Silicon Carbide Ceramic Chuck rau SiC sapphire Si GAAs Wafer

Kev Piav Qhia Luv:

Lub Silicon Carbide Ceramic Chuck yog lub platform ua haujlwm tau zoo uas tsim los rau kev tshuaj xyuas semiconductor, kev tsim cov wafer, thiab kev siv bonding. Ua los ntawm cov khoom siv ceramic siab heev - suav nrog sintered SiC (SSiC), reaction-bonded SiC (RSiC), silicon nitride, thiab txhuas nitride - nws muaj kev ruaj khov siab, kev nthuav dav thermal qis, kev tiv thaiv kev hnav zoo heev, thiab lub neej ua haujlwm ntev.

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Kev Txheeb Xyuas Txog Silicon Carbide (SiC) Ceramic Chuck

LubSilicon Carbide Ceramic Chuckyog ib lub platform ua haujlwm siab uas tau tsim los rau kev tshuaj xyuas semiconductor, kev tsim wafer, thiab kev siv bonding. Ua los ntawm cov khoom siv ceramic siab heev—xws liCov khoom siv sintered SiC (SSiC), SiC uas sib txuas nrog cov tshuaj tiv thaiv (RSiC), silicon nitride, thiabtxhuas nitride—nws muabsiab tawv, tsis tshua muaj thermal expansion, zoo heev hnav tsis kam, thiab lub neej ntev kev pab cuam.

Nrog kev tsim kho kom raug thiab kev txhuam kom zoo tshaj plaws, lub chuck xa tauqhov tiaj tiaj ntawm sub-micron, qhov chaw zoo li daim iav, thiab kev ruaj khov ntev mus sij hawm ntev, ua rau nws yog qhov kev daws teeb meem zoo tshaj plaws rau cov txheej txheem semiconductor tseem ceeb.

Cov Txiaj Ntsig Tseem Ceeb

Kev Ntsuas Siab
Kev tiaj tiaj tswj tau sab hauv0.3–0.5 μm, xyuas kom meej tias wafer ruaj khov thiab cov txheej txheem raug.
Kev Txhuam Iav
Ua tiavRa 0.02 μmqhov roughness ntawm qhov chaw, txo cov khawb thiab kev ua qias tuaj ntawm cov wafer—zoo meej rau cov chaw huv si heev.
Ultra-Lightweight
Muaj zog dua tab sis sib dua li cov khoom siv quartz lossis hlau, txhim kho kev tswj hwm kev txav mus los, kev teb sai, thiab kev tso qhov tseeb.
Kev Nyuaj Siab Siab
Qhov tshwj xeeb Young's modulus ua kom muaj kev ruaj khov ntawm qhov ntev thaum muaj kev thauj khoom hnyav thiab kev ua haujlwm ceev ceev.
Kev nthuav dav thermal qis
CTE phim cov silicon wafers zoo heev, txo qhov kev ntxhov siab thermal thiab txhim kho kev ntseeg siab ntawm cov txheej txheem.
Kev Tiv Thaiv Kev Hnav Zoo Tshaj Plaws
Qhov nyuaj heev ua rau nws tiaj tus thiab raug txawm tias siv sijhawm ntev thiab siv ntau zaus.

Cov Txheej Txheem Tsim Khoom

Kev Npaj Khoom Siv Raw
Cov hmoov SiC uas muaj kev ntshiab siab nrog kev tswj tau qhov loj ntawm cov khoom me me thiab cov khoom tsis huv uas tsawg heev.
Kev Tsim & Sintering
Cov txheej txheem xws lisintering tsis muaj siab (SSiC) or kev sib txuas lus (RSiC)tsim cov khoom siv ceramic uas ntom thiab sib xws.
Kev Ua Haujlwm Zoo Tshaj Plaws
CNC sib tsoo, laser trimming, thiab ultra-precision machining ua tiav ± 0.01 hli kev kam rau siab thiab ≤3 μm parallelism.
Kev Kho Mob Nto
Kev sib tsoo thiab polishing ntau theem rau Ra 0.02 μm; xaiv tau coatings muaj rau kev tiv thaiv corrosion lossis kev sib txhuam tshwj xeeb.
Kev Tshuaj Xyuas & Kev Tswj Xyuas Zoo
Cov interferometers thiab cov roughness testers xyuas kom meej tias ua raws li cov lus qhia ntawm semiconductor-qib.

Cov Lus Qhia Txog Kev Siv

Cov Qauv	Tus nqi	Chav tsev
Kev tiaj tiaj	≤0.5	μm
Qhov loj ntawm cov wafer	6 '', 8 '', 12 '' (muaj kev cai)	—
Hom nto	Hom Pin / Hom Nplhaib	—
Qhov siab ntawm tus pin	0.05–0.2	mm
Qhov tsawg kawg nkaus ntawm txoj kab uas hla ntawm tus pin	ϕ0.2	mm
Qhov sib nrug tsawg kawg nkaus ntawm tus pin	3	mm
Qhov dav tsawg kawg nkaus ntawm lub nplhaib foob	0.7	mm
Qhov ntxhib ntawm qhov chaw	Ra 0.02	μm
Kev kam rau siab tuab	±0.01	mm
Kev kam rau siab ntawm txoj kab uas hla	±0.01	mm
Kev kam rau siab sib luag	≤3	μm

Cov Ntawv Thov Tseem Ceeb

Cov khoom siv tshuaj xyuas semiconductor wafer
Wafer fabrication thiab hloov pauv systems
Cov cuab yeej txuas wafer & ntim khoom
Kev tsim khoom siv optoelectronic siab heev
Cov cuab yeej siv precision uas xav tau cov chaw tiaj tiaj thiab huv si heev

Cov Lus Nug thiab Lus Teb - Silicon Carbide Ceramic Chuck

Q1: SiC ceramic chucks piv rau quartz lossis hlau chucks li cas?
A1: SiC chucks sib dua, tawv dua, thiab muaj CTE ze li silicon wafers, txo qhov thermal deformation. Lawv kuj muab kev tiv thaiv kev hnav zoo dua thiab lub neej ntev dua.

Q2: Qhov tiaj tiaj twg tuaj yeem ua tiav?
A2: Tswj nyob rau hauv0.3–0.5 μm, ua tau raws li qhov xav tau ntawm kev tsim khoom semiconductor.

Q3: Qhov saum npoo puas yuav khawb cov wafers?
A3: Tsis yog—ua kom ci ntsa iab rauRa 0.02 μm, ua kom tsis muaj khawb thiab txo cov khoom me me.

Q4: Cov wafer loj me twg tau txais kev txhawb nqa?
A4: Qhov loj me ntawm6'', 8'', thiab 12'', nrog rau kev hloov kho kom haum.

Q5: Lub thermal tsis kam li cas?
A5: SiC ceramics muab kev ua haujlwm kub zoo heev nrog kev hloov pauv tsawg kawg nkaus hauv qab kev hloov pauv thermal.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.