Silicon Carbide Cantilever Paddle (SiC Cantilever Paddle)

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Cov yam ntxwv

Daim duab qhia ntxaws ntxaws

Txheej Txheem Cej Luam Khoom

Lub silicon carbide cantilever paddle, tsim los ntawm kev ua haujlwm siab-bonded silicon carbide (RBSiC), yog ib qho tseem ceeb siv rau hauv wafer loading thiab handling systems rau semiconductor thiab photovoltaic applications.
Piv nrog rau cov quartz lossis graphite paddles ib txwm muaj, SiC cantilever paddles muaj lub zog zoo dua, tawv heev, tsis tshua muaj thermal nthuav dav, thiab tiv taus corrosion zoo heev. Lawv tswj tau qhov ruaj khov zoo heev hauv qhov kub siab, ua tau raws li qhov yuav tsum tau ua ntawm cov wafer loj, lub neej ua haujlwm ntev, thiab tsis muaj kuab paug ntau.

Nrog rau kev txhim kho tas mus li ntawm cov txheej txheem semiconductor mus rau qhov loj dua wafer diameters, throughput siab dua, thiab cov chaw ua haujlwm huv dua, SiC cantilever paddles tau hloov cov ntaub ntawv ib txwm muaj, ua qhov kev xaiv zoo tshaj plaws rau cov cub tawg diffusion, LPCVD, thiab cov khoom siv kub siab.

Cov yam ntxwv ntawm cov khoom

Kev Ruaj Ntseg Kub Zoo heev
- Ua haujlwm tau zoo ntawm 1000–1300 ℃ yam tsis muaj kev hloov pauv.
- Qhov kub siab tshaj plaws rau kev pabcuam txog li 1380 ℃.
Muaj Peev Xwm Thauj Khoom Tau Siab
- Lub zog khoov txog li 250–280 MPa, siab dua li cov quartz paddles.
- Muaj peev xwm tuav cov wafers loj (300 mm thiab siab dua).
Kev Pabcuam Ntev & Kev Txij Nkawm Tsawg
- Cov coefficient thermal expansion qis (4.5 × 10⁻⁶ K⁻¹), zoo sib xws nrog cov ntaub ntawv txheej LPCVD.
- Txo cov kab nrib pleb thiab tev tawv uas tshwm sim los ntawm kev ntxhov siab, ua rau lub sijhawm ntxuav thiab txij nkawm ntev dua.
Kev Tiv Thaiv Kev Xeb thiab Kev Huv Si
- Kev tiv thaiv zoo heev rau cov kua qaub thiab alkalis.
- Cov qauv me me nrog qhov qhib porosity <0.1%, txo qis cov khoom me me thiab kev tso tawm ntawm cov khoom tsis huv.
Tsim Qauv Sib Xws Nrog Kev Siv Tshuab
- Cov duab geometry ruaj khov nrog qhov tseeb siab.
- Sib koom ua ke nrog cov tshuab robotic wafer loading thiab unloading, ua rau muaj kev tsim khoom tsis siv neeg.

Cov Khoom Siv Lub Cev thiab Tshuaj

Khoom	Chav tsev	Cov ntaub ntawv
Kub Tshaj Plaws rau Kev Pabcuam	℃	1380 xyoo
Qhov Ceev	g/cm³	3.04 – 3.08
Qhib Porosity	%	< 0.1
Lub zog khoov	MPa	250 (20 ℃), 280 (1200 ℃)
Modulus ntawm Elasticity	GPa	330 (20 ℃), 300 (1200 ℃)
Kev Ua Kub	W/m·K	45 (1200 ℃)
Cov Coefficient ntawm Kev Nthuav Dav Kub	K⁻¹×10⁻⁶	4.5
Vickers Hardness	HV2	≥ 2100
Kev Tiv Thaiv Acid / Alkaline	-	Zoo heev

Qhov ntev txheem:2378 hli, 2550 hli, 2660 hli
Kev cai qhov ntev muaj thaum thov

Cov ntawv thov

Kev Lag Luam Semiconductor
- LPCVD (Kev Tso Pa Tshuaj Uas Tsis Muaj Peev Xwm Siab)
- Cov txheej txheem diffusion (phosphorus, boron, thiab lwm yam)
- Kev ua kom sov
Kev Lag Luam Photovoltaic
- Polysilicon thiab monocrystalline wafer diffusion thiab txheej
- Kev kub siab annealing thiab passivation
Lwm Cov Teb
- Cov chaw kub kub corrosive
- Cov txheej txheem ua haujlwm wafer precision uas xav tau lub neej ntev thiab muaj kuab paug tsawg

Cov txiaj ntsig ntawm cov neeg siv khoom

Txo Cov Nqi Ua Haujlwm- Lub neej ntev dua piv rau cov quartz paddles, txo qhov downtime thiab hloov zaus.
Cov Nyiaj Tau Los Siab Dua- Kev ua qias tuaj tsawg heev ua kom lub wafer nto huv si thiab txo cov nqi tsis zoo.
Yav tom ntej-Pov thawj- Sib xws nrog cov wafer loj thiab cov txheej txheem semiconductor tiam tom ntej.
Kev Tsim Khoom Zoo Dua- Sib xws nrog cov tshuab robotic automation, txhawb nqa kev tsim khoom ntau.

Cov Lus Nug Feem Ntau - Silicon Carbide Cantilever Paddle

Q1: Silicon carbide cantilever paddle yog dab tsi?
A: Nws yog ib qho kev txhawb nqa wafer thiab kev tuav cov khoom ua los ntawm cov tshuaj tiv thaiv-bonded silicon carbide (RBSiC). Nws yog dav siv hauv diffusion furnaces, LPCVD, thiab lwm yam kub semiconductor thiab photovoltaic txheej txheem.

Q2: Vim li cas ho xaiv SiC dua li quartz paddles?
A: Piv nrog rau cov paddles quartz, SiC paddles muab:

Muaj zog dua thiab muaj peev xwm thauj khoom tau zoo dua
Kev ruaj khov thermal zoo dua ntawm qhov kub txog li 1380 ℃
Lub neej ua haujlwm ntev dua thiab txo cov voj voog txij nkawm
Txo cov khoom me me thiab kev pheej hmoo ntawm kev ua qias tuaj
Kev sib raug zoo nrog cov wafer loj dua (300 hli thiab siab dua)

Q3: SiC cantilever paddle txhawb nqa cov wafer loj npaum li cas?
A: Cov paddles txheem muaj rau 2378 hli, 2550 hli, thiab 2660 hli lub tshuab cua sov. Cov qhov ntev tshwj xeeb muaj los txhawb cov wafers txog li 300 hli thiab dhau ntawd.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.