HPSI SiC Wafer ≥90% Transmittance Optical Qib rau AI / AR Cov Tsom Iav
Kev Taw Qhia Tseem Ceeb: Lub Luag Haujlwm ntawm HPSI SiC Wafers hauv AI/AR Glasses
HPSI (High-Purity Semi-Insulating) Silicon Carbide wafers yog cov wafers tshwj xeeb uas muaj cov yam ntxwv siab resistivity (> 10⁹ Ω· cm) thiab qhov tsis zoo tsawg heev. Hauv AI / AR tsom iav, lawv feem ntau ua haujlwm ua cov khoom siv tseem ceeb rau diffractive optical waveguide lenses, hais txog cov teeb meem cuam tshuam nrog cov khoom siv kho qhov muag ib txwm muaj nyob rau hauv cov ntsiab lus ntawm cov yam ntxwv nyias thiab lub teeb, cua sov dissipation, thiab kev ua tau zoo ntawm optical. Piv txwv li, AR tsom iav siv SiC waveguide lenses tuaj yeem ua tiav qhov pom dav dav (FOV) ntawm 70 ° -80 °, thaum txo qhov tuab ntawm ib txheej lens rau tsuas yog 0.55 hli thiab qhov hnyav rau tsuas yog 2.7g, txhim kho kev nplij siab hnav thiab kev pom kev.
Cov Yam Ntxwv Tseem Ceeb: Cov Khoom Siv SiC Ua Rau AI/AR Tsim Cov Iav Tsim Los Pab Tau Li Cas
High Refractive Index thiab Optical Performance Optimization
- SiC tus refractive index (2.6–2.7) yog ze li ntawm 50% siab dua li ntawm cov iav ib txwm muaj (1.8–2.0). Qhov no tso cai rau cov qauv waveguide nyias dua thiab ua haujlwm tau zoo dua, ua rau FOV nthuav dav heev. Tus refractive index siab kuj pab txo qhov "rainbow effect" uas feem ntau pom hauv diffractive waveguides, txhim kho qhov huv ntawm daim duab.
Muaj peev xwm tswj tau thermal zoo heev
- Nrog rau qhov ua tau zoo ntawm cov cua sov txog li 490 W/m·K (ze li ntawm tooj liab), SiC tuaj yeem ua kom cov cua sov uas tsim los ntawm Micro-LED cov modules sai sai. Qhov no tiv thaiv kev ua haujlwm tsis zoo lossis cov khoom siv laus vim qhov kub siab, ua kom lub roj teeb siv tau ntev thiab ruaj khov.
Lub zog thiab kev ruaj khov ntawm lub tshuab
- SiC muaj Mohs hardness ntawm 9.5 (qhov thib ob tsuas yog pob zeb diamond), muab kev tiv thaiv khawb zoo heev, ua rau nws zoo tagnrho rau cov tsom iav siv ntau zaus. Nws qhov roughness ntawm qhov chaw tuaj yeem tswj tau rau Ra < 0.5 nm, ua kom ntseeg tau tias muaj kev poob qis thiab sib xws heev hauv waveguides.
Kev Sib Piv ntawm Cov Khoom Siv Hluav Taws Xob
- HPSI SiC qhov resistivity (>10⁹ Ω·cm) pab tiv thaiv kev cuam tshuam ntawm cov teeb liab. Nws kuj tseem tuaj yeem ua haujlwm ua cov khoom siv hluav taws xob zoo, ua kom zoo dua cov modules tswj hluav taws xob hauv AR tsom iav.
Cov Lus Qhia Tseem Ceeb rau Daim Ntawv Thov
Cov Cheebtsam Optical tseem ceeb rau AI / AR Glasses
- Cov Lens Diffractive Waveguide: SiC substrates yog siv los tsim cov ultra-thin optical waveguides uas txhawb nqa FOV loj thiab tshem tawm cov nyhuv zaj sawv.
- Cov Phaj Qhov Rai thiab Cov Prisms: Los ntawm kev txiav thiab txhuam kom raug, SiC tuaj yeem ua tiav rau hauv cov qhov rai tiv thaiv lossis cov prisms kho qhov muag rau AR tsom iav, txhim kho kev xa hluav taws xob thiab kev tiv thaiv kev hnav.
Cov Kev Siv Txuas Ntxiv rau Lwm Cov Teb
- Cov Khoom Siv Hluav Taws Xob: Siv rau hauv cov xwm txheej siab, muaj zog xws li cov inverters tsheb fais fab tshiab thiab kev tswj hwm lub cev muaj zog hauv kev lag luam.
- Quantum Optics: Ua haujlwm ua tus tswv tsev rau cov chaw xim, siv rau hauv cov substrates rau kev sib txuas lus quantum thiab cov khoom siv sensing.
Kev Sib Piv Cov Lus Qhia Txog 4 Nti & 6 Nti HPSI SiC Substrate
| Cov Qauv | Qib | 4-Nti Cov Khoom Siv | 6-Ntiag Tug Substrate |
| Txoj kab uas hla | Qib Z / Qib D | 99.5 hli - 100.0 hli | 149.5 hli - 150.0 hli |
| Poly-hom | Qib Z / Qib D | 4H | 4H |
| Qhov tuab | Qib Z | 500 μm ± 15 μm | 500 μm ± 15 μm |
| Qib D | 500 μm ± 25 μm | 500 μm ± 25 μm | |
| Kev Taw Qhia Wafer | Qib Z / Qib D | Nyob rau ntawm axis: <0001> ± 0.5 ° | Nyob rau ntawm axis: <0001> ± 0.5 ° |
| Qhov ntom ntawm cov kav dej me me | Qib Z | ≤ 1 cm² | ≤ 1 cm² |
| Qib D | ≤ 15 cm² | ≤ 15 cm² | |
| Kev tiv thaiv | Qib Z | ≥ 1E10 Ω·cm | ≥ 1E10 Ω·cm |
| Qib D | ≥ 1E5 Ω·cm | ≥ 1E5 Ω·cm | |
| Kev Taw Qhia Tiaj Tus Thawj Coj | Qib Z / Qib D | (10-10) ± 5.0° | (10-10) ± 5.0° |
| Qhov Ntev Tiaj Tus Thawj | Qib Z / Qib D | 32.5 hli ± 2.0 hli | Qhov Notch |
| Qhov Ntev Thib Ob | Qib Z / Qib D | 18.0 hli ± 2.0 hli | - |
| Kev Tshem Tawm Ntug | Qib Z / Qib D | 3 hli | 3 hli |
| LTV / TTV / Bow / Warp | Qib Z | ≤ 2.5 μm / ≤ 5 μm / ≤ 15 μm / ≤ 30 μm | ≤ 2.5 μm / ≤ 6 μm / ≤ 25 μm / ≤ 35 μm |
| Qib D | ≤ 10 μm / ≤ 15 μm / ≤ 25 μm / ≤ 40 μm | ≤ 5 μm / ≤ 15 μm / ≤ 40 μm / ≤ 80 μm | |
| Kev ntxhib | Qib Z | Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm | Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm |
| Qib D | Polish Ra ≤ 1 nm / CMP Ra ≤ 0.2 nm | Polish Ra ≤ 1 nm / CMP Ra ≤ 0.5 nm | |
| Cov kab nrib pleb ntug | Qib D | Thaj chaw sib sau ua ke ≤ 0.1% | Qhov ntev tag nrho ≤ 20 hli, ib qho ≤ 2 hli |
| Cov Cheeb Tsam Polytype | Qib D | Thaj chaw sib sau ua ke ≤ 0.3% | Thaj chaw sib sau ua ke ≤ 3% |
| Cov pa roj carbon uas pom tau | Qib Z | Thaj chaw sib sau ua ke ≤ 0.05% | Thaj chaw sib sau ua ke ≤ 0.05% |
| Qib D | Thaj chaw sib sau ua ke ≤ 0.3% | Thaj chaw sib sau ua ke ≤ 3% | |
| Cov khawb ntawm qhov chaw silicon | Qib D | 5 tso cai, txhua ≤1mm | Qhov ntev tag nrho ≤ 1 x txoj kab uas hla |
| Cov Chips Ntug | Qib Z | Tsis pub muaj (dav thiab tob ≥0.2 hli) | Tsis pub muaj (dav thiab tob ≥0.2 hli) |
| Qib D | 7 tso cai, txhua ≤1mm | 7 tso cai, txhua ≤1mm | |
| Kev puas tsuaj ntawm cov ntsia hlau | Qib Z | - | ≤ 500 cm² |
| Kev ntim khoom | Qib Z / Qib D | Multi-wafer Cassette Los Yog Ib Lub Thawv Wafer | Multi-wafer Cassette Los Yog Ib Lub Thawv Wafer |
XKH Cov Kev Pabcuam: Kev Tsim Khoom Ua Ke thiab Kev Kho Kom Haum Rau Koj Tus Kheej
Lub tuam txhab XKH muaj peev xwm sib txuas ua ke ntsug los ntawm cov khoom siv raw mus rau cov wafers tiav, npog tag nrho cov saw hlau ntawm SiC substrate kev loj hlob, kev txiav, kev txhuam, thiab kev ua tiav raws li kev cai. Cov txiaj ntsig tseem ceeb ntawm kev pabcuam suav nrog:
- Kev sib txawv ntawm cov khoom siv:Peb tuaj yeem muab ntau hom wafer xws li 4H-N hom, 4H-HPSI hom, 4H/6H-P hom, thiab 3C-N hom. Kev tiv taus, tuab, thiab kev taw qhia tuaj yeem hloov kho raws li qhov xav tau.
- Kev Kho Kom Haum Qhov Loj:Peb txhawb nqa kev ua cov wafer txij li 2-nti mus txog 12-nti txoj kab uas hla, thiab tseem tuaj yeem ua cov qauv tshwj xeeb xws li cov khoom plaub fab (piv txwv li, 5x5mm, 10x10mm) thiab cov prisms tsis sib xws.
- Kev Tswj Xyuas Qhov Tseeb Qib Optical:Wafer Total Thickness Variation (TTV) tuaj yeem tswj tau ntawm <1μm, thiab qhov roughness ntawm Ra <0.3 nm, ua tau raws li qhov yuav tsum tau ua ntawm nano-level flatness rau cov khoom siv waveguide.
- Kev Teb Sai Sai Rau Kev Ua Lag Luam:Tus qauv lag luam sib koom ua ke ua kom muaj kev hloov pauv zoo los ntawm R&D mus rau kev tsim khoom loj, txhawb txhua yam los ntawm kev txheeb xyuas me me mus rau kev xa khoom loj (lub sijhawm ua khoom feem ntau yog 15-40 hnub).
Cov Lus Nug Txog HPSI SiC Wafer
Q1: Vim li cas HPSI SiC thiaj suav tias yog cov khoom siv zoo tshaj plaws rau AR waveguide lenses?
A1: Nws cov ntsuas refractive siab (2.6–2.7) ua rau cov qauv waveguide nyias dua, ua haujlwm tau zoo dua uas txhawb nqa qhov pom loj dua (piv txwv li, 70 ° –80 °) thaum tshem tawm "cov nyhuv zaj sawv".
Q2: HPSI SiC txhim kho kev tswj cua sov hauv AI/AR tsom iav li cas?
A2: Nrog rau kev ua kom sov txog li 490 W / m · K (ze li tooj liab), nws ua kom cov cua sov tawm ntawm cov khoom xws li Micro-LEDs zoo, ua kom muaj kev ua haujlwm ruaj khov thiab lub neej ntev dua.
Q3: HPSI SiC muaj cov txiaj ntsig zoo li cas rau cov tsom iav hnav tau?
A3: Nws qhov nyuaj tshwj xeeb (Mohs 9.5) muab kev tiv thaiv khawb zoo dua, ua rau nws ruaj khov rau kev siv txhua hnub hauv cov tsom iav AR rau cov neeg siv khoom.
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