Silicon Carbide Ceramic Chuck rau SiC sapphire Si GAAs Wafer
Daim duab qhia ntxaws
Txheej txheem cej luam ntawm Silicon Carbide (SiC) Ceramic Chuck
CovSilicon Carbide Ceramic Chuckyog lub platform ua haujlwm siab ua haujlwm rau kev tshuaj xyuas semiconductor, wafer fabrication, thiab daim ntawv thov kev sib txuas. Ua nrog cov khoom siv ceramic siab heev - suav nrogSintered SiC (SSiC), Reaction Bonded SiC (RSiC), silicon nitride, thiabaluminium nitride— nws muajsiab tawv, tsis tshua muaj thermal expansion, zoo heev hnav tsis kam, thiab kev pab lub neej ntev.
Nrog precision engineering thiab lub xeev-of-the-art polishing, lub chuck xasub-micron flatness, daim iav-zoo qhov chaw, thiab lub sij hawm ntev stability, ua nws txoj kev daws teeb meem zoo tshaj plaws rau cov txheej txheem semiconductor tseem ceeb.
Qhov Zoo Tshaj Plaws
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Siab Precision
Flatness tswj nyob rau hauv0.3-0.5 hli, kom ntseeg tau tias wafer stability thiab cov txheej txheem zoo ib yam. -
Daim iav Polishing
Ua tiavRa 0.02 mnto roughness, txo wafer khawb thiab kis kab mob - zoo meej rau qhov chaw huv huv. -
Ultra-lub teeb yuag
Muaj zog tsis tau sib dua li quartz lossis hlau substrates, txhim kho kev tswj kev txav, kev ua haujlwm, thiab qhov tseeb ntawm qhov chaw. -
Siab tawv
Exceptional Young's modulus ua kom muaj kev ruaj ntseg nyob rau hauv cov khoom hnyav thiab kev ua haujlwm siab. -
Tsawg Thermal Expansion
CTE zoo sib xws silicon wafers, txo cov thermal stress thiab txhim kho cov txheej txheem kev ntseeg tau. -
Zoo hnav tsis kam
Hardness heev khaws cia flatness thiab precision txawm nyob rau hauv lub sij hawm ntev, high-frequency siv.
Kev tsim khoom
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Kev npaj raw khoom
High-purity SiC hmoov nrog tswj particle loj thiab ultra-low impurities. -
Kev tsim & Sintering
Cov txheej txheem xws liTsis siv neeg sintering (SSiC) or Kev sib txuas lus sib txuas (RSiC)tsim ntom, uniform ceramic substrates. -
Precision Machining
CNC sib tsoo, laser trimming, thiab ultra-precision machining ua tiav ± 0.01 hli kam rau ua thiab ≤3 μm parallelism. -
Kev kho saum npoo
Multi-theem sib tsoo thiab polishing rau Ra 0.02 μm; xaiv txheej muaj rau corrosion kuj los yog customized kev sib txhuam zog. -
Kev Tshuaj Xyuas & Kev Tswj Xyuas Zoo
Interferometers thiab roughness testers txheeb xyuas kev ua raws li cov txheej txheem semiconductor-qib.
Technical Specifications
| Parameter | Tus nqi | Chav tsev |
|---|---|---|
| Flatness | ≤0.5 | ib m |
| Wafer qhov ntau thiab tsawg | 6 '', 8 '', 12 '' (kev cai muaj) | — |
| Hom nto | Pin hom / Nplhaib hom | — |
| Pin qhov siab | 0.05–0.2 hli | mm |
| Min. pin diam | 0.2 tsi | mm |
| Min. pin sib nrug | 3 | mm |
| Min. foob nplhaib dav | 0.7 ua | mm |
| Nto roughness | Rau 0.02 | ib m |
| Thickness kam rau ua | ± 0.01 | mm |
| Qhov siab kam rau ua | ± 0.01 | mm |
| Parallelism kam rau ua | ≤ 3 | ib m |
Cov ntawv thov tseem ceeb
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Semiconductor wafer soj ntsuam cov cuab yeej
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Wafer fabrication thiab hloov tshuab
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Wafer bonding & ntim cov cuab yeej
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Advanced optoelectronic ntaus ntawv raug
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Cov cuab yeej Precision xav tau ultra-nplua, ultra-huv nto
Q&A - Silicon Carbide Ceramic Chuck
Q1: SiC ceramic chucks piv nrog quartz lossis hlau chucks li cas?
A1: SiC chucks sib dua, tawv dua, thiab muaj CTE ze rau silicon wafers, txo qis thermal deformation. Lawv kuj muab superior hnav tsis kam thiab lub neej ntev.
Q2: Dab tsi flatness tuaj yeem ua tiav?
A2: Tswj hauv0.3-0.5 hli, ua tau raws li cov kev xav tau nruj ntawm cov khoom siv semiconductor.
Q3: Puas yog qhov chaw khawb wafers?
A3: Tsis yog-iav-polished rauRa 0.02 m, xyuas kom tsis muaj khawb-dawb tuav thiab txo particle tiam.
Q4: Qhov ntau thiab tsawg wafer txhawb?
A4: Txheem qhov ntau thiab tsawg ntawm6 '', 8 '' thiab 12 '', nrog customization muaj.
Q5: Lub thermal tsis kam yog li cas?
A5: SiC ceramics muab kev ua haujlwm kub kub zoo heev nrog tsawg deformation nyob rau hauv thermal cycling.
Txog Peb
XKH tshwj xeeb hauv kev tsim cov thev naus laus zis, tsim khoom, thiab muag cov iav tshwj xeeb kho qhov muag thiab cov ntaub ntawv siv lead ua tshiab. Peb cov khoom siv kho qhov muag khoom siv hluav taws xob, khoom siv hluav taws xob, thiab tub rog. Peb muab Sapphire optical Cheebtsam, xov tooj ntawm tes lens npog, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor siv lead ua wafers. Nrog cov kws tshaj lij thiab cov cuab yeej siv niaj hnub, peb ua tau zoo hauv kev ua cov khoom lag luam uas tsis yog tus qauv, aiming los ua ib qho khoom siv optoelectronic high-tech enterprise.
