Ion Beam Polishing Tshuab rau sapphire SiC Si

Kev Piav Qhia Luv:

Lub Tshuab Ion Beam Figuring thiab Polishing yog ua raws li lub hauv paus ntsiab lus ntawm ion sputtering. Hauv lub chamber uas muaj lub tshuab nqus tsev siab, ib qho chaw ion tsim cov plasma, uas raug nrawm mus rau hauv lub zog siab ion beam. Lub beam no bombards qhov chaw ntawm lub optical component, tshem tawm cov khoom ntawm qhov atomic scale kom ua tiav qhov kho qhov chaw thiab ua tiav qhov tseeb heev.

Xa email rau peb

Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Kev Txheeb Xyuas Khoom ntawm Ion Beam Polishing Tshuab

Ua ib qho txheej txheem tsis sib cuag, kev txhuam hniav ion beam tshem tawm kev ntxhov siab ntawm cov khoom siv thiab zam kev puas tsuaj rau hauv av, ua rau nws zoo tagnrho rau kev tsim cov khoom siv high-precision optics siv hauv kev tshawb fawb txog hnub qub, aerospace, semiconductors, thiab cov ntawv thov kev tshawb fawb siab heev.

Txoj Cai Ua Haujlwm ntawm Ion Beam Polishing Tshuab

Kev Tsim Ion
Cov roj inert (piv txwv li, argon) raug coj mus rau hauv lub tshuab nqus tsev thiab ionized los ntawm kev tso tawm hluav taws xob los tsim cov plasma.

Kev Ua Kom Sai & Kev Tsim Lub Teeb
Cov ions raug nrawm mus rau ntau pua lossis txhiab lub electron volts (eV) thiab ua rau hauv ib qho chaw ruaj khov, tsom mus rau qhov chaw.

Kev Tshem Tawm Khoom Siv
Lub teeb ion ua rau cov atoms tawm ntawm qhov chaw yam tsis muaj kev pib ua tshuaj lom neeg.

Kev Tshawb Pom Qhov Yuam Kev & Kev Npaj Txoj Kev
Kev hloov pauv ntawm cov duab nto raug ntsuas nrog kev cuam tshuam. Cov haujlwm tshem tawm raug siv los txiav txim siab lub sijhawm nyob thiab tsim cov kev taw qhia zoo tshaj plaws.

Kev Kho Kom Kaw-Loop
Cov voj voog rov ua dua ntawm kev ua thiab kev ntsuas txuas ntxiv mus txog thaum RMS / PV cov hom phiaj raug ua tiav.

Cov Nta Tseem Ceeb ntawm Ion Beam Polishing Tshuab

Kev Sib Tw Nto Thoob Ntiaj Teb- Cov txheej txheem tiaj tus, spherical, aspherical, thiab freeform surfaces

Tus Nqi Tshem Tawm Ruaj Khov Heev- Pab kom muaj kev kho kom raug cov duab sub-nanometer

Kev Ua Haujlwm Tsis Muaj Kev Puas Tsuaj- Tsis muaj qhov tsis zoo hauv qab av lossis kev hloov pauv ntawm cov qauv

Kev Ua Tau Zoo Ib Txwm Muaj- Ua haujlwm zoo sib xws rau cov ntaub ntawv ntawm ntau yam hardness

Kev Kho Qhov Zaus Qis/Nruab Nrab- Tshem tawm cov yuam kev yam tsis tau tsim cov khoom cuav nruab nrab / siab

Kev Xav Tau Txij Nkawm Tsawg- Kev ua haujlwm ntev nrog lub sijhawm tsis ua haujlwm tsawg

Cov Lus Qhia Txog Kev Siv Tshuab Ion Beam Polishing

Khoom	Cov Lus Qhia Tshwj Xeeb
Txoj Kev Ua Haujlwm	Ion sputtering nyob rau hauv ib puag ncig high-vacuum
Hom Ua Haujlwm	Kev txiav txim siab thiab txhuam qhov chaw tsis sib cuag
Qhov Loj Tshaj Plaws ntawm Cov Khoom Siv	Φ4000 hli
Cov Axes Txav Mus Los	3-axis / 5-axis
Kev Ruaj Ntseg Tshem Tawm	≥95%
Kev Ntsuas Qhov Nto	PV < 10 nm; RMS ≤ 0.5 nm (RMS ib txwm < 1 nm; PV < 15 nm)
Kev Muaj Peev Xwm Kho Zaus	Tshem tawm cov yuam kev zaus qis-nruab nrab yam tsis muaj qhov yuam kev zaus nruab nrab/siab
Kev Ua Haujlwm Txuas Ntxiv Mus	3-5 lub lis piam yam tsis muaj kev saib xyuas lub tshuab nqus tsev
Tus nqi kho	Qis

Kev Ua Haujlwm ntawm Ion Beam Polishing Tshuab

Cov Hom Nto Uas Txhawb Nqa

Yooj yim: Tiaj, kheej kheej, prism

Complex: Symmetric/asymmetric asphere, tawm-axis asphere, cylindrical

Tshwj Xeeb: Ultra-thin optics, slat optics, hemispherical optics, conformal optics, theem phaj, freeform surfaces

Cov Khoom Siv Txhawb Nqa

Iav kho qhov muag: Quartz, microcrystalline, K9, thiab lwm yam.

Cov ntaub ntawv infrared: Silicon, germanium, thiab lwm yam.

Cov Hlau: Aluminium, stainless hlau, titanium alloy, thiab lwm yam.

Cov siv lead ua: YAG, ib leeg-siv lead ua silicon carbide, thiab lwm yam.

Cov ntaub ntawv tawv/nkig: Silicon carbide, thiab lwm yam.

Qhov Zoo Ntawm Qhov Chaw / Kev Ntsuas Tseeb

PV < 10 nm

RMS ≤ 0.5 nm

Kev Tshawb Fawb Txog Kev Ua Haujlwm ntawm Ion Beam Polishing Machine

Rooj plaub 1 - Daim iav tiaj tus qauv

Khoom siv: D630 hli quartz tiaj tus

Qhov Tshwm Sim: PV 46.4 nm; RMS 4.63 nm

Rooj Plaub 2 - Daim Iav X-ray Reflective

Khoom ua haujlwm: 150 × 30 hli silicon tiaj tus

Qhov Tshwm Sim: PV 8.3 nm; RMS 0.379 nm; Qhov Nce Toj 0.13 µrad

Rooj plaub 3 - Daim iav tawm ntawm Axis

Khoom ua haujlwm: D326 hli tawm ntawm daim iav hauv av

Qhov Tshwm Sim: PV 35.9 nm; RMS 3.9 nm

Cov Lus Nug Txog Cov Tsom Iav Quartz

Cov Lus Nug Feem Ntau - Tshuab Polishing Ion Beam

Q1: Dab tsi yog ion beam polishing?
A1:Kev txhuam hniav Ion beam yog ib qho txheej txheem tsis sib cuag uas siv cov beam ions (xws li argon ions) los tshem tawm cov khoom ntawm qhov chaw ua haujlwm. Cov ions raug nrawm thiab taw qhia rau qhov chaw, ua rau cov khoom siv atomic-level raug tshem tawm, ua rau cov tiav du heev. Cov txheej txheem no tshem tawm kev ntxhov siab ntawm lub tshuab thiab kev puas tsuaj rau hauv av, ua rau nws zoo tagnrho rau cov khoom siv kho qhov muag precision.

Q2: Cov hom nto twg tuaj yeem ua tiav Ion Beam Polishing Machine?
A2:LubTshuab Polishing Ion Beamtuaj yeem ua tiav ntau yam nto, suav nrog cov khoom siv kho qhov muag yooj yim xws licov tiaj tiaj, cov pob kheej kheej, thiab cov prism, nrog rau cov geometries nyuaj zoo liaspheres, tawm ntawm-axis aspheres, thiabcov nto dawbNws muaj txiaj ntsig zoo rau cov ntaub ntawv xws li iav kho qhov muag, infrared optics, hlau, thiab cov ntaub ntawv tawv/nkig.

Q3: Cov ntaub ntawv twg tuaj yeem siv Ion Beam Polishing Machine ua haujlwm nrog?
A3:LubTshuab Polishing Ion Beamtuaj yeem txhuam ntau yam khoom siv, suav nrog:

Kho qhov muag iavXim: Quartz, microcrystalline, K9, thiab lwm yam
Cov ntaub ntawv infraredCov khoom siv: silicon, germanium, thiab lwm yam.
Cov hlauCov khoom siv: Aluminium, Stainless hlau, Titanium alloy, thiab lwm yam.
Cov ntaub ntawv siv lead uaCov khoom siv: YAG, ib leeg-siv lead ua silicon carbide, thiab lwm yam.
Lwm cov ntaub ntawv tawv/nkigCov khoom siv: Silicon carbide, thiab lwm yam.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.