Silicon Carbide Ceramics vs. Semiconductor Silicon Carbide: Cov Khoom Siv Tib Yam nrog Ob Lub Hom Phiaj Sib Txawv

1. Cov Kev Cai Purity Sib Txawv rau Cov Khoom Siv Raw

 

Cov SiC uas yog ceramic muaj qhov yuav tsum tau ua kom huv si me ntsis rau nws cov hmoov av. Feem ntau, cov khoom lag luam uas muaj qhov huv si 90% -98% tuaj yeem ua tau raws li feem ntau cov kev xav tau ntawm daim ntawv thov, txawm hais tias cov khoom siv ceramic ua haujlwm siab yuav xav tau qhov huv si 98% -99.5% (piv txwv li, SiC uas muaj kev sib txuas lus yuav tsum tau tswj cov ntsiab lus silicon dawb). Nws zam tau qee yam tsis huv thiab qee zaum siv cov khoom pab sintering xws li txhuas oxide (Al₂O₃) lossis yttrium oxide (Y₂O₃) los txhim kho kev ua haujlwm sintering, txo qhov kub sintering, thiab txhim kho qhov ceev ntawm cov khoom kawg.

 

SiC qib semiconductor xav tau qib kev huv huv ze li zoo meej. Cov khoom siv ib leeg siv lead ua SiC xav tau ≥99.9999% (6N) kev huv huv, nrog rau qee qhov kev siv siab xav tau 7N (99.99999%) kev huv huv. Cov txheej Epitaxial yuav tsum tswj cov khoom tsis huv hauv qab 10¹⁶ atoms / cm³ (tshwj xeeb tshaj yog zam cov khoom tsis huv tob xws li B, Al, thiab V). Txawm tias cov khoom tsis huv xws li hlau (Fe), txhuas (Al), lossis boron (B) tuaj yeem cuam tshuam loj heev rau cov khoom siv hluav taws xob los ntawm kev ua rau cov neeg nqa khoom tawg, txo qhov muaj zog ntawm lub zog tawg, thiab thaum kawg ua rau cov khoom siv ua haujlwm thiab kev ntseeg siab tsis zoo, ua rau yuav tsum tswj hwm cov khoom tsis huv.

 

Cov khoom siv semiconductor silicon carbide

 

2. Cov Qauv Siv Crystal Sib Txawv thiab Zoo

 

SiC qib ceramic feem ntau muaj nyob rau hauv cov hmoov polycrystalline lossis cov khoom sintered uas muaj ntau cov microcrystals SiC uas tsis sib xws. Cov khoom siv yuav muaj ntau hom polytypes (piv txwv li, α-SiC, β-SiC) yam tsis muaj kev tswj hwm nruj rau cov polytypes tshwj xeeb, nrog rau kev tsom mus rau qhov ceev ntawm cov khoom siv thiab kev sib xws. Nws cov qauv sab hauv muaj cov ciam teb ntau thiab cov qhov me me, thiab tej zaum yuav muaj cov khoom pab sintering (piv txwv li, Al₂O₃, Y₂O₃).

 

Cov SiC semiconductor-qib yuav tsum yog cov khoom siv ib leeg lossis cov txheej epitaxial nrog cov qauv siv lead ua kom zoo. Nws xav tau cov polytypes tshwj xeeb tau los ntawm kev siv cov txheej txheem loj hlob siv lead ua kom raug (piv txwv li, 4H-SiC, 6H-SiC). Cov khoom siv hluav taws xob xws li kev txav mus los ntawm hluav taws xob thiab bandgap yog qhov rhiab heev rau kev xaiv polytype, uas yuav tsum tau tswj hwm nruj. Tam sim no, 4H-SiC tswj hwm kev ua lag luam vim nws cov khoom siv hluav taws xob zoo dua suav nrog kev txav mus los ntawm cov neeg nqa khoom siab thiab lub zog tawg, ua rau nws zoo tagnrho rau cov khoom siv hluav taws xob.

 

3. Kev Sib Piv Txog Qhov Nyuaj Ntawm Cov Txheej Txheem

 

Cov SiC qib ceramic siv cov txheej txheem tsim khoom yooj yim (kev npaj hmoov → kev tsim → kev sintering), zoo ib yam li "kev ua cib." Cov txheej txheem suav nrog:

 

• Kev sib xyaw cov hmoov SiC qib lag luam (feem ntau yog micron-sized) nrog cov binders
• Tsim los ntawm kev nias
• Kev sintering kub siab (1600-2200 ° C) kom ua tiav kev sib sau ua ke los ntawm kev sib kis ntawm cov khoom me me
  Feem ntau cov ntawv thov tuaj yeem txaus siab nrog >90% qhov ceev. Tag nrho cov txheej txheem tsis xav tau kev tswj hwm kev loj hlob ntawm cov siv lead ua kom meej, tsom mus rau kev tsim thiab sintering sib xws. Cov txiaj ntsig suav nrog kev ywj pheej ntawm cov txheej txheem rau cov duab nyuaj, txawm hais tias muaj qhov yuav tsum tau ua kom huv qis dua.

 

Cov txheej txheem SiC semiconductor muaj cov txheej txheem nyuaj dua (kev npaj hmoov uas muaj cov khoom huv siab → kev loj hlob ntawm cov khoom siv ib leeg → kev tso cov wafer epitaxial → kev tsim khoom siv). Cov kauj ruam tseem ceeb suav nrog:

 

• Kev npaj cov khoom siv feem ntau yog los ntawm kev thauj mus los ntawm lub cev (PVT)
• Sublimation ntawm SiC hmoov ntawm qhov xwm txheej hnyav (2200-2400 ° C, lub tshuab nqus tsev siab)
• Kev tswj hwm qhov kub thiab txias (± 1 ° C) thiab cov kev ntsuas siab kom meej
• Kev loj hlob ntawm cov txheej Epitaxial los ntawm kev tso cov pa tshuaj lom neeg (CVD) los tsim cov txheej tuab sib npaug, doped (feem ntau ntau txog kaum microns)
  Tag nrho cov txheej txheem xav tau qhov chaw huv si heev (piv txwv li, Chav Kawm 10 chav huv) kom tiv thaiv kev ua qias tuaj. Cov yam ntxwv suav nrog kev ua haujlwm raug heev, xav tau kev tswj hwm cov cua sov thiab cov roj ntws, nrog rau cov kev cai nruj rau ob qho tib si raw khoom purity (> 99.9999%) thiab cov khoom siv kho vajtse.

 

4. Cov Nqi Sib Txawv Tseem Ceeb thiab Kev Taw Qhia Txog Kev Ua Lag Luam

 

Cov yam ntxwv ntawm SiC ceramic:

• Khoom siv raw: Hmoov qib lag luam
• Cov txheej txheem yooj yim
• Tus nqi qis: Txhiab txhiab txog kaum txhiab RMB ib tuj
• Cov ntawv thov dav dav: Cov khoom siv abrasives, refractories, thiab lwm yam kev lag luam uas muaj nqi siab

 

Cov yam ntxwv ntawm SiC semiconductor:

• Lub voj voog loj hlob ntev ntawm cov substrate
• Kev tswj xyuas qhov tsis zoo uas nyuaj
• Cov nqi qis ntawm cov nyiaj tau los
• Tus nqi siab: Txhiab txhiab USD rau ib 6-nti substrate
• Cov lag luam tsom mus rau: Cov khoom siv hluav taws xob ua tau zoo xws li cov khoom siv fais fab thiab cov khoom siv RF
  Nrog kev loj hlob sai ntawm cov tsheb siv hluav taws xob tshiab thiab kev sib txuas lus 5G, kev xav tau ntawm kev ua lag luam tab tom loj hlob sai heev.

 

5. Cov Xwm Txheej Sib Txawv ntawm Daim Ntawv Thov

 

SiC qib ceramic ua haujlwm ua "cov khoom siv ua haujlwm hauv kev lag luam" feem ntau rau cov ntawv thov kev tsim kho. Siv nws cov khoom siv kho tshuab zoo heev (kev tawv siab, kev tiv taus hnav) thiab cov khoom siv thermal (kev tiv taus kub siab, kev tiv taus oxidation), nws ua tau zoo hauv:

 

• Cov khoom siv abrasives (cov log sib tsoo, ntawv xuab zeb)
• Cov khoom siv refractories (cov ntaub thaiv qhov cub kub siab)
• Cov khoom siv uas tiv taus kev hnav/kev xeb (lub cev twj tso kua mis, cov yeeb nkab sab hauv)

 

Cov khoom siv ua los ntawm silicon carbide ceramic

 

Cov khoom siv semiconductor-qib SiC ua haujlwm zoo li "cov neeg tseem ceeb hauv hluav taws xob," siv nws cov khoom siv semiconductor dav dav los qhia txog cov txiaj ntsig tshwj xeeb hauv cov khoom siv hluav taws xob:

 

• Cov khoom siv fais fab: EV inverters, grid converters (txhim kho kev hloov pauv fais fab kom zoo)
• Cov khoom siv RF: 5G chaw nres tsheb, radar systems (ua kom muaj zaus ua haujlwm siab dua)
• Optoelectronics: Cov khoom siv rau cov LEDs xiav

 

200-millimeter SiC epitaxial wafer

 

Qhov Loj	SiC qib ceramic	SiC qib semiconductor
Cov Qauv Siv Crystal	Polycrystalline, ntau hom polytypes	Ib leeg siv lead ua, xaiv cov polytypes nruj me ntsis
Kev tsom mus rau cov txheej txheem	Kev tswj cov duab thiab kev sib sau ua ke	Kev tswj hwm qhov zoo ntawm cov siv lead ua thiab cov khoom siv hluav taws xob
Kev Ua Tau Zoo Tshaj Plaws	Lub zog kho tshuab, kev tiv thaiv corrosion, thermal stability	Cov khoom siv hluav taws xob (bandgap, breakdown field, thiab lwm yam)
Cov Xwm Txheej ntawm Daim Ntawv Thov	Cov khoom siv hauv tsev, cov khoom siv tiv taus hnav, cov khoom siv kub siab	Cov khoom siv fais fab loj, cov khoom siv zaus siab, cov khoom siv optoelectronic
Cov Tsav Tsheb Nqi	Kev yooj ywm ntawm cov txheej txheem, tus nqi khoom siv raw	Kev loj hlob ntawm cov siv lead ua, kev ua haujlwm ntawm cov khoom siv, kev ntshiab ntawm cov khoom siv raw

 

Hauv kev xaus, qhov sib txawv tseem ceeb yog los ntawm lawv lub hom phiaj ua haujlwm sib txawv: cov khoom siv ceramic-qib SiC siv "cov qauv (qauv)" thaum cov khoom siv semiconductor-qib SiC siv "cov khoom (hluav taws xob)." Tus thawj coj nrhiav kev ua haujlwm kho tshuab / thermal uas pheej yig, thaum tus tom kawg sawv cev rau qhov siab tshaj plaws ntawm kev siv tshuab npaj khoom siv ua cov khoom siv ua haujlwm siab, ib leeg-siv lead ua ke. Txawm hais tias sib koom tib lub hauv paus chiv keeb tshuaj, cov khoom siv ceramic-qib thiab semiconductor-qib SiC qhia txog qhov sib txawv meej hauv kev huv, cov qauv siv lead ua ke, thiab cov txheej txheem tsim khoom - tsis tau ob qho tib si ua rau muaj kev pab tseem ceeb rau kev tsim khoom lag luam thiab kev nce qib hauv kev siv tshuab hauv lawv thaj chaw.