Cov Ntsiab Lus
1.Txheej txheem cej luam thiab Cov Haujlwm Tseem Ceeb ntawm FOUP
2.Cov qauv thiab cov yam ntxwv tsim ntawm FOUP
3. Kev faib tawm thiab cov lus qhia rau kev siv FOUP
4. Kev Ua Haujlwm thiab Qhov Tseem Ceeb ntawm FOUP hauv Kev Tsim Khoom Semiconductor
5.Kev Cov Teeb Meem Txog Kev Siv Tshuab thiab Kev Loj Hlob Yav Tom Ntej
6. XKH cov kev daws teeb meem thiab kev pabcuam tshwj xeeb
Hauv cov txheej txheem tsim khoom semiconductor, Lub Pem Hauv Ntej Qhib Unified Pod (FOUP) yog lub thawv tseem ceeb siv rau kev tiv thaiv, thauj, thiab khaws cia wafers. Nws sab hauv tuaj yeem tuav 25 daim ntawm 300mm wafers, thiab nws cov khoom tseem ceeb suav nrog lub thawv qhib pem hauv ntej thiab lub qhov rooj tshwj xeeb rau kev qhib thiab kaw. FOUP yog lub hauv paus tseem ceeb hauv lub kaw lus thauj khoom tsis siv neeg hauv 12 nti wafer fabs. Nws feem ntau raug thauj mus rau hauv lub xeev kaw thiab tsuas yog qhib thaum thawb mus rau qhov chaw thauj khoom ntawm cov khoom siv, tso cai rau wafers raug xa mus rau hauv qhov chaw thauj khoom / tshem tawm ntawm cov khoom siv.
Tus qauv tsim ntawm FOUP tau hloov kho rau qhov yuav tsum tau ua ntawm ib puag ncig me me. Nws muaj cov qhov nyob tom qab rau kev ntxig wafer, thiab lub hau tau tsim tshwj xeeb kom phim lub clamp ntawm lub qhov qhib. Cov neeg hlau tuav wafer ua haujlwm hauv Chav Kawm 1 huab cua huv, xyuas kom meej tias cov wafer tsis muaj kuab paug thaum lub sijhawm xa khoom. Ntxiv mus, FOUP raug tsiv mus rau ntawm cov cuab yeej ua haujlwm los ntawm lub tshuab tswj cov khoom siv tsis siv neeg (AMHS). Cov tuam txhab wafer niaj hnub no feem ntau siv cov tshuab tsheb ciav hlau saum toj kawg nkaus rau kev thauj mus los, thaum ob peb lub tuam txhab qub dua tuaj yeem siv cov tsheb thauj khoom hauv av (AGVs).
Lub FOUP tsis yog tsuas yog ua rau kev hloov pauv wafer tsis siv neeg xwb tab sis kuj ua haujlwm khaws cia. Vim muaj ntau kauj ruam tsim khoom, wafers yuav siv sijhawm ntau lub hlis los ua kom tiav tag nrho cov txheej txheem. Ua ke nrog cov ntim khoom ntau txhua hli, qhov no txhais tau tias kaum tawm txhiab tus wafers hauv lub fab yeej ib txwm nyob hauv kev thauj mus los lossis khaws cia ib ntus txhua lub sijhawm. Thaum lub sijhawm khaws cia, FOUPs raug ntxuav nrog nitrogen kom tiv thaiv cov pa phem los ntawm kev sib cuag nrog cov wafers, kom ntseeg tau tias cov txheej txheem tsim khoom huv si thiab txhim khu kev qha.
1. Lub Luag Haujlwm thiab Qhov Tseem Ceeb ntawm FOUP
Lub luag haujlwm tseem ceeb ntawm FOUP yog los tiv thaiv cov wafers los ntawm kev poob siab thiab kev ua qias tuaj sab nraud, tshwj xeeb tshaj yog zam kev cuam tshuam rau cov txiaj ntsig thaum lub sijhawm hloov pauv. Nws ua tau zoo tiv thaiv cov dej noo los ntawm cov txheej txheem xws li roj purging thiab Local Atmosphere Control (LAC), kom ntseeg tau tias cov wafers tseem nyob hauv qhov xwm txheej nyab xeeb thaum tos cov kauj ruam tom ntej. Nws lub kaw lus kaw thiab tswj tau tso cai tsuas yog cov tshuaj thiab cov ntsiab lus tsim nyog nkag mus, txo qhov cuam tshuam tsis zoo ntawm VOCs, oxygen, thiab dej noo ntawm cov wafers.
Vim tias FOUP uas muaj 25 lub wafers puv nkaus tuaj yeem hnyav txog li 9 kilograms, nws txoj kev thauj mus los yuav tsum vam khom rau Lub Tshuab Tswj Khoom Siv Tsis Siv Neeg (AMHS). Txhawm rau pab txhawb qhov no, FOUP tau tsim los nrog ntau yam kev sib xyaw ua ke ntawm cov phaj sib txuas, cov koob, thiab cov qhov, thiab muaj cov cim hluav taws xob RFID rau kev txheeb xyuas yooj yim thiab kev faib tawm. Kev tswj hwm tsis siv neeg no yuav luag tsis tas yuav ua haujlwm tes, txo cov nqi yuam kev thiab txhim kho kev nyab xeeb thiab qhov tseeb ntawm cov txheej txheem tsim khoom.
2. Cov qauv thiab kev faib tawm ntawm FOUP
Qhov loj me ntawm FOUP yog kwv yees li 420 hli dav, 335 hli tob, thiab 335 hli siab. Nws cov khoom tseem ceeb suav nrog: sab saum toj OHT (nceb taub hau) rau kev thauj mus los ntawm lub tshuab nqa khoom; lub qhov rooj pem hauv ntej rau kev nkag mus rau cov khoom siv wafer; sab tes tuav, feem ntau muaj xim kom paub qhov txawv ntawm cov txheej txheem nrog ntau qib kev sib kis; thaj chaw daim npav rau kev tso cov ntawv xov xwm; thiab daim ntawv cim RFID hauv qab uas ua haujlwm ua tus cim tshwj xeeb rau FOUP, tso cai rau cov cuab yeej thiab cov tshuab nqa khoom kom paub nws. Lub hauv paus kuj tseem muaj plaub qhov cim thiab qhov chaw rau kev sib phim nrog cov cuab yeej thiab qhov sib txawv ntawm cov txheej txheem.
Raws li kev siv, FOUPs raug muab faib ua peb hom: PRD (rau kev tsim khoom), ENG (rau kev tsim cov wafers), thiab MON (rau cov wafers saib xyuas). PRD FOUPs tuaj yeem siv rau kev tsim khoom, ENG hom yog qhov tsim nyog rau R&D lossis kev sim, thiab MON hom yog mob siab rau kev saib xyuas cov txheej txheem rau cov kauj ruam xws li CMP thiab DIFF. Nws yog ib qho tseem ceeb uas yuav tsum nco ntsoov tias PRD FOUPs tuaj yeem siv rau ob qho tib si ENG thiab MON lub hom phiaj, thiab ENG hom tuaj yeem siv rau MON, tab sis kev ua haujlwm rov qab ua rau muaj kev pheej hmoo zoo.
Raws li qib kev ua qias tuaj, FOUPs tuaj yeem muab faib ua FE FOUP (txheej txheem pem hauv ntej, tsis muaj hlau), BE FOUP (txheej txheem tom qab, muaj hlau), thiab cov uas tshwj xeeb rau cov txheej txheem hlau tshwj xeeb xws li NI FOUP, CU FOUP, thiab CO FOUP. FOUPs rau cov txheej txheem sib txawv feem ntau yog qhov sib txawv los ntawm xim ntawm cov tes tuav sab lossis cov vaj huam sib luag qhov rooj. FOUPs los ntawm cov txheej txheem pem hauv ntej tuaj yeem siv rau hauv cov txheej txheem tom qab, tab sis FOUPs tom qab yuav tsum tsis txhob siv rau hauv cov txheej txheem pem hauv ntej, vim qhov no yuav ua rau muaj kev pheej hmoo ntawm kev ua qias tuaj.
Ua tus neeg nqa khoom tseem ceeb hauv kev tsim khoom semiconductor, FOUP, los ntawm kev siv tshuab siab thiab kev tswj hwm kev ua qias tuaj, ua kom muaj kev nyab xeeb thiab kev huv ntawm cov wafers thaum lub sijhawm tsim khoom, ua rau nws yog qhov tseem ceeb hauv cov khoom siv wafer niaj hnub.
Xaus lus
XKH cog lus tias yuav muab cov kev daws teeb meem Front-Opening Unified Pod (FOUP) uas haum rau cov neeg siv khoom, ua raws li koj cov kev xav tau tshwj xeeb thiab cov lus qhia txog cov khoom siv. Siv cov thev naus laus zis siab heev thiab cov txheej txheem tsim khoom meej, peb xyuas kom meej tias txhua yam khoom FOUP muab kev nyab xeeb, kev huv, thiab kev ruaj khov. Peb pab neeg ua haujlwm muaj kev txawj ntse hauv kev lag luam, muab kev txhawb nqa lub neej tag nrho - los ntawm kev sab laj xaiv thiab kev txhim kho cov qauv mus rau kev ntxuav thiab kev saib xyuas - kom ntseeg tau tias kev sib koom ua ke thiab kev koom tes zoo ntawm FOUP thiab koj Lub Tshuab Tswj Khoom Siv Tsis Siv Neeg (AMHS) nrog rau cov khoom siv ua haujlwm. Peb ib txwm muab qhov tseem ceeb rau kev nyab xeeb ntawm cov wafers thiab kev txhim kho ntawm cov khoom tsim tawm ua peb lub hom phiaj tseem ceeb. Los ntawm cov khoom tshiab thiab cov kev pabcuam kev txawj ntse, peb muab kev lees paub zoo rau koj cov txheej txheem tsim khoom semiconductor, thaum kawg txhawb kev ua haujlwm zoo thiab cov khoom tsim tawm.
Lub sijhawm tshaj tawm: Cuaj hlis-08-2025