Cov Iav AR Uas Muaj Qib Optical-Grade Silicon Carbide Waveguide: Kev Npaj Cov Khoom Siv Semi-Insulating Uas Muaj Kev Ntshiab Siab

Nyob rau hauv keeb kwm yav dhau ntawm kev hloov pauv AI, cov tsom iav AR maj mam nkag mus rau hauv kev paub ntawm pej xeem. Raws li tus qauv uas sib xyaw ua ke lub ntiaj teb virtual thiab lub ntiaj teb tiag tiag, cov tsom iav AR txawv ntawm cov khoom siv VR los ntawm kev tso cai rau cov neeg siv pom ob qho tib si cov duab digital thiab lub teeb ib puag ncig tib lub sijhawm. Txhawm rau ua tiav qhov kev ua haujlwm ob qho tib si - tso tawm cov duab microdisplay rau hauv lub qhov muag thaum khaws cia lub teeb xa tawm sab nraud - cov tsom iav AR-raws li qib silicon carbide (SiC) siv lub waveguide (lightguide) architecture. Tus qauv tsim no siv tag nrho cov kev cuam tshuam sab hauv los xa cov duab, zoo ib yam li kev xa cov fiber ntau, raws li tau piav qhia hauv daim duab schematic.

Feem ntau, ib lub substrate semi-insulating uas muaj 6-nti siab purity tuaj yeem tso tau 2 khub iav, thaum lub substrate 8-nti tuaj yeem tso tau 3-4 khub. Kev siv cov ntaub ntawv SiC muab peb qhov zoo tseem ceeb:

1. Cov ntsuas kev cuam tshuam zoo tshaj plaws (2.7): Ua rau muaj >80° puv xim pom (FOV) nrog ib txheej lens, tshem tawm cov duab zaj sawv uas pom ntau hauv cov qauv AR ib txwm muaj.
2. Kev sib xyaw ua ke ntawm peb xim (RGB) waveguide: Hloov cov txheej txheem waveguide ntau txheej, txo qhov loj me thiab qhov hnyav ntawm lub cuab yeej.
3. Kev ua tau zoo ntawm cov cua sov (490 W/m·K): Txo qhov kev puas tsuaj ntawm cov khoom siv kho qhov muag uas tshwm sim los ntawm kev sib sau ua ke ntawm cua sov.

Cov txiaj ntsig no tau tsav tsheb kom muaj kev thov ntau rau cov iav AR SiC. Cov iav SiC uas siv feem ntau yog cov siv lead ua semi-insulating (HPSI) uas muaj purity siab, uas cov kev xav tau npaj nruj heev ua rau cov nqi siab tam sim no. Yog li ntawd, kev tsim cov khoom siv HPSI SiC yog qhov tseem ceeb.

1. Kev tsim cov hmoov SiC Semi-Insulating
Kev tsim khoom lag luam feem ntau siv cov khoom siv kub siab (SHS), uas yog ib qho txheej txheem uas xav tau kev tswj hwm zoo:

• Cov khoom siv raw: 99.999% cov hmoov carbon/silicon ntshiab nrog cov khoom me me ntawm 10–100 μm.
• Kev ntshiab ntawm lub Crucible: Cov khoom siv graphite raug ntxuav kom huv si hauv qhov kub siab kom txo qis kev sib kis ntawm cov hlau tsis huv.
• Kev tswj huab cua: 6N-purity argon (nrog rau cov tshuab lim dej hauv kab) tiv thaiv kev koom ua ke ntawm nitrogen; cov pa roj HCl/H₂ me me yuav raug qhia kom ua rau cov tshuaj boron volatile thiab txo cov nitrogen, txawm hais tias H₂ concentration xav tau kev ua kom zoo tshaj plaws kom tiv thaiv kev xeb ntawm graphite.
• Cov qauv khoom siv: Cov cub tawg synthesis yuav tsum ua tiav <10⁻⁴ Pa lub hauv paus nqus tsev, nrog rau cov txheej txheem kuaj xyuas qhov xau.

2. Kev Sib Tw Loj Hlob Crystal
Kev loj hlob ntawm HPSI SiC muaj cov kev cai zoo sib xws:

• Khoom Noj: 6N+-purity SiC hmoov nrog B/Al/N <10¹⁶ cm⁻³, Fe/Ti/O qis dua qhov txwv, thiab tsawg kawg nkaus alkali hlau (Na/K).
• Cov txheej txheem roj: 6N argon/hydrogen sib xyaw ua rau muaj kev tiv taus zoo dua.
• Cov Khoom Siv: Cov twj tso kua mis molecular ua kom muaj lub tshuab nqus tsev siab heev (<10⁻⁶ Pa); kev kho ua ntej crucible thiab kev ntxuav nitrogen yog qhov tseem ceeb heev.

2.1 Kev Tsim Kho Tshiab rau Kev Ua Cov Khoom Siv
Piv rau silicon, SiC lub voj voog kev loj hlob ntev thiab kev ntxhov siab (ua rau tawg / ntug chipping) xav tau kev ua tiav siab heev:

• Kev txiav laser: Ua kom cov txiaj ntsig ntau ntxiv los ntawm 30 wafers (350 μm, wire saw) mus rau >50 wafers ib lub boule 20-mm, nrog rau qhov ua rau 200-μm thinning. Lub sijhawm ua tiav poob qis los ntawm 10–15 hnub (wire saw) mus rau <20 feeb/wafer rau 8-nti siv lead ua.

3. Kev Koom Tes Hauv Kev Lag Luam

Pab neeg Orion ntawm Meta tau tsim cov khoom siv SiC waveguide uas siv tau zoo heev, ua rau muaj kev nqis peev rau R&D. Cov kev koom tes tseem ceeb suav nrog:

• TankeBlue & MUDI Micro: Kev sib koom tes tsim cov iav AR diffractive waveguide.
• Jingsheng Mech, Longqi Tech, XREAL, & Kunyou Optoelectronics: Kev sib koom tes zoo rau kev sib koom ua ke ntawm AI/AR.

Kev kwv yees ua lag luam kwv yees tias yuav muaj 500,000 SiC-based AR units txhua xyoo txog xyoo 2027, siv 250,000 6-nti (lossis 125,000 8-nti) substrates. Txoj kev taug kev no qhia txog SiC lub luag haujlwm hloov pauv hauv tiam tom ntej AR optics.

XKH tshwj xeeb hauv kev muab cov khoom siv SiC zoo 4H-semi-insulating (4H-SEMI) nrog cov kab uas koj xaiv tau txij li 2-nti mus txog 8-nti, uas ua kom tau raws li cov kev xav tau tshwj xeeb hauv RF, hluav taws xob, thiab AR/VR optics. Peb lub zog suav nrog kev muab ntim khoom kom ruaj khov, kev hloov kho kom raug (tuab, kev taw qhia, qhov chaw tiav), thiab kev ua tiav hauv tsev los ntawm kev loj hlob ntawm cov siv lead ua mus rau kev txhuam. Dhau ntawm 4H-SEMI, peb kuj muab cov khoom siv 4H-N-hom, 4H/6H-P-hom, thiab 3C-SiC, txhawb nqa ntau yam kev tsim kho tshiab ntawm semiconductor thiab optoelectronic.