Kev ntxuav ntub (Wet Clean) yog ib qho ntawm cov kauj ruam tseem ceeb hauv cov txheej txheem tsim khoom semiconductor, uas tsom mus rau kev tshem tawm ntau yam khoom tsis huv ntawm qhov chaw ntawm wafer kom ntseeg tau tias cov kauj ruam tom ntej tuaj yeem ua tiav ntawm qhov chaw huv.
Raws li qhov loj ntawm cov khoom siv semiconductor txuas ntxiv mus me me thiab qhov yuav tsum tau ua kom raug nce ntxiv, qhov kev xav tau ntawm cov txheej txheem ntxuav wafer tau dhau los ua nruj dua. Txawm tias cov khoom me me, cov khoom siv organic, cov hlau ions, lossis cov oxide seem ntawm qhov chaw wafer tuaj yeem cuam tshuam rau kev ua haujlwm ntawm cov khoom siv, yog li cuam tshuam rau qhov tsim tawm thiab kev ntseeg siab ntawm cov khoom siv semiconductor.
Cov Ntsiab Cai Tseem Ceeb ntawm Kev Ntxuav Wafer
Lub hauv paus ntawm kev ntxuav wafer yog nyob rau hauv kev tshem tawm ntau yam khoom tsis huv ntawm qhov chaw wafer los ntawm kev siv lub cev, tshuaj lom neeg, thiab lwm txoj hauv kev kom ntseeg tau tias wafer muaj qhov chaw huv si rau kev ua tiav tom ntej.
Hom Kev Ua Phem
Cov Kev Cuam Tshuam Tseem Ceeb rau Cov Yam Ntxwv ntawm Cov Khoom Siv
| Tsab xov xwm Kev Ua Phem | Cov qauv tsis zoo
Cov teeb meem ntawm kev cog cov ion
Cov teeb meem ntawm cov yeeb yaj kiab insulating tawg
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| Kev Ua Phem Los Ntawm Hlau | Cov Hlau Alkali | MOS transistor tsis ruaj khov
Kev tawg/kev puas tsuaj ntawm zaj duab xis oxide rooj vag
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| Cov Hlau Hnyav | Nce PN junction rov qab xau tam sim no
Cov teeb meem ntawm zaj duab xis oxide ntawm lub rooj vag
Kev puas tsuaj ntawm cov neeg tsawg tsawg hauv lub neej
Kev tsim cov txheej txheem oxide excitation defect
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| Kev Ua Phem Los Ntawm Tshuaj | Cov Khoom Siv Organic | Cov teeb meem ntawm zaj duab xis oxide ntawm lub rooj vag
Kev hloov pauv ntawm zaj duab xis CVD (lub sijhawm tsim cov kab mob)
Kev hloov pauv ntawm cov tuab ntawm cov zaj duab xis oxide thermal (kev ua kom oxidation sai dua)
Kev tshwm sim ntawm cov pos huab (wafer, lens, daim iav, lub ntsej muag, reticle)
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| Cov Tshuaj Dopants Inorganic (B, P) | MOS transistor Vth hloov pauv
Si substrate thiab siab tsis kam poly-silicon ntawv tsis kam variations
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| Cov hauv paus tsis muaj zog (amines, ammonia) & Cov kua qaub (SOx) | Kev puas tsuaj ntawm qhov kev daws teeb meem ntawm cov tshuaj tiv thaiv uas tau nthuav dav
Qhov tshwm sim ntawm cov khoom me me thiab cov pa phem vim yog kev tsim ntsev
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| Cov Yeeb Yaj Kiab Oxide Hauv Tebchaws Thiab Tshuaj Lom Zem Vim Yog Cov Dej Num, Cua | Kev tiv thaiv kev sib cuag ntau ntxiv
Kev tawg/kev puas tsuaj ntawm zaj duab xis oxide rooj vag
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Tshwj xeeb, cov hom phiaj ntawm cov txheej txheem ntxuav wafer suav nrog:
Kev Tshem Tawm Cov Khoom Me Me: Siv cov txheej txheem lub cev lossis tshuaj lom neeg los tshem tawm cov khoom me me uas txuas rau ntawm qhov chaw ntawm lub wafer. Cov khoom me me nyuaj rau tshem tawm vim muaj cov zog electrostatic muaj zog ntawm lawv thiab qhov chaw ntawm lub wafer, uas xav tau kev kho tshwj xeeb.
Kev Tshem Tawm Cov Khoom Siv Organic: Cov khoom tsis huv organic xws li roj thiab cov khoom seem photoresist yuav lo rau ntawm qhov chaw ntawm lub wafer. Cov khoom tsis huv no feem ntau raug tshem tawm siv cov tshuaj oxidizing muaj zog lossis cov kuab tshuaj.
Tshem Tawm Cov Hlau Ion: Cov hlau ion seem ntawm qhov chaw ntawm lub wafer tuaj yeem ua rau lub zog hluav taws xob poob qis thiab txawm tias cuam tshuam rau cov kauj ruam ua tom ntej. Yog li ntawd, cov tshuaj tshwj xeeb siv los tshem tawm cov ions no.
Kev Tshem Tawm Oxide: Qee cov txheej txheem xav kom qhov chaw ntawm wafer tsis muaj cov txheej oxide, xws li silicon oxide. Hauv cov xwm txheej zoo li no, cov txheej oxide ntuj yuav tsum tau tshem tawm thaum lub sijhawm ntxuav.
Qhov kev sib tw ntawm cov thev naus laus zis ntxuav wafer yog nyob rau hauv kev tshem tawm cov pa phem yam tsis muaj kev cuam tshuam tsis zoo rau qhov chaw ntawm wafer, xws li tiv thaiv kev ntxhib ntawm qhov chaw, kev xeb, lossis lwm yam kev puas tsuaj rau lub cev.
2. Cov Txheej Txheem Ntxuav Wafer
Cov txheej txheem ntxuav wafer feem ntau muaj ntau kauj ruam los xyuas kom meej tias tshem tawm cov kuab paug tag nrho thiab ua tiav qhov chaw huv si.
Daim Duab: Kev Sib Piv Ntawm Kev Ntxuav Hom Batch thiab Kev Ntxuav Ib Leeg Wafer
Cov txheej txheem ntxuav wafer feem ntau suav nrog cov kauj ruam tseem ceeb hauv qab no:
1. Kev Ntxuav Ua Ntej (Kev Ntxuav Ua Ntej)
Lub hom phiaj ntawm kev ntxuav ua ntej yog kom tshem tawm cov khoom tsis huv thiab cov khoom loj ntawm qhov chaw wafer, uas feem ntau ua tiav los ntawm kev yaug dej deionized (DI Dej) thiab kev ntxuav ultrasonic. Dej deionized tuaj yeem tshem tawm cov khoom me me thiab cov khoom tsis huv uas yaj tawm ntawm qhov chaw wafer, thaum kev ntxuav ultrasonic siv cov teebmeem cavitation los rhuav tshem qhov sib txuas ntawm cov khoom me me thiab qhov chaw wafer, ua rau lawv yooj yim dua rau dislodge.
2. Kev Ntxuav Tshuaj
Kev ntxuav tshuaj yog ib qho ntawm cov kauj ruam tseem ceeb hauv cov txheej txheem ntxuav wafer, siv cov tshuaj lom neeg los tshem tawm cov khoom siv organic, cov hlau ions, thiab oxides ntawm qhov chaw wafer.
Kev Tshem Tawm Cov Khoom Siv Organic: Feem ntau, acetone lossis cov tshuaj ammonia/peroxide sib xyaw (SC-1) yog siv los yaj thiab oxidize cov organic contaminations. Qhov piv txwv ib txwm rau SC-1 kua yog NH₄OH
₂O₂
₂O = 1:1:5, nrog rau qhov kub ua haujlwm li ntawm 20°C.
Tshem Tawm Cov Hlau Ion: Nitric acid lossis hydrochloric acid/peroxide sib xyaw (SC-2) yog siv los tshem tawm cov hlau ions ntawm qhov chaw wafer. Qhov piv txwv ib txwm rau SC-2 kua yog HCl
₂O₂
₂O = 1:1:6, nrog rau qhov kub thiab txias tswj tau kwv yees li 80°C.
Kev Tshem Tawm Oxide: Hauv qee cov txheej txheem, qhov kev tshem tawm ntawm cov txheej oxide ib txwm muaj los ntawm qhov chaw wafer yog qhov yuav tsum tau ua, uas siv cov kua hydrofluoric acid (HF). Qhov piv ib txwm rau cov kua HF yog HF
₂O = 1:50, thiab nws siv tau rau ntawm qhov kub thiab txias hauv chav.
3. Kev Ntxuav Zaum Kawg
Tom qab ntxuav tshuaj lom neeg, cov wafers feem ntau yuav tsum tau ntxuav zaum kawg kom paub tseeb tias tsis muaj cov tshuaj seem nyob rau ntawm qhov chaw. Kev ntxuav zaum kawg feem ntau siv dej deionized los ntxuav kom huv si. Tsis tas li ntawd, kev ntxuav dej ozone (O₃/H₂O) yog siv los tshem tawm cov kuab paug uas tseem tshuav ntawm qhov chaw wafer.
4. Kev ziab
Cov wafers uas tau ntxuav lawm yuav tsum tau ziab sai sai kom tiv thaiv cov dej lossis rov qab lo rau cov khoom tsis huv. Cov txheej txheem ziab feem ntau suav nrog kev ziab kom qhuav thiab kev siv nitrogen purging. Qhov ua ntej tshem tawm cov dej noo ntawm qhov chaw wafer los ntawm kev tig ntawm qhov ceev ceev, thaum qhov tom kawg ua kom qhuav tag nrho los ntawm kev tshuab cov pa nitrogen kom qhuav hla qhov chaw wafer.
Cov kuab paug
Lub Npe Txheej Txheem Ntxuav
Kev Piav Qhia Txog Kev Sib Xyaws Tshuaj
Cov tshuaj lom neeg
| Cov khoom me me | Piranha (SPM) | Sulfuric acid / hydrogen peroxide / DI dej | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide / hydrogen peroxide / DI dej | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| Cov hlau (tsis yog tooj liab) | SC-2 (HPM) | Hydrochloric acid / hydrogen peroxide / DI dej | HCl/H2O2/H2O1:1:6; 85°C |
| Piranha (SPM) | Sulfuric acid / hydrogen peroxide / DI dej | H2SO4/H2O2/H2O3-4:1; 90°C | |
| DHF | Dilute hydrofluoric acid / DI dej (yuav tsis tshem tawm tooj liab) | HF/H2O1:50 | |
| Cov khoom noj khoom haus organic | Piranha (SPM) | Sulfuric acid / hydrogen peroxide / DI dej | H2SO4/H2O2/H2O 3-4:1; 90°C |
| SC-1 (APM) | Ammonium hydroxide / hydrogen peroxide / DI dej | NH4OH/H2O2/H2O 1:4:20; 80°C | |
| DIO3 | Ozone hauv dej de-ionized | Cov Khoom Sib Xyaws Zoo Tshaj Plaws ntawm O3/H2O | |
| Cov Oxide Ib Txwm | DHF | Dilute hydrofluoric acid / DI dej | HF/H2O 1:100 |
| BHF | Cov kua qaub hydrofluoric uas tau muab tso rau hauv | NH4F/HF/H2O |
3. Cov Txheej Txheem Ntxuav Wafer Feem Ntau
1. Txoj Kev Ntxuav RCA
Txoj kev ntxuav RCA yog ib qho ntawm cov txheej txheem ntxuav wafer qub tshaj plaws hauv kev lag luam semiconductor, tsim los ntawm RCA Corporation ntau tshaj 40 xyoo dhau los. Txoj kev no feem ntau yog siv los tshem tawm cov organic contaminations thiab cov hlau ion impurities thiab tuaj yeem ua tiav hauv ob kauj ruam: SC-1 (Standard Clean 1) thiab SC-2 (Standard Clean 2).
SC-1 Kev Ntxuav: Cov kauj ruam no feem ntau yog siv los tshem tawm cov organic contaminations thiab cov khoom me me. Cov tshuaj yog ib qho sib tov ntawm ammonia, hydrogen peroxide, thiab dej, uas tsim ib txheej silicon oxide nyias nyias rau ntawm qhov chaw ntawm lub wafer.
SC-2 Kev Ntxuav: Cov kauj ruam no feem ntau yog siv los tshem tawm cov hlau ion uas muaj cov tshuaj lom, siv cov hydrochloric acid, hydrogen peroxide, thiab dej sib xyaw. Nws tso ib txheej nyias nyias rau ntawm qhov chaw ntawm lub wafer kom tiv thaiv kev rov ua qias tuaj.
2. Txoj Kev Ntxuav Piranha (Piranha Etch Clean)
Txoj kev ntxuav Piranha yog ib txoj kev siv tau zoo heev rau kev tshem tawm cov khoom siv organic, siv cov tshuaj sulfuric acid thiab hydrogen peroxide sib xyaw, feem ntau yog 3: 1 lossis 4: 1. Vim yog cov khoom siv oxidative muaj zog heev ntawm cov tshuaj no, nws tuaj yeem tshem tawm ntau cov khoom siv organic thiab cov khoom tsis huv. Txoj kev no yuav tsum tau tswj hwm cov xwm txheej nruj, tshwj xeeb tshaj yog qhov kub thiab txias, kom tsis txhob ua rau lub wafer puas tsuaj.
Kev ntxuav ultrasonic siv cov nyhuv cavitation tsim los ntawm cov suab nrov zaus siab hauv cov kua kom tshem tawm cov pa phem ntawm qhov chaw wafer. Piv rau kev ntxuav ultrasonic ib txwm muaj, kev ntxuav megasonic ua haujlwm ntawm qhov zaus siab dua, ua rau kev tshem tawm cov khoom me me hauv qab micron zoo dua yam tsis ua rau puas tsuaj rau qhov chaw wafer.
4. Kev Ntxuav Ozone
Cov thev naus laus zis ntxuav ozone siv cov khoom oxidizing muaj zog ntawm ozone los rhuav tshem thiab tshem tawm cov organic contaminations ntawm qhov chaw wafer, thaum kawg hloov lawv mus rau hauv cov pa roj carbon dioxide thiab dej tsis muaj teeb meem. Txoj kev no tsis tas yuav siv cov tshuaj reagents kim thiab ua rau muaj kuab paug tsawg dua, ua rau nws yog ib qho thev naus laus zis tshiab hauv kev ntxuav wafer.
4. Cov Khoom Siv Ntxuav Wafer
Yuav kom ntseeg tau tias cov txheej txheem ntxuav wafer ua haujlwm tau zoo thiab muaj kev nyab xeeb, ntau yam khoom siv ntxuav siab heev siv rau hauv kev tsim khoom semiconductor. Cov hom tseem ceeb suav nrog:
1. Cov Khoom Siv Ntxuav Ntub Dej
Cov khoom siv ntxuav ntub muaj xws li ntau lub thoob dej uas muab tso rau hauv lub raj mis, lub thoob dej ntxuav ultrasonic, thiab lub tshuab ziab khaub ncaws. Cov khoom siv no muab cov zog kho tshuab thiab cov tshuaj reagents los tshem tawm cov pa phem ntawm qhov chaw ntawm lub wafer. Cov thoob dej uas muab tso rau hauv lub raj mis feem ntau muaj cov tshuab tswj qhov kub thiab txias kom ntseeg tau tias cov tshuaj daws teeb meem ruaj khov thiab ua haujlwm tau zoo.
2. Cov Khoom Siv Ntxuav Qhuav
Cov khoom siv ntxuav qhuav feem ntau suav nrog cov tshuaj ntxuav plasma, uas siv cov khoom me me hauv plasma los ua kom sib xyaw thiab tshem tawm cov seem ntawm qhov chaw wafer. Kev ntxuav plasma yog qhov tsim nyog rau cov txheej txheem uas xav tau kev tswj hwm qhov chaw kom zoo yam tsis muaj cov tshuaj seem.
3. Cov Tshuab Ntxuav Tsis Siv Neeg
Nrog rau kev nthuav dav ntawm kev tsim cov khoom siv semiconductor, cov txheej txheem ntxuav tsis siv neeg tau dhau los ua qhov kev xaiv zoo tshaj plaws rau kev ntxuav wafer loj. Cov txheej txheem no feem ntau suav nrog cov txheej txheem hloov pauv tsis siv neeg, cov txheej txheem ntxuav ntau lub tank, thiab cov txheej txheem tswj kev ua haujlwm kom ntseeg tau tias cov txiaj ntsig ntxuav tas li rau txhua wafer.
5. Cov Qauv Yav Tom Ntej
Raws li cov khoom siv semiconductor txuas ntxiv mus me me, cov thev naus laus zis ntxuav wafer tab tom hloov pauv mus rau kev daws teeb meem zoo dua thiab zoo rau ib puag ncig. Cov thev naus laus zis ntxuav yav tom ntej yuav tsom mus rau:
Kev Tshem Tawm Cov Khoom Me Me Uas Tsis Yog Nanometer: Cov thev naus laus zis ntxuav uas twb muaj lawm tuaj yeem tswj tau cov khoom me me uas tsis yog nanometer, tab sis nrog kev txo qis ntxiv ntawm qhov loj ntawm lub cuab yeej, kev tshem tawm cov khoom me me uas tsis yog nanometer yuav dhau los ua qhov kev sib tw tshiab.
Kev Ntxuav Ntsuab thiab Zoo Rau Ib puag ncig: Txo kev siv cov tshuaj lom neeg uas ua rau ib puag ncig puas tsuaj thiab tsim cov txheej txheem ntxuav uas zoo rau ib puag ncig, xws li kev ntxuav ozone thiab kev ntxuav megasonic, yuav tseem ceeb zuj zus.
Cov Qib Siab Dua ntawm Kev Ua Haujlwm Tsis Siv Neeg thiab Kev Txawj Ntse: Cov txheej txheem ntse yuav ua rau muaj kev saib xyuas tiag tiag thiab kev hloov kho ntawm ntau yam kev ntsuas thaum lub sijhawm ntxuav, txhim kho kev ua haujlwm ntawm kev ntxuav thiab kev ua haujlwm ntawm kev tsim khoom.
Kev siv tshuab ntxuav wafer, ua ib kauj ruam tseem ceeb hauv kev tsim khoom semiconductor, ua lub luag haujlwm tseem ceeb hauv kev ua kom cov nplaim wafer huv rau cov txheej txheem tom ntej. Kev sib xyaw ua ke ntawm ntau txoj kev ntxuav tau zoo tshem tawm cov pa phem, muab cov nplaim substrate huv rau cov kauj ruam tom ntej. Thaum thev naus laus zis nce qib, cov txheej txheem ntxuav yuav txuas ntxiv mus kom zoo dua kom ua tau raws li qhov xav tau rau qhov tseeb dua thiab qis dua qhov tsis zoo hauv kev tsim khoom semiconductor.
Lub sijhawm tshaj tawm: Lub Kaum Hli-08-2024