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SiC Epitaxial Wafer rau Cov Khoom Siv Fais Fab - 4H-SiC, N-hom, Qhov Ceev Tsis Zoo

SiC Epitaxial Wafer rau Cov Khoom Siv Fais Fab - 4H-SiC, N-hom, Qhov Ceev Qis Different Duab Tshwj Xeeb
  • SiC Epitaxial Wafer rau Cov Khoom Siv Fais Fab - 4H-SiC, N-hom, Qhov Ceev Tsis Zoo
  • SiC Epitaxial Wafer rau Cov Khoom Siv Fais Fab - 4H-SiC, N-hom, Qhov Ceev Tsis Zoo
  • SiC Epitaxial Wafer rau Cov Khoom Siv Fais Fab - 4H-SiC, N-hom, Qhov Ceev Tsis Zoo

Kev Piav Qhia Luv:

Lub SiC Epitaxial Wafer yog lub hauv paus ntawm cov khoom siv semiconductor niaj hnub ua haujlwm siab, tshwj xeeb tshaj yog cov uas tsim los rau kev ua haujlwm siab, zaus siab, thiab kub siab. Luv rau Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer muaj cov txheej SiC epitaxial zoo, nyias uas loj hlob saum cov SiC substrate loj. Kev siv cov thev naus laus zis SiC Epitaxial Wafer tab tom nthuav dav sai hauv cov tsheb fais fab, cov phiaj xwm ntse, cov tshuab hluav taws xob rov ua dua tshiab, thiab aerospace vim nws cov khoom siv lub cev thiab hluav taws xob zoo dua piv rau cov wafers silicon ib txwm muaj.


Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

SiC Epitaxial Wafer-4
SiC Epitaxial Wafer-6

Kev Taw Qhia

Lub SiC Epitaxial Wafer yog lub hauv paus ntawm cov khoom siv semiconductor niaj hnub ua haujlwm siab, tshwj xeeb tshaj yog cov uas tsim los rau kev ua haujlwm siab, zaus siab, thiab kub siab. Luv rau Silicon Carbide Epitaxial Wafer, SiC Epitaxial Wafer muaj cov txheej SiC epitaxial zoo, nyias uas loj hlob saum cov SiC substrate loj. Kev siv cov thev naus laus zis SiC Epitaxial Wafer tab tom nthuav dav sai hauv cov tsheb fais fab, cov phiaj xwm ntse, cov tshuab hluav taws xob rov ua dua tshiab, thiab aerospace vim nws cov khoom siv lub cev thiab hluav taws xob zoo dua piv rau cov wafers silicon ib txwm muaj.

Cov Ntsiab Cai Tsim Khoom ntawm SiC Epitaxial Wafer

Kev tsim cov SiC Epitaxial Wafer xav tau cov txheej txheem tswj hwm cov pa tshuaj lom neeg (CVD). Cov txheej epitaxial feem ntau yog loj hlob ntawm cov khoom siv monocrystalline SiC siv cov roj xws li silane (SiH₄), propane (C₃H₈), thiab hydrogen (H₂) ntawm qhov kub tshaj 1500 ° C. Qhov kev loj hlob epitaxial kub siab no ua kom muaj kev sib dhos zoo heev thiab muaj qhov tsis zoo tsawg kawg nkaus ntawm cov txheej epitaxial thiab cov khoom siv.

Cov txheej txheem suav nrog ntau theem tseem ceeb:

  1. Kev Npaj Khoom Siv: Lub hauv paus SiC wafer raug ntxuav thiab txhuam kom du rau atomic smoothness.

  2. Kev Loj Hlob ntawm CVDHauv lub reactor uas muaj purity siab, cov pa roj ua rau muaj ib txheej SiC uas siv lead ua ke rau ntawm lub substrate.

  3. Kev Tswj Xyuas Doping: N-hom lossis P-hom doping raug qhia thaum lub sijhawm epitaxy kom ua tiav cov khoom hluav taws xob xav tau.

  4. Kev Tshuaj Xyuas thiab Kev NtsuasKev siv lub tshuab tsom iav pom kev, AFM, thiab X-ray diffraction yog siv los xyuas seb txheej tuab npaum li cas, qhov concentration ntawm cov tshuaj doping, thiab qhov ceev ntawm cov qhov tsis zoo.

Txhua lub SiC Epitaxial Wafer raug saib xyuas kom zoo kom tswj tau qhov kam rau siab hauv qhov tuab sib xws, qhov chaw tiaj tus, thiab qhov tsis kam. Lub peev xwm los kho cov kev ntsuas no yog qhov tseem ceeb rau cov MOSFETs siab voltage, Schottky diodes, thiab lwm yam khoom siv fais fab.

Cov Lus Qhia Tshwj Xeeb

Cov Qauv Cov Lus Qhia Tshwj Xeeb
Pawg Kev Tshawb Fawb Txog Cov Khoom Siv, Cov Khoom Siv Crystal Ib Leeg
Polytype 4H
Kev siv tshuaj doping Hom N
Txoj kab uas hla 101 hli
Kev kam rau txoj kab uas hla ± 5%
Qhov tuab 0.35 hli
Kev kam rau siab tuab ± 5%
Qhov Ntev Tiaj Tus Thawj 22 hli (± 10%)
TTV (Tag Nrho Thickness Variation) ≤10 µm
Ua kom nkhaus ≤25 µm
FWHM ≤30 Arc-sec
Qhov Chaw Tiav Rq ≤0.35 nm

Cov ntawv thov ntawm SiC Epitaxial Wafer

Cov khoom SiC Epitaxial Wafer yog qhov tseem ceeb hauv ntau lub sectors:

  • Cov Tsheb Fais Fab (EVs): Cov khoom siv SiC Epitaxial Wafer ua rau lub zog ua haujlwm zoo dua thiab txo qhov hnyav.

  • Lub Zog Rov Ua Dua TshiabSiv rau hauv cov inverters rau lub hnub ci thiab cua fais fab systems.

  • Cov Khoom Siv Fais Fab Kev Lag Luam: Pab kom muaj zaus siab, kub siab hloov pauv nrog kev poob qis dua.

  • Kev Ua Haujlwm Huab Cua thiab Kev Tiv Thaiv: Zoo tagnrho rau cov chaw ib puag ncig hnyav uas xav tau cov khoom siv semiconductor ruaj khov.

  • 5G Chaw Nres TshebCov khoom SiC Epitaxial Wafer txhawb nqa cov zog siab dua rau cov ntawv thov RF.

Cov SiC Epitaxial Wafer ua rau muaj cov qauv tsim me me, hloov pauv sai dua, thiab ua haujlwm hloov pauv hluav taws xob zoo dua piv rau cov silicon wafers.

Cov txiaj ntsig ntawm SiC Epitaxial Wafer

SiC Epitaxial Wafer thev naus laus zis muaj cov txiaj ntsig zoo:

  1. Lub zog tawg siab: Tiv taus cov voltages txog li 10 npaug siab dua li Si wafers.

  2. Kev Ua KubSiC Epitaxial Wafer yaj cov cua sov sai dua, ua rau cov khoom siv khiav txias dua thiab ntseeg tau dua.

  3. Kev Hloov Ceev Siab: Kev poob qis dua ntawm kev hloov pauv ua rau muaj kev ua haujlwm zoo dua thiab me me.

  4. Dav Bandgap: Xyuas kom ruaj khov ntawm cov hluav taws xob siab dua thiab kub dua.

  5. Khoom Siv Ruaj KhobSiC yog tshuaj lom neeg inert thiab muaj zog mechanically, zoo tagnrho rau cov ntawv thov uas xav tau kev kub ntxhov.

Cov txiaj ntsig no ua rau SiC Epitaxial Wafer yog cov khoom siv xaiv rau tiam tom ntej ntawm semiconductors.

Cov Lus Nug Feem Ntau: SiC Epitaxial Wafer

Q1: Qhov txawv ntawm SiC wafer thiab SiC Epitaxial Wafer yog dab tsi?
Ib lub SiC wafer yog hais txog cov khoom siv loj, thaum SiC Epitaxial Wafer suav nrog cov txheej txheem doped tshwj xeeb uas siv rau hauv kev tsim khoom siv.

Q2: Muaj cov tuab npaum li cas rau SiC Epitaxial Wafer txheej?
Cov khaubncaws sab nraud povtseg Epitaxial feem ntau yog txij li ob peb micrometers mus txog ntau tshaj 100 μm, nyob ntawm seb daim ntawv thov xav tau dab tsi.

Q3: SiC Epitaxial Wafer puas haum rau qhov chaw kub thiab txias?
Yog, SiC Epitaxial Wafer tuaj yeem ua haujlwm hauv cov xwm txheej siab dua 600 ° C, ua tau zoo dua silicon.

Q4: Vim li cas qhov tsis zoo ntawm qhov ceev thiaj li tseem ceeb hauv SiC Epitaxial Wafer?
Qhov tsis zoo ntawm qhov tsis zoo yuav ua rau cov khoom siv ua haujlwm tau zoo dua thiab muaj txiaj ntsig zoo dua, tshwj xeeb tshaj yog rau cov ntawv thov hluav taws xob siab.

Q5: Puas muaj N-hom thiab P-hom SiC Epitaxial Wafers?
Yog, ob hom no yog tsim los ntawm kev siv cov roj dopant tswj kom meej thaum lub sijhawm epitaxial.

Q6: Cov wafer loj npaum li cas yog tus qauv rau SiC Epitaxial Wafer?
Cov kab uas hla txheem suav nrog 2-nti, 4-nti, 6-nti, thiab nce ntxiv 8-nti rau kev tsim khoom ntau.

Q7: SiC Epitaxial Wafer cuam tshuam li cas rau tus nqi thiab kev ua haujlwm zoo?
Txawm hais tias thaum xub thawj kim dua li silicon, SiC Epitaxial Wafer txo qhov loj me ntawm lub kaw lus thiab kev poob hluav taws xob, txhim kho tag nrho cov nqi siv tau zoo hauv lub sijhawm ntev.

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