LT Lithium Tantalate (LiTaO3) Crystal 2 nti/3 nti/4 nti/6 nti Orientaiton Y-42 °/36 °/108 ° Thickness 250-500um
Cov kev tsis sib xws
| Lub Npe | LiTaO3 qib kho qhov muag | Lub rooj suab theem LiTaO3 |
| Axial | Z txiav + / - 0.2 ° | 36 ° Y txiav / 42 ° Y txiav / X txiav(+ / - 0.2 °) |
| Txoj kab uas hla | 76.2 hli + / - 0.3 hli/100 ± 0.2 hli | 76.2 hli + /-0.3 hli100 hli + /-0.3 hli 0r 150 ± 0.5 hli |
| Datum dav hlau | 22 hli + / - 2 hli | 22 hli + /-2 hli32 hli + /-2 hli |
| Qhov tuab | 500um + /-5 hli1000um + /-5 hli | 500um + /-20 hli350um + /-20 hli |
| TTV | ≤ 10um | ≤ 10um |
| Kub ntawm Curie | 605 °C + / - 0.7 °C (Txoj kev DTA) | 605 °C + / -3 °C (Txoj kev DTA |
| Qhov zoo ntawm qhov chaw | Kev txhuam ob sab | Kev txhuam ob sab |
| Cov npoo chamfered | kev puag ncig ntug | kev puag ncig ntug |
Cov Yam Ntxwv Tseem Ceeb
1. Cov qauv siv lead ua thiab kev ua haujlwm hluav taws xob
· Kev Ruaj Ntseg Crystallographic: 100% 4H-SiC polytype dominance, xoom multicrystalline inclusions (piv txwv li, 6H/15R), nrog XRD rocking curve full-width ntawm ib nrab-siab tshaj plaws (FWHM) ≤32.7 arcsec.
· Kev Muaj Peev Xwm Nqa Tau Siab: Kev muaj peev xwm ntawm cov hluav taws xob ntawm 5,400 cm²/V·s (4H-SiC) thiab kev muaj peev xwm ntawm qhov ntawm 380 cm²/V·s, ua rau muaj kev tsim cov cuab yeej siv zaus siab.
· Kev Nyuaj Siab ntawm Kev Tawm Hluav Taws Xob: Tiv taus 1 MeV neutron irradiation nrog qhov kev puas tsuaj ntawm 1 × 10¹⁵ n / cm², zoo tagnrho rau kev siv aerospace thiab nuclear.
2. Cov Khoom Siv Thermal thiab Mechanical
· Kev Ua Haujlwm Kub Tshaj Plaws: 4.9 W/cm·K (4H-SiC), peb npaug ntawm silicon, txhawb kev ua haujlwm siab tshaj 200 ° C.
· Tus Nqi Qis Thermal Expansion: CTE ntawm 4.0 × 10⁻⁶ / K (25–1000 ° C), kom ntseeg tau tias muaj kev sib raug zoo nrog cov ntim khoom uas ua los ntawm silicon thiab txo qis kev ntxhov siab thermal.
3. Kev Tswj Xyuas Qhov Tsis Zoo thiab Kev Ua Haujlwm Zoo
· Qhov Ceev ntawm Micropipe: <0.3 cm⁻² (8-nti wafers), qhov ceev ntawm dislocation <1,000 cm⁻² (tau txheeb xyuas los ntawm KOH etching).
· Qhov Zoo Ntawm Qhov Chaw: CMP-polished rau Ra <0.2 nm, ua tau raws li EUV lithography-qib flatness xav tau.
Cov Ntawv Thov Tseem Ceeb
| Domain | Cov xwm txheej ntawm daim ntawv thov | Cov Kev Zoo ntawm Kev Siv Tshuab |
| Kev sib txuas lus optical | 100G/400G lasers, silicon photonics hybrid modules | Cov noob InP ua rau muaj qhov sib txawv ntawm bandgap (1.34 eV) thiab Si-based heteroepitaxy, txo qhov poob ntawm optical coupling. |
| Cov Tsheb Siv Hluav Taws Xob Tshiab | 800V cov inverters hluav taws xob siab, cov chargers onboard (OBC) | Cov khoom siv 4H-SiC tiv taus >1,200 V, txo qhov kev poob ntawm kev sib txuas lus los ntawm 50% thiab qhov ntim ntawm lub kaw lus los ntawm 40%. |
| Kev Sib Txuas Lus 5G | Cov khoom siv RF millimeter-wave (PA/LNA), cov amplifiers fais fab chaw nres tsheb | Cov khoom siv SiC semi-insulating (resistivity >10⁵ Ω·cm) ua rau muaj kev sib koom ua ke ntawm zaus siab (60 GHz+). |
| Cov Khoom Siv Lag Luam | Cov khoom siv ntsuas kub siab, cov khoom siv hloov pauv tam sim no, cov khoom siv tshuaj ntsuam nuclear | Cov noob InSb (0.17 eV bandgap) xa cov khoom siv magnetic txog li 300% @ 10 T. |
LiTaO₃ Wafers - Cov Yam Ntxwv Tseem Ceeb
1. Kev Ua Haujlwm Zoo Tshaj Plaws Piezoelectric
· Cov coefficients piezoelectric siab (d₃₃~8-10 pC/N, K²~0.5%) ua rau cov khoom siv SAW/BAW zaus siab nrog kev poob ntxig <1.5dB rau 5G RF lim dej
· Kev sib txuas zoo heev ntawm electromechanical txhawb nqa cov qauv lim dej dav dav (≥5%) rau cov ntawv thov sub-6GHz thiab mmWave
2. Cov Khoom Siv Kho Qhov Muag
· Kev pom tseeb ntawm Broadband (>70% kev sib kis los ntawm 400-5000nm) rau cov electro-optic modulators ua tiav >40GHz bandwidth
· Muaj zog nonlinear optical susceptibility (χ⁽²⁾~30pm/V) ua rau muaj kev ua haujlwm zoo thib ob harmonic tiam (SHG) hauv cov tshuab laser
3. Kev Ruaj Ntseg Ib puag ncig
· Qhov kub siab Curie (600°C) tswj tau cov lus teb piezoelectric hauv qib tsheb (-40°C txog 150°C) ib puag ncig
· Kev tsis muaj tshuaj lom neeg tiv thaiv cov kua qaub / alkalis (pH1-13) ua kom muaj kev ntseeg siab hauv kev siv sensor hauv kev lag luam
4. Kev Muaj Peev Xwm Kho Kom Haum
· Kev tsim kho kev taw qhia: X-txiav (51°), Y-txiav (0°), Z-txiav (36°) rau cov lus teb piezoelectric tshwj xeeb
· Cov kev xaiv doping: Mg-doped (tiv taus kev puas tsuaj ntawm qhov muag), Zn-doped (txhim kho d₃₃)
· Qhov chaw tiav: Epitaxial-npaj polishing (Ra <0.5nm), ITO / Au metallization
LiTaO₃ Wafers - Cov Ntawv Thov Tseem Ceeb
1. RF Pem Hauv Ntej-Qhov Kawg Modules
· 5G NR SAW lim dej (Band n77/n79) nrog rau qhov kub thiab txias coefficient ntawm zaus (TCF) <|-15ppm/°C|
· Ultra-wideband BAW resonators rau WiFi 6E/7 (5.925-7.125GHz)
2. Kev Sib Koom Ua Ke Photonics
· Cov modulators Mach-Zehnder ceev ceev (> 100Gbps) rau kev sib txuas lus optical sib xws
QWIP infrared detectors nrog cutoff wavelengths tunable los ntawm 3-14μm
3. Cov Khoom Siv Hluav Taws Xob Hauv Tsheb
· Ultrasonic parking sensors nrog >200kHz zaus ua haujlwm
· TPMS piezoelectric transducers uas muaj sia nyob -40 ° C txog 125 ° C thermal cycling
4. Cov Txheej Txheem Tiv Thaiv
· Cov lim dej txais EW nrog >60dB kev tsis lees txais sab nraud ntawm cov qhab
· Cov qhov rai IR nrhiav foob pob hluav taws xob xa 3-5μm MWIR hluav taws xob
5. Cov Txuj Ci Tshiab
· Cov khoom siv quantum transducers rau kev hloov pauv microwave-rau-optical
· PMUT arrays rau kev kho mob ultrasound imaging (> 20MHz kev daws teeb meem)
LiTaO₃ Wafers - XKH Services
1. Kev Tswj Xyuas Kev Muab Khoom
· Kev ua Boule-rau-wafer nrog 4-lub lim tiam ua ntej rau cov qauv txheem
· Kev tsim khoom zoo tshaj plaws uas muab 10-15% qhov zoo dua tus nqi piv rau cov neeg sib tw
2. Kev daws teeb meem tshwj xeeb
· Kev taw qhia tshwj xeeb rau kev wafering: 36 ° ± 0.5 ° Y-txiav rau kev ua haujlwm zoo tshaj plaws ntawm SAW
Cov khoom sib xyaw ua ke: MgO (5mol%) doping rau kev siv kho qhov muag
Cov kev pab cuam metallization: Cr/Au (100/1000Å) electrode patterning
3. Kev Txhawb Nqa Txog Kev Txawj Ntse
· Kev piav qhia txog cov khoom siv: XRD rocking curves (FWHM <0.01 °), AFM surface analysis
· Kev sim ua qauv ntawm lub cuab yeej: Kev ua qauv FEM rau kev tsim qauv lim dej SAW kom zoo dua
Xaus lus
LiTaO₃ wafers txuas ntxiv mus ua kom muaj kev nce qib hauv kev siv tshuab thoob plaws RF kev sib txuas lus, kev sib xyaw ua ke photonics, thiab cov sensors ib puag ncig hnyav. XKH txoj kev txawj ntse ntawm cov khoom siv, kev tsim khoom raug, thiab kev txhawb nqa kev siv engineering pab cov neeg siv khoom kov yeej cov teeb meem tsim qauv hauv cov kab ke hluav taws xob tiam tom ntej.









