SiC Ceramic Tais rau Wafer Carrier nrog Kev Tiv Thaiv Kub Siab
Lub tais ua los ntawm silicon carbide ceramic (SiC Tray)
Ib qho khoom siv ceramic ua haujlwm siab ua los ntawm silicon carbide (SiC), tsim los rau kev siv hauv kev lag luam siab heev xws li kev tsim khoom semiconductor thiab kev tsim khoom LED. Nws cov haujlwm tseem ceeb suav nrog kev ua haujlwm ua tus nqa wafer, lub platform txheej txheem etching, lossis kev txhawb nqa txheej txheem kub siab, siv cov khoom siv thermal conductivity zoo heev, kev tiv taus kub siab, thiab kev ruaj khov tshuaj lom neeg kom ntseeg tau tias cov txheej txheem sib xws thiab cov khoom tsim tawm.
Cov yam ntxwv tseem ceeb
1. Kev Ua Haujlwm Kub
- Kev Ua Kub Siab: 140–300 W/m·K, ntau dua li cov graphite ib txwm muaj (85 W/m·K), ua rau kub sai thiab txo qhov kev ntxhov siab thermal.
- Tus nqi qis ntawm Thermal Expansion Coefficient: 4.0 × 10⁻⁶/℃ (25–1000℃), sib npaug zos silicon (2.6 × 10⁻⁶/℃), txo qhov kev pheej hmoo ntawm thermal deformation.
2. Cov Khoom Siv Kho Tshuab
- Lub zog siab: Lub zog flexural ≥320 MPa (20 ℃), tiv taus kev nias thiab kev cuam tshuam.
- Kev Nyuaj Siab: Mohs hardness 9.5, thib ob tsuas yog pob zeb diamond, muab kev tiv thaiv kev hnav zoo dua.
3. Kev Ruaj Ntseg Tshuaj
- Kev Tiv Thaiv Kev Xeb: Tiv taus cov kua qaub muaj zog (piv txwv li, HF, H₂SO₄), tsim nyog rau cov txheej txheem etching.
- Tsis yog hlau nplaum: Kev cuam tshuam ntawm hlau nplaum sab hauv <1 × 10⁻⁶ emu/g, zam kev cuam tshuam nrog cov cuab yeej precision.
4. Kev Ua Siab Ntev Rau Ib puag ncig
- Kev Ruaj Khoov Kub Siab: Kub ua haujlwm ntev txog li 1600–1900 ℃; tiv taus luv luv txog li 2200 ℃ (ib puag ncig tsis muaj oxygen).
- Kev Tiv Thaiv Kev Poob Siab Thaum Tshav Kub: Tiv taus qhov kev hloov pauv kub sai sai (ΔT > 1000 ℃) yam tsis muaj kev tawg.
Cov ntawv thov
| Daim Ntawv Thov | Cov Xwm Txheej Tshwj Xeeb | Tus nqi kev txawj ntse |
| Kev Tsim Khoom Semiconductor | Wafer etching (ICP), nyias-zaj duab xis deposition (MOCVD), CMP polishing | Kev ua kom muaj cua sov siab ua kom muaj qhov kub thiab txias sib xws; kev nthuav dav thermal qis txo qis wafer warpage. |
| Kev tsim khoom LED | Kev loj hlob ntawm Epitaxial (piv txwv li, GaN), wafer dicing, ntim khoom | Txo cov teeb meem ntau hom, ua kom LED ci ntsa iab zoo dua thiab siv tau ntev dua. |
| Kev lag luam photovoltaic | Cov cub tawg sintering silicon wafer, kev txhawb nqa cov khoom siv PECVD | Kev tiv taus kub thiab thermal poob siab ntev lub neej ntawm cov khoom siv. |
| Laser & Optics | Cov khoom siv cua txias laser muaj zog heev, kev txhawb nqa lub kaw lus kho qhov muag | Kev ua kom muaj cua sov siab ua rau cov cua sov tawm sai, ua kom cov khoom siv kho qhov muag ruaj khov. |
| Cov cuab yeej siv los ntsuas | Cov neeg tuav cov qauv TGA/DSC | Muaj peev xwm ua kom sov tsawg thiab teb sai sai rau qhov kub thiab txias ua rau kev ntsuas raug. |
Cov txiaj ntsig ntawm cov khoom
- Kev Ua Haujlwm Zoo Tag Nrho: Kev ua tau zoo ntawm cov cua sov, lub zog, thiab kev tiv thaiv corrosion ntau dua li alumina thiab silicon nitride ceramics, ua tau raws li qhov xav tau ntawm kev ua haujlwm.
- Tsim Qauv Sib Dua: Qhov ceev ntawm 3.1–3.2 g/cm³ (40% ntawm cov hlau), txo qhov kev thauj khoom inertial thiab txhim kho kev txav mus los kom raug.
- Lub neej ntev thiab kev ntseeg siab: Lub neej ua haujlwm tshaj 5 xyoos ntawm 1600 ℃, txo lub sijhawm tsis ua haujlwm thiab txo cov nqi ua haujlwm los ntawm 30%.
- Kev Kho Kom Haum: Txhawb cov qauv geometries nyuaj (piv txwv li, cov khob nqus dej uas muaj qhov porous, cov tais ntau txheej) nrog qhov yuam kev flatness <15 μm rau cov ntawv thov precision.
Cov Lus Qhia Txog Kev Siv
| Pawg parameter | Tus qhia |
| Cov Khoom Siv Lub Cev | |
| Qhov Ceev | ≥3.10 g/cm³ |
| Lub zog khoov (20 ℃) | 320–410 MPa |
| Kev Ua Kub (20 ℃) | 140–300 W/(m·K) |
| Cov Coefficient ntawm Kev Nthuav Dav Kub (25–1000 ℃) | 4.0 × 10⁻⁶/℃ |
| Cov Khoom Siv Tshuaj | |
| Kev Tiv Thaiv Acid (HF/H₂SO₄) | Tsis muaj xeb tom qab 24 teev immersion |
| Kev ua precision | |
| Kev tiaj tiaj | ≤15 μm (300 × 300 hli) |
| Qhov Roughness ntawm qhov chaw (Ra) | ≤0.4 μm |
Cov Kev Pabcuam ntawm XKH
XKH muab cov kev daws teeb meem kev lag luam dav dav uas suav nrog kev tsim kho tshwj xeeb, kev ua haujlwm kom raug, thiab kev tswj xyuas zoo. Rau kev tsim kho tshwj xeeb, nws muab cov khoom siv uas muaj qhov huv siab (>99.999%) thiab qhov porous (30–50% porosity), ua ke nrog 3D modeling thiab simulation los txhim kho cov geometries nyuaj rau cov ntawv thov xws li semiconductors thiab aerospace. Precision machining ua raws li cov txheej txheem yooj yim: kev ua hmoov → isostatic/qhuav nias → 2200°C sintering → CNC/pob zeb diamond sib tsoo → kev tshuaj xyuas, xyuas kom meej tias nanometer-level polishing thiab ±0.01 hli dimensional tolerance. Kev tswj xyuas zoo suav nrog kev sim tag nrho cov txheej txheem (XRD composition, SEM microstructure, 3-point bending) thiab kev txhawb nqa kev siv tshuab (kev txhim kho cov txheej txheem, kev sab laj 24/7, 48-teev xa khoom), xa cov khoom siv txhim khu kev qha, ua haujlwm siab rau cov kev xav tau kev lag luam siab heev.
Cov Lus Nug Feem Ntau (FAQ)
1. Q: Cov lag luam twg siv cov tais silicon carbide ceramic?
A: Siv dav hauv kev tsim khoom semiconductor (wafer handling), lub zog hnub ci (PECVD processes), cov khoom siv kho mob (MRI components), thiab aerospace (cov khoom kub siab) vim lawv tiv taus cua sov heev thiab tshuaj lom neeg ruaj khov.
2. Q: Silicon carbide ua tau zoo dua li cov tais quartz/iav li cas?
A: Kev tiv taus cua sov siab dua (txog li 1800 ° C piv rau quartz's 1100 ° C), xoom kev cuam tshuam magnetic, thiab lub neej ntev dua (5+ xyoo piv rau quartz's 6-12 lub hlis).
3. Q: Cov tais silicon carbide puas tuaj yeem tswj tau cov chaw acidic?
A: Yog. Tiv taus HF, H2SO4, thiab NaOH nrog <0.01 hli xeb / xyoo, ua rau lawv zoo tagnrho rau kev siv tshuaj lom neeg thiab kev ntxuav wafer.
4. Q: Cov tais silicon carbide puas sib xws nrog kev ua haujlwm tsis siv neeg?
A: Yog. Tsim los rau kev nqus tsev thiab kev tswj hwm neeg hlau, nrog qhov chaw tiaj tus <0.01 hli los tiv thaiv kev ua qias tuaj ntawm cov khoom me me hauv cov khoom siv tsis siv neeg.
5. Q: Tus nqi sib piv piv rau cov ntaub ntawv ib txwm muaj yog dab tsi?
A: Tus nqi siab dua ua ntej (3-5x quartz) tab sis 30-50% qis dua TCO vim yog lub neej ntev dua, txo qis lub sijhawm tsis ua haujlwm, thiab txuag hluav taws xob los ntawm kev ua kom sov zoo dua.
