HPSI SiCOI wafer 4 6inch Hydropholic Bonding

Kev Piav Qhia Luv:

Cov wafers uas muaj cov khoom siv semi-insulating (HPSI) 4H-SiCOI uas muaj cov khoom siv siab heev yog tsim los ntawm kev siv cov thev naus laus zis siab heev los txuas thiab ua kom nyias nyias. Cov wafers no yog tsim los ntawm kev txuas 4H HPSI silicon carbide substrates rau ntawm cov txheej thermal oxide los ntawm ob txoj kev tseem ceeb: hydrophilic (ncaj qha) kev txuas thiab kev txuas ntawm qhov chaw. Qhov tom kawg qhia txog ib txheej hloov kho nruab nrab (xws li amorphous silicon, txhuas oxide, lossis titanium oxide) los txhim kho qhov zoo ntawm kev txuas thiab txo cov npuas, tshwj xeeb tshaj yog rau cov ntawv thov kho qhov muag. Kev tswj cov tuab ntawm cov txheej silicon carbide yog ua tiav los ntawm kev siv ion implantation-based SmartCut lossis kev sib tsoo thiab CMP polishing cov txheej txheem. SmartCut muaj cov txheej txheem siab precision thickness uniformity (50nm–900nm nrog ±20nm uniformity) tab sis tej zaum yuav ua rau muaj kev puas tsuaj me ntsis vim yog ion implantation, cuam tshuam rau kev ua haujlwm ntawm cov khoom siv kho qhov muag. Kev sib tsoo thiab CMP polishing zam kev puas tsuaj rau cov khoom siv thiab nyiam dua rau cov zaj duab xis tuab dua (350nm–500µm) thiab quantum lossis PIC daim ntawv thov, txawm hais tias muaj qhov tuab tsawg dua (±100nm). Cov wafers 6-nti txheem muaj ib txheej SiC 1µm ± 0.1µm rau ntawm ib txheej SiO2 3µm saum 675µm Si substrates nrog qhov du nto zoo heev (Rq < 0.2nm). Cov HPSI SiCOI wafers no ua haujlwm rau MEMS, PIC, quantum, thiab optical device manufacturing nrog cov khoom siv zoo heev thiab cov txheej txheem yooj ywm.

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SiCOI Wafer (Silicon Carbide-on-Insulator) Cov Khoom Txheej Txheem Cej Luam

SiCOI wafers yog cov khoom siv semiconductor tshiab uas sib xyaw Silicon Carbide (SiC) nrog cov txheej insulating, feem ntau yog SiO₂ lossis sapphire, los txhim kho kev ua tau zoo hauv cov khoom siv hluav taws xob, RF, thiab photonics. Hauv qab no yog cov ntsiab lus ntxaws ntxaws ntawm lawv cov khoom faib ua ntu tseem ceeb:

Vaj tse	Kev piav qhia
Cov Khoom Siv Sib xyaw	Silicon Carbide (SiC) txheej sib txuas rau ntawm cov khoom siv rwb thaiv tsev (feem ntau yog SiO₂ lossis sapphire)
Cov Qauv Siv Crystal	Feem ntau yog 4H lossis 6H polytypes ntawm SiC, paub txog qhov zoo ntawm cov siv lead ua thiab kev sib xws
Cov Khoom Siv Hluav Taws Xob	Lub zog hluav taws xob tawg siab (~ 3 MV / cm), qhov sib txawv ntawm bandgap dav (~ 3.26 eV rau 4H-SiC), qhov hluav taws xob xau qis
Kev Ua Kub	Kev ua kom muaj cua sov zoo (~ 300 W / m·K), ua rau muaj kev tshem tawm cua sov zoo
Txheej dielectric	Txheej rwb thaiv tsev (SiO₂ lossis sapphire) muab kev rho tawm hluav taws xob thiab txo cov peev xwm parasitic
Cov Khoom Siv Kho Tshuab	Kev nyuaj siab (~ 9 Mohs scale), lub zog zoo heev, thiab kev ruaj khov thermal
Qhov Chaw Tiav	Feem ntau ultra-du nrog qhov tsis zoo tsawg, tsim nyog rau kev tsim khoom siv
Cov ntawv thov	Cov khoom siv hluav taws xob fais fab, MEMS cov khoom siv, RF cov khoom siv, cov sensors uas xav tau kev kam rau siab kub thiab voltage

SiCOI wafers (Silicon Carbide-on-Insulator) sawv cev rau cov qauv semiconductor substrate siab heev, muaj cov txheej nyias nyias zoo ntawm silicon carbide (SiC) sib txuas rau ntawm cov txheej insulating, feem ntau yog silicon dioxide (SiO₂) lossis sapphire. Silicon carbide yog ib qho semiconductor dav dav uas paub txog nws lub peev xwm los tiv taus cov hluav taws xob siab thiab qhov kub siab, nrog rau kev ua kom sov zoo heev thiab kev ua kom muaj zog, ua rau nws zoo tagnrho rau kev siv hluav taws xob siab, zaus siab, thiab kub siab.

Cov txheej txheem rwb thaiv tsev hauv SiCOI wafers muab kev rho tawm hluav taws xob zoo, txo cov kab mob parasitic capacitance thiab cov dej ntws tawm ntawm cov khoom siv, yog li ua kom zoo dua tag nrho cov khoom siv kev ua tau zoo thiab kev ntseeg siab. Lub ntsej muag wafer yog polished meej kom ua tiav ultra-smoothness nrog tsawg qhov tsis zoo, ua tau raws li qhov xav tau ntawm micro- thiab nano-scale device fabrication.

Cov qauv khoom siv no tsis yog tsuas yog txhim kho cov yam ntxwv hluav taws xob ntawm SiC cov khoom siv xwb tab sis kuj tseem ua rau kev tswj hwm thermal thiab kev ruaj khov ntawm lub cev. Yog li ntawd, SiCOI wafers tau siv dav hauv cov khoom siv hluav taws xob, xov tooj cua zaus (RF) Cheebtsam, microelectromechanical systems (MEMS) sensors, thiab cov khoom siv hluav taws xob kub siab. Zuag qhia tag nrho, SiCOI wafers sib xyaw cov khoom zoo ntawm silicon carbide nrog cov txiaj ntsig kev rho tawm hluav taws xob ntawm cov txheej insulator, muab lub hauv paus zoo tagnrho rau tiam tom ntej ntawm cov khoom siv semiconductor ua tau zoo.

Daim ntawv thov SiCOI wafer

Cov Khoom Siv Hluav Taws Xob

Cov hloov pauv hluav taws xob siab thiab muaj zog siab, MOSFETs, thiab diodes

Tau txais txiaj ntsig los ntawm SiC qhov bandgap dav, lub zog tawg siab, thiab kev ruaj khov thermal

Txo qhov kev poob hluav taws xob thiab kev ua haujlwm zoo dua hauv cov txheej txheem hloov hluav taws xob

Cov Cheebtsam Xov Tooj Cua Zaus (RF)

Cov transistors thiab amplifiers uas muaj zaus siab

Lub peev xwm parasitic qis vim yog txheej insulating txhim kho RF kev ua tau zoo

Haum rau 5G kev sib txuas lus thiab radar systems

Cov Txheej Txheem Microelectromechanical (MEMS)

Cov sensors thiab actuators ua haujlwm hauv qhov chaw nyuaj

Kev ruaj khov ntawm lub tshuab thiab kev tsis sib haum xeeb ntawm cov tshuaj ua rau lub cuab yeej siv tau ntev dua

Xws li cov sensors siab, accelerometers, thiab gyroscopes

Cov Khoom Siv Hluav Taws Xob Kub Siab

Cov khoom siv hluav taws xob rau tsheb, aerospace, thiab kev siv hauv kev lag luam

Ua haujlwm tau zoo ntawm qhov kub siab uas silicon tsis ua haujlwm

Cov Khoom Siv Photonic

Kev koom ua ke nrog cov khoom siv optoelectronic ntawm cov khoom siv insulator

Pab kom muaj cov photonics hauv-chip nrog kev tswj hwm thermal zoo dua

Cov Lus Nug thiab Lus Teb ntawm SiCOI wafer

Q:SiCOI wafer yog dab tsi

Ib:SiCOI wafer sawv cev rau Silicon Carbide-on-Insulator wafer. Nws yog ib hom semiconductor substrate uas ib txheej nyias ntawm silicon carbide (SiC) raug khi rau ntawm ib txheej insulating, feem ntau yog silicon dioxide (SiO₂) lossis qee zaum sapphire. Cov qauv no zoo ib yam li lub tswv yim rau Silicon-on-Insulator (SOI) wafers uas paub zoo tab sis siv SiC es tsis yog silicon.