SiC siv lead ua kom loj hlob rauv SiC Ingot loj hlob 4 nti 6 nti 8 nti PTV Lely TSSG LPE txoj kev loj hlob
Cov txheej txheem loj hlob ntawm cov siv lead ua thiab lawv cov yam ntxwv
(1) Txoj Kev Hloov Pauv Pa (PTV)
Lub hauv paus ntsiab lus: Thaum kub siab, cov khoom siv SiC raw sublimes rau hauv ib theem roj, uas tom qab ntawd recrystallized rau ntawm cov noob siv lead ua.
Cov yam ntxwv tseem ceeb:
Kub siab rau kev loj hlob (2000-2500 ° C).
Cov siv lead ua 4H-SiC thiab 6H-SiC zoo thiab loj tuaj yeem cog tau.
Tus nqi loj hlob qeeb, tab sis qhov zoo ntawm cov siv lead ua yog siab.
Daim Ntawv Thov: Feem ntau siv rau hauv lub zog semiconductor, RF khoom siv thiab lwm yam teb high-end.
(2) Txoj kev Lely
Lub Ntsiab Cai: Cov siv lead ua tau loj hlob los ntawm kev sublimation thiab recrystallization ntawm SiC hmoov ntawm qhov kub siab.
Cov yam ntxwv tseem ceeb:
Cov txheej txheem loj hlob tsis tas yuav muaj noob, thiab qhov loj ntawm cov siv lead ua me me.
Qhov zoo ntawm cov siv lead ua yog siab, tab sis qhov ua tau zoo ntawm kev loj hlob yog qis.
Haum rau kev tshawb fawb hauv chaw kuaj mob thiab kev tsim khoom me me.
Daim Ntawv Thov: Feem ntau siv rau hauv kev tshawb fawb thiab kev npaj cov khoom siv SiC me me.
(3) Txoj Kev Loj Hlob ntawm Cov Tshuaj Noob Sab Saum Toj (TSSG)
Lub Ntsiab Cai: Hauv cov tshuaj kub siab, cov khoom siv SiC yaj thiab crystallizes rau ntawm cov noob siv lead ua.
Cov yam ntxwv tseem ceeb:
Qhov kub ntawm kev loj hlob yog qis (1500-1800 ° C).
Cov siv lead ua SiC zoo thiab tsis muaj qhov tsis zoo tuaj yeem cog tau.
Tus nqi loj hlob qeeb, tab sis qhov sib npaug ntawm cov siv lead ua zoo.
Daim Ntawv Thov: Haum rau kev npaj cov khoom siv SiC zoo, xws li cov khoom siv optoelectronic.
(4) Cov kua theem epitaxy (LPE)
Lub hauv paus ntsiab lus: Hauv cov kua hlau kua, SiC raw khoom epitaxial kev loj hlob ntawm lub substrate.
Cov yam ntxwv tseem ceeb:
Qhov kub ntawm kev loj hlob yog qis (1000-1500 ° C).
Kev loj hlob sai, tsim nyog rau kev loj hlob ntawm zaj duab xis.
Qhov zoo ntawm cov siv lead ua yog siab, tab sis qhov tuab yog txwv.
Daim Ntawv Thov: Feem ntau siv rau kev loj hlob epitaxial ntawm SiC zaj duab xis, xws li cov sensors thiab optoelectronic devices.
Cov txheej txheem thov tseem ceeb ntawm silicon carbide crystal furnace
SiC siv lead ua kom sov yog cov khoom siv tseem ceeb rau kev npaj sic siv lead ua, thiab nws cov kev siv tseem ceeb suav nrog:
Kev tsim cov khoom siv hluav taws xob semiconductor: Siv los cog cov khoom siv hluav taws xob 4H-SiC thiab 6H-SiC zoo ua cov khoom siv rau cov khoom siv hluav taws xob (xws li MOSFETs, diodes).
Daim ntawv thov: tsheb fais fab, photovoltaic inverters, cov khoom siv fais fab kev lag luam, thiab lwm yam.
Kev tsim khoom siv Rf: Siv los cog cov khoom siv SiC uas tsis muaj qhov tsis zoo ua cov khoom siv rau RF kom tau raws li qhov xav tau ntawm 5G kev sib txuas lus, radar thiab kev sib txuas lus satellite.
Kev tsim khoom siv Optoelectronic: Siv los cog cov khoom siv SiC zoo ua cov khoom siv rau cov teeb pom kev zoo, cov khoom siv ultraviolet thiab lasers.
Kev tshawb fawb txog kev tshawb fawb thiab kev tsim khoom me me: rau kev tshawb fawb hauv chaw kuaj mob thiab kev tsim khoom siv tshiab los txhawb kev tsim kho tshiab thiab kev ua kom zoo dua ntawm SiC siv lead ua kev loj hlob thev naus laus zis.
Kev tsim cov khoom siv kub siab: Siv los cog cov siv lead ua SiC uas tiv taus kub siab ua cov khoom siv tseem ceeb rau kev tsav dav hlau thiab cov sensors kub siab.
Cov khoom siv thiab cov kev pabcuam ntawm SiC cub tawg los ntawm lub tuam txhab
XKH tsom mus rau kev tsim kho thiab tsim cov khoom siv SIC crystal furnace, muab cov kev pabcuam hauv qab no:
Cov khoom siv kho kom haum: XKH muab cov cub tawg loj hlob raws li tus neeg siv khoom xav tau nrog ntau txoj kev loj hlob xws li PTV thiab TSSG.
Kev txhawb nqa kev txawj ntse: XKH muab kev txhawb nqa kev txawj ntse rau cov neeg siv khoom rau tag nrho cov txheej txheem los ntawm kev txhim kho cov txheej txheem loj hlob ntawm cov siv lead ua kom zoo dua mus rau kev saib xyuas cov khoom siv.
Kev Pab Qhia: XKH muab kev cob qhia ua haujlwm thiab kev qhia txog kev siv tshuab rau cov neeg siv khoom kom ntseeg tau tias kev siv cov khoom siv tau zoo.
Kev pab cuam tom qab muag: XKH muab kev pab cuam tom qab muag sai thiab kev hloov kho khoom siv kom ntseeg tau tias cov neeg siv khoom tsim khoom tas mus li.
Cov thev naus laus zis loj hlob ntawm silicon carbide crystal (xws li PTV, Lely, TSSG, LPE) muaj cov ntawv thov tseem ceeb hauv kev siv hluav taws xob fais fab, cov khoom siv RF thiab optoelectronics. XKH muab cov khoom siv hluav taws xob SiC siab heev thiab ntau yam kev pabcuam los txhawb cov neeg siv khoom hauv kev tsim cov khoom siv SiC zoo thiab pab txhawb kev txhim kho ntawm kev lag luam semiconductor.
Daim duab qhia ntxaws ntxaws
