SiCOI wafer 4 nti 6 nti HPSI SiC SiO2 Si subatrate qauv

Kev Piav Qhia Luv:

Daim ntawv no nthuav qhia txog kev piav qhia ntxaws ntxaws ntawm Silicon Carbide-on-Insulator (SiCOI) wafers, tshwj xeeb tshaj yog tsom mus rau 4-nti thiab 6-nti substrates uas muaj cov txheej txheem siab-purity semi-insulating (HPSI) silicon carbide (SiC) uas sib txuas rau ntawm silicon dioxide (SiO₂) insulating txheej saum silicon (Si) substrates. Cov qauv SiCOI ua ke cov khoom siv hluav taws xob, thermal, thiab mechanical zoo tshaj plaws ntawm SiC nrog cov txiaj ntsig kev rho tawm hluav taws xob ntawm oxide txheej thiab kev txhawb nqa mechanical ntawm silicon substrate. Kev siv HPSI SiC txhim kho kev ua haujlwm ntawm cov cuab yeej los ntawm kev txo qis substrate conduction thiab txo cov kev poob parasitic, ua rau cov wafers no zoo tagnrho rau cov ntawv thov semiconductor muaj zog, zaus siab, thiab kub siab. Cov txheej txheem tsim khoom, cov yam ntxwv ntawm cov khoom siv, thiab cov txiaj ntsig ntawm cov qauv ntawm cov txheej txheem ntau txheej no tau tham txog, hais txog nws qhov cuam tshuam rau cov khoom siv hluav taws xob tiam tom ntej thiab microelectromechanical systems (MEMS). Txoj kev tshawb fawb kuj piv cov khoom thiab cov ntawv thov muaj peev xwm ntawm 4-nti thiab 6-nti SiCOI wafers, qhia txog kev nthuav dav thiab kev koom ua ke rau cov khoom siv semiconductor siab heev.

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Cov yam ntxwv

Cov qauv ntawm SiCOI wafer

HPB (Kev Sib Txuas Lus Zoo) BIC (Kev Sib Txuas Lus Sib Txuas Lus) thiab SOD (Silicon-on-Diamond lossis Silicon-on-Insulator-like technology). Nws suav nrog:

Cov Kev Ntsuas Kev Ua Tau Zoo:

Cov teev cov kev ntsuas xws li qhov tseeb, hom kev ua yuam kev (piv txwv li, "Tsis muaj qhov yuam kev," "Qhov deb ntawm tus nqi"), thiab kev ntsuas tuab (piv txwv li, "Direct-Layer thickness/kg").

Ib lub rooj uas muaj cov nqi lej (tej zaum yog cov kev sim lossis cov txheej txheem) nyob rau hauv cov npe xws li "ADDR/SYGBDT," "10/0," thiab lwm yam.

Cov Ntaub Ntawv Txog Txheej Thickness:

Cov ntawv sau ntau zaus uas muaj cim "L1 Thickness (A)" mus rau "L270 Thickness (A)" (tej zaum yog hauv Ångströms, 1 Å = 0.1 nm).

Qhia txog cov qauv ntau txheej nrog kev tswj qhov tuab kom meej rau txhua txheej, ib txwm muaj nyob rau hauv cov wafers semiconductor siab heev.

SiCOI Wafer Qauv

SiCOI (Silicon Carbide on Insulator) yog ib qho qauv wafer tshwj xeeb uas sib xyaw ua ke silicon carbide (SiC) nrog ib txheej insulating, zoo ib yam li SOI (Silicon-on-Insulator) tab sis zoo rau kev siv hluav taws xob siab / kub siab. Cov yam ntxwv tseem ceeb:

Txheej Txheem:

Txheej Sab Saum Toj: Ib Leeg-Silicon Carbide (SiC) rau kev txav mus los ntawm hluav taws xob siab thiab kev ruaj khov thermal.

Cov Insulator Faus: Feem ntau SiO₂ (oxide) lossis pob zeb diamond (hauv SOD) kom txo cov peev xwm parasitic thiab txhim kho kev sib cais.

Cov Khoom Siv Hauv Paus: Silicon lossis polycrystalline SiC rau kev txhawb nqa kho tshuab

Cov yam ntxwv ntawm SiCOI wafer

Cov Khoom Siv Hluav Taws Xob Qhov Bandgap Dav Dav (3.2 eV rau 4H-SiC): Ua rau muaj qhov hluav taws xob tawg siab (>10 × siab dua li silicon). Txo cov dej ntws tawm, txhim kho kev ua haujlwm zoo hauv cov khoom siv fais fab.

Kev Muaj Peev Xwm Electron Siab:~900 cm²/V·s (4H-SiC) piv rau ~1,400 cm²/V·s (Si), tab sis kev ua tau zoo dua hauv thaj chaw siab.

Tsis tshua muaj kev tiv thaiv:Cov transistors raws li SiCOI (piv txwv li, MOSFETs) qhia txog kev poob qis dua.

Kev rwb thaiv tsev zoo heev:Cov oxide faus (SiO₂) lossis pob zeb diamond txo cov peev xwm parasitic thiab crosstalk.

Cov Khoom Siv ThermalKev Ua Kub Siab: SiC (~ 490 W / m·K rau 4H-SiC) vs. Si (~ 150 W / m·K). Pob zeb diamond (yog siv ua insulator) tuaj yeem tshaj 2,000 W / m·K, ua kom cua sov tawm zoo dua.

Kev Ruaj Ntseg Thermal:Ua haujlwm tau zoo ntawm >300°C (piv rau ~150°C rau silicon). Txo qhov yuav tsum tau txias hauv cov khoom siv hluav taws xob.

3. Cov Khoom Siv Kho Tshuab & Tshuaj Lom ZemKev Nyuaj Siab Kawg (~ 9.5 Mohs): Tiv taus kev hnav, ua rau SiCOI ruaj khov rau cov chaw ib puag ncig hnyav.

Kev Tsis Muaj Tshuaj Lom Zem:Tiv taus oxidation thiab corrosion, txawm tias nyob rau hauv acidic / alkaline mob.

Kev Nthuav Dav Thermal Tsawg:Sib phim zoo nrog lwm cov ntaub ntawv kub siab (piv txwv li, GaN).

4. Cov Kev Zoo ntawm Cov Qauv (piv rau Bulk SiC lossis SOI)

Txo Cov Kev Poob ntawm Cov Khoom Siv:Cov txheej rwb thaiv tsev tiv thaiv kom tsis txhob muaj hluav taws xob nkag mus rau hauv lub substrate.

Kev Ua Haujlwm RF Zoo Dua:Qhov qis dua ntawm cov kab mob parasitic ua rau kev hloov pauv sai dua (muaj txiaj ntsig rau 5G / mmWave li).

Tsim Qauv Yooj Yim:Cov txheej sab saud SiC nyias nyias tso cai rau kev ua kom zoo dua ntawm cov khoom siv (piv txwv li, cov channel ultra-thin hauv transistors).

Kev sib piv nrog SOI & Bulk SiC

Vaj tse	SiCOI	SOI (Si/SiO₂/Si)	SiC ntau
Bandgap	3.2 eV (SiC)	1.1 eV (Si)	3.2 eV (SiC)
Kev Ua Kub	Siab (SiC + pob zeb diamond)	Qis (SiO₂ txwv kev ntws cua sov)	Siab (SiC xwb)
Lub zog tawg	Siab heev	Nruab nrab	Siab heev
Tus nqi	Siab dua	Qis dua	Siab tshaj plaws (SiC ntshiab)

Cov ntawv thov ntawm SiCOI wafer

Cov Khoom Siv Hluav Taws Xob
SiCOI wafers siv dav hauv cov khoom siv hluav taws xob siab thiab siab zog semiconductor xws li MOSFETs, Schottky diodes, thiab cov hloov hluav taws xob. Qhov dav bandgap thiab qhov hluav taws xob tawg siab ntawm SiC ua rau muaj kev hloov pauv hluav taws xob zoo nrog kev poob qis thiab kev ua haujlwm thermal zoo dua.

Cov Khoom Siv Xov Tooj Cua Zaus (RF)
Cov txheej insulating hauv SiCOI wafers txo cov parasitic capacitance, ua rau lawv haum rau cov transistors thiab amplifiers siv hauv kev sib txuas lus, radar, thiab 5G technologies.

Cov Txheej Txheem Microelectromechanical (MEMS)
SiCOI wafers muab lub platform ruaj khov rau kev tsim cov MEMS sensors thiab actuators uas ua haujlwm tau zoo hauv cov chaw ib puag ncig hnyav vim SiC cov tshuaj lom neeg tsis muaj zog thiab lub zog kho tshuab.

Cov Khoom Siv Hluav Taws Xob Kub Siab
SiCOI ua rau cov khoom siv hluav taws xob uas tswj tau kev ua tau zoo thiab kev ntseeg tau ntawm qhov kub siab, pab tau rau kev siv tsheb, aerospace, thiab kev lag luam uas cov khoom siv silicon ib txwm ua tsis tau zoo.

Cov Khoom Siv Photonic thiab Optoelectronic
Kev sib xyaw ua ke ntawm SiC cov khoom siv kho qhov muag thiab cov txheej rwb thaiv tsev ua rau muaj kev sib koom ua ke ntawm cov voj voog photonic nrog kev tswj hwm thermal zoo dua.

Cov Khoom Siv Hluav Taws Xob Uas Muaj Kev Tiv Thaiv Hluav Taws Xob
Vim yog qhov kev kam rau hluav taws xob ntawm SiC, SiCOI wafers zoo tagnrho rau qhov chaw thiab kev siv nuclear uas xav tau cov khoom siv uas tiv taus cov chaw muaj hluav taws xob siab.

Cov Lus Nug thiab Lus Teb ntawm SiCOI wafer

Q1: SiCOI wafer yog dab tsi?

A: SiCOI sawv cev rau Silicon Carbide-on-Insulator. Nws yog ib qho qauv semiconductor wafer uas ib txheej nyias ntawm silicon carbide (SiC) raug khi rau ntawm ib txheej insulating (feem ntau yog silicon dioxide, SiO₂), uas tau txhawb nqa los ntawm silicon substrate. Cov qauv no ua ke SiC cov khoom zoo heev nrog kev rho tawm hluav taws xob los ntawm cov insulator.

Q2: Cov txiaj ntsig tseem ceeb ntawm SiCOI wafers yog dab tsi?

A: Cov txiaj ntsig tseem ceeb suav nrog lub zog tawg siab, bandgap dav, kev ua kom sov zoo heev, kev tawv tawv zoo dua, thiab txo cov kab mob parasitic capacitance ua tsaug rau txheej insulating. Qhov no ua rau kev ua haujlwm ntawm lub cuab yeej zoo dua, kev ua haujlwm zoo dua, thiab kev ntseeg siab.

Q3: Cov ntawv thov SiCOI wafers yog dab tsi?

A: Lawv siv rau hauv cov khoom siv hluav taws xob, cov khoom siv RF zaus siab, MEMS sensors, cov khoom siv hluav taws xob kub siab, cov khoom siv photonic, thiab cov khoom siv hluav taws xob-hardened.