SICOI (Silicon Carbide ntawm Insulator) Wafers SiC Zaj duab xis NTAWM Silicon
Daim duab qhia ntxaws ntxaws
Taw qhia txog Silicon Carbide ntawm Insulator (SICOI) wafers
Silicon Carbide on Insulator (SICOI) wafers yog cov khoom siv semiconductor tiam tom ntej uas sib xyaw cov khoom siv lub cev thiab hluav taws xob zoo tshaj plaws ntawm silicon carbide (SiC) nrog cov yam ntxwv hluav taws xob zoo tshaj plaws ntawm cov txheej txheem rwb thaiv tsev, xws li silicon dioxide (SiO₂) lossis silicon nitride (Si₃N₄). Ib qho SICOI wafer ib txwm muaj cov txheej SiC epitaxial nyias nyias, cov zaj duab xis rwb thaiv tsev nruab nrab, thiab cov khoom siv txhawb nqa, uas tuaj yeem yog silicon lossis SiC.
Cov qauv sib xyaw no tau tsim los ua kom tau raws li qhov xav tau ntawm cov khoom siv hluav taws xob muaj zog, zaus siab, thiab kub siab. Los ntawm kev koom ua ke ib txheej insulating, SICOI wafers txo qis cov kab mob parasitic capacitance thiab tiv thaiv cov dej ntws tawm, yog li ua kom muaj kev ua haujlwm ntau dua, ua haujlwm zoo dua, thiab kev tswj hwm thermal zoo dua. Cov txiaj ntsig no ua rau lawv muaj txiaj ntsig zoo hauv cov lag luam xws li tsheb fais fab, 5G kev sib txuas lus hauv tsev, cov kab ke aerospace, cov khoom siv hluav taws xob RF siab heev, thiab cov thev naus laus zis MEMS sensor.
Cov Ntsiab Cai Tsim Khoom ntawm SICOI Wafers
SICOI (Silicon Carbide on Insulator) wafers yog tsim los ntawm kev siv tshuab siab heevCov txheej txheem ntawm kev sib txuas wafer thiab kev ua kom nyias nyias:
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Kev Loj Hlob ntawm SiC Substrate– Ib lub wafer SiC zoo ib leeg-siv lead ua ke (4H/6H) tau npaj ua cov khoom pub dawb.
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Kev Tso Txheej Insulating- Ib zaj duab xis rwb thaiv tsev (SiO₂ lossis Si₃N₄) yog tsim rau ntawm lub wafer nqa khoom (Si lossis SiC).
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Kev Sib Txuas Wafer- Cov SiC wafer thiab cov cab kuj wafer raug sib txuas ua ke hauv qab kev kub siab lossis kev pab plasma.
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Kev Ua Kom Nyias Thiab Txhuam- Cov wafer pub dawb SiC raug txo kom nyias mus rau ob peb micrometers thiab txhuam kom ua tiav qhov chaw du.
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Kev Tshuaj Xyuas Zaum Kawg- Lub SICOI wafer tiav lawm raug sim rau qhov tuab sib xws, qhov roughness ntawm qhov chaw, thiab kev ua haujlwm rwb thaiv tsev.
Los ntawm cov txheej txheem no, ib qhotxheej SiC nyias nyiasnrog cov khoom siv hluav taws xob thiab thermal zoo heev yog ua ke nrog cov zaj duab xis insulating thiab cov khoom txhawb nqa, tsim kom muaj lub platform ua haujlwm siab rau lub zog tiam tom ntej thiab cov khoom siv RF.
Cov txiaj ntsig tseem ceeb ntawm SICOI Wafers
| Qeb Tshwj Xeeb | Cov Yam Ntxim Saib Xyuas | Cov txiaj ntsig tseem ceeb |
|---|---|---|
| Cov Qauv Khoom Siv | 4H/6H-SiC txheej txheem nquag + zaj duab xis rwb thaiv tsev (SiO₂/Si₃N₄) + Si lossis SiC tus neeg nqa khoom | Ua tiav kev rho tawm hluav taws xob muaj zog, txo cov kab mob cuam tshuam |
| Cov Khoom Siv Hluav Taws Xob | Lub zog tawg siab (> 3 MV / cm), qhov poob dielectric qis | Optimized rau high-voltage thiab high-frequency ua haujlwm |
| Cov Khoom Siv Thermal | Kev ua kom sov tau txog li 4.9 W/cm·K, ruaj khov saum 500°C | Kev ua kom sov zoo, kev ua tau zoo heev nyob rau hauv cov cua sov hnyav |
| Cov Khoom Siv Kho Tshuab | Kev nyuaj siab heev (Mohs 9.5), coefficient qis ntawm thermal expansion | Ruaj khov tiv thaiv kev ntxhov siab, ua kom lub cuab yeej siv tau ntev dua |
| Qhov Zoo Ntawm Qhov Chaw | Nto du heev (Ra <0.2 nm) | Txhawb nqa qhov tsis muaj qhov tsis zoo epitaxy thiab kev tsim khoom siv txhim khu kev qha |
| Kev rwb thaiv tsev | Kev tiv taus >10¹⁴ Ω·cm, qhov xau qis | Kev ua haujlwm txhim khu kev qha hauv RF thiab cov ntawv thov kev rho tawm hluav taws xob siab |
| Qhov Loj & Kev Kho Kom Haum | Muaj nyob rau hauv 4, 6, thiab 8-nti hom ntawv; SiC tuab 1–100 μm; rwb thaiv tsev 0.1–10 μm | Tsim qauv yooj ywm rau ntau yam kev thov sib txawv |
Cov Cheeb Tsam Tseem Ceeb ntawm Daim Ntawv Thov
| Kev Lag Luam Daim Ntawv Thov | Cov Qauv Siv Ib Txwm Muaj | Cov Kev Zoo ntawm Kev Ua Tau Zoo |
|---|---|---|
| Cov Khoom Siv Hluav Taws Xob | EV inverters, chaw them hluav taws xob, cov khoom siv hluav taws xob hauv kev lag luam | Lub zog hluav taws xob tawg siab, txo qhov poob hloov pauv |
| RF & 5G | Cov amplifiers fais fab chaw nres tsheb, cov khoom millimeter-wave | Cov kab mob tsawg, txhawb nqa GHz-ntau yam kev ua haujlwm |
| Cov Sensors MEMS | Cov ntsuas siab ntawm ib puag ncig hnyav, MEMS qib navigation | Kev ruaj khov thermal siab, tiv taus hluav taws xob |
| Kev Ua Si thiab Kev Tiv Thaiv Huab Cua | Kev sib txuas lus satellite, cov khoom siv hluav taws xob avionics | Kev ntseeg siab tau thaum muaj huab cua kub heev thiab raug hluav taws xob |
| Smart Grid | Cov hloov pauv HVDC, cov khoom siv hluav taws xob solid-state | Kev rwb thaiv tsev siab txo qhov poob hluav taws xob |
| Kev siv hluav taws xob Optoelectronics | UV LEDs, laser substrates | Cov khoom siv crystalline zoo txhawb nqa kev tso tawm lub teeb zoo |
Kev tsim khoom ntawm 4H-SiCOI
Kev tsim cov 4H-SiCOI wafers yog ua tiav los ntawmCov txheej txheem wafer bonding thiab thinning, ua kom muaj cov interfaces insulating zoo thiab cov txheej SiC uas tsis muaj qhov tsis zoo.
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aDaim duab qhia txog kev tsim khoom ntawm 4H-SiCOI.
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bDuab ntawm 4-nti 4H-SiCOI wafer siv kev sib txuas thiab kev nyias nyias; cov cheeb tsam tsis zoo cim.
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cKev piav qhia txog qhov sib npaug ntawm cov thickness ntawm 4H-SiCOI substrate.
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dDuab ntawm 4H-SiCOI tuag.
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eCov txheej txheem ntws rau kev tsim cov SiC microdisk resonator.
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f: SEM ntawm lub microdisk resonator ua tiav.
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g: SEM nthuav dav qhia txog phab ntsa resonator; AFM inset qhia txog qhov du ntawm qhov chaw nanoscale.
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h: SEM hla ntu qhia txog qhov saum npoo sab saud zoo li parabolic.
Cov Lus Nug Feem Ntau Txog SICOI Wafers
Q1: Cov SICOI wafers muaj qhov zoo li cas dua li cov SiC wafers ib txwm muaj?
A1: Tsis zoo li cov qauv SiC substrates, SICOI wafers muaj xws li ib txheej insulating uas txo cov parasitic capacitance thiab cov dej ntws tawm, ua rau muaj kev ua haujlwm zoo dua, kev teb zaus zoo dua, thiab kev ua haujlwm thermal zoo dua.
Q2: Feem ntau muaj cov wafer loj li cas?
A2: SICOI wafers feem ntau yog tsim tawm hauv 4-nti, 6-nti, thiab 8-nti hom ntawv, nrog rau kev cai SiC thiab cov txheej insulating tuab muaj nyob ntawm qhov xav tau ntawm cov khoom siv.
Q3: Cov lag luam twg tau txais txiaj ntsig ntau tshaj plaws los ntawm SICOI wafers?
A3: Cov lag luam tseem ceeb suav nrog cov khoom siv hluav taws xob rau cov tsheb fais fab, RF electronics rau 5G networks, MEMS rau cov sensors aerospace, thiab optoelectronics xws li UV LEDs.
Q4: Cov txheej insulating ua li cas thiaj txhim kho kev ua haujlwm ntawm lub cuab yeej?
A4: Cov zaj duab xis insulating (SiO₂ lossis Si₃N₄) tiv thaiv kev xau tam sim no thiab txo cov lus sib tham hluav taws xob, ua rau muaj kev ua haujlwm siab dua, kev hloov pauv zoo dua, thiab txo cov cua sov poob.
Q5: Cov SICOI wafers puas haum rau cov ntawv thov kub siab?
A5: Yog lawm, nrog rau kev ua haujlwm siab thermal thiab kev tiv taus tshaj 500 ° C, SICOI wafers tau tsim los ua haujlwm tau zoo hauv qab qhov kub thiab txias heev thiab hauv qhov chaw ib puag ncig hnyav.
Q6: Puas tuaj yeem hloov kho SICOI wafers?
A6: Muaj tseeb tiag. Cov chaw tsim khoom muab cov qauv tsim tshwj xeeb rau cov tuab tshwj xeeb, cov qib doping, thiab cov khoom sib xyaw ua ke kom tau raws li ntau yam kev tshawb fawb thiab kev xav tau ntawm kev lag luam.
