Silicon Carbide Cantilever Paddle (SiC Cantilever Paddle)

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Silicon carbide cantilever paddle, tsim los ntawm high-performance cov tshuaj tiv thaiv-bonded silicon carbide (RBSiC), yog ib qho tseem ceeb tivthaiv siv nyob rau hauv wafer loading thiab tuav systems rau semiconductor thiab photovoltaic daim ntaub ntawv.


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Product Overview

Silicon carbide cantilever paddle, tsim los ntawm high-performance cov tshuaj tiv thaiv-bonded silicon carbide (RBSiC), yog ib qho tseem ceeb tivthaiv siv nyob rau hauv wafer loading thiab tuav systems rau semiconductor thiab photovoltaic daim ntaub ntawv.
Piv nrog cov tsoos quartz lossis graphite paddles, SiC cantilever paddles muab cov khoom siv zog zoo dua, siab hardness, tsis tshua muaj thermal expansion, thiab zoo heev corrosion kuj. Lawv muaj kev ruaj ntseg zoo heev nyob rau hauv qhov kub thiab txias, ua tau raws li qhov yuav tsum tau nruj ntawm qhov loj wafer loj, ncua kev pab cuam lub neej, thiab ultra-low paug.

Nrog rau kev txhim kho txuas ntxiv ntawm cov txheej txheem semiconductor mus rau qhov loj dua wafer diameters, ntau dua, thiab kev ua haujlwm huv si, SiC cantilever paddles tau maj mam hloov cov khoom siv, dhau los ua qhov kev xaiv rau diffusion furnaces, LPCVD, thiab lwm yam khoom siv kub.

Khoom nta

  • Zoo heev kub-kub stability

    • Ua haujlwm ntseeg tau ntawm 1000-1300 ℃ yam tsis muaj deformation.

    • Qhov siab tshaj plaws kev pabcuam kub txog 1380 ℃.

  • Siab Load-Bearing Capacity

    • Bending zog mus txog 250-280 MPa, ntau dua li quartz paddles.

    • Muaj peev xwm tuav cov kab loj-ntev wafers (300 hli thiab siab dua).

  • Kev Pabcuam Ntev Ntev & Kev Kho Mob Tsawg

    • Tsawg thermal expansion coefficient (4.5 × 10⁻⁶ K⁻¹), zoo sib xws nrog LPCVD txheej txheej.

    • Txo cov kab nrib pleb uas ua rau muaj kev ntxhov siab thiab tev, ua kom muaj kev tu thiab tu lub voj voog.

  • Corrosion Resistance & Purity

    • Zoo heev tiv taus acids thiab alkalis.

    • Nthuav microstructure nrog qhib porosity <0.1%, txo cov khoom tsim thiab impurity tso tawm.

  • Automation-Compatible Design

    • Stable cross-sectional geometry nrog siab qhov tseeb.

    • Seamlessly integrates nrog robotic wafer loading thiab unloading systems, enabling tag nrho automated ntau lawm.

Physical & Chemical Properties

Yam khoom Chav tsev Cov ntaub ntawv
Max. Kev Pabcuam Kub 1380
Qhov ntom g/cm³ 3.04-3.08 Nws
Qhib Porosity % <0.1
Khoov zog MPa 250 (20 ℃), 280 (1200 ℃)
Modulus ntawm Elasticity GPa 330 (20 ℃), 300 (1200 ℃)
Thermal conductivity W/m·K 45 (1200 ℃)
Thermal Expansion Coefficient K⁻¹×10⁻⁶ 4.5
Vickers Hardness HV 2 ≥ 2100
Acid / Alkaline Resistance - Zoo heev

 

  • Standard ntev:2378 hli, 2550 hli, 2660 hli

  • Kev cai qhov ntev muaj raws li qhov kev thov

Daim ntawv thov

  • Kev lag luam semiconductor

    • LPCVD (Low Pressure Chemical Vapor Deposition)

    • Diffusion txheej txheem (phosphorus, boron, thiab lwm yam)

    • Thermal oxidation

  • Kev lag luam photovoltaic

    • Polysilicon thiab monocrystalline wafer diffusion thiab txheej

    • High-temperature annealing thiab passivation

  • Lwm cov teb

    • High-temperature corrosive ib puag ncig

    • Precision wafer tuav cov tshuab yuav tsum tau ua haujlwm ntev thiab tsis muaj paug

Cov txiaj ntsig ntawm cov neeg siv khoom

  1. Txo cov nqi khiav lag luam- Lub neej ntev dua piv nrog quartz paddles, txo qis qis qis thiab hloov zaus.

  2. Yield siab dua- Tsis tshua muaj paug paug ua kom wafer nto huv si thiab txo tus nqi tsis raug.

  3. Yav tom ntej-Cov pov thawj- Tau tshaj qhov loj wafer qhov ntau thiab tsawg dua cov txheej txheem semiconductor.

  4. Txhim kho Productivity- Ua haujlwm tau zoo nrog cov tshuab automation robotic, txhawb nqa cov khoom ntim siab.

FAQ - Silicon Carbide Cantilever Paddle

Q1: Dab tsi yog silicon carbide cantilever paddle?
A: Nws yog wafer txhawb nqa thiab tuav cov khoom ua los ntawm cov tshuaj tiv thaiv-bonded silicon carbide (RBSiC). Nws yog dav siv nyob rau hauv diffusion furnaces, LPCVD, thiab lwm yam high-temperature semiconductor thiab photovoltaic txheej txheem.


Q2: Vim li cas thiaj xaiv SiC hla quartz paddles?
A: Piv nrog quartz paddles, SiC paddles muab:

  • Ntau dua mechanical zog thiab load-bearing muaj peev xwm

  • Zoo thermal stability ntawm qhov kub txog li 1380 ℃

  • Lub neej ua haujlwm ntev dua thiab txo qis txij nkawm

  • Tsawg particle tsim thiab muaj kev pheej hmoo kis kab mob

  • Compatibility nrog loj wafer loj (300 hli thiab siab dua)


Q3: Qhov ntau thiab tsawg wafer tuaj yeem txhawb nqa SiC cantilever paddle?
A: Txheem paddles muaj rau 2378 hli, 2550 hli, thiab 2660 hli rauv tshuab. Customized qhov ntev yog muaj los txhawb wafers mus txog 300 mm thiab tshaj.

Txog Peb

XKH tshwj xeeb hauv kev tsim cov thev naus laus zis, tsim khoom, thiab muag cov iav tshwj xeeb kho qhov muag thiab cov ntaub ntawv siv lead ua tshiab. Peb cov khoom siv kho qhov muag khoom siv hluav taws xob, khoom siv hluav taws xob, thiab tub rog. Peb muab Sapphire optical Cheebtsam, xov tooj ntawm tes lens npog, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor siv lead ua wafers. Nrog cov kws tshaj lij thiab cov cuab yeej siv niaj hnub, peb ua tau zoo hauv kev ua cov khoom lag luam uas tsis yog tus qauv, aiming los ua ib qho khoom siv optoelectronic high-tech enterprise.

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