SiC wafer 4H-N 6H-N HPSI 4H-semi 6H-semi 4H-P 6H-P 3C hom 2inch 3inch 4inch 6inch 8inch
Cov Khoom
4H-N thiab 6H-N (N-hom SiC Wafers)
Daim Ntawv Thov:Feem ntau siv rau hauv cov khoom siv hluav taws xob, optoelectronics, thiab cov ntawv thov kub siab.
Txoj kab uas hla:50.8 hli txog 200 hli.
Qhov tuab:350 μm ± 25 μm, nrog rau kev xaiv tuab ntawm 500 μm ± 25 μm.
Kev tiv taus:N-hom 4H/6H-P: ≤ 0.1 Ω·cm (Z-qib), ≤ 0.3 Ω·cm (P-qib); N-hom 3C-N: ≤ 0.8 mΩ·cm (Z-qib), ≤ 1 mΩ·cm (P-qib).
Qhov ntxhib:Ra ≤ 0.2 nm (CMP lossis MP).
Qhov Ceev ntawm Cov Kav Dej Me Me (MPD):< 1 ib daim/cm².
TTV: ≤ 10 μm rau txhua txoj kab uas hla.
Ua kom nkhaus: ≤ 30 μm (≤ 45 μm rau 8-nti wafers).
Kev Tsis suav ntug:3 hli mus rau 6 hli nyob ntawm hom wafer.
Ntim:Cov cassette ntau lub wafer lossis ib lub thawv wafer.
Muaj ntau qhov loj me 3 nti 4 nti 6 nti 8 nti
HPSI (Cov Wafer SiC Uas Muaj Kev Ntshiab Siab Semi-Insulating)
Daim Ntawv Thov:Siv rau cov khoom siv uas xav tau kev tiv taus siab thiab kev ua haujlwm ruaj khov, xws li RF cov khoom siv, cov ntawv thov photonic, thiab cov sensors.
Txoj kab uas hla:50.8 hli txog 200 hli.
Qhov tuab:Tus qauv tuab ntawm 350 μm ± 25 μm nrog rau kev xaiv rau cov wafers tuab dua txog li 500 μm.
Qhov ntxhib:Ra ≤ 0.2 nm.
Qhov Ceev ntawm Cov Kav Dej Me Me (MPD): ≤ 1 ib daim/cm².
Kev tiv taus:Kev tiv taus siab, feem ntau siv rau hauv cov ntawv thov semi-insulating.
Ua kom nkhaus: ≤ 30 μm (rau cov qhov me me), ≤ 45 μm rau cov kab uas hla loj dua.
TTV: ≤ 10 μm.
Muaj ntau qhov loj me 3 nti 4 nti 6 nti 8 nti
4H-P,6H-P&3C SiC wafer(P-hom SiC Wafers)
Daim Ntawv Thov:Feem ntau rau cov khoom siv fais fab thiab cov khoom siv zaus siab.
Txoj kab uas hla:50.8 hli txog 200 hli.
Qhov tuab:350 μm ± 25 μm lossis kev xaiv kho.
Kev tiv taus:P-hom 4H/6H-P: ≤ 0.1 Ω·cm (Z-qib), ≤ 0.3 Ω·cm (P-qib).
Qhov ntxhib:Ra ≤ 0.2 nm (CMP lossis MP).
Qhov Ceev ntawm Cov Kav Dej Me Me (MPD):< 1 ib daim/cm².
TTV: ≤ 10 μm.
Kev Tsis suav ntug:3 hli mus rau 6 hli.
Ua kom nkhaus: ≤ 30 μm rau cov qhov me me, ≤ 45 μm rau cov qhov loj dua.
Muaj ntau qhov loj me 3 nti 4 nti 6 nti5×5 10×10
Cov Lus Qhia Txog Cov Ntaub Ntawv Ib Nrab
| Vaj tse | 2 nti | 3 nti | 4 nti | 6 nti | 8 nti | |||
| Hom | 4H-N/HPSI/ | 4H-N/HPSI/ | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI//4H/6H-P/3C; | 4H-N/HPSI/4H-SEMI | |||
| Txoj kab uas hla | 50.8 ± 0.3 hli | 76.2 ± 0.3 hli | 100 ± 0.3 hli | 150 ± 0.3 hli | 200 ± 0.3 hli | |||
| Qhov tuab | 330 ± 25 um | 350 ± 25 um | 350 ± 25 um | 350 ± 25 um | 350 ± 25 um | |||
| 350 ± 25um; | 500 ± 25um | 500 ± 25um | 500 ± 25um | 500 ± 25um | ||||
| los yog kho kom haum | los yog kho kom haum | los yog kho kom haum | los yog kho kom haum | los yog kho kom haum | ||||
| Kev ntxhib | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | Ra ≤ 0.2nm | |||
| Ua kom nkhaus | ≤ 30um | ≤ 30um | ≤ 30um | ≤ 30um | ≤45um | |||
| TTV | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | ≤ 10um | |||
| Khawb/Khaws | CMP/MP | |||||||
| MPD | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | <1ea/cm-2 | |||
| Duab | Puag ncig, Tiaj tiaj 16 hli; Ntev 22 hli; Ntev 30/32.5 hli; Ntev 47.5 hli; NOTCH; NOTCH; | |||||||
| Bevel | 45°, SEMI Spec; C Puab | |||||||
| Qib | Qib tsim khoom rau MOS & SBD; Qib tshawb fawb; Qib dummy, Qib noob wafer | |||||||
| Cov Lus Cim | Txoj kab uas hla, Thickness, Orientation, specifications saum toj no tuaj yeem hloov kho raws li koj qhov kev thov | |||||||
Cov ntawv thov
·Cov Khoom Siv Hluav Taws Xob
N hom SiC wafers yog qhov tseem ceeb hauv cov khoom siv hluav taws xob vim lawv muaj peev xwm tswj tau qhov hluav taws xob siab thiab tam sim no siab. Lawv feem ntau siv rau hauv cov hloov hluav taws xob, inverters, thiab cov tsav tsheb rau kev lag luam xws li lub zog rov ua dua tshiab, tsheb fais fab, thiab kev lag luam automation.
· Cov khoom siv hluav taws xob Optoelectronics
Cov ntaub ntawv N hom SiC, tshwj xeeb tshaj yog rau cov ntawv thov optoelectronic, siv rau hauv cov khoom siv xws li lub teeb-emitting diodes (LEDs) thiab laser diodes. Lawv cov thermal conductivity siab thiab bandgap dav ua rau lawv zoo tagnrho rau cov khoom siv optoelectronic ua tau zoo.
·Cov Ntawv Thov Kub Siab
4H-N 6H-N SiC wafers zoo rau cov chaw kub siab, xws li hauv cov sensors thiab cov khoom siv fais fab siv hauv aerospace, automotive, thiab kev siv industrial qhov twg cua sov dissipation thiab kev ruaj khov ntawm qhov kub siab yog qhov tseem ceeb.
·Cov Khoom Siv RF
4H-N 6H-N SiC wafers siv rau hauv cov khoom siv zaus xov tooj cua (RF) uas ua haujlwm hauv cov zaus siab. Lawv siv rau hauv cov kab ke sib txuas lus, thev naus laus zis radar, thiab kev sib txuas lus satellite, qhov twg xav tau kev siv hluav taws xob zoo thiab kev ua tau zoo.
·Cov Ntawv Thov Photonic
Hauv photonics, SiC wafers yog siv rau cov khoom siv xws li photodetectors thiab modulators. Cov khoom siv tshwj xeeb tso cai rau nws ua haujlwm tau zoo hauv kev tsim lub teeb, kev hloov kho, thiab kev tshawb pom hauv cov kab ke sib txuas lus optical thiab cov khoom siv duab.
·Cov Sensors
SiC wafers siv rau hauv ntau yam kev siv sensor, tshwj xeeb tshaj yog nyob rau hauv qhov chaw nyuaj uas lwm cov ntaub ntawv yuav ua tsis tiav. Cov no suav nrog qhov kub thiab txias, siab, thiab tshuaj lom neeg sensors, uas yog qhov tseem ceeb hauv cov teb xws li tsheb, roj & roj av, thiab kev saib xyuas ib puag ncig.
·Cov Txheej Txheem Tsav Tsheb Hluav Taws Xob
Cov thev naus laus zis SiC ua lub luag haujlwm tseem ceeb hauv cov tsheb fais fab los ntawm kev txhim kho kev ua haujlwm zoo thiab kev ua tau zoo ntawm cov tshuab tsav. Nrog SiC fais fab semiconductors, cov tsheb fais fab tuaj yeem ua tiav lub roj teeb zoo dua, lub sijhawm them sai dua, thiab kev siv hluav taws xob zoo dua.
·Cov Sensors Siab Tshaj Plaws thiab Cov Photonic Converters
Hauv cov thev naus laus zis sensor siab heev, SiC wafers yog siv los tsim cov sensors siab rau cov ntawv thov hauv robotics, cov khoom siv kho mob, thiab kev saib xyuas ib puag ncig. Hauv cov photonic converters, SiC cov khoom raug siv los ua kom muaj kev hloov pauv hluav taws xob zoo rau cov teeb liab optical, uas yog qhov tseem ceeb hauv kev sib txuas lus thiab kev siv internet ceev ceev.
Cov Lus Nug thiab Lus Teb
Q:4H hauv 4H SiC yog dab tsi?
A:"4H" hauv 4H SiC txhais tau hais tias cov qauv siv lead ua ntawm silicon carbide, tshwj xeeb yog daim ntawv hexagonal nrog plaub txheej (H). Tus "H" qhia txog hom hexagonal polytype, uas sib txawv ntawm lwm cov SiC polytypes xws li 6H lossis 3C.
Q:Lub thermal conductivity ntawm 4H-SiC yog dab tsi?
A: Lub zog ua kom sov ntawm 4H-SiC (Silicon Carbide) yog kwv yees li 490-500 W / m · K ntawm chav sov. Qhov kev ua kom sov siab no ua rau nws zoo tagnrho rau kev siv hauv cov khoom siv hluav taws xob thiab cov chaw kub siab, qhov twg kev ua kom sov zoo yog qhov tseem ceeb.














