiO2)
Zoo tagnrho rau cov txheej txheem semiconductor thiab photonics uas huv heev uas yuav tsum txo qhov kev ua qias tuaj ntawm cov khoom siv. -
Kev Ua Haujlwm Thermal Dav Dav
Tswj kev ruaj khov ntawm cov qauv los ntawm qhov kub thiab txias cryogenic txog li ntau dua 1100 ° C yam tsis muaj kev warping lossis degradation. -
Kev Sib Kis UV thiab IR Zoo Tshaj Plaws
Muab kev pom tseeb zoo heev los ntawm kev sib sib zog nqus ultraviolet (DUV) mus txog ze-infrared (NIR), txhawb nqa kev siv optical precision. -
Cov Coefficient Kev Nthuav Dav Thermal Qis
Txhim kho qhov ruaj khov ntawm qhov ntsuas thaum muaj kev hloov pauv ntawm qhov kub thiab txias, txo kev ntxhov siab thiab txhim kho kev ntseeg siab ntawm cov txheej txheem. -
Kev Tiv Thaiv Tshuaj Zoo Tshaj Plaws
Tsis haum rau feem ntau cov kua qaub, alkalis, thiab cov kuab tshuaj - ua rau nws zoo rau cov chaw muaj tshuaj lom neeg. -
Kev Yooj Yim Tiav Qhov Nto
Muaj cov khoom tiav uas du thiab du heev, ib sab lossis ob sab uas ci ntsa iab, sib xws nrog cov kev xav tau ntawm photonics thiab MEMS.
Cov Txheej Txheem Tsim Khoom ntawm Quartz Iav Wafer
Fused quartz wafers yog tsim los ntawm ntau cov kauj ruam tswj thiab meej:
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Kev Xaiv Khoom Siv Raw
Kev xaiv cov khoom siv quartz ntuj tsim los yog cov khoom siv SiO₂ uas muaj cov khoom ntshiab siab. -
Kev yaj thiab kev sib xyaw
Quartz yog yaj ntawm ~ 2000 ° C hauv cov cub hluav taws xob hauv qab huab cua tswj kom tshem tawm cov khoom suav nrog thiab npuas. -
Kev Tsim Thaiv
Cov silica uas yaj lawm raug txias rau hauv cov khoom khov kho lossis cov khoom sib xyaw. -
Kev Txiav Wafer
Cov pob zeb diamond lossis hlau txiav precision yog siv los txiav cov ingots rau hauv wafer blanks. -
Kev txhuam thiab kev txhuam
Ob qho chaw saum npoo yog tiaj tus thiab txhuam kom ua tau raws li qhov pom tseeb, tuab, thiab qhov ntxhib. -
Kev Ntxuav thiab Kev Tshuaj Xyuas
Cov wafers raug ntxuav hauv ISO Class 100/1000 chav huv thiab raug tshuaj xyuas kom zoo rau qhov tsis zoo thiab qhov sib xws.
Cov yam ntxwv ntawm Quartz Glass wafer
| spec | chav tsev | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Txoj kab uas hla / qhov loj (los yog square) | mm | 100 | 150 | 200 | 250 | 300 |
| Kev kam rau siab (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Qhov tuab | mm | 0.10 los yog ntau dua | 0.30 los yog ntau dua | 0.40 los yog ntau dua | 0.50 los yog ntau dua | 0.50 los yog ntau dua |
| Lub tiaj tiaj siv rau kev siv thawj zaug | mm | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
| LTV (5mm × 5mm) | μm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TTV | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Hneev | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Ua kom nkhaus | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm × 5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Kev Sib Npaug Ntug | mm | Ua raws li SEMI M1.2 Txheem / xa mus rau IEC62276 | ||||
| Hom nto | Ib Sab Polished / Ob Sab Polished | |||||
| Sab ci ntsa iab Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Cov Qauv Sab Nraud | μm | dav dav 0.2-0.7 lossis kho kom haum | ||||
Quartz vs. Lwm Cov Khoom Siv Pob tshab
| Vaj tse | Quartz Iav | Borosilicate Iav | Sapphire | Iav Txheem |
|---|---|---|---|---|
| Max Kev Ua Haujlwm Temp | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Kev Kis UV | Zoo heev (JGS1) | Txom nyem | Zoo | Txom nyem heev |
| Kev Tiv Thaiv Tshuaj | Zoo heev | Nruab nrab | Zoo heev | Txom nyem |
| Kev dawb huv | Siab heev | Qis mus rau nruab nrab | Siab | Qis |
| Kev nthuav dav thermal | Qis heev | Nruab nrab | Qis | Siab |
| Tus nqi | Nruab nrab mus rau siab | Qis | Siab | Qis heev |
Cov Lus Nug Txog Quartz Iav Wafer
Q1: Qhov txawv ntawm fused quartz thiab fused silica yog dab tsi?
Txawm hais tias ob qho tib si yog cov qauv amorphous ntawm SiO₂, fused quartz feem ntau yog los ntawm cov khoom siv quartz ntuj, thaum fused silica yog tsim los ntawm kev tsim khoom. Kev ua haujlwm, lawv muab kev ua tau zoo sib xws, tab sis fused silica yuav muaj qhov huv thiab homogeneity siab dua me ntsis.
Q2: Cov fused quartz wafers puas siv tau rau hauv cov chaw muaj cua tshuab ntau?
Yog. Vim lawv cov khoom siv tawm tsawg thiab kev tiv taus cua sov siab, fused quartz wafers zoo heev rau cov tshuab nqus tsev thiab cov ntawv thov aerospace.
Q3: Cov wafers no puas haum rau kev siv laser tob-UV?
Kiag li. Fused quartz muaj kev xa hluav taws xob siab txog li ~ 185 nm, ua rau nws zoo tagnrho rau DUV optics, lithography masks, thiab excimer laser systems.
Q4: Koj puas txhawb nqa kev tsim khoom wafer kev cai?
Yog. Peb muab kev hloov kho tag nrho suav nrog txoj kab uas hla, tuab, qhov zoo ntawm qhov chaw, tiaj tus/notches, thiab laser patterning, raws li koj cov kev xav tau tshwj xeeb.
Txog Peb
XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.
