Cov Khoom Siv Silicon piv rau Cov Khoom Siv Iav: Peb Tab Tom Ntxuav Dab Tsi Tiag? Txij Li Cov Khoom Siv Tseem Ceeb Mus Rau Cov Kev Daws Teeb Meem Kev Ntxuav Uas Ua Raws Li Cov Txheej Txheem

Txawm hais tias ob qho tib si silicon thiab iav wafers sib koom lub hom phiaj ntawm kev "ntxuav," cov teeb meem thiab hom kev ua tsis tiav uas lawv ntsib thaum lub sijhawm ntxuav yog txawv heev. Qhov tsis sib xws no tshwm sim los ntawm cov khoom siv thiab cov kev cai tshwj xeeb ntawm silicon thiab iav, nrog rau "kev xav" sib txawv ntawm kev ntxuav uas tsav los ntawm lawv cov ntawv thov kawg.

Ua ntej, cia peb piav qhia meej: Peb tab tom ntxuav dab tsi tiag? Muaj cov pa phem dab tsi koom nrog?

Cov pa phem muaj peev xwm muab faib ua plaub pawg:

1. Cov Khoom Uas Muaj Cov Khoom Particle

   • Cov hmoov av, cov hlau me me, cov organic me me, cov khoom siv abrasive (los ntawm CMP txheej txheem), thiab lwm yam.

   • Cov pa phem no tuaj yeem ua rau muaj qhov tsis zoo ntawm cov qauv, xws li luv luv lossis qhib voj voog.

2. Cov Khoom Siv Organic Contaminations

   • Xws li cov photoresist residues, resin additives, tib neeg daim tawv nqaij roj, cov kuab tshuaj residues, thiab lwm yam.

   • Cov organic contaminations tuaj yeem tsim cov qhov ncauj qhov ntswg uas cuam tshuam etching lossis ion implantation thiab txo qhov adhesion ntawm lwm cov zaj duab xis nyias.

3. Cov Khoom Uas Muaj Hlau Ion

   • Hlau, tooj liab, sodium, potassium, calcium, thiab lwm yam, uas feem ntau los ntawm cov khoom siv, tshuaj lom neeg, thiab kev sib cuag ntawm tib neeg.

   • Hauv cov khoom siv semiconductor, cov hlau ions yog cov "killer" contaminations, ua rau muaj zog ntau ntxiv hauv qhov txwv tsis pub siv, uas ua rau cov hluav taws xob xau ntau ntxiv, ua rau lub neej ntawm cov khoom siv luv dua, thiab ua rau cov khoom siv hluav taws xob puas tsuaj loj heev. Hauv iav, lawv yuav cuam tshuam rau qhov zoo thiab kev nplaum ntawm cov zaj duab xis nyias tom qab.

4. Txheej Oxide Ib Txwm

   • Rau cov silicon wafers: Ib txheej nyias nyias ntawm silicon dioxide (Native Oxide) tsim los ntawm ntuj tsim rau saum npoo ntawm huab cua. Qhov tuab thiab kev sib xws ntawm cov txheej oxide no nyuaj rau tswj, thiab nws yuav tsum tau tshem tawm tag nrho thaum lub sijhawm tsim cov qauv tseem ceeb xws li cov rooj vag oxides.

   • Rau cov iav wafers: Iav nws tus kheej yog ib qho qauv silica network, yog li tsis muaj teeb meem ntawm "tshem tawm ib txheej oxide ib txwm muaj." Txawm li cas los xij, qhov chaw saum npoo yuav tau hloov kho vim muaj kuab paug, thiab txheej no yuav tsum tau tshem tawm.

I. Cov Hom Phiaj Tseem Ceeb: Qhov Sib Txawv Ntawm Kev Ua Haujlwm Hluav Taws Xob thiab Kev Zoo Tag Nrho Lub Cev

• Cov Silicon Wafers

  • Lub hom phiaj tseem ceeb ntawm kev ntxuav yog kom ntseeg tau tias muaj kev ua haujlwm hluav taws xob. Cov lus qhia feem ntau suav nrog kev suav cov khoom me me thiab qhov loj me (piv txwv li, cov khoom me me ≥0.1μm yuav tsum tau tshem tawm zoo), cov hlau ion concentration (piv txwv li, Fe, Cu yuav tsum tau tswj kom ≤10¹⁰ atoms / cm² lossis qis dua), thiab cov organic residue theem. Txawm tias qhov kev ua qias tuaj yeem ua rau lub voj voog luv luv, cov dej ntws tawm, lossis kev ua tsis tiav ntawm lub rooj vag oxide kev ncaj ncees.

• Cov khob cij iav

  • Raws li cov khoom siv hauv pem teb, cov kev xav tau tseem ceeb yog kev ua kom zoo nkauj ntawm lub cev thiab kev ruaj khov ntawm tshuaj lom neeg. Cov lus qhia tshwj xeeb tsom mus rau cov yam ntxwv loj xws li tsis muaj khawb, cov xim tsis tuaj yeem tshem tawm, thiab kev tswj hwm qhov roughness thiab geometry ntawm qhov chaw qub. Lub hom phiaj ntxuav yog kom ntseeg tau tias pom kev huv thiab kev nplaum zoo rau cov txheej txheem tom ntej xws li kev pleev xim.

II. Yam Khoom Siv: Qhov Txawv Tseem Ceeb Ntawm Crystalline thiab Amorphous

• Silicon

  • Silicon yog ib yam khoom siv crystalline, thiab nws qhov chaw ntuj tsim ib txheej silicon dioxide (SiO₂) oxide uas tsis sib xws. Cov txheej oxide no muaj kev pheej hmoo rau kev ua haujlwm hluav taws xob thiab yuav tsum tau muab tshem tawm kom huv si thiab sib npaug.

• Iav

  • Iav yog ib lub network silica amorphous. Nws cov khoom siv loj zoo ib yam li cov txheej silicon oxide ntawm silicon, uas txhais tau tias nws tuaj yeem raug etched sai sai los ntawm hydrofluoric acid (HF) thiab kuj yooj yim rau kev puas tsuaj alkali muaj zog, ua rau muaj kev nce ntxiv ntawm qhov chaw roughness lossis deformation. Qhov sib txawv tseem ceeb no qhia tias kev ntxuav silicon wafer tuaj yeem ua siab ntev rau lub teeb, tswj kev etching kom tshem tawm cov pa phem, thaum kev ntxuav iav wafer yuav tsum tau ua nrog kev ceev faj heev kom tsis txhob ua rau cov khoom siv hauv paus puas tsuaj.

III. Kev Sib Piv ntawm Cov Tshuaj Ntxuav

Raws li cov hom phiaj thiab cov yam ntxwv ntawm cov khoom siv uas tau hais los saum toj no, cov tshuaj ntxuav rau silicon thiab iav wafers sib txawv:

• Cov Txheej Txheem Ntxuav Iav Wafer

  • Tam sim no, feem ntau cov chaw ua iav siv cov txheej txheem ntxuav raws li cov yam ntxwv ntawm cov khoom siv iav, feem ntau yog siv cov tshuaj ntxuav alkaline tsis muaj zog.

  • Cov yam ntxwv ntawm cov tshuaj ntxuav:Cov tshuaj ntxuav tshwj xeeb no feem ntau yog alkaline tsis muaj zog, nrog pH nyob ib puag ncig 8-9. Lawv feem ntau muaj cov surfactants (piv txwv li, alkyl polyoxyethylene ether), cov tshuaj chelating hlau (piv txwv li, HEDP), thiab cov khoom siv ntxuav organic, tsim los emulsify thiab decompose cov organic contaminations xws li roj thiab cov ntiv tes, thaum tsis muaj corrosive rau lub iav matrix.

  • Cov Txheej Txheem:Cov txheej txheem ntxuav ib txwm muaj xws li siv cov tshuaj ntxuav alkaline tsis muaj zog ntawm qhov kub thiab txias ntawm chav tsev mus txog 60 ° C, ua ke nrog kev ntxuav ultrasonic. Tom qab ntxuav, cov wafers dhau los ntawm ntau kauj ruam yaug nrog dej ntshiab thiab ziab maj mam (piv txwv li, qeeb qeeb lossis IPA vapor ziab). Cov txheej txheem no ua tau raws li cov kev cai ntawm iav wafer rau kev huv si thiab kev huv si dav dav.

• Cov Txheej Txheem Ntxuav Silicon Wafer

  • Rau kev ua cov khoom siv semiconductor, cov silicon wafers feem ntau raug ntxuav RCA tus qauv, uas yog ib txoj kev ntxuav zoo heev uas muaj peev xwm daws tau txhua yam teeb meem, kom ntseeg tau tias cov kev cai ua haujlwm hluav taws xob rau cov khoom siv semiconductor tau ua tiav.

IV. Thaum Iav Ua Tau Raws Li Cov Qauv "Kev Huv Si" Siab Dua

Thaum cov iav wafers siv rau hauv cov ntawv thov uas xav tau kev suav cov khoom me me thiab cov hlau ion theem (piv txwv li, ua cov substrates hauv cov txheej txheem semiconductor lossis rau cov zaj duab xis nyias zoo heev), cov txheej txheem ntxuav sab hauv yuav tsis txaus lawm. Hauv qhov no, cov ntsiab cai ntxuav semiconductor tuaj yeem siv tau, qhia txog kev hloov kho RCA ntxuav txoj kev.

Lub hauv paus ntawm txoj kev npaj no yog kom txo thiab ua kom zoo dua cov txheej txheem RCA txheem kom haum rau qhov xwm txheej ntawm iav:

• Kev Tshem Tawm Cov Khoom Uas Muaj Cov Tshuaj Lom Zem:Cov tshuaj SPM lossis cov dej ozone uas tsis muaj zog siv tau los rhuav tshem cov organic contaminations los ntawm kev oxidation muaj zog.

• Kev Tshem Tawm Cov Khoom Me Me:Cov tshuaj SC1 uas tau diluted heev yog siv rau qhov kub qis dua thiab lub sijhawm kho luv dua los siv nws cov electrostatic repulsion thiab micro-etching effects los tshem tawm cov khoom me me, thaum txo qhov xeb ntawm lub iav.

• Kev Tshem Tawm Hlau Ion:Cov kua SC2 uas tau diluted los yog cov kua hydrochloric acid/nitric acid uas tau diluted yooj yim yog siv los tshem tawm cov hlau uas muaj kuab lom los ntawm kev chelation.

• Kev Txwv Tsis Pub Ua:Yuav tsum tsis txhob siv DHF (di-ammonium fluoride) kiag li kom tiv thaiv kev xeb ntawm lub iav substrate.

Hauv tag nrho cov txheej txheem hloov kho, kev sib xyaw ua ke ntawm cov thev naus laus zis megasonic ua rau muaj kev tshem tawm zoo ntawm cov khoom me me thiab mos dua ntawm qhov chaw.

Xaus lus

Cov txheej txheem ntxuav rau silicon thiab iav wafers yog qhov tshwm sim tsis zam ntawm kev tsim kho rov qab raws li lawv cov kev xav tau kawg, cov khoom siv, thiab cov yam ntxwv ntawm lub cev thiab tshuaj. Kev ntxuav silicon wafer nrhiav "kev huv si ntawm qib atomic" rau kev ua haujlwm hluav taws xob, thaum kev ntxuav iav wafer tsom mus rau kev ua tiav "zoo meej, tsis puas tsuaj" ntawm cov chaw. Raws li iav wafers siv ntau dua hauv cov ntawv thov semiconductor, lawv cov txheej txheem ntxuav yuav hloov pauv dhau qhov kev ntxuav alkaline tsis muaj zog, tsim cov kev daws teeb meem zoo dua, xws li cov txheej txheem RCA hloov kho kom ua tau raws li cov qauv kev huv siab dua.