SiC ceramic kawg effector handing caj npab rau wafer carring

Kev Piav Qhia Luv:

LiNbO₃ Wafers sawv cev rau tus qauv kub hauv kev sib xyaw ua ke photonics thiab precision acoustics, xa cov kev ua tau zoo tsis muaj qhov sib xws hauv cov tshuab optoelectronic niaj hnub. Ua ib lub chaw tsim khoom ua lag luam, peb tau ua kom zoo tshaj plaws ntawm kev tsim cov khoom siv no los ntawm kev siv cov txheej txheem sib npaug ntawm cov pa dej, ua tiav kev ua tiav crystalline ua tus thawj coj hauv kev lag luam nrog cov qhov tsis xws luag hauv qab 50 / cm².

XKH muaj peev xwm tsim tau ntau yam khoom uas muaj qhov loj li ntawm 75mm txog 150mm, nrog rau kev tswj qhov tseeb (X/Y/Z-txiav ±0.3°) thiab cov kev xaiv tshwj xeeb uas suav nrog cov khoom tsis tshua muaj. Kev sib xyaw ua ke ntawm cov khoom hauv LiNbO₃ Wafers - suav nrog lawv cov coefficient r₃₃ zoo kawg nkaus (32±2 pm/V) thiab kev pom tseeb dav dav los ntawm ze-UV mus rau nruab nrab-IR - ua rau lawv tsis tseem ceeb rau cov voj voog photonic tiam tom ntej thiab cov khoom siv suab nrov siab.

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SiC ceramic end effector Abstract

Lub SiC (Silicon Carbide) ceramic end-effector yog ib qho tseem ceeb hauv cov txheej txheem tuav wafer siab uas siv rau hauv kev tsim khoom semiconductor thiab cov chaw ua haujlwm microfabrication siab heev. Tsim los ua kom tau raws li qhov xav tau ntawm cov chaw huv si, kub siab, thiab ruaj khov heev, lub tshuab tshwj xeeb no ua kom ntseeg tau tias kev thauj mus los ntawm wafers txhim khu kev qha thiab tsis muaj kuab paug thaum lub sijhawm tseem ceeb ntawm kev tsim khoom xws li lithography, etching, thiab deposition.

Siv cov khoom siv zoo tshaj plaws ntawm silicon carbide—xws li kev ua tau zoo ntawm cov cua sov, qhov nyuaj heev, kev tsis muaj zog ntawm cov tshuaj lom neeg zoo heev, thiab kev nthuav dav thermal tsawg kawg nkaus—SiC ceramic end-effector muab cov khoom siv kho tshuab tsis sib xws thiab kev ruaj khov txawm tias nyob hauv kev kub ceev lossis hauv cov txheej txheem corrosive. Nws cov khoom me me thiab cov yam ntxwv tsis kam plasma ua rau nws tsim nyog rau chav huv thiab cov ntawv thov ua haujlwm nqus tsev, qhov twg kev tswj hwm qhov chaw wafer thiab txo cov khoom me me yog qhov tseem ceeb.

SiC ceramic kawg effector Daim Ntawv Thov

1. Kev Tswj Xyuas Wafer Semiconductor

Cov khoom siv kawg ntawm SiC ceramic siv dav hauv kev lag luam semiconductor rau kev tuav cov silicon wafers thaum lub sijhawm tsim khoom. Cov khoom siv kawg no feem ntau yog ntsia rau ntawm cov caj npab robotic lossis cov tshuab hloov pauv lub tshuab nqus tsev thiab tau tsim los kom haum rau cov wafers ntawm ntau qhov ntau thiab tsawg xws li 200mm thiab 300mm. Lawv yog qhov tseem ceeb hauv cov txheej txheem suav nrog Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), etching, thiab diffusion - qhov twg kub siab, qhov chaw nqus tsev, thiab cov pa roj corrosive yog qhov sib xws. SiC qhov kev tiv thaiv thermal zoo tshaj plaws thiab kev ruaj khov tshuaj ua rau nws yog cov khoom siv zoo tshaj plaws los tiv taus cov chaw ib puag ncig hnyav yam tsis muaj kev puas tsuaj.

2. Kev Sib Txuas ntawm Chav Huv thiab Lub Tshuab Nqus Tsev

Hauv chav huv thiab qhov chaw nqus tsev, qhov twg yuav tsum txo qhov kev ua qias tuaj ntawm cov khoom me me, SiC ceramics muaj cov txiaj ntsig zoo heev. Cov khoom siv qhov ntom ntom thiab du nto tiv taus kev tsim cov khoom me me, pab tswj kev ua kom zoo thaum thauj mus los. Qhov no ua rau SiC kawg effectors tshwj xeeb tshaj yog haum rau cov txheej txheem tseem ceeb xws li Extreme Ultraviolet Lithography (EUV) thiab Atomic Layer Deposition (ALD), qhov twg kev huv yog qhov tseem ceeb. Ntxiv mus, SiC qhov kev tawm pa tawm tsawg thiab kev tiv thaiv plasma siab ua kom muaj kev ua tau zoo hauv cov chav nqus tsev, ua kom lub neej ntawm cov cuab yeej ntev dua thiab txo qhov zaus txij nkawm.

3. Cov Txheej Txheem Qhia Chaw Siab

Kev ua kom raug thiab ruaj khov yog qhov tseem ceeb hauv cov txheej txheem tswj hwm wafer siab heev, tshwj xeeb tshaj yog hauv kev ntsuas, kev tshuaj xyuas, thiab cov khoom siv sib dhos. SiC ceramics muaj cov coefficient qis heev ntawm kev nthuav dav thermal thiab kev tawv ncauj siab, uas tso cai rau qhov kawg effector kom tswj tau nws qhov tseeb ntawm cov qauv txawm tias nyob hauv qab thermal cycling lossis kev thauj khoom siv tshuab. Qhov no ua kom ntseeg tau tias cov wafers tseem sib dhos zoo thaum lub sijhawm thauj mus los, txo qhov kev pheej hmoo ntawm kev khawb me me, kev tsis sib haum xeeb, lossis kev ntsuas yuam kev - cov yam tseem ceeb uas tseem ceeb ntawm cov txheej txheem sub-5nm.

SiC ceramic kawg effector Cov Khoom

1. Lub zog siab thiab lub zog tawv

Cov khoom siv SiC muaj lub zog zoo heev, nrog rau lub zog flexural feem ntau tshaj 400 MPa thiab Vickers hardness tus nqi siab dua 2000 HV. Qhov no ua rau lawv tiv taus kev ntxhov siab, kev cuam tshuam, thiab kev hnav, txawm tias tom qab siv ntev. Lub zog siab ntawm SiC kuj txo qhov kev hloov pauv thaum lub sijhawm hloov pauv wafer ceev, ua kom ntseeg tau tias qhov chaw raug thiab rov ua dua.

2. Kev Ruaj Ntseg Thermal Zoo heev

Ib qho ntawm cov khoom muaj nqis tshaj plaws ntawm SiC ceramics yog lawv lub peev xwm los tiv taus qhov kub thiab txias heev - feem ntau txog li 1600 ° C hauv cov huab cua inert - yam tsis poob qhov kev ua haujlwm zoo. Lawv cov coefficient qis ntawm thermal expansion (~ 4.0 x 10⁻⁶ /K) ua kom muaj kev ruaj khov ntawm qhov ntev hauv qab thermal cycling, ua rau lawv zoo tagnrho rau cov ntawv thov xws li CVD, PVD, thiab high-temperature annealing.

Cov Lus Nug thiab Lus Teb Txog SiC ceramic end effector

Q: Cov khoom siv dab tsi siv rau hauv wafer kawg effector?

Ib:Cov khoom siv wafer feem ntau yog ua los ntawm cov ntaub ntawv uas muaj zog siab, ruaj khov thermal, thiab tsim cov khoom me me. Ntawm cov no, Silicon Carbide (SiC) ceramic yog ib qho ntawm cov ntaub ntawv zoo tshaj plaws thiab nyiam tshaj plaws. SiC ceramics yog cov khoom tawv heev, ruaj khov thermally, tsis muaj tshuaj lom neeg, thiab tiv taus kev hnav, ua rau lawv zoo tagnrho rau kev tuav cov silicon wafers mos hauv chav huv thiab qhov chaw nqus tsev. Piv rau quartz lossis cov hlau coated, SiC muaj kev ruaj khov zoo dua nyob rau hauv qhov kub siab thiab tsis poob cov khoom me me, uas pab tiv thaiv kev ua qias tuaj.