Semi-Insulating Silicon Carbide (SiC) Substrate High-Purity Rau Ar Cov Iav

Kev Piav Qhia Luv:

Cov khoom siv silicon carbide semi-insulating uas muaj purity siab (SiC) yog cov khoom siv tshwj xeeb ua los ntawm silicon carbide, siv dav hauv kev tsim cov khoom siv hluav taws xob, cov khoom siv xov tooj cua zaus (RF), thiab cov khoom siv semiconductor uas muaj zaus siab, kub siab. Silicon carbide, ua cov khoom siv semiconductor dav dav, muaj cov khoom siv hluav taws xob, thermal, thiab mechanical zoo heev, ua rau nws tsim nyog rau kev siv hauv cov chaw muaj zog siab, zaus siab, thiab kub siab.

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Kev Txheeb Xyuas Khoom ntawm Semi-Insulating SiC Wafers

Peb cov High-Purity Semi-Insulating SiC Wafers yog tsim los rau cov khoom siv hluav taws xob siab heev, RF/microwave Cheebtsam, thiab cov ntawv thov optoelectronic. Cov wafers no yog tsim los ntawm cov khoom siv zoo 4H- lossis 6H-SiC ib leeg siv lead ua, siv txoj kev loj hlob ntawm Physical Vapor Transport (PVT) zoo, ua raws li kev sib xyaw ua ke tob. Qhov tshwm sim yog cov wafer nrog cov khoom zoo tshaj plaws hauv qab no:

Ultra-High Resistivity≥1 × 10¹² Ω·cm, ua kom txo tau cov dej ntws tawm hauv cov khoom siv hloov pauv hluav taws xob siab.
Dav Bandgap (~3.2 eV): Xyuas kom muaj kev ua tau zoo heev hauv qhov kub thiab txias, thaj chaw siab, thiab qhov chaw muaj hluav taws xob ntau.
Kev Ua Haujlwm Thermal Zoo Tshaj Plaws: >4.9 W/cm·K, muab kev tso cua sov zoo hauv cov ntawv thov muaj zog heev.
Lub Zog Kho Kom Zoo Dua: Nrog Mohs hardness ntawm 9.0 (qhov thib ob tsuas yog pob zeb diamond), thermal expansion tsawg, thiab muaj zog tshuaj stability.
Atomically Smooth SurfaceRa <0.4 nm thiab qhov tsis xws luag <1/cm², zoo tagnrho rau MOCVD/HVPE epitaxy thiab micro-nano fabrication.

Muaj Qhov LojCov qhov loj txheem suav nrog 50, 75, 100, 150, thiab 200 mm (2"–8"), nrog rau cov kab uas hla kev cai muaj txog li 250 mm.
Qhov ntau thiab tsawg: 200–1,000 μm, nrog rau kev kam rau siab ntawm ± 5 μm.

Cov Txheej Txheem Tsim Khoom ntawm Semi-Insulating SiC Wafers

Kev Npaj Hmoov SiC Uas Muaj Kev Ntshiab Siab

Cov Khoom Pib6N-qib SiC hmoov, purified siv ntau theem nqus tsev sublimation thiab thermal kho, kom ntseeg tau tias muaj hlau tsawg (Fe, Cr, Ni < 10 ppb) thiab tsawg kawg polycrystalline inclusions.

Kev Loj Hlob ntawm Ib Leeg Crystal uas Hloov Kho PVT

Ib puag ncig: Nyob ze-nqus tsev (10⁻³–10⁻² Torr).
Kub: Lub khob hliav graphite raug cua sov rau ~ 2,500 ° C nrog kev tswj hwm thermal gradient ntawm ΔT ≈ 10–20 ° C / cm.
Kev Tsim Cov Pa Roj thiab CrucibleCov khoom sib cais crucible thiab cov porous uas tsim tshwj xeeb ua kom cov pa sib faib sib npaug thiab tiv thaiv kev tsim nucleation tsis xav tau.
Kev Pub Noj thiab Kev Tig DynamicKev rov ua kom tiav ntawm SiC hmoov thiab kev sib hloov ntawm cov pas nrig siv lead ua rau muaj qhov sib txawv qis (<3,000 cm⁻²) thiab kev taw qhia 4H/6H sib xws.

Kev Them Nyiaj Rau Qib Siab Deep-Level Annealing

Hydrogen AnnealUa nyob rau hauv H₂ huab cua ntawm qhov kub ntawm 600–1,400 °C kom ua kom cov ntxiab tob tob thiab ua kom cov neeg nqa khoom sab hauv ruaj khov.
N/Al Co-Doping (Xaiv tau)Kev koom ua ke ntawm Al (tus txais) thiab N (tus pub) thaum lub sijhawm loj hlob lossis CVD tom qab loj hlob los tsim cov khub pub-tus txais ruaj khov, tsav cov ncov resistivity.

Kev Txiav Txim Siab Thiab Kev Txiav Ntau Theem

Kev Txiav Hlau Pob Zeb DiamondCov ncuav mog qab zib txiav ua tej daim me me li ntawm 200–1,000 μm, nrog rau kev puas tsuaj tsawg kawg nkaus thiab kev kam rau siab ntawm ± 5 μm.
Txheej Txheem Lapping: Cov pob zeb diamond abrasives uas sib law liag loj mus rau me me yuav tshem tawm qhov puas tsuaj ntawm lub tshuab txiav, npaj cov wafer rau kev txhuam.

Kev Txhuam Txhuam Tshuaj (CMP)

Kev Sib Txhuam Xov XwmNano-oxide (SiO₂ lossis CeO₂) slurry nyob rau hauv cov kua alkaline me me.
Kev Tswj Xyuas Txheej TxheemKev txhuam kom tsis muaj kev ntxhov siab tsawg txo qhov roughness, ua tiav RMS roughness ntawm 0.2–0.4 nm thiab tshem tawm cov khawb me me.

Kev Ntxuav thiab Ntim Khoom Zaum Kawg

Kev Ntxuav UltrasonicCov txheej txheem ntxuav ntau kauj ruam (cov kuab tshuaj organic, kev kho acid/base, thiab kev yaug dej deionized) hauv chav huv Class-100.
Kev Kaw thiab Ntim Khoom: Wafer ziab nrog nitrogen purge, kaw rau hauv cov hnab tiv thaiv uas muaj nitrogen thiab ntim rau hauv cov thawv sab nraud uas tiv thaiv kev co thiab tiv thaiv kev co.

Cov Lus Qhia Txog Semi-Insulating SiC Wafers

Kev Ua Tau Zoo ntawm Khoom	Qib P	Qib D
I. Cov Qauv Siv Crystal	I. Cov Qauv Siv Crystal	I. Cov Qauv Siv Crystal
Crystal Polytype	4H	4H
Refractive Index a	>2.6 @589nm	>2.6 @589nm
Tus Nqi Nqus Tau	≤0.5% @ 450-650nm	≤1.5% @ 450-650nm
MP Transmittance a (Tsis muaj txheej)	≥66.5%	≥66.2%
Huab cua daj cua dub	≤0.3%	≤1.5%
Kev suav nrog Polytype a	Tsis pub	Thaj chaw sib sau ua ke ≤20%
Qhov Ceev ntawm Micropipe a	≤0.5 / cm²	≤2 / cm²
Hexagonal Void a	Tsis pub	Tsis muaj
Kev suav nrog ntau yam	Tsis pub	Tsis muaj
Kev suav nrog MP a	Tsis pub	Tsis muaj
II. Cov Txheej Txheem Mechanical	II. Cov Txheej Txheem Mechanical	II. Cov Txheej Txheem Mechanical
Txoj kab uas hla	150.0 hli +0.0 hli / -0.2 hli	150.0 hli +0.0 hli / -0.2 hli
Kev Taw Qhia Nto	{0001} ±0.3°	{0001} ±0.3°
Qhov Ntev Tiaj Tus Thawj	Qhov Notch	Qhov Notch
Qhov Ntev Thib Ob	Tsis muaj chav tsev thib ob	Tsis muaj chav tsev thib ob
Kev Taw Qhia Notch	<1-100> ±2°	<1-100> ±2°
Lub kaum sab xis	90° +5° / -1°	90° +5° / -1°
Qhov tob ntawm qhov nkhaus	1 hli ntawm ntug +0.25 hli / -0.0 hli	1 hli ntawm ntug +0.25 hli / -0.0 hli
Kev Kho Mob Nto	C-ntsej muag, Si-ntsej muag: Chemo-Mechanical Polishing (CMP)	C-ntsej muag, Si-ntsej muag: Chemo-Mechanical Polishing (CMP)
Ntug Wafer	Chamfered (Puag ncig)	Chamfered (Puag ncig)
Qhov Roughness ntawm Qhov Chaw (AFM) (5μm x 5μm)	Si-ntsej muag, C-ntsej muag: Ra ≤ 0.2 nm	Si-ntsej muag, C-ntsej muag: Ra ≤ 0.2 nm
Thickness a (Tropel)	500.0 μm ± 25.0 μm	500.0 μm ± 25.0 μm
LTV (Tropel) (40mm x 40mm) a	≤ 2 μm	≤ 4 μm
Tag Nrho Thickness Variation (TTV) a (Tropel)	≤ 3 μm	≤ 5 μm
Bow (Tus Nqi Tsis Muaj) a (Tropel)	≤ 5 μm	≤ 15 μm
Warp a (Tropel)	≤ 15 μm	≤ 30 μm
III. Cov Qauv Nto	III. Cov Qauv Nto	III. Cov Qauv Nto
Chip/Notch	Tsis pub	≤ 2 pcs, txhua qhov ntev thiab dav ≤ 1.0 hli
Khawb ib (Si-lub ntsej muag, CS8520)	Tag nrho ntev ≤ 1 x Txoj kab uas hla	Tag nrho ntev ≤ 3 x Txoj kab uas hla
Particle a (Si-face, CS8520)	≤ 500 daim	Tsis muaj
Tawg	Tsis pub	Tsis pub
Kev ua qias tuaj a	Tsis pub	Tsis pub

Cov Ntawv Thov Tseem Ceeb ntawm Semi-Insulating SiC Wafers

Cov Khoom Siv Hluav Taws Xob Muaj Zog SiabMOSFETs raws li SiC, Schottky diodes, thiab cov modules fais fab rau cov tsheb fais fab (EVs) tau txais txiaj ntsig los ntawm SiC qhov kev tiv thaiv qis thiab muaj peev xwm siab.
RF & MicrowaveSiC qhov kev ua haujlwm siab thiab kev tiv thaiv hluav taws xob zoo tagnrho rau 5G lub hauv paus-chaw nres tsheb amplifiers, radar modules, thiab kev sib txuas lus satellite.
Kev siv hluav taws xob OptoelectronicsCov UV-LEDs, cov diodes xiav-laser, thiab cov photodetectors siv cov atomically du SiC substrates rau kev loj hlob epitaxial sib xws.
Kev Tshawb Pom Ib puag ncig hnyav heevSiC qhov ruaj khov ntawm qhov kub siab (> 600 ° C) ua rau nws zoo meej rau cov sensors hauv qhov chaw ib puag ncig hnyav, suav nrog cov roj turbines thiab cov khoom siv nuclear.
Kev Ua Si thiab Kev Tiv Thaiv Huab CuaSiC muaj kev ruaj khov rau cov khoom siv hluav taws xob hauv cov satellites, cov tshuab foob pob hluav taws, thiab cov khoom siv hluav taws xob aviation.
Kev Tshawb Fawb Qib SiabCov kev daws teeb meem tshwj xeeb rau kev suav lej quantum, micro-optics, thiab lwm yam kev tshawb fawb tshwj xeeb.

Cov Lus Nug Feem Ntau

Vim li cas thiaj siv cov SiC semi-insulating dua li cov SiC conductive?
Cov SiC semi-insulating muaj cov resistivity siab dua, uas txo cov dej ntws tawm hauv cov khoom siv high-voltage thiab high-frequency. Cov SiC conductive yog qhov tsim nyog dua rau cov ntawv thov uas xav tau kev conductivity hluav taws xob.
Cov wafers no puas siv tau rau kev loj hlob epitaxial?
Yog lawm, cov wafers no yog epi-npaj thiab optimized rau MOCVD, HVPE, lossis MBE, nrog rau kev kho qhov chaw thiab kev tswj qhov tsis zoo kom ntseeg tau tias cov txheej epitaxial zoo dua.
Koj ua li cas thiaj paub tseeb tias lub wafer huv si?
Ib qho txheej txheem chav huv Class-100, kev ntxuav ultrasonic ntau kauj ruam, thiab cov ntim khoom uas muaj nitrogen-sealed lav tias cov wafers tsis muaj cov kuab paug, cov khoom seem, thiab cov khawb me me.
Lub sijhawm ua cov xaj yog dab tsi?
Cov qauv feem ntau xa tuaj tsis pub dhau 7-10 hnub ua haujlwm, thaum cov xaj tsim khoom feem ntau xa tuaj tsis pub dhau 4-6 lub lis piam, nyob ntawm qhov loj me ntawm cov wafer thiab cov yam ntxwv tshwj xeeb.
Koj puas tuaj yeem muab cov duab kev cai?
Yog, peb tuaj yeem tsim cov khoom siv tshwj xeeb hauv ntau yam duab xws li cov qhov rai planar, V-grooves, spherical lenses, thiab ntau ntxiv.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.