TTV, BOW, WARP, thiab TIR Txhais Li Cas hauv Wafers?

Thaum tshuaj xyuas cov semiconductor silicon wafers lossis cov substrates ua los ntawm lwm cov ntaub ntawv, peb feem ntau ntsib cov cim qhia kev siv tshuab xws li: TTV, BOW, WARP, thiab tej zaum TIR, STIR, LTV, thiab lwm yam. Cov no sawv cev rau cov yam ntxwv twg?

TTV — Tag Nrho Thickness Variation
Hneev — Hneev
WARP - Kev sib tw
TIR — Tag Nrho Cov Kev Nyeem Qhia
STIR — Tag Nrho Qhov Kev Nyeem Qhia Txog Qhov Chaw
LTV - Kev Hloov Pauv Thickness Hauv Zos

1. Tag Nrho Qhov Thickness Variation — TTV

Qhov sib txawv ntawm qhov tuab siab tshaj plaws thiab tsawg kawg nkaus ntawm lub wafer piv rau lub dav hlau siv thaum lub wafer raug clamped thiab nyob ze. Nws feem ntau yog qhia hauv micrometers (μm), feem ntau sawv cev ua: ≤15 μm.

2. Hneev — Hneev

Qhov sib txawv ntawm qhov tsawg kawg nkaus thiab qhov siab tshaj plaws ntawm qhov chaw nruab nrab ntawm qhov chaw wafer mus rau lub dav hlau siv thaum lub wafer nyob rau hauv lub xeev dawb (unclamped). Qhov no suav nrog ob qho tib si concave (negative bow) thiab convex (positive bow). Nws feem ntau yog qhia hauv micrometers (μm), feem ntau sawv cev ua: ≤40 μm.

3. Ntshai — Ntshai

Qhov sib txawv ntawm qhov tsawg kawg nkaus thiab qhov siab tshaj plaws ntawm qhov chaw wafer mus rau qhov chaw siv (feem ntau yog qhov chaw tom qab ntawm wafer) thaum lub wafer nyob rau hauv lub xeev dawb (unclamped). Qhov no suav nrog ob qho tib si concave (negative warp) thiab convex (positive warp). Nws feem ntau yog qhia hauv micrometers (μm), feem ntau sawv cev ua: ≤30 μm.

4. Tag Nrho Cov Kev Nyeem Qhia — TIR

Thaum lub wafer raug clamped thiab nyob ze, siv lub dav hlau siv uas txo qhov sib sau ua ke ntawm txhua qhov chaw hauv thaj chaw zoo lossis thaj chaw tshwj xeeb ntawm qhov chaw wafer, TIR yog qhov sib txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg nkaus ntawm qhov chaw wafer mus rau lub dav hlau siv no.

XKH tau tsim los ntawm kev txawj ntse hauv cov khoom siv semiconductor xws li TTV, BOW, WARP, thiab TIR, muab cov kev pabcuam ua wafer raws li cov qauv kev lag luam nruj. Peb muab thiab txhawb nqa ntau yam khoom siv ua tau zoo xws li sapphire, silicon carbide (SiC), silicon wafers, SOI, thiab quartz, kom ntseeg tau tias qhov tiaj tiaj, qhov tuab sib xws, thiab qhov zoo ntawm qhov chaw rau cov ntawv thov siab heev hauv optoelectronics, cov khoom siv fais fab, thiab MEMS. Ntseeg peb kom xa cov khoom siv txhim khu kev qha thiab kev ua haujlwm raug uas ua tau raws li koj cov kev xav tau tsim qauv tshaj plaws.