Cov txheej txheem tseem ceeb rau kev npaj silicon single crystal suav nrog: Physical Vapor Transport (PVT), Top-Seeded Solution Growth (TSSG), thiab High-Temperature Chemical Vapor Deposition (HT-CVD). Ntawm cov no, txoj kev PVT tau siv dav hauv kev tsim khoom lag luam vim nws cov khoom siv yooj yim, yooj yim tswj, thiab cov khoom siv thiab cov nqi ua haujlwm qis.
Cov Ntsiab Lus Tseem Ceeb rau Kev Loj Hlob PVT ntawm Silicon Carbide Crystals
Thaum cog cov siv lead ua los ntawm silicon carbide siv txoj kev Physical Vapor Transport (PVT), cov hauv qab no yuav tsum tau xav txog:
- Kev Huv Si ntawm Cov Khoom Siv Graphite hauv Chav Loj Hlob: Cov ntsiab lus tsis huv hauv cov khoom graphite yuav tsum qis dua 5 × 10⁻⁶, thaum cov ntsiab lus tsis huv hauv cov khoom rwb thaiv tsev yuav tsum qis dua 10 × 10⁻⁶. Cov ntsiab lus xws li B thiab Al yuav tsum khaws cia qis dua 0.1 × 10⁻⁶.
- Kev Xaiv Qhov Polarity ntawm Cov Pob Zeb Siv Tau Zoo: Kev tshawb fawb qhia tau tias lub ntsej muag C (0001) yog qhov tsim nyog rau kev loj hlob ntawm cov pob zeb 4H-SiC, thaum lub ntsej muag Si (0001) yog siv rau kev loj hlob ntawm cov pob zeb 6H-SiC.
- Kev Siv Cov Pob Zeb Uas Tsis Muaj Qhov Sib Npaug: Cov pob zeb uas tsis muaj qhov sib npaug tuaj yeem hloov pauv qhov sib npaug ntawm kev loj hlob ntawm cov pob zeb, txo cov qhov tsis zoo hauv cov pob zeb.
- Cov Txheej Txheem Sib Txuas Cov Noob Crystal Zoo.
- Tswj kev ruaj khov ntawm Crystal Growth Interface thaum lub sijhawm loj hlob.
Cov Txuj Ci Tseem Ceeb rau Silicon Carbide Crystal Growth
- Kev Siv Tshuab Doping rau Silicon Carbide Hmoov
Kev ntxiv Ce rau hauv cov hmoov silicon carbide tuaj yeem ua kom cov 4H-SiC cov siv lead ua kom ruaj khov. Cov txiaj ntsig zoo qhia tau tias Ce doping tuaj yeem:
- Ua kom cov silicon carbide crystals loj hlob sai dua.
- Tswj qhov kev taw qhia ntawm kev loj hlob ntawm crystal, ua rau nws zoo li qub thiab tsis tu ncua.
- Txo qhov tsis huv ntawm cov khoom siv, txo cov qhov tsis zoo thiab pab txhawb kev tsim cov khoom siv ib leeg thiab cov khoom siv zoo.
- Tiv thaiv kev xeb rov qab ntawm cov siv lead ua thiab txhim kho cov txiaj ntsig ib leeg.
- Kev Tswj Xyuas Kub thiab Kub Radial Gradient
Qhov kub thiab txias axial feem ntau cuam tshuam rau hom kev loj hlob ntawm cov siv lead ua thiab kev ua haujlwm zoo. Qhov kub thiab txias me me dhau tuaj yeem ua rau muaj polycrystalline tsim thiab txo qhov kev loj hlob. Qhov kub thiab txias axial thiab radial kom zoo pab txhawb kev loj hlob sai ntawm SiC siv lead ua thaum tswj hwm qhov zoo ntawm cov siv lead ua. - Kev Tswj Xyuas Basal Plane Dislocation (BPD)
Cov teeb meem BPD feem ntau tshwm sim thaum lub zog shear hauv cov siv lead ua ntau dua qhov kev ntxhov siab tseem ceeb ntawm SiC, ua rau cov kab ke poob qis. Vim tias BPDs yog perpendicular rau qhov kev loj hlob ntawm cov siv lead ua, lawv feem ntau tshwm sim thaum lub sijhawm loj hlob thiab txias ntawm cov siv lead ua. - Kev Siv Tshuab Kho Kom Zoo Dua Qhov Sib Piv ntawm Cov Pa Hauv Paus
Kev nce qhov sib piv ntawm carbon-rau-silicon hauv qhov chaw loj hlob yog ib qho kev ntsuas zoo los tswj kev loj hlob ntawm ib lub pob zeb siv lead ua ke. Qhov sib piv ntawm carbon-rau-silicon siab dua txo cov kauj ruam loj, khaws cov ntaub ntawv loj hlob ntawm cov pob zeb siv lead ua ke, thiab tiv thaiv kev tsim polytype. - Kev Tswj Xyuas Kev Nyuaj Siab Tsawg
Kev ntxhov siab thaum lub sijhawm siv lead ua loj hlob tuaj yeem ua rau cov dav hlau siv lead ua khoov, ua rau cov khoom siv lead ua tsis zoo lossis tawg. Kev ntxhov siab ntau kuj ua rau cov dav hlau basal dislocations, uas tuaj yeem cuam tshuam tsis zoo rau qhov zoo ntawm txheej epitaxial thiab kev ua haujlwm ntawm lub cuab yeej.
Daim duab luam theej duab SiC wafer 6-nti
Cov Txheej Txheem Los Txo Kev Nyuaj Siab Hauv Cov Crystals:
- Kho qhov kev faib tawm ntawm qhov kub thiab txias thiab cov txheej txheem kom ua rau muaj kev loj hlob ze ntawm SiC cov siv lead ua ke.
- Txhim kho cov qauv crucible kom tso cai rau kev loj hlob ntawm cov siv lead ua dawb nrog kev txwv tsawg kawg nkaus.
- Hloov cov txheej txheem kho cov noob siv lead ua kom txo qhov sib txawv ntawm kev nthuav dav ntawm cov noob siv lead ua thiab lub thawv graphite. Ib txoj hauv kev uas feem ntau yog tseg qhov sib txawv 2 hli ntawm cov noob siv lead ua thiab lub thawv graphite.
- Txhim kho cov txheej txheem annealing los ntawm kev siv qhov cub annealing hauv qhov chaw, kho qhov kub thiab lub sijhawm annealing kom tso tawm tag nrho kev ntxhov siab sab hauv.
Yav Tom Ntej Cov Qauv Hauv Silicon Carbide Crystal Growth Technology
Saib mus tom ntej, cov thev naus laus zis zoo SiC ib leeg siv lead ua ke yuav tsim kho raws li cov lus qhia hauv qab no:
- Kev Loj Hlob Loj
Qhov txoj kab uas hla ntawm cov pob zeb silicon carbide ib leeg tau hloov zuj zus los ntawm ob peb millimeters mus rau 6-nti, 8-nti, thiab txawm tias loj dua 12-nti. Cov pob zeb SiC loj uas muaj txoj kab uas hla loj txhim kho kev ua haujlwm ntau lawm, txo cov nqi, thiab ua tau raws li qhov xav tau ntawm cov khoom siv hluav taws xob siab. - Kev Loj Hlob Zoo
Cov khoom siv SiC zoo yog qhov tseem ceeb rau cov khoom siv ua haujlwm siab. Txawm hais tias muaj kev vam meej ntau heev los xij, tseem muaj qhov tsis zoo xws li cov kav dej me me, cov qhov tawg, thiab cov khoom tsis huv, uas cuam tshuam rau kev ua haujlwm thiab kev ntseeg siab ntawm cov khoom siv. - Kev Txo Nqi
Tus nqi siab ntawm kev npaj SiC siv lead ua rau nws siv tsis tau rau qee qhov chaw. Kev ua kom zoo dua cov txheej txheem kev loj hlob, kev txhim kho kev ua haujlwm zoo, thiab kev txo cov nqi khoom siv raw tuaj yeem pab txo cov nuj nqis tsim khoom. - Kev Loj Hlob Txawj Ntse
Nrog kev nce qib hauv AI thiab cov ntaub ntawv loj, SiC siv lead ua kom loj hlob thev naus laus zis yuav siv cov kev daws teeb meem ntse. Kev saib xyuas thiab tswj hwm lub sijhawm tiag tiag siv cov sensors thiab cov tshuab tsis siv neeg yuav txhim kho kev ruaj khov thiab kev tswj hwm. Tsis tas li ntawd, kev tshuaj xyuas cov ntaub ntawv loj tuaj yeem ua kom zoo dua cov kev loj hlob, txhim kho qhov zoo ntawm siv lead ua thiab kev ua haujlwm ntau lawm.
Kev siv tshuab ua silicon carbide zoo yog qhov tseem ceeb hauv kev tshawb fawb txog cov khoom siv semiconductor. Thaum thev naus laus zis nce qib, cov txheej txheem loj hlob ntawm SiC crystal yuav txuas ntxiv mus, muab lub hauv paus ruaj khov rau kev siv hauv cov teb kub siab, zaus siab, thiab muaj zog siab.
Lub sijhawm tshaj tawm: Lub Xya Hli-25-2025