SiC ceramic chuck tais Ceramic suction khob precision machining customized
Cov yam ntxwv ntawm cov khoom siv:
1. Kev nyuaj siab: Mohs hardness ntawm silicon carbide yog 9.2-9.5, thib ob tsuas yog pob zeb diamond, nrog rau kev hnav tsis kam zoo.
2. Kev ua tau zoo ntawm cov cua sov: cov thermal conductivity ntawm silicon carbide yog siab txog li 120-200 W / m · K, uas tuaj yeem tso cua sov sai sai thiab tsim nyog rau qhov chaw kub siab.
3. Cov coefficient ntawm kev nthuav dav thermal qis: silicon carbide thermal expansion coefficient qis (4.0-4.5 × 10⁻⁶ / K), tseem tuaj yeem tswj tau qhov ruaj khov ntawm qhov kub siab.
4. Kev ruaj khov tshuaj lom neeg: silicon carbide acid thiab alkali corrosion tsis kam, tsim nyog rau kev siv hauv cov tshuaj lom neeg corrosive ib puag ncig.
5. Lub zog kho tshuab siab: silicon carbide muaj lub zog khoov siab thiab lub zog compressive, thiab tuaj yeem tiv taus kev ntxhov siab loj.
Nta:
1. Hauv kev lag luam semiconductor, cov wafers nyias heev yuav tsum tau muab tso rau ntawm lub khob nqus tsev, lub tshuab nqus tsev siv los kho cov wafers, thiab cov txheej txheem ntawm kev siv quav ciab, kev nyias nyias, kev siv quav ciab, kev ntxuav thiab kev txiav yog ua tiav rau ntawm cov wafers.
2. Lub tshuab nqus silicon carbide muaj cov thermal conductivity zoo, tuaj yeem ua kom lub sijhawm siv waxing thiab waxing luv dua, txhim kho kev ua haujlwm ntau lawm.
3. Silicon carbide nqus tsev sucker kuj muaj cov kua qaub thiab alkali corrosion zoo.
4. Piv nrog rau cov phaj corundum ib txwm muaj, nws ua rau lub sijhawm thauj khoom thiab thau khoom cua sov thiab txias luv dua, ua kom kev ua haujlwm zoo dua; Tib lub sijhawm, nws tuaj yeem txo qhov hnav ntawm cov phaj sab saud thiab sab qis, tswj tau qhov tseeb ntawm lub dav hlau, thiab txuas lub neej ua haujlwm ntev txog li 40%.
5. Cov khoom siv me me, lub teeb yuag. Nws yooj yim dua rau cov neeg teb xov tooj nqa cov pallets, txo qhov kev pheej hmoo ntawm kev sib tsoo los ntawm kev nyuaj thauj mus los li ntawm 20%.
6. Loj: qhov siab tshaj plaws txoj kab uas hla 640 hli; Qhov tiaj tus: 3um lossis tsawg dua
Daim ntawv thov teb:
1. Kev tsim khoom siv semiconductor
●Kev ua cov khoom siv wafer:
Siv rau kev kho wafer hauv photolithography, etching, nyias zaj duab xis deposition thiab lwm yam txheej txheem, kom ntseeg tau tias muaj qhov tseeb siab thiab ua tiav cov txheej txheem. Nws qhov kub siab thiab kev tiv thaiv corrosion yog qhov tsim nyog rau cov chaw tsim khoom semiconductor hnyav.
● Kev loj hlob ntawm epitaxial:
Hauv SiC lossis GaN epitaxial kev loj hlob, ua tus cab kuj kom cua sov thiab kho cov wafers, kom ntseeg tau tias qhov kub thiab txias sib xws thiab siv lead ua zoo ntawm qhov kub siab, txhim kho kev ua haujlwm ntawm lub cuab yeej.
2. Cov khoom siv photoelectric
● Kev Tsim Khoom LED:
Siv los kho sapphire lossis SiC substrate, thiab ua tus neeg nqa cua sov hauv MOCVD cov txheej txheem, kom ntseeg tau tias muaj kev sib npaug ntawm kev loj hlob epitaxial, txhim kho LED luminous efficiency thiab zoo.
●Diode laser:
Ua ib qho khoom siv high-precision, kho thiab cua sov substrate kom ntseeg tau tias qhov kub thiab txias ntawm cov txheej txheem ruaj khov, txhim kho lub zog tso zis thiab kev ntseeg tau ntawm lub laser diode.
3. Kev ua haujlwm kom raug
●Kev ua cov khoom siv kho qhov muag:
Nws yog siv rau kev kho cov khoom siv precision xws li optical lenses thiab cov lim dej kom ntseeg tau tias muaj kev ua haujlwm siab thiab muaj kuab paug tsawg thaum lub sijhawm ua tiav, thiab nws tsim nyog rau kev siv tshuab siab.
●Kev ua cov khoom siv av nplaum:
Ua ib qho khoom siv ruaj khov siab, nws tsim nyog rau kev ua kom raug ntawm cov khoom siv ceramic kom ntseeg tau tias kev ua haujlwm raug thiab sib xws hauv qab qhov kub thiab txias thiab ib puag ncig corrosive.
4. Kev sim ua tej yam tshiab
●Kev sim kub siab:
Ua ib lub cuab yeej kho cov qauv hauv qhov chaw kub siab, nws txhawb nqa kev sim kub heev saum 1600 ° C kom ntseeg tau tias qhov kub sib xws thiab cov qauv ruaj khov.
●Kev sim nqus tsev:
Ua ib qho qauv kho thiab cua sov nqa khoom hauv qhov chaw nqus tsev, kom ntseeg tau tias qhov tseeb thiab rov ua dua ntawm qhov kev sim, tsim nyog rau kev nqus tsev txheej thiab kev kho cua sov.
Cov lus qhia txog kev siv:
| (Cov khoom siv) | (Chav) | (ssic) | |
| (Cov ntsiab lus SiC) |
| (Wt)% | >99 |
| (Qhov nruab nrab ntawm cov noob) |
| micron | 4-10 |
| (Qhov Ceev) |
| kg/dm3 | >3.14 |
| (Qhov pom tseeb ntawm qhov porosity) |
| Vo1% | <0.5 |
| (Vickers hardness) | HV 0.5 | GPa | 28 |
| *( Lub zog khoov tau) | 20ºC | MPa | 450 |
| (Lub zog nias) | 20ºC | MPa | 3900 |
| (Elastic Modulus) | 20ºC | GPa | 420 |
| (Kev tawg tawv) |
| MPa/m'% | 3.5 |
| (Kev coj ua cua sov) | 20°C | W/(m*K) | 160 |
| (Kev tiv taus) | 20°C | Ohm.cm | 106-108 |
|
| ib (RT**...80ºC) | K-1*10-6 | 4.3 |
|
|
| oºC | 1700 xyoo |
Nrog ntau xyoo ntawm kev khaws cov txuj ci thiab kev paub txog kev lag luam, XKH muaj peev xwm kho cov yam ntxwv tseem ceeb xws li qhov loj me, txoj kev cua sov thiab kev tsim cov khoom nqus tsev raws li qhov xav tau ntawm cov neeg siv khoom, kom ntseeg tau tias cov khoom tau hloov kho zoo meej rau cov txheej txheem ntawm cov neeg siv khoom. SiC silicon carbide ceramic chucks tau dhau los ua cov khoom tseem ceeb hauv kev ua wafer, epitaxial kev loj hlob thiab lwm yam txheej txheem tseem ceeb vim lawv cov thermal conductivity zoo heev, kev ruaj khov kub siab thiab kev ruaj khov tshuaj lom neeg. Tshwj xeeb tshaj yog hauv kev tsim cov khoom siv semiconductor tiam thib peb xws li SiC thiab GaN, qhov kev thov rau silicon carbide ceramic chucks txuas ntxiv mus loj hlob. Yav tom ntej, nrog rau kev txhim kho sai ntawm 5G, tsheb fais fab, kev txawj ntse dag thiab lwm yam thev naus laus zis, kev siv silicon carbide ceramic chucks hauv kev lag luam semiconductor yuav dav dua.
Daim duab qhia ntxaws ntxaws
