Cov Khoom Siv Raw Tseem Ceeb rau Kev Tsim Khoom Semiconductor: Hom Wafer Substrates

Wafer Substrates ua Cov Khoom Siv Tseem Ceeb hauv Semiconductor Devices

Wafer substrates yog cov khoom siv nqa khoom ntawm cov khoom siv semiconductor, thiab lawv cov khoom siv ncaj qha txiav txim siab qhov ua tau zoo ntawm cov khoom siv, tus nqi, thiab cov teb thov. Hauv qab no yog cov hom tseem ceeb ntawm wafer substrates nrog rau lawv cov txiaj ntsig thiab qhov tsis zoo:

1.Silicon (Si)

• Kev Ua Lag Luam Sib Koom:Nws suav txog ntau dua 95% ntawm kev lag luam semiconductor thoob ntiaj teb.

• Cov txiaj ntsig:

  • Tus nqi qis:Cov khoom siv raw ntau (silicon dioxide), cov txheej txheem tsim khoom tiav, thiab kev lag luam muaj zog.

  • Kev sib raug zoo ntawm cov txheej txheem siab:CMOS thev naus laus zis yog qhov paub tab heev, txhawb nqa cov nodes siab heev (piv txwv li, 3nm).

  • Zoo heev siv lead ua zoo:Cov wafers loj (feem ntau yog 12-nti, 18-nti tab tom tsim) nrog qhov tsis zoo me me tuaj yeem cog tau.

  • Cov khoom siv kho tshuab ruaj khov:Yooj yim txiav, txhuam, thiab tuav.

• Qhov Tsis Zoo:

  • Qhov sib txawv ntawm qhov sib txawv (1.12 eV):Cov dej xau siab heev thaum kub siab, ua rau lub zog siv tsis tau zoo.

  • Qhov sib txawv ntawm qhov tsis ncaj qha:Kev ua haujlwm ntawm lub teeb tsawg heev, tsis haum rau cov khoom siv optoelectronic xws li LEDs thiab lasers.

  • Kev txav mus los ntawm cov hluav taws xob txwv:Kev ua haujlwm siab tsis zoo dua li cov khoom siv semiconductor sib xyaw.
    

2.Gallium Arsenide (GaAs)

• Cov ntawv thov:Cov khoom siv RF zaus siab (5G/6G), cov khoom siv optoelectronic (lasers, solar cells).

• Cov txiaj ntsig:

  • Kev txav mus los ntawm cov hluav taws xob siab (5–6 × ntawm silicon):Haum rau kev siv high-speed, high-frequency xws li kev sib txuas lus millimeter-wave.

  • Qhov sib txawv ntawm qhov sib txawv ncaj qha (1.42 eV):Kev hloov pauv photoelectric ua haujlwm siab, lub hauv paus ntawm infrared lasers thiab LEDs.

  • Kev tiv taus kub thiab hluav taws xob siab:Haum rau aerospace thiab ib puag ncig hnyav.

• Qhov Tsis Zoo:

  • Tus nqi siab:Cov khoom tsis tshua muaj, nyuaj rau kev loj hlob ntawm cov siv lead ua (feem ntau yuav tawg), qhov loj ntawm cov wafer tsawg (feem ntau yog 6-nti).

  • Mechanics ntawm cov khoom siv brittle:Yooj yim tawg, ua rau cov khoom ua tiav qis.

  • Kev lom:Arsenic yuav tsum tau ua tib zoo tuav thiab tswj hwm ib puag ncig.

3. Silicon Carbide (SiC)

• Cov ntawv thov:Cov khoom siv fais fab kub thiab hluav taws xob siab (EV inverters, chaw them hluav taws xob), aerospace.

• Cov txiaj ntsig:

  • Qhov sib txawv ntawm bandgap (3.26 eV):Lub zog tawg siab (10 × ntawm silicon), kev kam rau siab kub (kub ua haujlwm > 200 ° C).

  • Kev ua tau zoo ntawm cov cua sov (≈3 × silicon):Kev kub hnyiab zoo heev, ua rau lub zog ceev ntawm lub cev muaj zog dua.

  • Kev poob qis hloov pauv:Txhim kho kev hloov pauv hluav taws xob kom zoo dua.

• Qhov Tsis Zoo:

  • Kev npaj substrate nyuaj:Qis heev cov siv lead ua loj hlob (>1 lub lim tiam), nyuaj tswj qhov tsis zoo (cov kav dej me me, cov pob tawg), tus nqi siab heev (5–10 × silicon).

  • Qhov loj me ntawm cov wafer:Feem ntau yog 4–6 nti; 8-nti tseem tab tom tsim kho.

  • Nyuaj rau kev ua tiav:Nyuaj heev (Mohs 9.5), ua rau siv sijhawm txiav thiab txhuam.

4. Gallium Nitride (GaN)

• Cov ntawv thov:Cov khoom siv fais fab zaus siab (them ceev, chaw nres tsheb 5G), cov teeb LED/lasers xiav.

• Cov txiaj ntsig:

  • Kev txav mus los ntawm hluav taws xob siab heev + qhov sib txawv ntawm bandgap dav (3.4 eV):Ua ke nrog cov zaus siab (> 100 GHz) thiab kev ua haujlwm siab voltage.

  • Tsis tshua muaj kev tiv thaiv:Txo qhov poob hluav taws xob ntawm lub cuab yeej.

  • Heteroepitaxy sib xws:Feem ntau cog rau ntawm silicon, sapphire, lossis SiC substrates, txo cov nqi.

• Qhov Tsis Zoo:

  • Kev loj hlob ntawm ib lub pob zeb siv lead ua ke nyuaj heev:Heteroepitaxy yog qhov tseem ceeb, tab sis lattice mismatch ua rau muaj qhov tsis zoo.

  • Tus nqi siab:Cov khoom siv GaN ib txwm kim heev (ib lub wafer 2-nti tuaj yeem raug nqi ntau txhiab USD).

  • Cov teeb meem kev ntseeg siab:Cov xwm txheej xws li kev tawg tam sim no xav tau kev ua kom zoo dua.

5. Indium Phosphide (InP)

• Cov ntawv thov:Kev sib txuas lus optical ceev ceev (lasers, photodetectors), terahertz devices.

• Cov txiaj ntsig:

  • Kev txav mus los ntawm cov hluav taws xob siab heev:Txhawb nqa >100 GHz kev ua haujlwm, ua tau zoo dua GaAs.

  • Direct bandgap nrog wavelength matching:Cov khoom siv tseem ceeb rau kev sib txuas lus fiber ntau 1.3–1.55 μm.

• Qhov Tsis Zoo:

  • Nkig thiab kim heev:Tus nqi ntawm cov khoom siv substrate tshaj 100 × silicon, qhov loj me ntawm cov wafer tsawg (4–6 nti).

6. Pob zeb Sapphire (Al₂O₃)

• Cov ntawv thov:Teeb pom kev zoo LED (GaN epitaxial substrate), iav npog khoom siv hluav taws xob rau cov neeg siv khoom.

• Cov txiaj ntsig:

  • Tus nqi qis:Pheej yig dua li SiC / GaN substrates.

  • Kev ruaj khov tshuaj zoo heev:Tiv taus corrosion, insulating heev.

  • Kev Pom Tseeb:Haum rau cov qauv LED ntsug.

• Qhov Tsis Zoo:

  • Qhov sib txawv loj ntawm lattice nrog GaN (> 13%):Ua rau muaj qhov tsis zoo ntau, xav tau cov txheej buffer.

  • Kev ua kom sov tsis zoo (~ 1/20 ntawm silicon):Txwv kev ua haujlwm ntawm cov LEDs muaj zog heev.

7. Cov Khoom Siv Ceramic (AlN, BeO, thiab lwm yam)

• Cov ntawv thov:Cov khoom siv cua sov rau cov modules muaj zog heev.

• Cov txiaj ntsig:

  • Rwb thaiv kev kub thiab kev coj ua kub siab (AlN: 170–230 W/m·K):Haum rau kev ntim khoom ntom ntom.

• Qhov Tsis Zoo:

  • Tsis yog ib qho siv lead ua:Tsis tuaj yeem txhawb nqa kev loj hlob ntawm cov khoom siv, tsuas yog siv ua cov khoom ntim khoom xwb.

8. Cov Khoom Siv Tshwj Xeeb

• SOI (Silicon ntawm Insulator):

  • Qauv:Silicon/SiO₂/silicon sandwich.

  • Cov txiaj ntsig:Txo cov peev xwm ntawm cov kab mob parasitic, ua kom tawv nqaij los ntawm kev siv hluav taws xob, thiab txo qhov xau (siv hauv RF, MEMS).

  • Qhov Tsis Zoo:kim dua 30–50% dua li cov silicon loj.

• Quartz (SiO₂):Siv rau hauv photomasks thiab MEMS; tiv taus kub siab tab sis tawg yooj yim heev.

• Pob zeb diamond:Cov khoom siv hluav taws xob ua tau zoo tshaj plaws (> 2000 W / m· K), nyob rau hauv R & D rau kev tshem tawm cua sov heev.

Cov Lus Qhia Txog Kev Sib Piv

Cov Yam Tseem Ceeb Rau Kev Xaiv Cov Khoom Siv

• Cov kev cai ua tau zoo:GaAs/InP rau qhov zaus siab; SiC rau qhov hluav taws xob siab, kub siab; GaAs/InP/GaN rau optoelectronics.

• Cov kev txwv nqi:Cov khoom siv hluav taws xob rau cov neeg siv khoom nyiam silicon; cov teb qib siab tuaj yeem ua pov thawj rau SiC / GaN cov nqi them.

• Kev sib koom ua ke nyuaj:Silicon tseem tsis tau hloov pauv rau CMOS kev sib raug zoo.

• Kev tswj hwm thermal:Cov ntawv thov muaj zog siab nyiam SiC lossis pob zeb diamond-based GaN.

• Kev loj hlob ntawm cov khoom xa tuaj:Si > Sapphire > GaAs > SiC > GaN > InP.

Yav Tom Ntej Sib Txawv

Kev sib koom ua ke sib txawv (piv txwv li, GaN-on-Si, GaN-on-SiC) yuav sib npaug kev ua tau zoo thiab tus nqi, tsav kev nce qib hauv 5G, tsheb fais fab, thiab kev suav lej quantum.