Silicon carbide (SiC), ua ib yam khoom siv semiconductor dav dav, ua lub luag haujlwm tseem ceeb hauv kev siv cov kev tshawb fawb niaj hnub no. Silicon carbide muaj kev ruaj khov zoo heev, kev kam rau siab ntawm lub zog hluav taws xob, kev coj ua hluav taws xob thiab lwm yam khoom zoo heev, thiab siv dav hauv cov khoom siv optoelectronic thiab cov khoom siv hnub ci. Vim muaj kev thov ntau ntxiv rau cov khoom siv hluav taws xob zoo dua thiab ruaj khov, kev paub txog kev loj hlob ntawm silicon carbide tau dhau los ua qhov chaw kub.
Yog li koj paub ntau npaum li cas txog SiC txoj kev loj hlob?
Niaj hnub no peb yuav tham txog peb txoj kev tseem ceeb rau kev loj hlob ntawm cov silicon carbide ib leeg siv lead ua: kev thauj mus los ntawm lub cev (PVT), kua theem epitaxy (LPE), thiab kub siab tshuaj vapor deposition (HT-CVD).
Txoj Kev Hloov Pauv Lub Cev (PVT)
Txoj kev hloov pauv lub cev vapor yog ib qho ntawm cov txheej txheem loj hlob silicon carbide feem ntau siv. Kev loj hlob ntawm cov siv lead ua silicon carbide feem ntau yog nyob ntawm sublimation ntawm sic hmoov thiab redeposition ntawm cov noob siv lead ua nyob rau hauv qhov kub siab. Hauv lub graphite crucible kaw, cov hmoov silicon carbide raug cua sov rau qhov kub siab, los ntawm kev tswj hwm qhov kub thiab txias, cov pa silicon carbide condenses rau ntawm qhov chaw ntawm cov noob siv lead ua, thiab maj mam loj hlob ib qho loj loj.
Feem ntau ntawm cov monocrystalline SiC uas peb muab tam sim no yog ua los ntawm txoj kev loj hlob no. Nws kuj yog txoj hauv kev tseem ceeb hauv kev lag luam.
Cov kua theem epitaxy (LPE)
Cov siv lead ua los ntawm silicon carbide raug npaj los ntawm cov kua theem epitaxy los ntawm cov txheej txheem loj hlob ntawm cov khoom siv lead ua. Hauv txoj kev no, cov hmoov silicon carbide raug yaj rau hauv cov kua silicon-carbon ntawm qhov kub siab, thiab tom qab ntawd qhov kub qis dua kom cov silicon carbide tau precipitated los ntawm cov kua thiab loj hlob ntawm cov noob siv lead ua. Qhov zoo tshaj plaws ntawm txoj kev LPE yog lub peev xwm los tau txais cov siv lead ua zoo ntawm qhov kub qis dua, tus nqi qis dua, thiab nws tsim nyog rau kev tsim khoom loj.
Kev Tso Tshuaj Pa Kub Siab (HT-CVD)
Los ntawm kev qhia cov roj uas muaj silicon thiab carbon rau hauv chav ua tshuaj ntawm qhov kub siab, cov txheej siv lead ua ke ntawm silicon carbide raug tso ncaj qha rau ntawm qhov chaw ntawm cov noob siv lead ua los ntawm kev tshuaj lom neeg. Qhov zoo ntawm txoj kev no yog tias qhov nrawm thiab cov xwm txheej tshuaj ntawm cov roj tuaj yeem tswj tau meej, kom tau txais cov siv lead ua silicon carbide uas muaj kev ntshiab siab thiab ob peb qhov tsis zoo. Cov txheej txheem HT-CVD tuaj yeem tsim cov siv lead ua silicon carbide nrog cov khoom zoo heev, uas yog qhov tshwj xeeb tshaj yog rau cov ntawv thov uas xav tau cov ntaub ntawv zoo heev.
Cov txheej txheem loj hlob ntawm silicon carbide yog lub hauv paus ntawm nws daim ntawv thov thiab kev txhim kho. Los ntawm kev tsim kho tshiab thiab kev ua kom zoo dua qub, peb txoj kev loj hlob no ua lawv lub luag haujlwm kom tau raws li qhov xav tau ntawm ntau lub sijhawm sib txawv, ua kom ntseeg tau tias qhov tseem ceeb ntawm silicon carbide. Nrog rau kev tshawb fawb tob zuj zus thiab kev nce qib ntawm thev naus laus zis, cov txheej txheem loj hlob ntawm silicon carbide cov ntaub ntawv yuav txuas ntxiv mus rau qhov zoo tshaj plaws, thiab kev ua tau zoo ntawm cov khoom siv hluav taws xob yuav raug txhim kho ntxiv.
(kev tswj xyuas)
Lub sijhawm tshaj tawm: Lub Rau Hli-23-2024