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SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom siv

SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom siv Featured Duab
  • SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom siv
  • SiC ceramic tais phaj graphite nrog CVD SiC txheej rau cov khoom siv

Kev Piav Qhia Luv:

Shanghai Xinkehui New Materials Co., Ltd. tsim cov Φ380mm–Φ600mm semiconductor etching disk, wafer bearing disk, silicon carbide tray, SIC tray, silicon carbide tray, ICP etching tray, etching tray, silicon carbide purity > 99.9%, SIC tray kev pabcuam lub neej yog plaub npaug ntawm graphite-based CVD tray, siv tau ntev yam tsis muaj deformation, Tiv taus FH acid, concentrated H2So4 corrosion.


Cov yam ntxwv

Cov khoom siv silicon carbide ceramics tsis yog tsuas yog siv rau hauv theem tso zaj duab xis nyias xwb, xws li epitaxy lossis MOCVD, lossis hauv kev ua wafer, uas yog lub plawv ntawm cov tais wafer rau MOCVD thawj zaug raug rau qhov chaw tso dej, thiab yog li ntawd nws tiv taus cua sov thiab xeb heev. Cov khoom siv SiC-coated kuj muaj cov thermal conductivity siab thiab cov khoom faib thermal zoo heev.

Cov Khoom Siv Pure Chemical Vapor Deposition Silicon Carbide (CVD SiC) wafer nqa khoom rau kev ua cov hlau Organic Chemical Vapor Deposition (MOCVD) kub siab.

Cov khoom siv wafer CVD SiC ntshiab zoo dua li cov khoom siv wafer ib txwm siv hauv cov txheej txheem no, uas yog graphite thiab coated nrog ib txheej ntawm CVD SiC. cov khoom siv graphite coated no tsis tuaj yeem tiv taus qhov kub siab (1100 txog 1200 degrees Celsius) uas xav tau rau GaN deposition ntawm hnub no lub teeb ci ntsa iab xiav thiab dawb led. Qhov kub siab ua rau lub txheej tsim cov qhov me me uas cov tshuaj ua haujlwm ua rau graphite hauv qab. Cov khoom graphite ces tawg tawm thiab ua rau GaN paug, ua rau lub txheej wafer coated hloov.

CVD SiC muaj qhov huv ntawm 99.999% lossis ntau dua thiab muaj kev ua tau zoo thermal thiab thermal shock tsis kam. Yog li ntawd, nws tuaj yeem tiv taus qhov kub thiab txias siab thiab qhov chaw nyuaj ntawm kev tsim khoom LED ci ntsa iab. Nws yog cov khoom siv monolithic khov kho uas ncav cuag qhov ceev theoretical, tsim cov khoom me me, thiab ua kom pom kev tiv thaiv corrosion thiab erosion siab heev. Cov khoom siv tuaj yeem hloov pauv opacity thiab conductivity yam tsis muaj cov hlau tsis huv. Cov neeg nqa khoom wafer feem ntau yog 17 nti hauv txoj kab uas hla thiab tuaj yeem tuav txog 40 2-4 nti wafers.

Daim duab qhia ntxaws ntxaws

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