N-Type SiC Composite Substrates Dia6inch Cov khoom siv monocrystaline zoo thiab cov khoom siv qis zoo
N-Hom SiC Composite Substrates Cov lus qhia dav dav
| 项目Cov khoom | 指标Cov Lus Qhia Tshwj Xeeb | 项目Cov khoom | 指标Cov Lus Qhia Tshwj Xeeb |
| 直径Txoj kab uas hla | 150 ± 0.2 hli | 正 面 ( 硅 面 ) 粗 糙 度 Pem hauv ntej (Si-ntsej muag) roughness | Ra≤0.2nm (5μm * 5μm) |
| 晶型Polytype | 4H | Ntug Cib, Khawb, Tawg (tshuaj xyuas pom) | Tsis muaj dab tsi |
| 电阻率Kev tiv taus | 0.015-0.025ohm ·cm | 总厚度变化TTV | ≤3μm |
| Hloov txheej tuab | ≥0.4μm | 翘曲度Ua kom nkhaus | ≤35μm |
| 空洞Tsis muaj dab tsi | ≤5ea/wafer (2mm> D> 0.5mm) | 总厚度Qhov tuab | 350 ± 25μm |
Lub npe "N-hom" txhais tau hais tias hom kev doping siv rau hauv cov ntaub ntawv SiC. Hauv semiconductor physics, doping cuam tshuam nrog kev qhia txog cov khoom tsis huv rau hauv semiconductor kom hloov nws cov khoom hluav taws xob. N-hom doping qhia txog cov ntsiab lus uas muab cov electrons dawb ntau dhau, ua rau cov ntaub ntawv muaj qhov tsis zoo.
Cov txiaj ntsig ntawm N-hom SiC composite substrates suav nrog:
1. Kev ua haujlwm kub siab: SiC muaj kev ua haujlwm kub siab thiab tuaj yeem ua haujlwm ntawm qhov kub siab, ua rau nws tsim nyog rau kev siv hluav taws xob muaj zog thiab zaus siab.
2. Lub zog hluav taws xob tawg siab: Cov ntaub ntawv SiC muaj lub zog hluav taws xob tawg siab, ua rau lawv tiv taus cov teb hluav taws xob siab yam tsis muaj kev tawg hluav taws xob.
3. Kev tiv thaiv tshuaj lom neeg thiab ib puag ncig: SiC tiv taus tshuaj lom neeg thiab tuaj yeem tiv taus cov xwm txheej ib puag ncig hnyav, ua rau nws tsim nyog siv rau hauv cov ntawv thov nyuaj.
4. Txo qhov poob hluav taws xob: Piv rau cov ntaub ntawv silicon ib txwm muaj, SiC substrates ua rau muaj kev hloov pauv hluav taws xob zoo dua thiab txo qhov poob hluav taws xob hauv cov khoom siv hluav taws xob.
5. Qhov sib txawv ntawm bandgap: SiC muaj qhov sib txawv ntawm bandgap dav, uas tso cai rau kev tsim cov khoom siv hluav taws xob uas tuaj yeem ua haujlwm ntawm qhov kub siab dua thiab muaj zog ntau dua.
Zuag qhia tag nrho, N-hom SiC composite substrates muaj cov txiaj ntsig zoo rau kev tsim cov khoom siv hluav taws xob ua tau zoo, tshwj xeeb tshaj yog nyob rau hauv cov ntawv thov uas qhov kev ua haujlwm kub siab, lub zog ceev ceev, thiab kev hloov pauv hluav taws xob zoo yog qhov tseem ceeb.