Silicon Carbide (SiC) Kab Rov Tav Rauv Raj

Kev Piav Qhia Luv:

Lub Silicon Carbide (SiC) Kab Rov Tav Rauv Ua Haujlwm ua lub chamber tseem ceeb thiab ciam teb siab rau cov tshuaj tiv thaiv roj kub thiab kev kho cua sov siv hauv kev tsim khoom semiconductor, kev tsim khoom photovoltaic, thiab kev ua cov khoom siv siab heev.

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Kev Tso Khoom & Kev Tsim Tus Nqi

Tsim los nrog ib daim qauv SiC uas tsim los ntawm cov khoom ntxiv ua ke nrog txheej tiv thaiv CVD-SiC ntom ntom, lub raj no muab kev ua kom sov zoo heev, muaj kuab paug tsawg kawg nkaus, muaj zog kho tshuab, thiab tiv taus tshuaj lom neeg zoo heev.
Nws tus qauv tsim ua kom muaj qhov kub thiab txias zoo sib xws, lub sijhawm ua haujlwm ntev, thiab kev ua haujlwm ruaj khov mus sij hawm ntev.

Cov txiaj ntsig tseem ceeb

Ua kom qhov kub thiab txias ntawm lub cev sib xws, kev huv, thiab kev ua haujlwm zoo ntawm cov khoom siv (OEE).
Txo lub sijhawm tsis ua haujlwm rau kev ntxuav thiab ua kom lub voj voog hloov pauv ntev dua, txo tus nqi tag nrho ntawm kev muaj (TCO).
Muab lub chamber ntev uas muaj peev xwm tswj tau cov tshuaj oxidative thiab chlorine uas muaj kub heev nrog kev pheej hmoo tsawg kawg nkaus.

Cov Huab Cua Siv Tau & Qhov Rai Txheej Txheem

Cov pa roj ua haujlwmCov pa oxygen (O₂) thiab lwm yam khoom sib xyaw oxidizing
Cov pa roj / cov pa roj tiv thaivCov pa roj nitrogen (N₂) thiab cov pa roj inert ntshiab heev
Cov tsiaj sib xws: cov pa roj uas muaj chlorine me me (kev sib xyaw thiab lub sijhawm nyob uas tswj los ntawm daim ntawv qhia)

Cov Txheej Txheem Ib Txwm MuajKev ua haujlwm ntawm cov txheej txheem: qhuav/ntub oxidation, annealing, diffusion, LPCVD/CVD deposition, surface activation, photovoltaic passivation, functional thin-film growth, carbonization, nitridation, thiab lwm yam.

Cov xwm txheej ua haujlwm

Kub: chav tsev kub txog li 1250 ° C (tso cai rau 10–15% kev nyab xeeb nyob ntawm tus qauv tsim cua sov thiab ΔT)
Siab: los ntawm qib nqus tsev qis-siab/LPCVD mus rau qhov siab zoo ze-atmospheric (qhov kawg spec rau ib qho kev yuav khoom)

Cov Khoom Siv & Kev Xav Txog Cov Qauv

Lub Cev Monolithic SiC (Tsim Khoom Ntxiv)

Cov β-SiC uas muaj qhov ceev ceev lossis ntau theem SiC, ua los ua ib qho khoom siv xwb—tsis muaj cov pob qij txha lossis cov xov uas sib txuas ua ke uas yuav xau lossis tsim cov ntsiab lus ntxhov siab.
Kev ua tau zoo ntawm cov cua sov ua rau muaj kev teb sai sai ntawm cov cua sov thiab kev sib npaug zoo ntawm cov cua sov axial/radial.
Cov coefficient qis, ruaj khov ntawm thermal expansion (CTE) ua kom muaj kev ruaj khov ntawm qhov ntev thiab cov foob txhim khu kev qha ntawm qhov kub siab.

CVD SiC Txheej Txheem

Tso rau hauv qhov chaw, ntshiab heev (cov khoom tsis huv ntawm qhov chaw/txheej txheej < 5 ppm) los tiv thaiv kev tsim cov khoom me me thiab kev tso tawm cov hlau ion.
Kev ua kom tsis muaj tshuaj lom neeg zoo tiv thaiv cov pa roj oxidizing thiab chlorine, tiv thaiv kev tawm tsam ntawm phab ntsa lossis rov tso dua.
Cov kev xaiv tuab tshwj xeeb rau thaj chaw kom sib npaug qhov tiv taus corrosion thiab thermal responsiveness.

Cov Nyiaj Pab Ua Ke: lub cev SiC muaj zog muab lub zog ntawm cov qauv thiab kev xa cua sov, thaum txheej CVD lav qhov huv thiab tiv taus xeb rau qhov kev ntseeg siab tshaj plaws thiab kev xa tawm.

Cov Hom Phiaj Tseem Ceeb rau Kev Ua Tau Zoo

Kub siv tas mus li:≤ 1250 ° C
Cov khoom tsis huv ntawm cov substrate:< 300 ppm
Cov khoom tsis huv ntawm CVD-SiC:< 5 ppm
Kev kam rau siab ntawm qhov ntev: OD ±0.3–0.5 hli; coaxiality ≤ 0.3 hli/m (muaj qhov nruj dua)
Sab hauv phab ntsa roughness: Ra ≤ 0.8–1.6 µm (polished los yog ze-iav tiav xaiv tau)
Tus nqi xau helium: ≤ 1 × 10⁻⁹ Pa·m³/s
Kev ua kom muaj zog thermal-shock: dim ntawm kev kub/txias rov ua dua yam tsis muaj kev tawg lossis spallation
Kev sib dhos chav huv: ISO Chav Kawm 5–6 nrog cov qib pov thawj ntawm cov khoom seem / hlau-ion

Kev Teeb tsa & Kev Xaiv

Geometry: OD 50–400 hli (loj dua los ntawm kev ntsuam xyuas) nrog kev tsim kho ib daim ntev; phab ntsa tuab tau ua kom zoo rau lub zog kho tshuab, qhov hnyav, thiab cua sov.
Cov qauv tsim kawg: flanges, lub qhov ncauj tswb, bayonet, locating rings, O-ring grooves, thiab kev cai twj tso kua mis tawm lossis qhov chaw siab.
Cov chaw nres nkoj ua haujlwmcov qhov cua sov thermocouple feedthroughs, lub rooj zaum iav pom kev, bypass gas inlets—txhua yam tau tsim los rau kev ua haujlwm kub siab, tsis xau.
Cov txheej txheem txheej txheem: phab ntsa sab hauv (lub neej ntawd), phab ntsa sab nraud, lossis kev pab them tag nrho; kev tiv thaiv tsom lossis qib tuab rau thaj chaw muaj kev cuam tshuam siab.
Kev kho qhov chaw thiab kev huv si: ntau qib roughness, ultrasonic / DI ntxuav, thiab kev cai ci / qhuav cov txheej txheem.
Cov Khoom Siv: graphite/ceramic/hlau flanges, seals, locating fixtures, handling sleeves, thiab storage cradles.

Kev Sib Piv Txog Kev Ua Tau Zoo

Kev ntsuas	SiC Raj	Quartz Raj	Alumina Raj	Lub raj mis graphite
Kev ua kom sov tau zoo	Siab, sib xws	Qis	Qis	Siab
Lub zog siab / creep	Zoo heev	Ncaj ncees	Zoo	Zoo (rhiab rau oxidation)
Kev poob siab kub	Zoo heev	Tsis muaj zog	Nruab nrab	Zoo heev
Kev Huv Si / cov hlau ions	Zoo heev (qis)	Nruab nrab	Nruab nrab	Txom nyem
Oxidation & Cl-chemistry	Zoo heev	Ncaj ncees	Zoo	Tsis zoo (oxidizes)
Tus nqi piv rau lub neej ua haujlwm	Nruab nrab / ntev lub neej	Qis / luv	Nruab nrab / nruab nrab	Nruab Nrab / ib puag ncig-txwv

Cov Lus Nug Feem Ntau (FAQ)

Q1. Vim li cas ho xaiv lub cev 3D-luam tawm monolithic SiC?
A. Nws tshem tawm cov seams thiab brazes uas tuaj yeem xau lossis sib sau ua ke kev ntxhov siab, thiab txhawb nqa cov geometries nyuaj nrog qhov tseeb sib xws.

Q2. SiC puas tiv taus cov pa roj uas muaj chlorine?
A. Yog. CVD-SiC tsis muaj zog heev nyob rau hauv qhov kub thiab txias thiab qhov siab uas tau teev tseg. Rau cov cheeb tsam uas muaj kev cuam tshuam loj, cov txheej tuab hauv zos thiab cov tshuab ntxuav/tshuab pa tawm uas ruaj khov yog qhov pom zoo.

Q3. Nws ua tau zoo dua li cas cov raj quartz?
A. SiC muaj lub neej ua haujlwm ntev dua, qhov kub zoo dua, txo cov khoom me me / hlau-ion, thiab txhim kho TCO - tshwj xeeb tshaj yog tshaj ~ 900 ° C lossis hauv cov huab cua oxidizing / chlorinated.

Q4. Lub raj puas tuaj yeem ua haujlwm sai sai thermal ramping?
A. Yog, yog tias qhov siab tshaj plaws ΔT thiab cov lus qhia ramp-rate raug ua raws li. Kev koom ua ke lub cev SiC siab-κ nrog ib txheej CVD nyias txhawb nqa kev hloov pauv thermal sai.

Q5. Thaum twg yuav tsum tau hloov?
A. Hloov lub raj yog tias koj pom muaj qhov tawg ntawm flange lossis ntug, cov qhov lossis cov spallation, cov nqi xau nce ntxiv, qhov kub thiab txias hloov pauv ntau, lossis cov khoom me me tsis zoo.

Txog Peb

XKH muaj kev txawj ntse hauv kev tsim khoom, kev tsim khoom, thiab kev muag khoom ntawm cov iav kho qhov muag tshwj xeeb thiab cov khoom siv siv lead ua tshiab. Peb cov khoom siv rau cov khoom siv hluav taws xob kho qhov muag, cov khoom siv hluav taws xob rau cov neeg siv khoom, thiab cov tub rog. Peb muab cov khoom siv kho qhov muag Sapphire, cov ntaub thaiv lub xov tooj ntawm tes, Ceramics, LT, Silicon Carbide SIC, Quartz, thiab semiconductor crystal wafers. Nrog kev txawj ntse thiab cov cuab yeej siv tshiab, peb ua tau zoo hauv kev ua cov khoom tsis yog tus qauv, lub hom phiaj yog ua lub tuam txhab ua khoom siv hluav taws xob kho qhov muag zoo tshaj plaws.