LNOI Wafer (Lithium Niobate ntawm Insulator) Kev Sib Txuas Lus Sensing High Electro-Optic
Daim duab qhia ntxaws ntxaws
Txheej txheem cej luam
Sab hauv lub thawv wafer muaj cov qhov sib npaug, qhov loj me ntawm cov uas yog sib npaug zos los txhawb ob sab ntawm lub wafer. Lub thawv siv lead ua feem ntau yog ua los ntawm cov yas PP translucent uas tiv taus kub, hnav thiab hluav taws xob zoo li qub. Cov xim sib txawv ntawm cov khoom ntxiv yog siv los cais cov hlau txheej txheem hauv kev tsim khoom semiconductor. Vim yog qhov me me tseem ceeb ntawm semiconductors, cov qauv ntom ntom, thiab cov kev cai nruj heev ntawm cov khoom me me hauv kev tsim khoom, lub thawv wafer yuav tsum tau lees tias muaj ib puag ncig huv si kom txuas rau lub thawv ib puag ncig ntawm cov tshuab sib txawv.
Txoj Kev Tsim Khoom
Kev tsim cov LNOI wafers muaj ntau kauj ruam meej:
Kauj Ruam 1: Kev Cog Helium IonCov helium ions raug muab tso rau hauv cov LN crystal loj siv lub ion implanter. Cov ions no nyob hauv qhov tob tshwj xeeb, tsim ib lub dav hlau tsis muaj zog uas thaum kawg yuav ua rau zaj duab xis tawg.
Kauj Ruam 2: Kev Tsim Cov Khoom Siv Hauv PausIb lub silicon lossis LN wafer sib cais raug oxidized lossis txheej nrog SiO2 siv PECVD lossis thermal oxidation. Nws qhov saum npoo yog planarized rau kev sib txuas zoo tshaj plaws.
Kauj Ruam 3: Kev sib txuas ntawm LN rau SubstrateCov siv lead ua LN uas muaj ion implanted raug tig thiab txuas rau lub wafer hauv paus siv kev sib txuas ncaj qha wafer. Hauv kev tshawb fawb, benzocyclobutene (BCB) tuaj yeem siv ua cov nplaum kom yooj yim rau kev sib txuas hauv qab cov xwm txheej uas tsis nruj heev.
Kauj Ruam 4: Kev Kho Mob Thermal thiab Kev Sib Cais Zaj Duab XisKev ua kom kub hnyiab ua rau muaj npuas dej ntawm qhov tob uas cog rau hauv, ua rau daim nyias nyias (txheej LN sab saud) sib cais ntawm qhov loj. Lub zog siv tshuab siv los ua kom tiav qhov kev tshem tawm cov tawv nqaij.
Kauj Ruam 5: Kev Txhuam NtoKev Siv Tshuaj Txhuam Hniav (CMP) yog siv los ua kom qhov saum npoo LN du, ua kom zoo dua qhov zoo ntawm lub teeb pom kev zoo thiab cov khoom siv tau zoo.
Cov Kev Ntsuas Kev Txawj
| Khoom siv | Kev kho qhov muag Qib LiNbO3 wafes (Dawb or Dub) | |
| Curie Kub | 1142 ± 0.7 ℃ | |
| Kev txiav Lub kaum sab xis | X/Y/Z thiab lwm yam | |
| Txoj kab uas hla/qhov loj | 2”/3”/4” ±0.03 hli | |
| Tol(±) | <0.20 hli ±0.005 hli | |
| Qhov tuab | 0.18 ～ 0.5 hli lossis ntau dua | |
| Thawj tiaj tus | 16 hli/22 hli/32 hli | |
| TTV | <3μm | |
| Hneev | -30 | |
| Ua kom nkhaus | <40μm | |
| Kev Taw Qhia tiaj tus | Muaj txhua yam | |
| Nto Hom | Ib Sab Polished (SSP) / Ob Sab Polished (DSP) | |
| Polished sab Ra | <0.5nm | |
| S/D | 20/10 | |
| Ntug Cov Qauv | R = 0.2 hli C-hom or Qhov ntswg loj | |
| Zoo | Dawb of tawg (npuas thiab suav nrog) | |
| Kev kho qhov muag tshuaj lom | Mg/Fe/Zn/MgO lwm yam rau kho qhov muag qib LN cov ncuav mog qab zib ib qho tau thov | |
| Ncuav mog qab zib Nto Cov Qauv | Cov ntsuas kev cuam tshuam | Tsis muaj = 2.2878 / Ne = 2.2033 @632nm wavelength / prism coupler txoj kev. |
| Kev ua qias tuaj, | Tsis muaj dab tsi | |
| Cov khoom me me c> 0.3μ m | <=30 | |
| Khawb, Chipping | Tsis muaj dab tsi | |
| Qhov tsis zoo | Tsis muaj qhov tawg ntawm ntug, khawb, pom cov cim, cov xim av | |
| Ntim Khoom | Qhov ntau / Lub thawv Wafer | 25 daim ib lub thawv |
Cov Qauv Siv
Vim nws muaj ntau yam thiab ua tau zoo, LNOI siv thoob plaws ntau yam lag luam:
Cov duab:Cov modulators me me, multiplexers, thiab photonic circuits.
RF/Kev Suab:Cov modulators Acousto-optic, cov lim dej RF.
Kev suav lej Quantum:Cov khoom sib tov zaus nonlinear thiab cov tshuab hluav taws xob photon-pair.
Kev Tiv Thaiv thiab Huab Cua:Cov gyros optical qis-poob, cov khoom siv hloov zaus.
Cov Khoom Siv Kho Mob:Cov khoom siv kho qhov muag thiab cov khoom siv ntsuas teeb liab zaus siab.
Cov Lus Nug Feem Ntau
Q: Vim li cas LNOI thiaj li nyiam dua SOI hauv cov kab ke kho qhov muag?
A:LNOI muaj cov coefficients electro-optic zoo dua thiab ntau qhov kev pom tseeb dav dua, ua rau muaj kev ua tau zoo dua hauv cov voj voog photonic.
Q: Puas yog CMP yuav tsum tau ua tom qab faib?
A:Yog. Qhov chaw LN uas raug nthuav tawm yog ntxhib tom qab ion-slicing thiab yuav tsum tau txhuam kom ua tau raws li cov lus qhia qib optical.
Q: Qhov loj tshaj plaws ntawm wafer muaj yog dab tsi?
A:Cov wafers LNOI lag luam feem ntau yog 3 "thiab 4", txawm hais tias qee tus neeg muag khoom tab tom tsim cov qauv 6".
Q: Puas siv tau cov txheej LN rov qab tom qab faib?
A:Lub hauv paus siv lead ua tuaj yeem rov ua dua thiab rov siv dua ntau zaus, txawm hais tias qhov zoo yuav poob qis tom qab ntau lub voj voog.
Q: Cov LNOI wafers puas sib xws nrog CMOS processing?
A:Yog lawm, lawv tau tsim los kom phim nrog cov txheej txheem tsim khoom siv semiconductor ib txwm muaj, tshwj xeeb tshaj yog thaum siv cov khoom siv silicon.
