SiC substrate 3 nti 350um thickness HPSI hom Prime Qib Dummy qib
Cov Khoom
| Cov Qauv | Qib Tsim Khoom | Qib Kev Tshawb Fawb | Qib Dummy | Chav tsev |
| Qib | Qib Tsim Khoom | Qib Kev Tshawb Fawb | Qib Dummy | |
| Txoj kab uas hla | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
| Qhov tuab | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
| Kev Taw Qhia Wafer | Nyob rau ntawm-axis: <0001> ± 0.5° | Nyob rau ntawm-axis: <0001> ± 2.0 ° | Nyob rau ntawm-axis: <0001> ± 2.0 ° | qib kawm |
| Qhov Ceev ntawm Cov Kav Dej Me Me (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
| Kev Tiv Thaiv Hluav Taws Xob | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
| Cov tshuaj lom | Tsis muaj tshuaj lom | Tsis muaj tshuaj lom | Tsis muaj tshuaj lom | |
| Kev Taw Qhia Tiaj Tus Thawj Coj | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | qib kawm |
| Qhov Ntev Tiaj Tus Thawj | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
| Qhov Ntev Thib Ob | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
| Kev Taw Qhia Qib Thib Ob | 90° CW ntawm lub tiaj tiaj thawj ± 5.0° | 90° CW ntawm lub tiaj tiaj thawj ± 5.0° | 90° CW ntawm lub tiaj tiaj thawj ± 5.0° | qib kawm |
| Kev Tshem Tawm Ntug | 3 | 3 | 3 | mm |
| LTV/TTV/Hneev/Warp | 3 / 10 / ±30 / 40 | 3 / 10 / ±30 / 40 | 5 / 15 / ±40 / 45 | µm |
| Qhov Roughness ntawm qhov chaw | Si-ntsej muag: CMP, C-ntsej muag: Polished | Si-ntsej muag: CMP, C-ntsej muag: Polished | Si-ntsej muag: CMP, C-ntsej muag: Polished | |
| Cov Kab Ntsig (Lub Teeb Ci Muaj Zog) | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi | |
| Cov Phaj Hex (Lub Teeb Ci Siab) | Tsis muaj dab tsi | Tsis muaj dab tsi | Thaj chaw sib sau ua ke 10% | % |
| Cov Cheeb Tsam Polytype (Lub Teeb Ci Siab) | Thaj chaw sib sau ua ke 5% | Thaj chaw sib sau ua ke 20% | Thaj chaw sib sau ua ke 30% | % |
| Cov Khawb (Lub Teeb Ci Siab) | ≤ 5 khawb, qhov ntev tag nrho ≤ 150 | ≤ 10 khawb, qhov ntev tag nrho ≤ 200 | ≤ 10 khawb, qhov ntev tag nrho ≤ 200 | mm |
| Kev Txiav Ntug | Tsis muaj ≥ 0.5 hli dav/qhov tob | 2 tso cai ≤ 1 hli dav/qhov tob | 5 tso cai ≤ 5 hli dav/qhov tob | mm |
| Kev Ua Phem Ntawm Qhov Chaw | Tsis muaj dab tsi | Tsis muaj dab tsi | Tsis muaj dab tsi |
Cov ntawv thov
1. Cov Khoom Siv Hluav Taws Xob Muaj Zog Siab
Qhov kev ua tau zoo tshaj plaws ntawm cov thermal conductivity thiab bandgap dav ntawm SiC wafers ua rau lawv zoo tagnrho rau cov khoom siv high-power, high-frequency:
●MOSFETs thiab IGBTs rau kev hloov hluav taws xob.
●Cov tshuab fais fab tsheb siab heev, suav nrog cov inverters thiab cov chargers.
●Cov khoom siv hluav taws xob ntse thiab cov tshuab hluav taws xob rov ua dua tshiab.
2. Cov Tshuab RF thiab Microwave
SiC substrates ua rau muaj kev siv RF thiab microwave zaus siab nrog qhov poob qis tshaj plaws:
● Kev sib txuas lus thiab satellite systems.
● Cov tshuab radar hauv huab cua.
●Cov khoom siv tes hauj lwm 5G siab heev.
3. Optoelectronics thiab Sensors
Cov khoom tshwj xeeb ntawm SiC txhawb nqa ntau yam kev siv optoelectronic:
● Cov cuab yeej ntes UV rau kev saib xyuas ib puag ncig thiab kev soj ntsuam kev lag luam.
● Cov khoom siv LED thiab laser rau cov teeb pom kev zoo thiab cov cuab yeej ua haujlwm raug.
● Cov cuab yeej ntsuas kub siab rau kev lag luam aerospace thiab automotive.
4. Kev Tshawb Fawb thiab Kev Txhim Kho
Qhov sib txawv ntawm cov qib (Kev Tsim Khoom, Kev Tshawb Fawb, Dummy) ua rau muaj kev sim thiab cov qauv cuab yeej tshiab hauv kev kawm thiab kev lag luam.
Cov txiaj ntsig
●Kev ntseeg siab:Zoo heev resistivity thiab stability thoob plaws qib.
●Kev Kho Kom Haum:Kev teeb tsa cov kev taw qhia thiab cov thicknesses kom haum rau ntau yam kev xav tau.
●Kev Ntshiab Siab:Cov khoom sib xyaw tsis muaj tshuaj lom ua kom muaj kev hloov pauv tsawg kawg nkaus ntawm cov khoom tsis huv.
●Kev nthuav dav:Ua tau raws li qhov yuav tsum tau ua ntawm kev tsim khoom loj thiab kev tshawb fawb sim.
Cov 3-nti high-purity SiC wafers yog koj lub rooj vag mus rau cov khoom siv ua haujlwm siab thiab kev nce qib hauv kev siv tshuab tshiab. Yog xav nug thiab cov lus qhia ntxaws ntxaws, hu rau peb hnub no.
Kev Txheeb Xyuas
Cov 3-nti High Purity Silicon Carbide (SiC) Wafers, muaj nyob rau hauv Kev Tsim Khoom, Kev Tshawb Fawb, thiab Dummy Qib, yog cov khoom siv zoo tshaj plaws tsim rau cov khoom siv hluav taws xob muaj zog, RF / microwave systems, optoelectronics, thiab kev tshawb fawb siab heev. Cov wafers no muaj cov khoom siv undoped, semi-insulating nrog resistivity zoo heev (≥1E10 Ω·cm rau Qib Tsim Khoom), micropipe qis density (≤1 cm−2^-2−2), thiab qhov zoo ntawm qhov chaw. Lawv tau ua kom zoo rau cov ntawv thov kev ua haujlwm siab, suav nrog kev hloov pauv hluav taws xob, kev sib txuas lus, UV sensing, thiab LED technologies. Nrog rau kev hloov kho tau, kev ua haujlwm thermal zoo dua, thiab cov khoom siv kho tshuab muaj zog, cov SiC wafers no ua rau muaj kev tsim khoom siv zoo, txhim khu kev qha thiab kev tsim kho tshiab thoob plaws kev lag luam.
Daim duab qhia ntxaws ntxaws
