TTV, BOW, WARP, thiab TIR txhais li cas hauv Wafers?

Thaum kuaj xyuas semiconductor silicon wafers lossis substrates ua los ntawm lwm cov ntaub ntawv, peb feem ntau ntsib cov kev qhia xws li: TTV, BOW, WARP, thiab tejzaum nws TIR, STIR, LTV, thiab lwm yam. Cov parameters no sawv cev li cas?

TTV - Tag nrho Thickness Variation
BOW — HUAB
WARP — Warp
TIR — Tag Nrho Kev Nyeem Ntawv
STIR — Site Total Indicated Reading
LTV - Qhov Thickness Variation hauv zos

1. Tag nrho Thickness Variation — TTV

Qhov sib txawv ntawm qhov siab tshaj plaws thiab qhov tsawg kawg nkaus thickness ntawm wafer txheeb ze rau lub dav hlau siv thaum lub wafer clamped thiab nyob ze. Nws yog feem ntau qhia nyob rau hauv micrometers (μm), feem ntau sawv cev li: ≤15 μm.

2. HUAB TAIS — HUAB TAIS

Qhov sib txawv ntawm qhov tsawg kawg nkaus thiab qhov siab tshaj plaws nyob deb ntawm qhov chaw nruab nrab ntawm qhov chaw wafer mus rau lub dav hlau siv thaum lub wafer nyob hauv lub xeev dawb (unclamped). Qhov no suav nrog ob qho tib si concave (tsis zoo hneev nti) thiab convex (zoo hneev nti) rooj plaub. Nws yog feem ntau qhia nyob rau hauv micrometers (μm), feem ntau sawv cev li: ≤40 μm.

3. Warp — WARP

Qhov sib txawv ntawm qhov tsawg kawg nkaus thiab qhov siab tshaj plaws ntawm qhov chaw wafer mus rau lub dav hlau siv (feem ntau yog sab nraub qaum ntawm lub wafer) thaum lub wafer nyob rau hauv lub xeev dawb (unclamped). Qhov no suav nrog ob qho tib si concave (tsis zoo warp) thiab convex (positive warp). Nws yog feem ntau qhia nyob rau hauv micrometers (μm), feem ntau sawv cev li: ≤30 μm.

4. Tag Nrho Kev Nyeem Ntawv — TIR

Thaum lub wafer yog clamped thiab nyob rau hauv kev sib cuag, siv lub dav hlau siv uas txo cov sum ntawm intercepts ntawm tag nrho cov ntsiab lus nyob rau hauv lub zoo cheeb tsam los yog ib cheeb tsam nyob rau hauv lub cheeb tsam ntawm lub wafer nto, lub TIR yog qhov sib txawv ntawm qhov siab tshaj plaws thiab yam tsawg kawg nkaus deb ntawm lub wafer nto rau lub dav hlau siv no.

Tsim los ntawm kev txawj ntse hauv cov khoom siv semiconductor tshwj xeeb xws li TTV, BOW, WARP, thiab TIR, XKH muab cov kev pabcuam kev cai wafer ua tiav raws li cov qauv kev lag luam nruj. Peb muab thiab txhawb nqa ntau yam ntaub ntawv ua tau zoo xws li sapphire, silicon carbide (SiC), silicon wafers, SOI, thiab quartz, kom ntseeg tau tias qhov flatness, thickness sib xws, thiab nto zoo rau kev siv siab heev hauv optoelectronics, cov khoom siv fais fab, thiab MEMS. Cia siab rau peb kom xa cov khoom siv txhim khu kev qha thiab precision machining uas ua tau raws li koj cov kev xav tau tshaj plaws tsim.