Cov qauv Sapphire Substrate PSS 2 nti 4 nti 6 nti ICP qhuav etching siv tau rau LED chips
Tus yam ntxwv tseem ceeb
1. Cov yam ntxwv ntawm cov khoom siv: Cov khoom siv hauv qab yog ib lub pob zeb sapphire siv lead ua ib leeg (Al₂O₃), uas muaj qhov nyuaj siab, tiv taus cua sov siab thiab ruaj khov tshuaj lom neeg.
2. Cov qauv nto: Qhov nto yog tsim los ntawm photolithography thiab etching rau hauv cov qauv micro-nano periodic, xws li cones, pyramids lossis hexagonal arrays.
3. Kev ua tau zoo ntawm qhov muag: Los ntawm kev tsim qauv ntawm qhov chaw, tag nrho cov kev cuam tshuam ntawm lub teeb ntawm qhov interface raug txo qis, thiab kev ua haujlwm ntawm lub teeb tau zoo dua.
4. Kev ua tau zoo ntawm thermal: Sapphire substrate muaj kev ua tau zoo heev ntawm thermal conductivity, tsim rau cov ntawv thov LED fais fab loj.
5. Cov lus qhia txog qhov loj me: Cov qhov loj me feem ntau yog 2 nti (50.8mm), 4 nti (100mm) thiab 6 nti (150mm).
Cov chaw thov tseem ceeb
1. Kev tsim khoom LED:
Txhim kho qhov ua tau zoo ntawm kev rho tawm lub teeb: PSS txo qhov poob lub teeb los ntawm kev tsim qauv, ua rau LED ci ntsa iab thiab ua haujlwm tau zoo dua.
Kev loj hlob zoo dua ntawm epitaxial: Cov qauv patterned muab lub hauv paus loj hlob zoo dua rau GaN epitaxial txheej thiab txhim kho kev ua haujlwm ntawm LED.
2. Laser Diode (LD):
Cov lasers muaj zog heev: Qhov ua tau zoo ntawm thermal conductivity thiab kev ruaj khov ntawm PSS yog qhov tsim nyog rau cov laser diodes muaj zog heev, txhim kho kev ua haujlwm ntawm cov cua sov thiab kev ntseeg tau.
Qhov tam sim no qis dua: Txhim kho qhov kev loj hlob ntawm epitaxial, txo qhov tam sim no ntawm lub laser diode, thiab txhim kho kev ua haujlwm zoo.
3. Lub tshuab ntes duab:
Kev rhiab heev: Kev kis tau lub teeb siab thiab qhov tsis zoo ntawm PSS txhim kho qhov rhiab heev thiab kev teb ceev ntawm lub photodetector.
Cov lus teb dav dav spectral: tsim nyog rau kev tshawb pom photoelectric hauv ultraviolet mus rau qhov pom ntau yam.
4. Cov khoom siv hluav taws xob:
Kev tiv thaiv hluav taws xob siab: Sapphire lub rwb thaiv tsev siab thiab kev ruaj khov thermal yog qhov tsim nyog rau cov khoom siv hluav taws xob siab.
Kev ua kom sov zoo: Kev ua kom sov siab ua rau kev ua haujlwm ntawm cov khoom siv fais fab zoo dua thiab ua kom lub neej ua haujlwm ntev.
5. Cov khoom siv Rf:
Kev ua haujlwm zaus siab: Qhov poob dielectric qis thiab kev ruaj khov thermal siab ntawm PSS yog qhov tsim nyog rau cov khoom siv RF zaus siab.
Suab nrov qis: Qhov tiaj tiaj thiab qhov tsis zoo tsawg txo cov suab nrov ntawm lub cuab yeej thiab txhim kho qhov zoo ntawm lub teeb liab.
6. Cov cuab yeej ntsuas biosensors:
Kev kuaj pom kev rhiab heev: Kev kis tau lub teeb siab thiab kev ruaj khov ntawm PSS yog qhov tsim nyog rau cov biosensors rhiab heev.
Kev sib haum xeeb ntawm biocompatibility: Lub biocompatibility ntawm sapphire ua rau nws tsim nyog rau kev kho mob thiab kev siv biodetection.
Cov qauv sapphire substrate (PSS) nrog GaN epitaxial khoom:
Cov qauv sapphire substrate (PSS) yog ib qho substrate zoo tagnrho rau GaN (gallium nitride) epitaxial kev loj hlob. Lub lattice tsis tu ncua ntawm sapphire yog ze rau GaN, uas tuaj yeem txo cov lattice mismatches thiab qhov tsis zoo hauv epitaxial kev loj hlob. Lub micro-nano qauv ntawm PSS nto tsis yog tsuas yog txhim kho qhov kev ua haujlwm ntawm lub teeb, tab sis kuj txhim kho qhov zoo ntawm cov siv lead ua ntawm GaN epitaxial txheej, yog li txhim kho kev ua tau zoo thiab kev ntseeg siab ntawm LED.
Cov kev tsis sib xws
| Khoom | Cov Khoom Siv Sapphire Muaj Qauv (2 ~ 6 nti) | ||
| Txoj kab uas hla | 50.8 ± 0.1 hli | 100.0 ± 0.2 hli | 150.0 ± 0.3 hli |
| Qhov tuab | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Kev Taw Qhia Nto | C-dav hlau (0001) tawm ntawm lub kaum sab xis mus rau M-axis (10-10) 0.2 ± 0.1° | ||
| C-dav hlau (0001) tawm ntawm lub kaum sab xis mus rau A-axis (11-20) 0 ± 0.1° | |||
| Kev Taw Qhia Tiaj Tus Thawj Coj | A-Dav Hlau (11-20) ± 1.0° | ||
| Qhov Ntev Tiaj Tus Thawj | 16.0 ± 1.0 hli | 30.0 ± 1.0 hli | 47.5 ± 2.0 hli |
| R-Dav Hlau | 9 teev | ||
| Pem Hauv Ntej Qhov Tiav | Muaj qauv | ||
| Tom qab nto tiav | SSP: Zoo-av, Ra = 0.8-1.2um; DSP: Epi-polished, Ra <0.3nm | ||
| Laser Mark | Sab nraub qaum | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| Hneev | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Kev Tshem Tawm Ntug | ≤2 hli | ||
| Cov Qauv Qhia Txog | Cov Qauv Duab | Dome, Cone, Pyramid | |
| Qhov Siab ntawm Qauv | 1.6 ~ 1.8μm | ||
| Qauv Txoj Kab uas hla | 2.75 ~ 2.85μm | ||
| Qhov Chaw Qauv | 0.1 ~ 0.3μm | ||
XKH tshwj xeeb hauv kev muab cov khoom siv sapphire substrates (PSS) zoo, kho kom haum raws li tus neeg xav tau nrog kev txhawb nqa kev siv tshuab thiab kev pabcuam tom qab muag los pab cov neeg siv khoom ua tiav kev tsim kho tshiab hauv LED, zaub thiab optoelectronics.
1. Kev muab khoom PSS zoo: Cov qauv sapphire substrates hauv ntau qhov ntau thiab tsawg (2 ", 4", 6 ") kom tau raws li qhov xav tau ntawm LED, zaub thiab optoelectronic khoom siv.
2. Kev tsim tshwj xeeb: Kho kom haum rau qhov chaw me me (xws li lub khob hliav qab, lub pyramid lossis lub hexagonal array) raws li cov neeg siv khoom xav tau los ua kom zoo dua qhov kev rho tawm lub teeb.
3. Kev txhawb nqa kev txawj ntse: Muab kev tsim daim ntawv thov PSS, kev txhim kho cov txheej txheem thiab kev sab laj txog kev txawj ntse los pab cov neeg siv khoom txhim kho kev ua tau zoo ntawm cov khoom.
4. Kev txhawb nqa kev loj hlob ntawm Epitaxial: PSS phim nrog GaN epitaxial khoom siv tau muab los xyuas kom meej tias cov txheej epitaxial zoo loj hlob.
5. Kev kuaj thiab ntawv pov thawj: Muab daim ntawv qhia txog kev tshuaj xyuas zoo ntawm PSS kom ntseeg tau tias cov khoom ua tau raws li cov qauv kev lag luam.
Daim duab qhia ntxaws ntxaws
