Silicon carbide ceramic tais sucker Silicon carbide ceramic raj muab kev kub siab sintering kev cai ua tiav
Cov yam ntxwv tseem ceeb:
1. Silicon carbide ceramic tais
- Kev nyuaj siab thiab kev hnav tsis kam: qhov nyuaj yog ze rau pob zeb diamond, thiab tuaj yeem tiv taus kev hnav khoom siv hauv kev ua wafer ntev.
- Kev ua tau zoo ntawm cov cua sov thiab cov coefficient nthuav dav thermal qis: kev tawg sai sai ntawm cov cua sov thiab kev ruaj khov ntawm qhov ntev, zam kev hloov pauv los ntawm kev ntxhov siab thermal.
- Qhov tiaj tiaj thiab qhov chaw tiav: Qhov tiaj tiaj ntawm qhov chaw yog txog qib micron, ua kom muaj kev sib cuag tag nrho ntawm wafer thiab lub disk, txo cov kuab paug thiab kev puas tsuaj.
Kev ruaj khov tshuaj lom neeg: Muaj zog tiv taus corrosion, tsim nyog rau kev ntxuav ntub thiab cov txheej txheem etching hauv kev tsim khoom semiconductor.
2. Silicon carbide ceramic raj
- Kev tiv taus kub siab: Nws tuaj yeem ua haujlwm hauv qhov kub siab tshaj 1600 ° C ntev, tsim nyog rau cov txheej txheem kub siab semiconductor.
Kev tiv thaiv corrosion zoo heev: tiv taus cov kua qaub, alkalis thiab ntau yam tshuaj lom neeg, tsim nyog rau cov txheej txheem ib puag ncig hnyav.
- Kev ua kom tawv thiab hnav tsis kam: tiv taus cov khoom tawg thiab kev hnav khoom siv, txuas lub neej kev pabcuam.
- Kev ua kom sov siab thiab cov coefficient qis ntawm kev nthuav dav thermal: kev ua kom sov sai thiab kev ruaj khov ntawm qhov ntev, txo qhov deformation lossis tawg los ntawm kev ntxhov siab thermal.
Khoom Siv Khoom:
Silicon carbide ceramic tais parameter:
| (Cov khoom siv) | (Chav) | (ssic) | |
| (Cov ntsiab lus SiC) | (Wt)% | >99 | |
| (Qhov nruab nrab ntawm cov noob) | micron | 4-10 | |
| (Qhov Ceev) | kg/dm3 | >3.14 | |
| (Qhov pom tseeb ntawm qhov porosity) | Vo1% | <0.5 | |
| (Vickers hardness) | HV 0.5 | GPa | 28 |
| *() Lub zog khoov * (peb lub ntsiab lus) | 20ºC | MPa | 450 |
| (Lub zog nias) | 20ºC | MPa | 3900 |
| (Elastic Modulus) | 20ºC | GPa | 420 |
| (Kev tawg tawv) | MPa/m'% | 3.5 | |
| (Kev coj ua cua sov) | 20°C | W/(m*K) | 160 |
| (Kev tiv taus) | 20°C | Ohm.cm | 106-108 |
(Tus coefficient ntawm kev nthuav dav thermal) | ib (RT**...80ºC) | K-1*10-6 | 4.3 |
(Qhov kub ua haujlwm siab tshaj plaws) | oºC | 1700 xyoo | |
Silicon carbide ceramic raj parameter:
| Cov khoom | Cov Ntawv Qhia |
| α-SIC | 99% feeb |
| Pom tseeb porosity | 16% siab tshaj |
| Qhov Ceev Ntau | 2.7g/cm3 feeb |
| Lub zog khoov ntawm qhov kub siab | 100 Mpa feeb |
| Coefficient ntawm Thermal Expansion | K-1 4.7x10 -6 |
| Coefficient ntawm Thermal Conductivity (1400ºC) | 24 W/mk |
| Kub Tshaj Plaws Ua Haujlwm | 1650ºC |
Cov ntawv thov tseem ceeb:
1. Silicon carbide ceramic phaj
- Wafer txiav thiab polishing: ua haujlwm ua lub platform bearing kom ntseeg tau tias muaj kev raug siab thiab ruaj khov thaum txiav thiab polishing.
- Cov txheej txheem lithography: Lub wafer yog tsau rau hauv lub tshuab lithography kom ntseeg tau tias muaj qhov chaw siab thaum lub sijhawm raug.
- Kev Siv Tshuaj Lom Zem (CMP): ua haujlwm ua lub platform txhawb nqa rau cov ntaub polishing, muab kev sib npaug thiab kev faib cua sov.
2. Silicon carbide ceramic raj
- Lub raj cua sov kub siab: siv rau cov khoom siv kub siab xws li lub cub tawg diffusion thiab lub cub tawg oxidation los nqa cov wafers rau kev kho mob kub siab.
- CVD/PVD txheej txheem: Ua ib lub raj xa dej hauv chav tshuaj tiv thaiv, tiv taus qhov kub thiab txias thiab cov pa roj corrosive.
- Cov khoom siv semiconductor: rau cov khoom hloov pauv cua sov, cov kav dej roj, thiab lwm yam, txhawm rau txhim kho kev tswj hwm thermal ntawm cov khoom siv.
XKH muaj ntau yam kev pabcuam tshwj xeeb rau cov tais ceramic silicon carbide, cov khob nqus thiab cov raj silicon carbide ceramic. Cov tais ceramic silicon carbide thiab cov khob nqus, XKH tuaj yeem hloov kho raws li cov neeg siv khoom xav tau ntawm ntau qhov loj me, cov duab thiab qhov ntxhib ntawm qhov chaw, thiab txhawb nqa kev kho tshwj xeeb, txhim kho kev hnav thiab kev tiv thaiv corrosion; Rau cov raj silicon carbide ceramic, XKH tuaj yeem hloov kho ntau yam txoj kab uas hla sab hauv, txoj kab uas hla sab nraud, qhov ntev thiab cov qauv nyuaj (xws li lub raj zoo li lossis lub raj porous), thiab muab kev txhuam, kev tiv thaiv oxidation thiab lwm yam txheej txheem kho qhov chaw. XKH ua kom ntseeg tau tias cov neeg siv khoom tuaj yeem siv cov txiaj ntsig zoo ntawm cov khoom siv silicon carbide ceramic kom ua tau raws li cov kev xav tau ntawm cov chaw tsim khoom siab xws li semiconductors, leds thiab photovoltaics.
Daim duab qhia ntxaws ntxaws
