Silicon carbide (SiC), ua cov khoom siv semiconductor tiam thib peb, tau txais kev saib xyuas ntau vim nws cov khoom zoo tshaj plaws thiab cov ntawv thov zoo hauv cov khoom siv hluav taws xob muaj zog. Tsis zoo li cov khoom siv silicon (Si) lossis germanium (Ge) ib txwm muaj, SiC muaj qhov dav bandgap, thermal conductivity siab, tawg teb siab, thiab tshuaj lom neeg ruaj khov zoo heev. Cov yam ntxwv no ua rau SiC yog cov khoom siv zoo tshaj plaws rau cov khoom siv hluav taws xob hauv tsheb fais fab, cov tshuab hluav taws xob rov ua dua tshiab, kev sib txuas lus 5G, thiab lwm yam kev siv ua haujlwm siab, kev ntseeg siab siab. Txawm li cas los xij, txawm tias nws muaj peev xwm, kev lag luam SiC ntsib cov teeb meem kev siv tshuab uas ua rau muaj kev cuam tshuam loj rau kev siv dav dav.
1. SiC SubstrateKev Loj Hlob Crystal thiab Wafer Fabrication
Kev tsim cov khoom siv SiC yog lub hauv paus ntawm kev lag luam SiC thiab sawv cev rau qhov teeb meem siab tshaj plaws. SiC tsis tuaj yeem loj hlob los ntawm cov kua theem zoo li silicon vim nws qhov chaw yaj siab thiab cov tshuaj siv lead ua ke nyuaj. Hloov chaw, txoj hauv kev tseem ceeb yog kev thauj mus los ntawm lub cev (PVT), uas cuam tshuam nrog kev hloov pauv cov silicon thiab cov hmoov carbon siab ntawm qhov kub tshaj 2000 ° C hauv ib puag ncig tswj hwm. Cov txheej txheem kev loj hlob yuav tsum tau tswj hwm qhov kub thiab txias, lub zog roj, thiab cov dej ntws kom tsim cov khoom siv lead ua zoo.
SiC muaj ntau tshaj 200 hom polytypes, tab sis tsuas yog ob peb hom xwb uas haum rau kev siv semiconductor. Kev ua kom pom tseeb tias yog polytype thaum txo qhov tsis zoo xws li micropipes thiab threading dislocations yog qhov tseem ceeb, vim tias cov qhov tsis zoo no cuam tshuam loj heev rau kev ntseeg tau ntawm cov khoom siv. Qhov kev loj hlob qeeb, feem ntau tsawg dua 2 hli ib teev, ua rau lub sijhawm loj hlob ntawm cov siv lead ua ke txog li ib lub lim tiam rau ib lub boule, piv rau ob peb hnub rau cov siv lead ua ke silicon.
Tom qab kev loj hlob ntawm cov siv lead ua, cov txheej txheem ntawm kev txiav, sib tsoo, polishing, thiab kev ntxuav yog qhov nyuaj heev vim SiC qhov nyuaj, thib ob tsuas yog pob zeb diamond. Cov kauj ruam no yuav tsum khaws cia qhov chaw kom zoo thaum tsis txhob muaj cov kab nrib pleb me me, ntug chipping, thiab kev puas tsuaj hauv qab. Thaum cov wafer diameters nce ntxiv los ntawm 4 ntiv tes mus rau 6 lossis txawm tias 8 ntiv tes, kev tswj hwm kev ntxhov siab thermal thiab kev ua tiav qhov tsis muaj qhov tsis zoo nthuav dav dhau los ua qhov nyuaj zuj zus.
2. SiC Epitaxy: Txheej Sib Xws thiab Kev Tswj Doping
Kev loj hlob ntawm Epitaxial ntawm SiC txheej ntawm cov substrates yog qhov tseem ceeb vim tias lub cuab yeej ua haujlwm hluav taws xob ncaj qha nyob ntawm qhov zoo ntawm cov txheej no. Chemical vapor deposition (CVD) yog txoj kev tseem ceeb, tso cai rau kev tswj hwm qhov tseeb ntawm hom doping (n-hom lossis p-hom) thiab txheej tuab. Raws li qhov ntsuas voltage nce, qhov xav tau epitaxial txheej tuab tuaj yeem nce los ntawm ob peb micrometers mus rau kaum lossis txawm tias pua pua micrometers. Kev tswj hwm qhov tuab sib xws, kev tiv taus tsis tu ncua, thiab qhov tsis zoo qis thoob plaws cov txheej tuab yog qhov nyuaj heev.
Cov khoom siv thiab cov txheej txheem Epitaxy tam sim no raug tswj hwm los ntawm ob peb tus neeg muag khoom thoob ntiaj teb, tsim cov teeb meem nkag mus rau cov chaw tsim khoom tshiab. Txawm tias muaj cov khoom siv zoo, kev tswj hwm epitaxial tsis zoo tuaj yeem ua rau cov txiaj ntsig qis, txo qis kev ntseeg siab, thiab kev ua haujlwm ntawm cov khoom siv tsis zoo.
3. Kev Tsim Khoom Siv: Cov Txheej Txheem Ua Kom Tiav Thiab Kev Sib Xws ntawm Cov Khoom Siv
Kev tsim cov khoom siv SiC muaj ntau yam teeb meem ntxiv. Cov txheej txheem diffusion silicon ib txwm tsis ua haujlwm vim SiC lub melting point siab; siv ion implantation hloov chaw. Yuav tsum tau kub siab annealing kom ua haujlwm dopants, uas muaj kev pheej hmoo ntawm kev puas tsuaj rau crystal lattice lossis kev puas tsuaj ntawm qhov chaw.
Kev tsim cov hlau sib cuag zoo yog lwm qhov teeb meem tseem ceeb. Kev tiv thaiv kev sib cuag qis (<10⁻⁵ Ω·cm²) yog qhov tseem ceeb rau kev ua haujlwm ntawm lub zog fais fab, tab sis cov hlau ib txwm muaj xws li Ni lossis Al muaj kev ruaj khov thermal tsawg. Cov txheej txheem sib xyaw ua ke txhim kho kev ruaj khov tab sis ua rau kev tiv thaiv kev sib cuag nce ntxiv, ua rau kev ua kom zoo dua qub nyuaj heev.
SiC MOSFETs kuj raug kev txom nyem los ntawm teeb meem interface; SiC/SiO₂ interface feem ntau muaj qhov ceev ntawm cov ntxiab, txwv tsis pub cov channel txav mus los thiab qhov ruaj khov ntawm qhov hluav taws xob. Kev hloov pauv sai sai ua rau muaj teeb meem nrog parasitic capacitance thiab inductance, xav tau kev tsim qauv ceev faj ntawm cov voj voog tsav tsheb thiab cov kev daws teeb meem ntim khoom.
4. Kev Ntim Khoom thiab Kev Sib Koom Tes Hauv Lub Tshuab
Cov khoom siv fais fab SiC ua haujlwm ntawm qhov hluav taws xob siab dua thiab kub dua li cov khoom siv silicon, ua rau muaj cov tswv yim ntim khoom tshiab. Cov modules uas txuas nrog hlau tsis txaus vim muaj kev txwv ntawm kev ua haujlwm thermal thiab hluav taws xob. Cov txheej txheem ntim khoom siab heev, xws li kev sib txuas wireless, kev txias ob sab, thiab kev koom ua ke ntawm cov capacitors decoupling, sensors, thiab drive circuitry, yuav tsum tau siv tag nrho SiC lub peev xwm. Cov khoom siv SiC hom Trench nrog cov khoom siv siab dua tau dhau los ua cov khoom siv tseem ceeb vim lawv qhov kev tiv thaiv conduction qis dua, txo qis parasitic capacitance, thiab txhim kho kev hloov pauv zoo dua.
5. Cov Qauv Nqi thiab Kev Cuam Tshuam ntawm Kev Lag Luam
Tus nqi siab ntawm cov khoom siv SiC feem ntau yog vim cov khoom siv substrate thiab epitaxial tsim tawm, uas ua ke suav txog kwv yees li 70% ntawm tag nrho cov nqi tsim khoom. Txawm hais tias tus nqi siab, cov khoom siv SiC muaj cov txiaj ntsig zoo dua li silicon, tshwj xeeb tshaj yog hauv cov txheej txheem ua haujlwm siab. Thaum cov khoom siv substrate thiab cov khoom siv ntau ntxiv thiab cov txiaj ntsig zoo dua, tus nqi yuav tsum txo qis, ua rau cov khoom siv SiC sib tw ntau dua hauv tsheb, lub zog rov ua dua tshiab, thiab kev siv hauv kev lag luam.
Xaus lus
Kev lag luam SiC sawv cev rau kev dhia loj hauv kev siv tshuab hauv cov ntaub ntawv semiconductor, tab sis nws txoj kev saws txais yuav raug txwv los ntawm kev loj hlob ntawm cov siv lead ua ke, kev tswj hwm txheej epitaxial, kev tsim khoom siv, thiab kev sib tw ntim khoom. Kev kov yeej cov teeb meem no xav tau kev tswj hwm qhov kub thiab txias kom raug, kev ua cov ntaub ntawv siab heev, cov qauv khoom siv tshiab, thiab cov kev daws teeb meem ntim khoom tshiab. Kev tshawb pom tas mus li hauv cov cheeb tsam no yuav tsis tsuas yog txo cov nqi thiab txhim kho cov txiaj ntsig tab sis kuj qhib tag nrho lub peev xwm ntawm SiC hauv cov khoom siv hluav taws xob tiam tom ntej, tsheb fais fab, cov tshuab hluav taws xob rov ua dua tshiab, thiab cov ntawv thov kev sib txuas lus siab.
Yav tom ntej ntawm kev lag luam SiC yog nyob rau hauv kev koom ua ke ntawm kev tsim kho tshiab ntawm cov khoom siv, kev tsim khoom meej, thiab kev tsim khoom siv, tsav tsheb hloov pauv ntawm cov kev daws teeb meem raws li silicon mus rau kev ua haujlwm siab, kev ntseeg siab siab wide-bandgap semiconductors.
Lub sijhawm tshaj tawm: Lub Kaum Ob Hlis-10-2025